vacuum pump option parts - 株式会社アルバック

Many user-friendly optional parts are available from ULVAC for comfortable operations of vacuum pumps.

These traps and vacuum piping parts are used according to application.

Vacuum Pump Option Parts

Pre-Stage TrapsDust Filter, DS seriesParticle Adsorption Trap TRO seriesOil Trap OT seriesCold Trap CT seriesWater Cooling Trap WT series

Oil FiltrationOil Filtration System OF series

Vacuum Piping Parts

Vacuum Flanges

Pre-Stage TrapsKeeping particle from coming into vacuum pumps, and preventing decrease of vacuum pumps lifetime.

Oil FiltrationCapable of adsorptive removal for particles in vacuum pump oil, acid gases or reactive gases.

Vacuum Flanges and Piping PartsVarious vacuum flanges and piping parts are available.Useful for connecting to equipments.

Vacuum Pump Opt ion Par ts Appl icat ions

DS-40

OF-2

Low Vacuum Pump

Low Vacuum

Pump

2

550 550420

21810096.2

580 580

610610

4-dia. 10 4-dia. 10

100

100

200

200

(551

)

100

100

Pressure gauge Pressure gauge

Electromagnetic switch

Electromagnetic switch

To rotary pump oil return port 3/8B (Connection port female coupler 3S)

From rotary pump drain port3/8B (Connection port female coupler 3S)

From rotary pump drain port3/8B (Connection port female coupler 3S)

To rotary pump oil return port 3/8B (Connection port female coupler 3S)

Nameplate Nameplate

tro chiod pumpAC100 V 0.2 kW

trochiod pumpAC100V 0.2 kW

Note) Maintenance space is 610×200×600 (mm)Note) Maintenance space is 610×200×600 (mm)

115 216 102.5 68

(554

)

Accessories for Vacuum Pumps

Oil Filtration System OF Series

Features

Speci f icat ions

Dimensions


Oil rotary pumps used in CVD and etching processes routinely collect contaminants inside the pump, such as reaction products, unreacted gases such as oxygen, and other corrosive substances. The resulting oxidation and deterioration of the operating oil hinders pump operation and quite often can lead to mechanical breakdown of the pump.OF series oil filtration system extend the useful lifespan of the pump operating oil and thereby help to lengthen the time between the required maintenance intervals of these pumps.

OF-2 The OF-2 model is for CVD processes and other processes where large quantities of particles are

generated. The unit reliably removes particles in the vacuum pump oil. The DHC (Dust Haul Capability) of the filter element is extremely large, extending the pump oil lifespan while increasing the time between required maintenance intervals.OF series oil filtration system extend the useful lifespan of the pump operating oil and thereby help to lengthen the time between the required maintenance intervals of these pumps.OF-3

The OF-3 model is for dry etching processes, where large volumes of oxygen are pumped, and for processes where strongly reactive gases are pumped. The unit is very effective in extending the pump oil lifespan. The unit consists of a particle filter element for removing sludge and a neutralization element for absorbing and removing oxygen and reactive gases.

OF-2

OF-3＊1 0.4 to 0.45 MPa = 4.0 to 4.5 kg/cm2

＊2 Hose length cannot be changed.

Item Model OF-2 OF-3Captured particle size 1μ≦ 1μ≦ (Pre-stage paper filter)

Capture capacity 1200g(600g per element)

(1) Dust: 600g(2) Oxygen: 500mL

Element replacement pressure 0.4 to 0.45 MPa (Gauge pressure) ＊1Required oil flow L 7 6.5Circulating oil volume L/min 3.0 ≦Connection hose length ＊2 1m (2 hoses)Coupling diameter R3/8 (PT 3/8) for both IN and OUT

Material Main unit: Stainless steel 304,Gasket: FPM

Power 100V, 50/60Hz 0.2kW

(unit: mm)OF-2 OF-3

3

Accessories for Vacuum Pumps

Features

Speci f icat ionsDimension Table

Dimensions

Particle Adsorption Trap TRO Series

TRO series traps are effective in CVD and other processes where a large amount particle is generated.Particles generated in a process are trapped when the TRO unit is placed in-line between the process equipment and the oil rotary vacuum pump. Since a special trap method using oil is used, particles can be adsorbed for an extended period of time with no loss of pumping conductance.In addition, through the use of special oil with a low vapor pressure, back streaming of oil from the oil rotary pump to the chamber is prevented. As a result, process quality and productivity can be greatly improved.

