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1 Eindhoven University of Technology 1 Virtual Reliability Qualification Prof. Kouchi (G.Q.) Zhang [email protected] [email protected] Eindhoven University of Technology 2 1. Development trends 2. Consequences for reliability Thermo-mechanical problems Motivations 3. Virtual prototyping and qualification The Methodology Status Quo/challenges Demonstrators 4. Conclusions

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Page 1: Virtual Reliability Qualification - Thierry LEQUEU · 2016-10-23 · knowledge-based Reliability Paradigm is a must. The scientific successes of many micro/nano-related technology

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Eindhoven University of Technology

1

Virtual Reliability Qualification

Prof. Kouchi (G.Q.) [email protected]

[email protected]

Eindhoven University of Technology

2

1. Development trends

2. Consequences for reliability• Thermo-mechanical problems• Motivations

3. Virtual prototyping and qualification • The Methodology• Status Quo/challenges• Demonstrators

4. Conclusions

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Eindhoven University of Technology

3

1. Development trensd

Eindhoven University of Technology

4

Telecommunication in 70sTelecommunication in 70s

1. Background (Development Trends)

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Eindhoven University of Technology

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Computing in 70sComputing in 70s

1. Background (Development Trends)

Eindhoven University of Technology

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Consumer electronics Consumer electronics annoanno 20042004

1. Background (Development Trends)

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Eindhoven University of Technology

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Consumer Electronics in near futureConsumer Electronics in near future

1. Background (Development Trends)

Soft and wearable electronics

Eindhoven University of Technology

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• Moving from a world of electronic “boxes” to the world of ambient intelligence where technology is built into our environment via connectivity and integration.

• Focus on function, not the devices that enable them.

•sensitive to people's needs•personalized to their requirements•anticipatory of their behavior and•responsive to their presence

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Eindhoven University of Technology

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Consumers wishesSmaller, smarter, lighter, faster, cheaper, more flexible,

more convenient, more reliable and functionalities.

Development trends •Miniaturisation down to nano-scales•Increasing levels functionality & technology integration•Eco-designs

•Cost reduction•Short-time-to-market•Outsourcing

Eindhoven University of Technology

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1996 1999 2002 2005 2008 2011

Fea

ture

Siz

e (n

m)

500

350

250

180

130

100

70

50

35

25

Dense Lines (DRAM Half-Pitch)1994

1997

1998 & 1999

2000

ITRS Roadmap History

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Eindhoven University of Technology

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Process technology evolutionSystem-on-Chip: standardization

• Standard CMOS density will continue to grow exponentially, driving down the cost of digital data processing and storage– More Moore : System-on-Chip

• But realized digital design complexity increasingly lags behind the potential of new technologies, while investments soar– Decelerating long-term semiconductor market

growth to single digit

Eindhoven University of Technology

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Is the Roadmap Going to End?Let’s see some famous forecasts

“ I think there is a world market for maybe five computers ”

Thomas Watson, Chairman of IBM, 1943

“ Computers in the future may weigh no more than 1.5 tons ”

Popular Mechanics Magazine, 1949

“ 640K ought to be enough for anybody ” Bill Gates, 1981

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Alternative Switching Technologies

Eindhoven University of Technology

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Packaging & assembly

•Wire diameter < 10 microns•Interconnect pitch of NLWSP < 20 microns•Thickness of copper film/PCB < 10 microns•Microvia diameter < 20 microns

Not only the wafer technology, packaging and assembly are also going beyond visualization!

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Eindhoven University of Technology

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Waferfab

Package System

Waferfab

Package System

Waferfab

Package System

IC – BoardTotal signalintegrity

IC – packageWLP, NSWLP

Package -boardEmbedded, MCM

•Total system performance•SiP•Nano-electronics

Eindhoven University of Technology

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More Moore and more than mooreComplementing, not competing

More Moore: SoC- Programmable monolithic IC • Advanced baseline CMOS, standard packaging• Maximize utilization of (expensive) mask sets• Diversification is in the software & embedded IP mix

More than Moore: SiP - Multi-technology module • Mature and advanced wafer processes, advanced packaging• Maximize utilization of dedicated option fabs• Diversification is in the components & technology mix

