The liquid-metal-jet anode provides unprecedented

brightness

Oscar Hemberg

2010-09-22

Bruker user meeting, 2010-09-22

Introduction

History and development of X-ray source

Excillum’s liquid-metal-jet-anode x-ray source

Performance

Applications

Summary

Agenda

2

Bruker user meeting, 2010-09-22

About Excillum

3

• Founded in 2007

• Spin-off from research project started at KTH (Royal Institute of Technology) in 2000.

• Mix of private venture capital and government agency research funding

• Commercializing a new x-ray source technology

• 4 prototype sources deployed with customers

• Exclusive partnership with Bruker for diffraction market

• First joint end customer installations planned for 2011

Bruker user meeting, 2010-09-22

Introduction

History and development of X-ray source

Excillum’s liquid-metal-jet-anode x-ray source

Performance

Applications

Summary

Agenda

4

Bruker user meeting, 2010-09-22

Historic Source Development

5

1904

Thermionic cathode

1990s

Synchrotrons

1920s

Line focusing and rotating anodes 2010s - Free-electron lasers

1895

Discovery

2010 - Present

• Continuous drive for high brilliance sources

• Research focus on large scale facilities

• Compact sources have seen minimal improvement since the 1970s

• Always a need for better homelab systems

Bruker user meeting, 2010-09-22

Conventional Source Technology

6

• 99.5% of electron-beam power becomes heat

• Solid target close to melting

• Few 10 kW/mm2 e-beam power density defines the technology limit

• Edge speed at mechanical limits

• Cooling technology has been perfected

• Reached its maximum potential with little or no room for improvements

Bruker user meeting, 2010-09-22

Introduction

History and development of X-ray source

Excillum’s liquid-metal-jet-anode x-ray source

Performance

Applications

Summary

Agenda

7

Bruker user meeting, 2010-09-22

The Excillum Breakthrough

8

• High-speed liquid-metal-jet anode

• Anode is regenerative

• No longer limited by melting

• >1000 kW/mm2 e-beam power density!

• Higher brightness source given more power per area

5 mm

Bruker user meeting, 2010-09-22

Prototype Installation

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Shutter

Montel Mirror

e- optic

Prototype installation in a D8 Discover cabinet

Bruker user meeting, 2010-09-22

Improved Version

10

Pre-production model

Bruker user meeting, 2010-09-22

MJX Source Details

11

• Closed loop recycling system

• Magnetic focusing optics

Bruker user meeting, 2010-09-22

Introduction

History and development of X-ray source

Excillum’s liquid metal jet anode x-ray source

Performance

Applications

Summary

Agenda

12

Bruker user meeting, 2010-09-22

Spot Size & Quality

13

20 µm10 µm5 µm

• Variable spot size: 5-20 µm (@ 50-200 W)

• “good” spot shape and high spatial stability

Bruker user meeting, 2010-09-22

Source Spectrum and Brightness

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GalliumKα

Kβ

InKα

Kβ

Spot size

[µm, FWHM]

Voltage

[kV]

Power

[W]

Ga Kα Flux

[Photons/(s×mrad2×line]

Ga Kα Brightness

[Photons/(s×mm2×mrad2×line]

5 60 50 3.0×106 1.5×1011

10 60 100 6.0×106 7.6×1010

20 60 200 1.2×107 3.8×1010

10 20 30 40 50 600

200

400

600

800

1000

Photon Energy (keV)

Bri

gh

tne

ss (

a.u

.)

Ga Kα: 9.25 keV (Cu replacement)

Bruker user meeting, 2010-09-22

Reliability & Serviceability

15

• Although a new target concept, it is intrinsically a simple system

• Main components are proven technology and solutions

• Electron gun and focusing:

- Standard HV supply and existing HV insulator used

- Cathode and optics design “borrowed” from accelerator technology

- More in common with microfocus tubes and SEM :s than rotating anodes

• Liquid-jet anode

- Modified reliable industrial process pump used

- Nozzle design “borrowed” from water jet cutting technology

- Closed loop recycling system, no dynamic vacuum seals

• Interaction chamber:

- Only 200 W of beam-power need to be dissipated

- Self-cleaning x-ray output window not deteriorated by vapor deposition

- Standard vacuum pumping solutions used

Bruker user meeting, 2010-09-22

Introduction

History and development of X-ray source

Excillum’s liquid-metal-jet-anode x-ray source

Performance

Applications

Summary

Agenda

16

Bruker user meeting, 2010-09-22

Phase Contrast Imaging

dkeII 2

0

dk

Absorption

Phase shift

>> for low Z elements

and high photon energies

phase contrast

Δd

Β

δ

I0F

I

Δ F

17

Bruker user meeting, 2010-09-22

Phase Contrast Tomography

z1=20 mm, z2=100 mm

M=6 3.4 micron effective pixel size

50 x 0.2s @ 40.8 W

Sealed tubeExcillum MJXS

Matthias Bartels, Tim Salditt, Institut für Röntgenphysik, University Göttingen, Germany

Sample: Egg of Peruphasma schultei (Samtschnecke)

1

21

Z

ZZM

18

Bruker user meeting, 2010-09-22

X-Ray Diffraction

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Mirror Specifications

Type Incoatec E43

Divergence 7.45 mrad

Magnification 3.8 ×

Source Performance

Target Alloy77 (95% Ga)

Power 200 W

Spot 20 µm

Flux 1.2×107 photons/(s∙mrad2)

Brightness 3.8×1010 photons/(s∙mm2∙mrad2)

Focus

Spot ~ 100 µm FWHM

Intensity > 5×1011 photons/(s∙mm2)

Bruker user meeting, 2010-09-22

Estimated System Performance

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Comparison of flux through a 0.1mm aperture

Beam FWHM @

sample, μm

66

11

78

16

0

60

0

0 100 200 300 400 500 600 700

Intensity x 109 (X-rays/sec/mm

2)

Classic 5 kW RAG/multilayer optics

IuS - Quazar

IuS - Quazar MX

EXCILLUM MJXS

MICROSTAR-H

MICROSTAR-MX

300

240

110

260

160

~100>5.0 x 1011 ph/mm2/s

Bruker user meeting, 2010-09-22

Future development

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Intensity• Increased jet speed for higher load capacity

• Line focus for increased load capacity

Power• Power (not only intensity) important for certain applications

Energy• High temperature alloys to access essentially pure In / Sn / Pb / Bi

• Kα lines at 24, 25, 75 and 77 keV

Bruker user meeting, 2010-09-22

Introduction

History and development of X-ray source

Excillum’s liquid-metal-jet-anode x-ray source

Performance

Applications

Summary

Agenda

22

Bruker user meeting, 2010-09-22

• Breakthrough in x-ray source technology

• Liquid-metal-jet x-ray sources are ready for industrial use

• Brightness an order of magnitude higher than conventional technology

• Exceptional beam quality

• Variable spot size attractive for certain applications

• Expected performance when combined with focusing Montel mirrors:

~ 100 µm diameter

> 5∙1011 photons/s/mm2

• Very attractive for

- Biological Crystallography

- Small angle X-Ray Scattering (BioSAXS)

- High Resolution X-Ray Diffraction

Summary

23