wyko 1100nt 3d optical profiler/wyko.pdf · 2007-02-12 · 3d optical profiler wyko 1100nt 3d...

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Wyko 1100NT 3D optical profiler Wyko 1100NT 3D optical profiler The Wyko NT1100 is a 3D optical surface profiler that uses interferometry to measure a surface. It has two main features, VSI (Vertical Scanning Interferometry) and PSI (Phase Shifting Interferometry). In the VSI mode it utilizes scanning white light interferometry which is a bright and dark pattern resulting from splitting of a beam where one part is reflected against a very smooth reference surface and the other against the test specimen. After reflection the beams are recombined in the interferometer and an interference pattern occurs. This pattern is photographed by a CCD camera and transferred to the computer for analysis. A piezoelectric transducer moves focus down and the process is repeated to make another picture. The PSI mode is similar to the VSI but it uses filtered light and the reference surface is translated instead of the objective. It also uses the difference in intensity instead of fringes for height data acquisition. The data that is acquired from a measurement is then used to generate a 3D image of the surface. The software Vision32 enables advanced calculations of various surface parameters and image processing. TECHNICAL SPECIFICATIONS Magnification: Vertical resolution (VSI): Vertical resolution (PSI): 1.25X – 100X <1 nm 1 Å Wyko 1100NT 3D optical profiler Typical image of a wear scar

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Page 1: Wyko 1100NT 3D optical profiler/wyko.pdf · 2007-02-12 · 3D optical profiler Wyko 1100NT 3D optical profiler The Wyko NT1100 is a 3D optical surface profiler that uses interferometry

Wyko 1100NT 3D optical profilerWyko 1100NT 3D optical profilerThe Wyko NT1100 is a 3D optical surface profiler that uses interferometry to measure a surface. It has two main features, VSI (Vertical Scanning Interferometry) and PSI (Phase Shifting Interferometry). In the VSI mode it utilizes scanning white light interferometry which is a bright and dark pattern resulting from splitting of a beam where one part is reflected against a very smooth reference surface and the other against the test specimen. After reflection the beams are recombined in the interferometer and an interference pattern occurs. This pattern is photographed by a CCD camera and transferred to the computer for analysis. A piezoelectric transducer moves focus down and the process is repeated to make another picture. The PSI mode is similar to the VSI but it uses filtered light and the reference surface is translated instead of the objective. It also uses the difference in intensity instead of fringes for height data acquisition. The data that is acquired from a measurement is then used to generate a 3D image of the surface. The software Vision32 enables advanced calculations of various surface parameters and image processing.

TECHNICAL SPECIFICATIONS

Magnification:Vertical resolution (VSI):Vertical resolution (PSI):

1.25X – 100X <1 nm1 Å

Wyko 1100NT 3D optical profiler

Typical image of a wear scar