technologies to make a microfluidic chip · of transistors on the chip surface is doubled, which...
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LAAS-CNRS
/ Laboratoire d’analyse et d’architecture des systèmes du CNRS
Laboratoire conventionné
avec l’Université Fédérale
de Toulouse Midi-Pyrénées
Technologies to make
a Microfluidic chip
Pierre Joseph
LAAS-CNRS, Toulouse
14/10/2019, Sète, Microfluidics19
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Microfluidique
Microfluidics : scale matters …
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Intro: Fabrication technologies
Microdiode vortex,
DRIE in silicon [LAAS]
Silicon Technology Microelectronics know-how
expensive
Requires special means
Commercial glass chips
[Micronit]
Glass technology transparency
low aspect ratio,
system integration challenging
History : from microelectronics
Photolithography,
Dry/wet etching
Evaporation/ sputtering
…
Introduction
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Moore’s law:
each 18 month, the number
of transistors on the chip
surface is doubled, which
corresponds to a gate size
reduction by a factor of 1.3.
An enormous progress during the
last 30 years due to a large
enhancement in lithography
resolution
Today: 50 billions of transistors on 1 cm2
When Microfluidics benefits from Microelectronics …
Microfluidics : scale matters …
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Building high resolution
structures (micro, nano …)
Building complex networks
Massive integration
Electrode integrations
…
When Microfluidics benefits from Microelectronics …
Microfluidics : scale matters … not only !
Expensive
Not flexible
Not transparent
Process compatibility ??
Biocompatibility ??
…
… but microfluidics requires specific developments !
Moritz Voelker, Small 2005
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Motivation
Choosing the right Material – Technology combination
Manufacturing processMaterial
Environmental context
Means / Resources
Existing facilities
Know How / Time
Collaborations …. Training
Physical properties
Chemical properties
Availability
Price
...
Volume production
Price
Resolution
Throughput
Reliability
Complexity
…
? ?
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JB Salmon
Intro: Impact of polymer microfabrication
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Motivation : from academic research …
World to chip connection
Channels (nm – mm range)
Material
Valves
Pumps
S. Quake Standford
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… to diagnosis Lab on chips
CEPHEID GeneXpert
Anthrax, MRSA, Flu, C. Difficile, Enteroviral meningitis, …
http://www.cepheid.com/tests-and-reagents/
Packaging, reliability, « FDA approval», Market…
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Replication methods: academy/industry
Gap academy/ industry…
Hot embossing, injection molding:
Powerful but big investment (machine cost)
Ducrée & Zengerle
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Maturity / commercialization
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285 companies (2019)
~60 : components, microfabrication
~60 : development, consulting
~60 : Research tools
~100 : diagnostics
Very active Research domain
>10000 players, Conf.µTAS ~2000 participants
Applications pull Industry
(start-ups & big companies)
http://fluidicmems.com/
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Experimental microfluidics: « a chip in a lab »
$ commercial
chips & setups
(Fluigent,
cascade microtech,
micronit…)
Chip
The only aspect developed here
But fabrication may
enable to integrate thatfluidics + control + measurements
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Intro: Basis of « PDMS technology »
Polymer technologies (ex: PDMS) simple, cheap, reliable,
no need for highly specific equipments
solvant compatibility, deformations
multi-layer alignment
[G. Whitesides, 1995]
~ 1-100 µm channels, choice on materials
History : from microelectronics … to alternative technologies
PDMS Soft-lithography
[LOF-CNRS]
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I. Intro: criteria to choose material / process
II. PDMS
III. What else?
IV. Openings
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II. PDMS for microfluidics
1. Mold (master)
a) Microfabrication & Photolithography
b) SU8 processing
c) Alternative ways to realize a master
2. Channel
a) PDMS, Casting & Curing
b) Bonding
3. Properties
a) Deformation
b) Permeation
c) Multi-level, modified
d) Chemistry & bio
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Microfabrication: main steps (1/2)
:Starting substrate
:Deposit layer of desired material
Deposit photoresist (resin)
Expose photographic emulsion through a mask:
Source: John C. Bean: "We're not in Kansas Anymore!" - A Hands-on Introduction to Nanoscience
Spincoating
Photolithography
Not done for SU-8 / PDMS
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Microfabrication: main steps (2/2)
Source: John C. Bean
:Develop photographic emulsion
Etch desired materal:
Remove photographic emulsion:
Note: also several thermal cycles (bakes)
Not done for SU-8 / PDMS
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Where to do microfabrication ?