Little conductance loss There is no conductance loss accompanying the adsorption of particles as with conventional filter

particle traps. This particle trap does not contain a filter element which can become clogged.High corrosion resistance

Stainless steel and fluoride rubber, with their excellent corrosion resistance, are used in the exhaust gas section.Easy maintenance

Oil replacement is the only maintenance required. The particle adsorbing oil can be observed through a view port, and a ball valve is included in the exhaust port as standard equipment.Extension of pump maintenance period

The oil replacement period and the overhaul period of the oil rotary vacuum pump are both extended. (Example: More than a 4 fold increase for CVD processes)Small Oil back streaming

Compared to use of an oil rotary vacuum pump alone, oil back streaming to the chamber is reduced by more than 50%.

TRO-100

＊1 Optional oils: ULVOIL Super R-7500, ULVOIL D-11＊2 AC200V, 3 phase, 50/60Hz

(unit: mm)

(unit: mm)

TRO-50 TRO-80 TRO-100A 390 600 740B 290 440 550C 135 190 240D 190 200 320E 260 370 470F 115 145 195G 120 200 250H 140 200 260 I 455 620 730J 40 50 55K 140 195 240L VG50 VG80 VG100M VG50 VG80 VG100

Item Model TRO-50 TRO-80 TRO-100Oil capacity L 2.5 8 19Recommended oil ＊1 ULVOIL R-4Suction port diameter JIS B 2290

Corresponds to VG50

Corresponds to VG80

Corresponds to VG100

Exhaust port diameter JIS B 2290

Corresponds to VG50

Corresponds to VG80


Applicable pump capacity L/min ≦1600 ≦4000 ≦7000

Applicable pump examples EC Series, PKS-016

VS Series, PKS-030 PKS-070

Weight kg 30 75 130Electric motor used ＊2 W 25 60 90Material Main unit: Stainless steel 304, Gasket: FPM

Hanging hole (TRO-50 has no mounting holes)

L

F G

HI

(K)

M

J

A

C

D

E

B

Oil gauge

Oil supply portdia. 18

4-dia. 12

Oil drain valve (1/2B)

4

Oil rotary vacuum pump

A C

D

B

E AH

B

G

DC F

I

Sight glass

Oil drain

Oil rotaryvacuum pump

B

A

D

C


E

Cooling water outlet

Cooling water inlet


Drain plugdia.F

H GB

GA

C

ED

INOUT

RP

bypass piping

OUT

CTIN

RP

INOUT

WT

RP

DS

RP

IN

Accessories for Vacuum Pumps Vacuum Components


Vacuum Components Pre-Stage Traps

Applications・ Pumping (dry condition) and vacuum adsorption of gases containing

particles with diameters of 10μm or more.・ Transport: Vacuum molding, vacuum packing, vacuum melting furnace,

and vacuum heating furnace.Structure:

An easily replaced filter element is contained inside the unit. The element can be cleaned and reused.Material: Stainless steelApplicable models: ULVAC oil rotary vacuum pumps

Applications・ Continuous pumping at high intake

pressures of gases containing particles.・ Pumping of gases containing materials

generated in chemical reaction processes such as CVD, etc.

