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The top documents of k-vutova
Simulation of the energy absorption and the resist development at sub-150 nm ion lithography
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Investigation of electron beam melting and refining of titanium and tantalum scrap
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Why light ions in future ion lithography?
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Photoelectron signal simulation from textured samples covered by a thin film
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Simulation of the heat transfer process through treated metal, melted in a water-cooled crucible by an electron beam
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Computer simulation of the heat transfer during electron beam melting and refining
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Photoelectron signal simulation from textured samples with modified surface composition
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Sensitivity, contrast and development process in electron and ion lithography
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Modelling of physical processes in ion lithography
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