18Source Gardeniers, MESA+, Twente
Avoid micron-sized contaminants…
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How ? - Fabrication in a clean room
LAAS
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Infrastructure and supportOptical photolithography
Metallization
Thin film deposition
M.B.E.
Wet Etching
Plasma Etching
Electrochemical deposition
Ion implantation
Electronic lithography
Packaging
Ex in LAAS (Toulouse)National platform, Equipment total value: 25 M€ 30 engineers and technicians
Chemistry
virtual visit: http://www.cnrs.fr/cnrs-images/multimedia/laas/360/hall.html
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…clean room
Source : Gardeniers
Where to do microfabrication ?
Note: for some applications/dimension,
Laminar flow hood can be enough
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Photolithography: basics
(1) Resin undergo chemical
transformation under UV (photo)
(could be X ray, ions, electrons…)
(2) Solubility to a specific solvent
change for exposed zone
(selective dissolution = revelation)
(3) (After photolitho)
on non protected zone of substrate :
etching, deposition, doping…
Principle: reproduce an image on a substrate covered by a layer of resin
V. Conedera –LAAS TEAM lectures
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Photolithography: basics
V. Conedera –LAAS TEAM lectures
Principle: reproduce an image on a substrate covered by a layer of resin
• Deposition on a substrate: homogeneous, adhesion
• Low mechanical stress
• Temperature stability
Important properties of a resin:
Optics: 3 modes:
Source R.B. Darling, Univ. Washington
• Chemical resistance
• Easy to be dissolved after use
• High sensitivity to UV, strong contrast
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Mold materials: SU-8
Data-sheet (advertising…):
50 µm
thick, chemically and thermally stable
improved adhesion and reduced coating stress
high, over 5:1 aspect ratio structures
very high optical transmission above 360 nm
suited for permanent applications
SU-8 3000 is a high contrast,
epoxy based photoresist
What ?
What for?
reusable molds
Freedom / geometry, design
Properties ?
Also a good structural material (see III.3)
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SU-8 composition: (1) resin
3 components : (1) EPON epoxy resin + (2) Organic solvent + (3) Photoinitiator.
(1) EPON epoxy resin: « glycidyl ether derivative of bisphenol-A novolac »
SU-8 because 8 epoxy
groups
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SU-8 composition: (2) solvent
Solvent quantity
• Viscosity thickness of the film
• Evaporation also influences thickness
• (spin coating time also…)
R. Bruce Darling
GBL
Important for spin-coating (step 1 in microfabrication)
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SU-8 composition: (2) solvent
Important for soft-bake (step 2)
(After spin-coating) solvent evaporation
Inside a oven On a hotplate
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GBL
Good evaporation…V. Conedera – LAAS TEAM lectures
Note: T ramp to reduce stress
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SU-8 composition: (3) Photoinitiator
3 components : EPON epoxy resin + Organic solvent + Photoinitiator.
(3)Photoinitiator: triarylium-sulfonium salts (CYRACURE® UVI from Union Carbide), ~10 wt %.
Daniel Sang-Won Park
mail.mems-exchange.org/pipermail/mems-talk/2004-June/013369.html
Photolithography
(step 3)
UV light
365 to 435 nm
(photolysis)
Photoinitiator
Ar+Sb-F6
STRONG
Acid
H+SbF6-
(Catalysis of)
Cationic polymerization
& Polymeric cross-
linking
post-exposure
Bake (step 4)
T
V. Conedera – LAAS TEAM lectures, JM Ducere
(mixed with hexafluoroantimoniate)
* Ar+ aromatic groups sensitivity to UV Finally: develop (step 5), rinse, dry
Organic solvent, PGMEA IPAPropylene glycol methyl ether acetate
* SbF6- low coordination anion VERY strong acid
* H+ opens epoxy groups polymerization & reticulation
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Note: How to realize mask ? direct writing
For ~5-25 µm resolution: high-resolution printers on a transparent film.
For ~ resolution: Chromium masks, realized by direct laser writing (on a resin).
Resolution: ~0.2 µm: nanopositionning system (mechanics) & diffraction (optics)
Ex at LAAS: laser DWL 200 Heidelberg Instruments, or KLOE Dilase
Sub-µm resolution direct writing
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Other (cheaper than SU8) ways to realize master ?
Kaigala, Lab. Chip 2007
50 µm X-channel , thermal treatment, on Mylar film
I. PDMS / 1. Mold
Lamination of
dry films
(see in part III)
Wax printer
2. Exposition and Bake1. Lamination 3. Development
4. Lamination 5. Exposition and bake 6. Development
Substrate
DF-10XX non cross-inkedDF-10XX cross-linked
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Master fabrication
Micro Machining
Aluminium Master
• Convenient for rapid prototyping
• Large range of materials
(metals, polymers …)
• 2,5 D accessible
• Lifetime (metal masters)
• Resolution down to 10 µm
• Speed ? Roughness ?