Material: Stainless steelOil: Low vapor pressure vacuum pump oil

(ULVOIL R-4)Applicable models: VD series, PKS series

Applications・ Continuous pumping at high intake

pressures of gases containing particles.・ Pumping of gases containing a large

amount of waterMaterial: Stainless steelApplicable models: ULVAC oil rotary

vacuum pumps

Applications・ Pumping of gases with saturation vapor

pressures of 2660 to 3990Pa or more.・ Continuous pumping of large volumes of

high temperature gasesMaterial: SS (plated), Stainless steelApplicable models: ULVAC oil rotary

vacuum pumps

DS-40

DS Series Dust Filter

OT Series Oil Trap

CT Series Cold Trap

WT Series Water Cooling Trap

Dimensions

Dimensions Dimension Table

Dimension Table

Dimension Table

Dimensions

Dimensions

Attachment Diagram

Attachment Diagram

Attachment Diagram

Attachment DiagramDimension Table

(unit: mm)

(unit: mm)

(unit: mm)

(unit: mm)

(unit: mm)

(unit: mm)

(unit: mm)

(unit: mm)Model Applicable models A B C DDS-20 PVD-180

90 90VG20 VF20

DS-25 PVD-360 VG25 VF25DS-40 VD301, VD401

140195

VG40 VF40DS-50 VD601, VD901 VG50 VF50DS-2 PKS-016 290 VG50 VF50DS-3 PKS-030 200 530 VG80 VF80DS-4 PKS-070 220 583 VG100 VF100

(unit: mm)

＊ The unit is connected above the suction piping (RF series) for the PVD-180, PVD-360 models.

＊ The main use of the CT series is to reduce the back �ow of the oil rotation vacuum pump. When the atmosphere in the state of high pressure is exhausted for a long time directly by way of CT., the consumption of the liquid nitrogen becomes violent. Please install the by-pass piping as shown in �gure, exhaust it via CT at high pressure and exhaust directly after pressure lowers.

Model OT-50 OT-80 OT-100A 150 160 185B 83 106 121C 300 366 401D 490 556 591E 180 180 185F dia. 140 dia. 165 dia. 216G VF50 VF80 VF100

H Corresponds to VG50

Corresponds to VG80


I G1 G1 G1

Model CT-25 CT-40 CT-50 CT-80 CT-100A 100 110 125 140 155B 96 88 99 114 131C 276 288 314 364 396

D Corresponds to VF25

Corresponds to VF40

Corresponds to VF50

Corresponds to VF80

Corresponds to VF100

E VG25 VG40 VG50 VG80 VG100

Model WT-25 WT-50 WT-80 WT-100A 93 150 150 200B 100 150 150 200C 100 100 140 180D 160 175 250 290E (550) (550) (705) (815)F dia. 60.5 dia. 114 dia. 165 dia. 216G VG25 VG50 VG80 VG100H VG25 VG50 VG80 VG100 I dia. 120 dia. 185 dia. 235 dia. 300

5

dia. AVG

B

PF 3/4 (PVD-180)PF 1 (PVD-360)

dia. AVG

B

C

O-ring


Vacuum Components Vacuum Piping Parts

Applications・ Flange joints for PVD-180, PVD-360

models・ Matching suction ports with helium

recovery modelsApplicable models:

PVD-180, PVD-360Specifications:・ Rotating flange section (with gasket

groove)・ Free flange attachment direction

with gasket (bolts and nuts are not included)

Material: Stainless steel, Gasket (FPM)

Applications・ General evacuation・ Matching exhaust ports with helium

recovery modelsApplicable models:

PVD-180, PVD-360Specifications:・ Rotating flange section (with gasket

groove)・ Free flange attachment direction

with gasket (bolts and nuts are not included)


RF Series Rotatable Type Suction Piping with Flange RF Series Rotatable Type Exhaust Piping with Flange

Dimensions Dimensions

Dimension Table Dimension Table

Attachment Diagram Attachment Diagram

(unit: mm) (unit: mm)