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• 3-D Stacking of ICS or Package Structures, Similar to PWB– Macro dimensions– Vertical stack up– Testable– System board to Complete

System

• 3 -D Build up, similar to IC Fabrication– Micro to Nano dimensions– Sequential build up and test

similar to MCM-D and IC– Wafer to IC concept for high

yield

SIP1 SIP3

M E M S Ga -As SIPSOC

SOCMEMS SIPGa-As

Examples of technology and function integration

Eindhoven University of Technology

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Generic sub-system

(digital) communication bus

storage radio

µP sensor

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Eindhoven University of Technology

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System-in-Package domains – 3

SiP 3e.g., MOEMS

SiP 2e.g., Passive

Integration

SiP 1e.g., MCM

SoC…electron

ics…IC

process…one ICMore

than… →In

creasing

value p

rop

ositio

n

Eindhoven University of Technology

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Stacked BGA production (leading vendor)

2000 2001 2002 2003

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Eco-DesignDesigning environmentally compatible products/processeswhile maintaining price/performance and quality characteristics.

Key Focus Areas:•Energy Usage (Products & Manufacturing Processes)•End-of-Life Management•Product Packaging•Removing the boxes

Materials

Product Process

•Virtual prototyping & qualification

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Paradigm shift: From Yellow to Purple

Paradigm shift

2003

1993

19881983

1978

1973

1998

Qty$

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2. Consequences for reliability

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ReliabilityThe probability that a product in operation will survive under certain conditions during a certain period in time. IEC50 (191)

FAILURE RATE (FITS, FPM)

LOG TIME

EFR ( Early Failure Rate; Infant Mortality)

Onset of wearout

Intrinsic Failure

YEARS MONTHS

Conventionalbathtub curve

QualityThe totality of features and characteristics of a product or service

that bear on its ability to satisfy stated or implied need. ISO 8420

Our scopeFrom 0 hour to life time

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•Multi-scale in both time and geometric domains with scale factors going up to 109.

•Strong interactions among different§disciplines (electrical, thermal, mechanical, physics, chemical, material science, etc.) §technologies (IC, packaging, assembly, system, soft and hardware)§failure modes and failure mechanisms

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•Behaviour is strongly non-linear, stochastic, time andtemperature dependence.

•Greatly increased loading intensity/loading steps

•Strict demand on and challenges for ensuring quality, robustness and reliability to cover the totalvalue chain

•Greatly increased design complexity and shrinking of design margin to nano levels.

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Q&R= ???f1(b1, b2,.. b i..) f2(c1, c2,.. ci..) f3(t1, t2,.. ti..) db dc dt

b: Business variables c: Consumer variablest: Technical variables

f3(t1, t2,.. ti..)= ???F1(material) F2(process) F3(product)

Q&R is innovation and integration of innovations

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Example of various cracks emanating from the edge of bond pads.May be caused by interface defects

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Pattern shift (Power line) caused by packaging stresses

Warpage caused by wafer thinning:200mm wafer thinned to 50 um

Cracking as a result of electromigration

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crack inside die

substrate

die

Die cracking in flip chip

CrackDelamination

Chip

Die attach voidMold compound filler particle

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Wire failures

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Failure Mode (SnAg)

Crack within Solder

Solder

Crack within solder

Si

Solder

Si

Failure Mode (SnAgCu)

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Delamination

die

underfill

delaminationCrack

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Flip Chip Solder Joint Voiding

Voiding

Underfil Voiding

Chip on Board Globtop Voiding

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Voids caused by molding compound shrinkage

Eindhoven University of Technology

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Eindhoven University of Technology

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BucklingMEMS processing challenges:

Buckling & postbuckling of membrane during CMOSmicromachning

Stress gradients between the top and the bottom layers of a film

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Eindhoven University of Technology

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Releasing MEMS: Stiction problem

• Surface forces (van der Waals, hydrogen bonding, etc.) are much stronger than bulk forces (spring restoring forces, gravity)

• Consequence: MEMS stict upon contact

• Common for MEMS that are mechanically compliant or have small gaps

Eindhoven University of Technology

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4. Problems and Challenges(Problems)

Overstress- Cracks (die, plastic, wirebond, etc. )- Delamination- Pop-corn- Buckling- Yields (ball shear, pattern shift, etc.)- Warpage - Large deformation- Electro/thermal/stress migration- Voiding- …...