25µm
200µm
1cm
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Master fabrication
Laser ablation
• 2,5 D accessible
• Resolution ~ 1µm ?
• Speed ? Roughness ? Cost
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SU8 processing: summary
We have done:
Remaining steps:
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II. PDMS for microfluidics
1. Mold (master)
a) Microfabrication & Photolithography
b) SU8 processing
c) Alternative ways to realize a master
2. Channel
a) PDMS, Casting & Curing
b) Bonding
3. Properties
a) Deformation
b) Permeation
c) Multi-level, modified
d) Chemistry & bio
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PDMS reticulation
D. J. Campbell et al,
J. Chem. Educ. (1999)
http://www.mrsec.wisc.edu/Edetc/background/PDMS/index.html
* Multiple sites 3D crosslinking
* No waste products
* curing agent harder
(more cross-links)
* Heating accelerates reaction
Siloxane oligomer
(PDMS prepolymer) Cross-linker (=curing agent)Crosslinking reaction
vinyl groups + silicon hydride bonds
(+ proprietary Pt-based catalyst)
Sylgard 184, Dow Corning
Elastomer
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PDMS bonding
* PDMS surface is hydrophobic, low surface energy: -Si(CH3)3
* Activation with O2 plasma hydrophilic: Si-OH silanol groups (Silica-like layer)
(Silicone)-Si-OH + (Glass)-Si-OH (Silicone)-Si-O-Si-(Glass) + H2O
After plasma, bonding activated PMDS with Glass (or with PDMS):
Chemical bonds, no glue
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PDMS bonding
(Silicone)-Si-OH + (Glass)-Si-OH (Silicone)-Si-O-Si-(Glass) + H2O
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Notes on PDMS bonding
1. Si-OH only for ~30 min because uncrosslinked chains diffuse to the surface
To stability of hydrophilicity after bonding:
* thermal aging, extraction (before plasma)
* stock finished microsystem under water
2. Also with Silicon (native oxyde, surface Si-OH) but lower density, less
efficient
3. Other method to bond PDMS-PDMS: ≠ % of curing agent (ex 5% - 15%)
(again mechanism: diffusion of free chains)
Eddington (2006) Vickers (2006)
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Origin of soft microfluidics : soft-lithography
Micro Contact
Printing…
MIMIC:
Micro Molding
In Capillary
PDMS microchannels (see part I)
Potentialities of PDMS casting!
Whitesides group (Harvard)
Becker & Gärtner. Anal Bioanal Chem (2008)
Xia & Whitesides
Angew Chem Int Ed (1998)
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Soft lithography: examples
50μm
(courtesy C. Thibault)
Oligonucleotides 20-mer after hybridization
Micro-contact printing MIMIC: Patterning by capillary flows
Xia & Whitesides, Angew Chem Int Ed (1998)
Polyacrylate Polyurethane
Polymer beads in water
Without solvent
With solvent
Zirconium oxyde ceramics
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II. PDMS for microfluidics
1. Mold (master)
a) Microfabrication & Photolithography
b) SU8 processing
c) Alternative ways to realize a master
2. Channel
a) PDMS, Casting & Curing
b) Bonding
3. Properties
a) Deformationb) Permeation
c) Multi-level, modified
d) Chemistry & bio
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PDMS can be deformed
Elastic modulus ~1MPa
Goulpeau PhD, 2006
*Drawback:
Q(P) non linear
Channel Collapse for low
aspect ratio
* Applications : valves, pumps
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« Quake Valve » based on deformability
Unger, Quake, Science 2000
Principle:
2 molds
Deflection of a thin membrane
close channels
Note: fluidic channels need to be round
(better closing)
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Valve based on deformability
Fabrication protocol
Goulpeau, 2006
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Valve based on deformability
Studer, Quake, J. Appl. Phys. 2004
Push-downPush-up
*Fluidic channel need to be round
AZ 100, heated above Tg:
reflowing round shape
*Actuation channels: SU-8 (rectangular)
Design optimization
Agreement with 3D FEM Model
near-incompressible Neo–Hookean material
(rubber-like, large deformations)
E~0.6 Mpa
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Pumps : principle
Unger, Quake, Science 2000
Goulpeau, 2006
Design
Peristatic cycle
Advancing fluorescein front
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PDMS/PMMA valves
Zhang et al., Lab Chip 2009
PMMA actuation wafer
PMMA fluidic wafer
PDMS membrane
PMMA channels: harder (see III.2), no deformation… integrate PDMS
membrane to realize a valve
Kuo, LOC 2012 (Review) : hybrid of substrates that takes advantage of each material’s attributes.
