Agilent Turbo-V 3K-G System The Advanced Solution for Thin Film Applications

Agilent Turbo-V 3K-G SystemThe Advanced Solution for Thin Film Applications

The Only Truly “Integrated” System in the Market•Fullyintegratedsystemwithonboardpowersupply•Vent/purgevalvescontrolcapability•Integrateddiagnostics•Multipleinterfacecapability•Lowestpowerabsorption

Best Footprint to Performance Ratio•TheTurbo-V3K-Gisanoptimizedsolution

dedicated to the Thin Film Deposition application•ThehighestArgonpumpingspeed(2050l/s)foritssizeallowsuniformdepositionratesathighsubstratethroughput•Highestpumpingspeedinitsclass:2200l/sforNitrogen•Throughput:over1400sccmforNitrogen•RampUptime<6mins•Theall-turbo,morecompactrotordesigndelivershighestperformancewiththesmallestfootprint

Applications•TFDprocesseslike: PVDCoatingsystems,Evaporativesputteringapplications,Glass-coatingsystems,FlatPanelDisplaysubstrateprocessing,ThinFilmPhotovoltaicsmanufacturing,DataStorage,OpticalCoating,LargeAreaCoating•Otherapplicationslike: Vacuumfurnaces,IonImplanters,MBEsystems

Thermal Efficiency•NewdoubleloopSSTcoolingchanneldoublestheheatexchangesurface•Lesspowerconsumption(-25%)resultinginloweroperatingtemperature•Reducedbearingoperatingtemperatureextendsbearinglife

Oil-free, Robust and Reliable•Maintenance-freedesign: -nooilrefill -nopreventivemaintenance•MTTF>200,000hrs•Morecompactelectricalmotordesignreducesrotordiameter(-20%)andimproveselectricalefficiency(+15%)•State-of-the-artrotordesignreducesweightandmechanicalstress(-20%)•Agilent’snewrotor-shaftfitting(Patentpending)

eliminates rotor tensile stress

Best Turbo Solution for Thin Film Deposition

Features and Benefits Compression Ratio vs Foreline Pressure

Pumping Speed vs Inlet Pressure*

Technical SpecificationsPumpingspeedWithISO250F:

N2:2200l/s Ar:2050l/s He:1900l/s

Compressionratio: N2:>1x10 7

Ar:>1x10 8

He:6x103

Throughput(sccm) >1400forNitrogenBasepressure(mbar) <10-8 Inletflange ISO250FForelineflange KF40NWRotationalspeed 31800RPMStart-uptime <6minutesForelinepressure <0.5mbar

Recommendedforepump >60m3/h(dependingon gasflowrequirements)Operatingposition AnyCoolingmethods WaterWeight 52Kg

Stop Speed Reading (SSR)•ContinuedpumpspeedreadingaftertheSTOP

command•Allowsmanagementofpumpslowdown andshutdowntime•Allowscontrolledventingprocedureincombinationwithintegratedpurge/ventdevice(PatentPending)

Integrated Purge and Vent Valve•Bothpurgeandventvalvesareintegratedintothepumpbody

•Valvesaremanagedbytheintegratedelectronics• Protects suspension from contamination•Managesforoptimumpumpslowdown

Remote Control Panel•Enablescontrollofthepumpfromarackmounted

panel•Allowsmanualuserinterface•LCDisplayshowsimmediatepumpstatus

information

Multiple Interface•ProprietaryAgilentProfibuscommunicationcard andspecificGSDfile(optional)

•SerialinterfaceorremoteI/Oprovidecommunicationbetweenthepumpandsystemcontrols

•EnablesthepumptobeoperatedviaaPCusing T-PlusSoftware

Completely Maintenance Free thanks to Agilent's dry system lubricant• No oil•Noriskofsystemcontamination• No preventive maintenance•Designedtoallowmountinginanyposition withoutcompromises

Optimized Temperature Monitoring System •Integrateddoubleloopcoolingchannel•Activecontrolandmanagementofpumpoperatingparametersforthehighestthermalefficiency

•Assurespumpingsystemoperateswithin specificationsformaximumoperatinglife

Integrated, Waterproof Electronics (IP54)•Microprocessorbasedarchitecture•Electronicsarecompletelyprotectedinthepumpbody