＊ Standard �ange according to JIS B2290＊ Refer to the attachment diagram for H

＊ Standard �ange according to JIS B2290＊ Refer to the attachment diagram for H

Model Applicable modelsDimensions A B H＊

RF-1 Model PVD-180dia. 80

72 315RF-2 Model PVD-180 with TMX 235 478RF-3 Model PVD-360

dia. 90

72 315

RF-4Model D-330K

220419

Model D-330DK 425RF-5 Model PVD-360 with TMX 285 528

RF-6Model D-330K with TMX

310509

Model D-330DK with TMX 515

With oil mist trap

All suction piping is threaded. From bottom of base From bottom of base (Floor)

Exhaust

ExhaustSuction

Suction

H

H

TMX

RP RP

RF1, 3, 4

RF2, 5, 6

MM

With oil mist trap

All exhaust piping is screwed.From �oorFrom �oor

SuctionSuction

H

H

TMX

RP RP

RF7, 8

RF9-12

MM

Model Applicable models Dimensions A B C H＊

RF-7 Model PVD-180 dia. 80 PF3/4" 50 314RF-8 Model PVD-360 dia. 90 PF1" 80 344RF-9 Model PVD-180 with TMX dia. 80

PF1/2"50

507

RF-10Model PVD-360 with TMX

dia. 90Model D-330K with TMX 383 (486)Model D-330DK with TMX 389 (492)


dia. 105383 (486)

Model D-650DK with TMX 389 (492)


dia. 120 PF2"383 (491)

Model D-950DK with TMX 389 (497)

H

Applicable models・ PVD series and DK series pumps (Only the casters are attached for

directly coupled oil rotary vacuum pumps.)

Pump Base with Handles and Casters

DimensionsDimension Table (unit: mm)

Applicable models HPVD-180 (B) 25PVD-360 (B), D-330K 25D-650K, D-950K 50

6

Vacuum Components Vacuum Piping Parts


dia.18 gauge port (standard)

dia.

d

dia.

d

dia.

D

dia.18

4-dia.10

100tt

VGVF

Leak port

dia. D1

dia.D2

dia. d

4-dia.10

A

VG

VF

T type L type

dia. D

dia. D

dia.d

dia.d

dia.d

dia.

D

T

T

B VG

VG VG

VFVF

A

A

A

4-dia.10

dia.

D

dia.

D

LL

VFVG

T

• JIS standard vacuum flange model • ISO standard KF flange model

A

VF VG

dia.

D

L=1000dia.

ddia.

D





Material: Stainless steel

Material: Stainless steel, gasket (FPM) Material: Crude rubber

TP Series Short Piping with Gauge Port

I Piping

L/T Piping

Flexible Hose

BJ Series Bellows Joints Vacuum Rubber Hose

Dimensions

Dimensions

Dimensions

Dimensions

Dimensions Dimensions

Dimension Table

Dimension Table

Dimension Table

Dimension Table

Dimension Table Dimension Table

(unit: mm)

(unit: mm)

(unit: mm)

(unit: mm)


(unit: mm)

(unit: mm)

(unit: mm)

(unit: mm)


Part number dia.D dia.d dia.p t Applicable modelsTP-20 80 27.2 60

8PVD-180 (B)

TP-25 90 34.0 70 PVD-360 (B)TP-40 105 48.6 85

10VD301, VD401

TP-50 120 60.5 100 VD601, VD901

Part number dia. D1 dia. D2 dia. d AI-VF20 ×VG20

80

80

27.2

100

VG25 90VG40 105VG50 120

I-VF25 ×VG2590

9034.0VG40 105

VG50 120I-VF40 ×VG40 105 105 48.6VG50 120I-VF50 ×VG50 120 120 60.5

Part number A dia. DBJ-25A 65 90BJ-40A 90 105BJ-50A 105 120BJ-80A 110 160BJ-100A 110 185BJ-150A 100 235