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Valves and pumps : microfluidic formulator
Chou et al, Biomed Devices 2001,
Hansen et al, PNAS 2004
http://www.pnas.org/content/suppl/2004/09/17/0405847101.DC1/05847Movie1.mpg
Systematic investigation of protein phase behavior
Rotary mixer (V~5nL)
* Rapid mixing of reagents by active peristaltic pumping
* Combinatorial automated mixing on chip: thousands of exp. with a few µL
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Integrating valves
• “Quake’s valves” : company for life science
• Digital PCR
• Protein cristallization
• Single cell gene
expression
• DNA sequencing
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PDMS is deformable : Confining chambers for microbes
Growth-induced compressive stress under spatial confinement
Morgan Delarue, Nature Physics 2016
Use deformation to measure/impose pressure
In Sète: see Baptiste Alric or Lucie Albert
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PDMS is soft …
Soft Robots
(G.M. Whitesides)
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II. PDMS for microfluidics
1. Mold (master)
a) Microfabrication & Photolithography
b) SU8 processing
c) Alternative ways to realize a master
2. Channel
a) PDMS, Casting & Curing
b) Bonding
3. Properties
a) Deformation
b) Permeationc) Multi-level, modified
d) Chemistry & bio
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PDMS is permeable to air
Zhou et al., Anal. Chem. 2007
Goulpeau et al, Brevet 2005
filling procedure
Works for closed-end channels
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Pumping with permeation
Verneuil et al., EuroPhys. Lett. 2004
Randall et al. PNAS 2005
Passive concentration
Permeation-induced flows
PDMS is permeable to air, but also to liquids
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Pumping with permeation
Leng et al. Phys. Rev. Lett. 2006
Salmon ESONN 2008
Active control of the permeation
Powerful & versatile tool
to study phase diagrams
In Sete: See JB Salmon
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Multi-level channels
Ex of application:
Super-hydrophobic surfaces in microchannels
2 level master (2 deposition of SU-8)
Technical challenges :
- Conformity of second level (non-flat substrate)
- Combine hydrophobicity and bonding
1st SU-8 layer2nd SU-8 layer
Wafer
Solution 1: spray deposition Conformity issue with spincoating
Solution 2: 2nd spincoating before developing
1st layer
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Multi-level channels: groove mixer
Stroock et al., Science 2002
Mixing only by diffusion:
enhancement by folding interfaces
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Modified PDMS: harder ?
Hard-PDMS
Useful for:
* Nanofluidics (no collapse)
* Increasing soft lithography resolution
E~9MPa
Modified formulation: more cross-links
Schmid et al., Macromol. 2000
More cross-links
Modulus
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Chemical resistance of PDMS channels
* Evolution of surfaces (migration of unreticulated chains) : from hydrophilic to hydrophobic
Zeta potential ~-80mV at neutral pH (Si-OH = acid, pKa~4 SiO- group)Lee, Anal. Chem (2003)
Wong, Micro. Nanofluidics, 2009
* Bad Chemical resistance and stability: S>1 : swelling by most solvent
in table: S = swelling ratio
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Surface modification of PDMS is challenging
Lee, Anal. Chem (2003)
Wong, Micro. Nanofluidics, 2009
-Physical,
dynamic coatings (surfactant treatments)
physisorption of charged or amphiphilic polymers and copolymers
…
- Chemical covalent bonding (SAM self assembled monolayer & thick
polymer coating)
- Activation (plasma), Silica-like layer (Si-OH silanol)
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Biocompatibility of PDMS?
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Biocompatibility of PDMS?
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Biocompatibility of PDMS
62Regehr, Beebe LOC2010
* PDMS uncured oligomers detected in cells membrane (even after Soxlhet
extraction)
* Adsorption of small, hydrophobic molecules from media into the polymer bulk.