Wear out- Fatigues- Creep- Wear- …..

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• New and combined failure modes &mechanisms

• >65% of failures thermo-mechanical related!

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No appropriate thermo-mechanical design method•Experience and trial-error based design method•Empirical, phenomenological, case dependent, •Sub-optimal product/process•High development costs

No appropriate thermo-mechanical qualification method •Time and money consuming•Unclear correlation between application profiles with spec. and accelerated testing•No guarantee for extrapolating to outside of the spec. •No satisfied coverage for quality, robustness and reliability

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Eindhoven University of Technology

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New Paradigm of Reliability

To meet the needs of tech. trends, a new & knowledge-based Reliability Paradigmis a must.

The scientific successes of many micro/nano-related technology developmentwould never lead to a business success without breakthroughs in the way that we are handling reliability through the whole value chain .

Eindhoven University of Technology

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3. Virtual prototyping and qualifications

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Eindhoven University of Technology

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Reliable & efficient prediction models

Advanced simulation based optimization methods

Virtual Thermo-Mechanical Prototyping

Sustanable Profitability

Eindhoven University of Technology

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Conceptdevelopment Design

PrototypingQualification Redesign

Objectives and benefits• Short-time-to-market• Cost reduction• Product/process optimization• Quality, robustness and reliability insurance

Conceptdevelopment Design

Virtual prototyping

Qualification

Virtual qualification

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Eindhoven University of Technology

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Computational methods Experimental

Methods

Product &processinputs

Material models

Damage models& failure criteria

Reliable & efficient simulation models

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• Process parameters (manufacturing, assembly, testing, reliability qualifications, field use)

• Product parameters (geometry,materials,tolerance design,interface design, defects, etc.)

Determining• loading and loading history; material behavior; initial stress;defects & damage initiation and evolution • life time and performance of product/process

!!!!!!!!! Inputs must be reliable !!!!!!!!!!!!

All statistic in nature

40C

for 21

days

140C for 3 minutes

Product &processinputs

Eindhoven University of Technology

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Material models

Damage models& failure criteria

- Constitutive law and damage models cannot be partitioned anymore

- Size effects* Microstructures and their evolutions* Gradient effect (chemical, electrical, thermal and mechanical)* Surface effect

- Strong process-dependence Temperature, time, constraint, stress, interfaces & reactions

- Multi-scale damage, initiation, failure criteria and process-dependent evolution

- Ultimate aim: Material design rules to tailor the properties for specific need

• Material & damage modelsLaws governing the behavior of materials & interfaces

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Computational methods Experimental

Mechanics

Deterministic

Stochastic

Combined computational &

experimental mechanics

Characterization

Verification

•Non-continuum; •Multi-scale (bridging gaps); •Multi-physics;•Multi-failure mode;•Multi-process; •Nonlinear;•3D applications;•Efficient & accurate•Advanced FEM tool (MARC)

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In principal, all the simulation results are wrong, unless you can prove they are right.

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Simulation based optimization

Optimization based on and integrated with advanced simulation models

• Maximum & minimum• Robust design

• Parameter sensitivityunder given bounds of design and response parameters

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Material ParametersGeometry

Boundary Conditions

Process parameters

DeformationStresses / Strains

Fatigue, Creep, Crack…...

Scatter

Uncertainty

1 How large is the scatter of the output parameters?

2 What is the probability that output parameters do not

fulfil design criteria (failure probability)?

3 How much does the scatter of the input parameters

contribute to the scatter of the output (sensitivities)?

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Sequential optimization

Optimum

Design spaceStep by step to optimum

Determine next point using

info from the path

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Compact-model optimization

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Simulation tool

DOE RSM

Design specification

Criteriasatisfied?