•Simplifiespumpinstallationinthesystem•Compactdesignreducesoverallfootprintand

volume

MoniTorr & Remote Assist•IntegratedMoniTorrcard(optional)allows24/7monitoringofallpumpparameters

•AproprietaryAgilentSoftwarePackagecollectsalldata

•AllowsvirtualpresenceofAgilentSupportEngineersattheusersite

Service Capability Worldwide•24hAdvanceExchange,FactoryRepairandUpgradeProgramsallowtheglobalcoverageofpre-andpost-salessupportneeds

20-25 %more gas

throughput

capacity

15 %smaller

size(height)

• Comparisons referred to published competitors' specifications

0

500

1000

1500

2000

2500

1,0E-08 1,0E-07 1,0E-06 1,0E-05 1,0E-04 1,0E-03 1,0E-02 1,0E-01

Pumping speed [L/sec]

ArgonHeliumNitrogen

Pum

ping

spee

d [l/

sec]

Inlet Pressure [mbar]

1,E+00

1,E+01

1,E+02

1,E+03

1,E+04

1,E+05

1,E+06

1,E+07

1,E+08

1,E+09

1,00E-03 1,00E-02 1,00E-01 1,00E+00 1,00E+01

Compression Ratio

ArgonHeliumNitrogen

Foreline Pressure [mbar]

15-20 %

higher

pumping speed

Conp

ress

ion

ratio

(*) Measured with a 60 m3/h forepump

Thisinformationissubjecttochangewithoutnotice©AgilentTechnologies,Inc.2011PublishedJuly15,2011VPD-0511EN

Outline DrawingsPuMPInG SySTEMS (*) Part number AgilentTurbo-V3K-GISO250FSystemwithintegratedpurge/ventdevice 969-8888

AgilentTurbo-V3K-GISO250FSystemwithProfibusandintegratedpurge/ventdevice 969-8889

(*) Pumping Systems include Pump with 230V Integrated Electronics, Inlet Screen installed on the pump, separate center-ring and pre-installed IP54 Mating Connectors.

Both models can be equipped with Agilent’s MoniTorr device on request. Also 120VAC units available on request.

ACCESSORIES Part number MainscableNEMAPlug,3mlong 969-9958 MainscableEuropeanPlug,3mlong 969-9957 T-PlusSoftwareandserialcable 969-9883 Watercoolingkitfor6x8(IDxOD)flexibletube 969-9348 Watercoolingkitfor3/8in.IDflexibletube 969-9338

SPARE PARTS Part number IP54proofmatingconnectors 969-8960 InletscreenISO250 969-9350 O-ringandcenterringISO250 969-9144

Ordering Information

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Fax: +39 011 997 9350Toll-Free: 00 800 234 234 00vpt.sales@agilent.comvpt-customerservice@agilent.com

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Pte LtdNo.1 Yishun Avenue 7Singapore 768923Tel: +65 6215 8045Fax : +65 6754 0574Toll-Free: 1 800 2762622 vps-customerservice@agilent.com

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Agilent Technologies

Dimensions:millimeters[inches]

60°

40.00 [1.57]

VENT HOLE ON ENVELOPE

UPPER VIEWBOTTOM VIEW

30°0'

PURGE/VENTVALVES PORT

45°

FORELINE KF 40

WATER COOLING FOR RUBBER TUBE Ø 9.0

Ø 310.00 [Ø 12.20]Ø 11.00 [Ø 0.43] q.ty 12

PURGE/VENTVALVES PORT

EYEBOLT

CENTER-RING (ISO 250F)

Ø334.90 [Ø13.19]

FLANGE ISO 250F

16.0

0 [0

.63]

367.

30 [1

4.46

]

163.

13 [6

.42]

WATER COOLING FOR RUBBER TUBE Ø 9.0

258.

50 [1

0.18

]

VENT

GND HOLE

146.

00 [5

.75]

105.

00 [4

.13]

124.

00 [4

.88]

181.00 [7.13]

Ø329.00 [12.95]

CONTROLLERFRONT PANEL

Agilent Turbo-V 3K-G