(ex: PDMS may stock/release oestrogen)
More ? See :
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PDMS biocompatibility / other polymers
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Study Adsorption & biocompatibility of PC, PMMA, PS, COC, PDMS
PC after 15-min UV-ozone, or COC after a 30-min oxidation, suitable for cells or tissue
Adsorption: Recovery of 7-ethoxycoumarin
(7-EC) and its metabolites % death in cell culture
(Surface coated with collagen)
PDMS adsorbs ~20% of 7-EC PMMA: >10% death: unstable peroxides
Midwoud, Verpoorte Anal Chem 2012
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Biocompatibility
64
Kuo, LOC 2012 Critical Review :
“regulatory approval for disposable microfluidic substrates will be more
forthcoming if the substrates are developed with the United States
Pharmacopeia’s biocompatibility compliance guidelines in mind.”
= choose an already qualified material “FDA approved”
Ex: Chin, Kia, Nature Medecine 2011: HIV / syphilis microfluidic POC
diagnostics in Rwanda., with PC chip (Elisa-like)
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Choosing the right polymer …
When PDMS isn't the best, Rajendrani Mukhopadhyay
Anal. Chem., 79 (9), 3248-3253, 2007
PDMS limitations :
• Permeability
• Mechanical properties (Young modulus)
• Hardly compatible with high throughput
fabrication techniques
• Surface treatment often needed
PDMS advantages :
• Easy bonding (oxygen plasma)
• Simple to handle
• Valve integration
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I. Intro, criteria to choose a material / a method
II. PDMS
III. What else?
1. Back to Material/process Choice2. Silicon
3. Other replication methods
4. Lamination based processes
IV. Openings
5. Other polymers
6 Paper
7 Porous medium
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Some Guidelines
Design for Microfluidic Device Manufacture Guidelines
Editors: Henne van Heeren (enablingMNT), Peter Hewkin (facilitator of the
Microfluidics Consortium)
With contributions from the following members of the MF5 Microfluidics
consortium: Dolomite, IMT, Micronit, and EV group and Sony DADC
This work was commissioned by the Microfluidics Consortium and is
supported by the MF manufacturing project.
http://www.cfbi.com/microfluidics.htm
Center for Business Innovation
Version 5,April 2014
(pdf available if you want)
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• Material Selection Decision Support Chart
Design for Microfluidic Device Manufacture Guidelines
Editors: Henne van Heeren (enablingMNT), Peter Hewkin (facilitator of the Microfluidics Consortium) 68
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• Material Selection Decision Support Chart
Design for Microfluidic Device Manufacture Guidelines
Editors: Henne van Heeren (enablingMNT), Peter Hewkin (facilitator of the Microfluidics Consortium) 69
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Which materials in the biomedical market?
© EMMA 2012 Copyrights © Yole Développement SA.
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Why Polymers ?
Rapid prototyping Large Scale production
Clean room facilities
Polymers PolymersSi / SiO2
The question of Price...
... and throughput
Molding processes Injection Molding
Price = Funct (material, facilities, process, throughput …)
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Choosing the right polymer: criteria …
Class of polymer (thermoplastics, thermosets, elastomers)
72
• PDMS : Poly(Dimethyl) SIloxane
• COC : Cycloolefincopolymer
• PC : Polycarbonate
• PE : polyester
• PEEK : PoIy Ether Ether Ketone
• PET : Polyéthylène téréphtalate
• PI : Polyimide
• PMMA : Polyméthylmétacrylate
• PP : Polypropylène
• PS : Polystyrène
• Fluorinated polymers (Dyneon, SIFEL..)
• SU8, Dry film resists
• UV curable polymers (NOA, …)
• …
Elastomers
Thermoplastics
Thermosets
physical properties
Optical,
Thermal
Electric
Chemical properties
Biocompatibility
Processing possibility
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Microchannel fab.
Microchannel sealing
Material’s choice
Electrode integration ?
Surface Treatment ?
World to chip connection ?
i)
ii)
From material to manufacturing process
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From material to manufacturing process
Direct patterning
Mask Transfer Channel fabrication
Mask
Integration / Sealing
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Design for Microfluidic Device Manufacture Guidelines
Editors: Henne van Heeren (enablingMNT), Peter Hewkin (facilitator of the Microfluidics Consortium)
Choosing the right manufacturing process
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Design for Microfluidic Device Manufacture Guidelines
Editors: Henne van Heeren (enablingMNT), Peter Hewkin (facilitator of the Microfluidics Consortium)
Choosing the right manufacturing process
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I. Intro, criteria to choose a material / a method
II. PDMS
III. What else?
1. Back to Material/process Choice
2. Silicon3. Other replication methods
4. Lamination based processes
IV. Openings
4. Other polymers
5. Paper
6. Porous medium
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Silicon and Glass processing
* Single crystal wafers
* Workhorse of microelectronics and MEMS
* Comprehensive knowledge based on
- Material properties (worlds best characterized material)
- Processing
*Micromachining technologies
- Surface micromachining (additive technology for ex. CMOS)
- Bulk micromachining (subtractive technology for ex. wet etching)
Silicon = Base material of MEMS
J. Ducrée: www.myfluidix.com
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Notions on Silicon and Glass processing
Silicon dry etching
Even more anisotropic: DRIE (Deep Reactive Ion Etching)
= succession of protection (CF4) and etching (SF6) steps
Anisotropy : high aspect ratio
Abgrall, JMM 2007
Removal of material by bombardment with ions (plasma)
Membranes inside channels, A Valencia, (2017)
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Notions on Silicon and Glass processing
Silicon wet etching
KOH etching solution.