Part number dia. d dia. D L Applicable

pipingR-5 4.5 18

1000

-R-9 9 24 3/8BR-15 15 36 1/2BR-18 18 42 3/4BR-25 25 55 1B

Part number D L T Model D LVFH-20- 200

80200

8

KFH-20- 200

40

200 500 500 500 500 1000 1000 1000 1000VFH-25- 200

90200 KFH-25- 200 200

500 500 500 500 1000 1000 1000 1000VFH-40- 500

105500

10

KFH-40- 50055

500 1000 1000 1000 1000 2000 120 2000 2000 2000VFH-50- 500

120500 KFH-50- 500

75500

1000 1000 1000 1000 2000 2000 2000 2000

Part number dia. D dia. d A BT-20 80 27.2 50 100T-25 90 34.0 55T-40 105 48.6 60 130T-50 120 60.5 150

Part number dia. D dia. d A TL-20 80 27.2 60 8L-25 90 34.0 65L-40 105 48.6 80 10L-50 120 60.5 90

7


Vacuum Components Vacuum Flanges

VF

P

T804-dia.10

dia.

D

dia.

d1

dia.

d3

O-ringULVAC No.5

dia.

18

dia.

D

VF

TA Internal structure




Flange with Suction Piping

Flange with Gauge Port

Quick Coupling Connection Adapter

Vacuum Flanges: ISO standard quick release coupling flange (ISO28661 1-1974)

Dimensions

Dimensions

Dimension Table

Dimension Table

Dimension Table

(unit: mm)

(unit: mm)

(unit: mm)

(unit: mm)

(unit: mm)

Part number P dia. D T dia. d1 [external diameter] dia. d2 [internal diameter] dia. 3 Applicable rubber hose

VF20 ×15A60 80 8

21.7 16.1 18 dia. 15 × dia. 3620A 27.2 21.6 24 dia. 18 × dia. 4225A 34.0 27.6 30 dia. 25 × dia. 55

VF25 ×15A70 90 8


VF40 ×15A80 105 10


VF50 ×15A100 120 10


Partnumber dia. D A TGF-20 80

60 8GF-25 90GF-40 105

62 10GF-50 120GF-80 160

64 12GF-100 185

45VF or VG

dia.D1

dia.D2

Clamp

B

AC

dia.D

dia. D

H

dia. B

dia.5

3.9

8

dia. d1dia. d2

dia. D

40

dia. B

Dimensions

Dimensions

Dimensions

Dimensions

Dimensions

(unit: mm)

(unit: mm)

(unit: mm)

(unit: mm)

(unit: mm)

Part number D1 D2 Nominal diameter KCG KCFKCG- 10 KCF- 10

3080

NW10VG20 VF20KCG- 16 KCF- 16 NW16

KCG- 20 KCF- 2040

NW20KCG- 25 KCF- 25 90 NW25 VG25 VF25KCG- 32 KCF- 32

55 105NW32

VG40 VF40KCG- 40 KCF- 40 NW40KCG- 50 KCF- 50 75 120 NW50 VG50 VF50

Material: Aluminum alloy

Material: Aluminum alloy

Material: Stainless steel 304 Material: FPM

Material: Stainless steel 304

CLAMP

COUPLING (Short)

O-RING SEAT O-RING

COUPLING (Long)

Dimension Table

Dimension Table

Dimension Table

Dimension Table

(unit: mm)

(unit: mm)

(unit: mm)

(unit: mm)

