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The The Probe StationProbe Station CASCADE MICROTECH RELCASCADE MICROTECH REL--6100 6100 in the ROMEROME CLEANCLEANROOMROOM CL100CL100 equipped with Logic Analyzer AGILENT 16702B AGILENT 16702B and S/W LABVIEWLABVIEW

Power SuppliesLogic Analyzer System

LVDS/CMOSPROBE CARD

Probe station

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PascAmPascAmwaferwafer

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AMBRAAMBRA PASCALPASCAL

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AMBRA v4WAFERWAFERAAEQFHX AAEQFHX

@ 07/12/05 NEW S/WNEW S/WGOOD =131 89%GREY =5 3%BAD =12 8%TOT =148

GOODGOOD CHIP.

GREYGREY CHIP.

BADBAD CHIP.

Not measurable CHIP: 13(cutted or not metallized)

Not measurable CHIP: 0(damaged).

Bad

Grey

Good

61

33 34 35 36 37 38 3927 28 29 30 31 32 40 41 42 43 44

18 19 20 21 22 23 2412 13 14 15 16 17 25 26

6 7 8 9 10 11

161

1 2 3 4 5

155 156 157 158 159 160

51 52 53 54 55 56 5745 46 47 48 49 50 58 59 60 62 63

71 72 7373 74 75 76 7764 65 66 67 68 69 70 78 79 80 81 82 83 8484

93 94 95 96 97 98 9986 87 88 89 90 91 92 100 101 102 103 104

114 115 116 117 118 119 120107 108 109 110 111 112 113 121 122 123 124

133 134 135 136 137 138 139127 128 129 130 131 132126 140

149 150 151 152 153143 144 145 146 147 148 154142

125 141

106

85 105

BadBad

BadBadBadBadBad

Bad

GreyGreyGrey

GreyGood Good Good Good Good Good Good Good

Good GoodGood Good Good Good Good Good

Good Good Good Good Good Good Good Good Good Good Good Good Good Good Good Good Good Good

Good Good Good Good Good

Good Good Good Good Good Good

Good Good Good Good Good Good Good Good Good Good Good Good Good Good

Good Good Good Good Good Good Good Good Good Good Good Good Good Good

Good Good Good Good Good Good

Good Good Good

Bad Bad

Bad BadGood Good Good

Good Good Good Good Good Good Good Good Good Good Good

Good Good Good Good Good

Grey Good

Good Good Good Good Good Good Good Good Good Good

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WAFER : WAFER : AAEQFHXAAEQFHXCHIP : CHIP : PASCAL v4

New “S/W” @28/11/05GOOD = 139 94%GREY = 7 5%BAD = 1 1%TOT meas. = 147DAMAGED = 0

GOODGOOD CHIP.

GREYGREY CHIP.

BADBAD CHIP.

Not measurable CHIP:(cutted or not metallized)

Not measurable CHIP:(damaged).

Good

Grey

Bad44 45 46 47 48 49 5037 38 39 40 41 42 43 51 52 53 54 55

27 28 29 30 31 32 3320 21 22 23 24 25 26 34 35 36

13 14 15 16 17 18 197 8 9 10 11 12

11 2 3 4 5 6

63 64 65 66 67 68 6956 57 58 59 60 61 62 70 71 72 73 74 75 76

84 85 86 87 88 89 9077 78 79 80 81 82 83 91 92 93 94 95 96 97

105 106 107 108 109 110 11198 99 100 101 102 103 104 112 113 114 115 116

124 125 126 127 128 129 130117 118 119 120 121 122 123 131 132 133 134

142 143 144 145 146 147 148136 137 138 139 140 141135 149

156 157 158 159 160150 151 152 153 154 155

Good Good Good Good

Good Good Good Good

Good Good Good Good Good Good Good Good Good Good GoodGood Good

Good Good Good Good Good GoodGood Good Good Good Good

GreyGood

Good Good Good Good

Good Good Good Good

Good Good Good Good Good Good Good Good GoodGood Good Good GoodGood Good Good Good

Good Good Good Good Good Good Good Good GoodGoodGood Good Good Good

Good Good

BadGrey

Good Good Good Good Good Good Good Good Good GoodGood Good Good Good GoodGood Good Good Good

Good Good Good Good Good Good GoodGood Good Good Good Good

Grey

Grey

Grey

Good Good Good GoodGood

Good Good

Good

Good Good Good Good Good GoodGoodGood Good Good Good Good Good

GoodGood Good

Good Good Good Good GoodGood Good Good Good Good

Grey

Grey

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Sistema parallelo di test per wafer PascAm

basato su Probe Station Karl-Suss PM8:

ispezione visuale,qualita’ metallizzazioni e

maschere sul wafer,test a campione…

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TELECAMERA

MICROSCOPIO

CHUCK

PIANO DI MARMO

FPGA + MICROCONTROLLORE

PLATE

X

Y

ENCODER Z

σz ~ 1µm

L ~ 1cm

PC: (S/W XCAP + PROGRAMMA GESTIONE COORDINATE)

POMPA PER VUOTO

RS232

RS232

ENCODER

(mini-MOUSE)

σxy ~ 30µm

L ~ 20cm

ENCODER MICROMETRICO

σxy ~ 1µm

L ~ 1cm

CONTATORE

MICROMETRICO

Idea!Idea!

8Probe Station Karl-Suss PM8

WaferWafer

Probe Card

Schedad’interfaccia

ControlloreJTAG

CUSTOM!Alimentatori

PatternGenerator

(DG2020A)PCPC

LAN

CAVETTICOASSIALI

CAVETTICOASSIALI

GPIB

LPT

FILITWISTATI

(LVDS)

Cavi twistati(LVDS)

Sistema di aghi (PROBE CARD)

LogicStateAnal.

(TLA5201)

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Disponibilita’ di tesi:Analisi del funzionamento dei rivelatori a deriva di silicio in ALICE

in interazioni p-p e Pb-Pb.

Perfezionamento di un sistema basato su Probe Station (KS-PM8)per la validazione ed il controllo di ASIC per la lettura di SDD.

Studio di fattibilita’ sulla rivelazione di barioni “multicharmed”tramite simulazione Monte Carlo in interazioni p-p e Pb-Pb.