Etch rate dependent on crystal orientation:
anisotropic, but crystal impose geometry
Ex: 3D micromirrors for biology (Hajjoul, Bancaud Lab Chip 2009)
<100> plane
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Notions on Silicon and Glass processing
Glass Wet etching
Isotropic
Low aspect ratio
Under-etching, influence of stirring
Abgrall, JMM 2007, and IMT Neuchatel
Under-etching
Chemicals: HF, Fluorhydric Acid
Note: also sand-blasting…
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Notions on Silicon and Glass processing
Glass Dry etching
Additional wet etching step
Elias, 2019
Most Glasses are not pure
Micromasking, roughness
Mix of :
5 % HF 5%
10 % HCl 37 %
85 % DI Water
Roughness at the microscale ~ 3 microns
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III. Notions on Silicon and Glass processing
Encapsulation (bonding)
Abgrall & Gué, JMM (2007)
More ? See “A practical guide for the fabrication of microfluidic devices using glass and silicon”
Iliescu, Biomicrofluidics2012
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I. Intro, criteria to choose a material / a method
II. PDMS
III. What else?
1. Back to Material/process Choice
2. Silicon
3. Other replication methods4. Lamination based processes
IV. Openings
4. « New » polymers
5. Paper
6. Porous medium
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3 classes of Polymers
Becker & Gärtner. Anal Bioanal Chem (2008),
Abgrall & Gué JMM (2007)
Polymer Behaviour controlled by
the type of bonds existing
between the chains
epoxy resists
(SU8)
Polyimide PI
Thermosetting polymers are cross-
linked,
* Not soluble in organic solvents
* Must be shaped before cross-linking
(=duroplastic polymers)
Thermoplastics: weakly bonded
chains
* Typically soluble in organic solvents.
* Soften upon heating (>Tg but needs to
be < TD)
* Harden when cooled down (<Tg).
PDMS
Elastomers : long chains,
some physical or chemical
cross-linking
Soft, swollen by most
solvents
COC
Important Temperatures:
*Tg glass transition, « softening»
* TD decomposition
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How to process polymers ?
Becker & Gärtner. Anal Bioanal Chem (2008)
A lot of processing techniques
What we have already seen
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Comparison of materials properties
Polymer : - Solvent compatibility, temperature & mechanical stability
+ Cheap, transparent, easy 2D & 3D processing,Becker & Gärtner. Anal Bioanal Chem (2008)
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Polymers: Other Replication methods
Lecture Notes: Zengerle & Ducrée: www.myfluidix.com/
Reviews: Becker & Gärtner. Anal Bioanal Chem (2008)
Becker & Gärtner Electrophoresis (2000)
Heckele et al, J. Micromech. Microeng (2004)
PDMS
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Replication methods: hot embossing
Zengele & Ducrée: www.myfluidix.com/
Becker & Gärtner. Anal Bioanal Chem (2008)
Principle
A French company
working on hot embossing
with a biocompatible
material
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Hot Embossing with nm features: nano-imprint lithography
90
Chou et al, Appl. Phys. Lett. 1995
Recent Review: L. Jay Guo,
J. Phys. D: Appl Phys 2004
press a mold into a thermoplastic polymer film on a
substrate vias and trenches
minimum size of 25 nm x 100 nm
60 nm wide trench
imprinted into PMMA.
The PMMA lines are
100 nm tall.
dot pattern imprinted into PMMA.
25 nm diameter and 120 nm period.
III. No PDMS / 2. Replication
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Roll Embossing= hot embossing+lamination
(1) (2)
(3)
Improving Hot Embossing throughput
template
substrate
Rollers: T, P • Master is reusable
• Industrial processes
& rapid prototyping
• Compatible with almost
any thermoplastic
• Fast process
• No limit in size
• High résolution ?
•Flexible masters !