N

Y

Optimization-maximum & minimum-parameter sensitivity-robust design

Reliable &efficient parametric models

Responseparameter(s)

Design parametersand spaces

Eindhoven University of Technology

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ProblemExpensive for nonlinear responses

ObjectiveTo develop smart infill sampling strategy & criteria for efficient and reliable RSM development and global optimization

MethodEGO (Efficient Global Optimization): Expected Improvement (low objective function in optimal objective region & high uncertainty in larger error region)

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start

DOE(MLH)

RSM(Kriging)

Obj?EGO/EI ofObj+RSM

EGO/EI of RSM

EI<limit? EI<limit? Startoptim

Add multi-pointsOptimalachieved

Optimalachieved

Adding new multi DOE points smartly according to the results of EGO

yy

n n

Accurate RSMGlobal optimization

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Current IC stress design rules

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DelaminationPassivation crack

Pattern shift

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1 Wafer Models

2 Packaging Models

3 IC Models

Check & Improvement

Package stressesWafer stresses

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2D modelwith delaminationand crack

Delamination - Crack energy criteria

Aim: • Predict J-integral values• Determine effect of 2nd metal

level

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Deformation mechanism Tensile stresses distribution

• Delamination may lead to passivation cracks and pattern shift.

• Depending on metal layout.• Critical crack location is identified.

Influence of IC/compound delamination on passivation cracks/pattern shift

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Experimental and numerical results

• Special test samples designed for the carrier product.• Observations compared with simulations.• With the verified models a wide design space simulated.

Metal shift

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L_delam

a L2

w

0 0.01

0.02 0.03 0 0.02 0.04 0.06 0.08 0.1

0 0.01 0.02 0.03

J (N/mm)

a (mm)

W (mm)

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CompoundIC (Die)

LeadsLeadframe

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Stress Evolution for Nominal Design

Die Attach

Moulding

TCT -65ºC

TCT +150ºC

TCT -65ºC

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Results - Comparison with FEM

U-field X-direction

V-field Y-direction

W-field Z-directionW-field Z-direction

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Predicted responses in 3D

150 100 50 0

-50

0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1t_lf 0.020.03

0.040.05

0.060.07

0.08

t_solder

-100-50

050

100150200

top1

Die Attach

solder t

hickness

leadframe thickness

Predicted responses in 3D

40 30 20 10 0

-10 -20 -30

0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1t_lf 0.020.03

0.040.05

0.060.07

0.08

t_solder

-40-30-20-10

01020304050

top2

Moulding

Predicted responses in 3D

-460 -470 -480 -490 -500 -510 -520 -530 -540

0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1t_lf 0.020.03

0.040.05

0.060.07

0.08

t_solder

-550-540-530-520-510-500-490-480-470-460-450

top3

TCT -65ºC

Predicted responses in 3D

-60 -70 -80 -90

-100

0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1t_lf 0.020.03

0.040.05

0.060.07

0.08

t_solder

-110-100

-90-80-70-60-50

top4

TCT +150ºC

Predicted responses in 3D

-290 -300 -310 -320 -330

0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1t_lf 0.020.03

0.040.05

0.060.07

0.08

t_solder

-340-330-320-310-300-290-280

top5

TCT -65ºC

Top Die Stress Evolution for Design Space

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0

0.01

0.02

0.03

0.04

0.05

0.06

0.07

-600 -595 -590 -585 -580 -575

Pro

babi

lity

objective

Histogram Monte Carlo

Sensitivity to Solder Thickness

Stress

Pro

babi

lity

TCT -65ºC, Max. Top Die Stress Histogram

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Solder joint failure under thermal loading

Nickel Pad

Cu Pad

FR4 PCB

Silicon Chip

Solder Bump

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Finite Element Analysis on solder joint reliability

Geometricinputs

Models of material behavior(properties & damage

evolution)

Loading&boundary conditions

Failure modes

Given product/process design parameters & spaces

Reliability Prediction andQualification Models

Reliability Qualification

Computational methods

Characterisationand verification

Experiments

2. Methodologies

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Creep (?)•Time dependent inelastic strain under constant load and elevated temperature•Three phases: Primary (decrease SR); secondary constant(SR); tertiary(increase SR)