Partnumber

Nominal diameter A B C dia. D

KQC-16 NW10/16 45 61 16 22KQC-25 NW20/25 55 75 16 32KQC-40 NW32/40 70 90 16 47KQC-50 NW50 95 123 25 62

Partnumber

Nominal diameter dia. d1 dia. d2

KBR-10 NW10 10 12KBR-16 NW16 16 17KBR-20 NW20 20 22KBR-25 NW25 25 26KBR-32 NW32 32 34KBR-40 NW40 40 41KBR-50 NW50 50 52

Part number

Nominal diameter dia. B dia. D

KLC-10 NW10 15 30KLC-16 NW16 20KLC-20 NW20 25 40KLC-25 NW25 30KLC-32 NW32 38 55KLC-40 NW40 45

Part number

Nominal diameter dia. B dia. D H

KSC-10 NW10 1530 16

KSC-16 NW16 20KSC-20 NW20 25

40

20KSC-25 NW25 30KSC-32 NW32 38

55KSC-40 NW40 45KSC-50 NW50 56 75

ULVAC, Inc. Components Division www.ulvac.co.jp/eng

Overseas Sales in Japan TEL +81-467-89-2261

USA : ULVAC Technologies, Inc. TEL +1-978-686-7550 PHILIPPINES : ULVAC Singapore Philippines Branch TEL +63-2-828-7700GERMANY : ULVAC GmbH TEL +49-89-960909-0 VIETNAM : ULVAC Singapore Vietnam Representative Office TEL +84-8-62556762CHINA : ULVAC (SHANGHAI) Trading Co.,Ltd. TEL +86-21-6127-6618 THAILAND : ULVAC (THAILAND) LTD TEL +66-2-312-4447TAIWAN : ULVAC TAIWAN, Inc. TEL +886-3-579-5688 MALAYSIA : ULVAC MALAYSIA SDN. BHD. TEL +60-3-5121-4700KOREA : ULVAC KOREA, Ltd. TEL +82-31-683-2922 INDIA : ULVAC, Inc., India Branch TEL +91-40-27007006SINGAPORE : ULVAC SINGAPORE PTE LTD TEL +65-6542-2700

This catalog is subject to change without notice. This catalog is published in order to sell this product in overseas. Please see Japanese catalog when purchasing in Japan. 1173E/2012062000UYO



Vacuum Components Vacuum Flanges

Flat surface seated Groove seatedd

g

h

f

T

CD

d

g

h

f

T

CD

S S

G1

G1G2

G2

CI

Vacuum Flange (JIS B 2290)

Dimensions

Dimension Table for Flanges and Gaskets (JIS B 2290)

(unit: mm)

(unit: mm)

Nominal diameter

External diameter (d) of applicable

steel piping

Flange externaldiameter

(D), casted

External flange diameter Bolt holesNominal

bolt

Gasket grooveFlange thickness, T

f g Center diameter, C Number Thickness,

hInternal

diameter, G1External

diameter, G2 Nominal SMetal Casting Other

10 17.3 70 10 8 1 38 50 4 10 M8 24 34 320 27.2 80 10 8 1 48 60 4 10 M8 34 44 325 34.0 90 10 8 1 58 70 4 10 M8 40 50 340 48.6 105 12 10 1 72 85 4 10 M8 55 65 350 60.5 120 12 10 1 88 100 4 10 M8 70 80 365 76.3 145 12 10 1 105 120 4 12 M10 85 95 380 89.1 160 14 12 2 120 135 4 12 M10 100 110 3100 114.3 185 14 12 2 145 160 8 12 M10 120 130 3125 139.8 210 14 12 2 170 185 8 12 M10 150 160 3150 165.2 235 14 12 2 195 210 8 12 M10 175 185 3200 216.3 300 18 16 2 252 270 8 15 M12 225 241 4.5250 267.4 350 18 16 2 302 320 12 15 M12 275 291 4.5300 318.5 400 18 16 2 352 370 12 15 M12 325 341 4.5350 355.6 450 ̶ 20 2 402 420 12 15 M12 380 396 4.5400 406.4 520 ̶ 20 2 458 480 12 19 M16 430 446 4.5450 457.2 575 ̶ 20 2 511 535 16 19 M16 480 504 7500 508.0 625 ̶ 22 2 561 585 16 19 M16 530 554 7550 558.8 680 ̶ 24 2 616 640 16 19 M16 585 609 7

vacuum pump option parts - 株式会社アルバック

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