(1) (2)
(3)
Lab on foils … need flexible masters(1) (2)
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Injection molding
Zengele & Ducrée: www.myfluidix.com/
Becker & Gärtner. Anal Bioanal Chem (2008)
Heckele, JMM (2004)
Principle Macro Scale
Base mold with mold insert and
automatic ejector
Source: Ferromatik Milacron
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small injection volumes : need for
« variotherm » process
increases complexity and cycle time
Other Replication methods: injection molding
Scaling down is difficult
…But feasable, ex: Microfluidic ChipShop
Channels with integrated fluidic interconnects
Company Gyros, realization of
« microlaboratory on CD» :
Channels on a CD format
www.gyros.com
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Polymer bonding (encapsulation, sealing)
Thermal bonding Adhesive bonding
Ex: PMMA, low P, 60°C above Tg
Ex: infiltration of UV sensitive resin
Temp, Pressure
MeltingTg
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Solvent bonding
Solvent Bonding:
entanglement of polymer chains
across the interface.
Exposure to vapour,
can also reduce roughness :
Ogilvie JMM2010
PMMA COC
Cyclohexane vaporAfter Chloroform vapor
Temp, Pressure
Solvent
Tg
Tg
Tg*< Tg
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Microfluidic device sealing
• Using polymers with lower Tg
Temp, Pressure
Tg
Polymer 1, Tg1
Polymer 2 Tg2< Tg1
S. Begolo et al., 2011 Lab on a Chip
Monolithic
No deformation
Polymer deposition
• Laser welding
• Ultrasound welding
• Infrared bonding
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Microfluidic device sealing … thermosets
• Microfluidic stickers
Norland optical Adhesive
• Adapted to rapid prototyping
• Easy bonding
• PDMS Master
Bartolo, Studer, Degré LOC 2008
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98
Note on polymer bonding: collapse
Huang et al, Langmuir (2005)
Collapse of
* thin (h), low aspect ratio (a/h>>1) structure
* with soft (E’) and adherent () material
Criterium for collapse:
For w>>a (single channel), criterium:
Usually: to be avoided…
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99
Note on polymer bonding: use of collapse!
Use to fabricate polymer nanochannelsPark, Huh, Craighead,Erickson (Cornell), PNAS 2009
Tunable nanochannels
Erickson et al. Nature Materials (2007)
Cross section function of external load
(triangular shape: cracks in PDMS)
Tunable filters
No nanofabrication needed ! Electrophoresis of elongated DNA
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100
I. Intro, criteria to choose a material / a method
II. PDMS
III. What else?
1. Back to Material/process Choice
2. Silicon
3. Other replication methods
4. Lamination based processes
IV. Openings
4. Other polymers
5. Paper
6. Porous medium
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SU-8 or cheaper substitute for photolithography
101
Lamination to make 3D devices ?
2. Exposition and Bake1. Lamination 3. Development
4. Lamination 5. Exposition and bake 6. Development
Substrate
DF-10XX non cross-inkedDF-10XX cross-linked
SU-8 3050 (1050) DF-1050 (50µm)
Time to process a layer 1h40 30 min
Cost for a layer on 4’’ wafer 16 € 1,6 €
Courson, Fouet, RSC Adv 2015
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5 levels of dry film. Floor 5 µm / 4 x 20 µm
Courson, Fouet, RSC Adv 2015
Lamination to make 3D devices ?
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Lamination-based Processes: COC fabrication
Paul et al., Electrophoresis (2007), Miserere LOC 2012, Metwally Khan-Malek, Microsystems Technology 2012
Good chemical resistance.
Available with ≠ Tg easy thermal processing.
Optically transparent down to 250 nm.
Surface treatments OK: for biology!
Material : COC (cycloolefin copolymer)
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Roll embossing COC
Paul et al., (Viovy, Curie Institute) Electrophoresis (2007), Miserere LOC 2012
Photopattern a
laminated dry film
template
Hot embossing COC by
lamination against this
template
Solvent bonding
(hexadecane in
isopropanol)
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105
I. Intro: criteria to choose material / process
II. PDMS
III. What else?
1. Back to Material/process Choice
2. Silicon
3. Other replication methods
4. Lamination based processes
IV. Openings5 A last overview of other polymers6 Paper
7 Porous medium
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Materials/processing for polymer microfabrication
106
A simplified view
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Practical Comparison for casting
107
Comparison PDMS, TPE, PUMA, NOA (casting)
Main advantage of « no PDMS »: stiffness ! ~100-1000 times harder
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New polymers: green microfluidics ?