Homologous temperature (?)Thom=Tcurrent/Tmelting

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plcr

eq

el

eqεεεε &&&& ++=

plcrinel εεε &&& ==

plcrinel εεε &&& +=crinel εε && =plinel εε && =

Extended Maxwell

Maxwell

Elastic-plastic

Bingham

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)()()( 321 tfTffcr σε =&f1 (σ)=Aσn

f1 (σ)=B exp(ασ)f1 (σ)=C (exp(ασ)-1)f1 (σ)=Dsinh(βα)f1 (σ)={Dsinh(βα)}m

f2(T)=exp (-Q/RT)R:boltzmann constant; T absolute tem.; Q apparent activation energy

f3 (t)=a tn

f3 (t)=(1+bt1/3)exp(kt)

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Fatigue Life

Governing Parameter

Stress

Strain

Energy

Fracture

Damage

CN mf =σ

CN pmf =ε

( )[ ] CN pmkf =− εν 1

cp

cp

pc

pc

cc

cc

pp

pp

f NF

NF

NF

NF

N+++=

1

CWN pmf = cpe

tot WWWW ++=

( ) pm WJKYYCdNda

∆∆∆∆∆= ,,:,

D: E, σ, P, W

1910

Coffin-Manson 1953

Morrow1965

1970

Morrow 1964

Manson 1973

1980

CS

N pmf =

εσ λ

JPL, CIT 1994

Guo 1993

( )[ ] CWN pmkf =−1ν Solomon 1995

2. Methodologies

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Finite Element Model-7x7Matrix Array

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Equivalent Plastic Strain Distribution in Solder Joints at the End of 2nd Cycle

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Fatigue Life Model: Manson_Coffin Based Empirical Model

803B2390B7

711A41530A1

N50%(Test)

Case

0.015 0.02 0.025 0.030

500

1000

1500

2000

N50

%

∆εavN50%

Average InelasticStrain

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Fatigue Life Model: Manson_Coffin Based Empirical Model

0.015 0.02 0.025 0.030

500

1000

1500

2000N

50%

data1 develop verification

( ) 49.2um10448.0Life −ε∆=

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Sensitivity to N50%

What are the most sensitive parameters to N50%?

• Most sensitive parameters to N50%:– Substrate pad diameter (an increase in substrate value,

has a decreasing effect to the reliability N50%)– Solder volume– CTE of the PCB

• These parameters need a good income inspection

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Effects of component size (DNP)

0

200

400

600

800

1000

1200

1400

1600

1800

"1.25" "1.4" "1.6" "1.95" "2.1"

DNP(mm)

N50

%(c

ycle

s)

Modeling

Test

1.25mm 2.1mm

N50%=1410

N50%=652

54%

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Example: Optimizing wire loop design to prevent wire breakProblem: Interconnect wire break is the dominant failure in electronic packaging. Figs. 1 & 2 show the failure on the stitch and the ball side, respectively. There is urgent industrial need to design optimal wire loop in order to prevent possible wire breaks.Method: Due to the large scale difference, global-local method is used in developing reliable FEM models to simulate the stress levels in a wire, in combination with nonlinear material model of the wire. From the global package model, wire deformations are obtained and serve as the input for the local wire model.

Fig.1Fig. 2

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Correlation with Interferometry Measurements

Temp Measurements Modeltransparent black

175ºC

250ºC

20ºC

sensor side

text side

cool down

heat up

∆z top = 25µm

∆z top = 25µm

∆z bottom = 5µm

∆z bottom = 25µm

250ºC

∆z top = 23µm∆z bottom = 11µm

20ºC∆z top = 31µm

∆z bottom = 10µm

20ºC

∆z corner top = 12µm∆z corner bottom = 8µm

IC

ICIC

250ºC

∆z top = 8µm∆z bottom = 7µm

IC

gap

gap

gap

gap

gap

gap

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Wire fatigue - principle

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Result: Optimized wire shape

looppart

loopheight

stitchdisplacement

Optimized loop

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4. Conclusions

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• Future technology/business development trends demand virtual prototyping/virtual qualifications.

• The developed methodologies can generate high added business values.

• Not to replay physical prototyping/qualification, but to reduce their numbers and duration.

• Many challenges remain. Combined effort needed.