108
Luecha LOC 2012
made of zein, a prolamin of corn.
a disposable environmentally friendly microchip
especially in agriculture applications
several other biodegradable materials:
silk fibroin9, gelatin,
poly(DL-lactic-co-glycolide) (PLGA),
poly(glycerolsebacate) (PGS)
calcium alginate
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Self-rolling of polymer bi-layers
109
1. A polymer bilayer
(P4VP layer in chloroform, PS layer
in toluene)
2. UV crosslinking
3. Openings: blade
4. Put in diluted HF solution in water.
Swelling of the P4VP
bending rolling
asymmetric profile 1D rollingReview: Luchnikov,
Macromol Rapid Comm 2011
+Many recent
developments by
F Malloggi (CEA)
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110
I. Intro: criteria to choose material / process
II. PDMS
III. What else?
1. Back to Material/process Choice
2. Silicon
3. Other replication methods
4. Lamination based processes
IV. Openings
5. A last overview of « New » polymers
6. Paper7. Porous medium
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111111
Martinez & Whitesides Anal. Chem 2008
Lewis, LOC2012
Paper microfluidics
Principle
*photolithography or wax printing to define
hydrophilic & hydrophobic zones in paper
(= channels)
*Bonding: layer of tape
low-cost (~0,03US$)
small sample volumes,
capillary wicking of fluids,
facile multiplexed assays
Advantages
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112112Martinez & Whitesides PNAS 2008
III.5. µ-PAD (Paper Analytical Devices)
Capillary Wicking Distribution to detection zones
5 layers of paper, 4 layers of tape,
filling in 5 min
Colorimetric detection
Top
Bottom
(detection)
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Paper: diagnostics for developing countries
Vella, Whitesides, Anal. Chem., 2012
Separation plasma/red blood cells: membranes
Measuring 2 enzymes
diagnostics of leaver trouble (secondary effects of HIV treatment)
Non profit organization ‘diagnostics for all’
113
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114
Channel in a Porous structural medium
Nitrocellulose membrane: stationary gradients
Diao et al., LOC 2006 (DeLisa, Cornell)
1, source 3, sink
2, Main channel
Calibration :
1: 0.1 mM fluorescein
2: Water
3: water
After 35mn,
Fluorescence intensity
across center channel
Porous membrane: 0.45µm pores, 140 µm thick.
CO2 Laser photoablation method.
Diffusion of buffers 1 and 3 (sink, source channels)
through the membrane towards the center channel
Interest: stationary gradient with no flow
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Gradients to study bacterial chemotaxis
115
Bacteries in
center channel:
Buffer Buffer
Labelled
E-Coli
Buffer
Buffer
+ L-aspartate
Labelled
E-Coli
Buffer
Inhibited, Labelled
E-Coli (sodium
azide-treated)Buffer
+ L-aspartate
Quantitative studies, but long response time ($ exp. tricks…)
Diao et al., LOC 2006 (DeLisa, Cornell)
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116
Porous medium: Hydrogels
Agarose gel channels: fabrication
Kalinin et al., Biophys J. 2009 (Wu, Cornell)
Pour 3% hot agarose gel (0.3g agarose, 10ml PBS) onto the silicon master
Peel it off once it is gelled.
Soak the gel membrane in a chemotaxis buffer for at least 30 min.
Cheng et al., LOC 2007 (Wu, Cornell)
* Good for bio. (proteins & nutrients diffuse in hydrogel)
* capable of applying chemical stimuli indep. of mechanical stimuli
* Straightforward to make
Advantages
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117
Hydrogels as active elements
Beebe et al, Nature 2000
Closed (expanded state) Open (contracted state)
pH responsive polymer
Liquid-phase photopolymerization
Reticulation through a mask
Integrated valve
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118
Soft Embossing of Hydrogels
Kobel et al, (Lutolf, EPFL) Langmuir 2009
* Use a PDMS stamp & finish hydrogel reticulation with the stamp on
* Microwells suited for biology (culturing live single hematopoietic stem cells)
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Hydrogel: great potential for tissue engineering
119
Ability to mimick a biological tissue:
Shape;
Stiffness,
Chemical environment
In Sète
See Laurent Malaquin,
lectures on bioprinting
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120
Openings
3D
Microfluidics FOR fabrication
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variable depth
“2.5 D” by gray scale lithography
Silicon
Resist
Silicon
Resist
Mask
Exposure
Development
Etching
Grayscale laser lithographyStandard photolithography
Massadi, Naillon - LAAS
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“2.5 D” by gray scale lithography
h
h
Massadi, Naillon - LAAS
Power
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“2.5 D” by gray scale lithography
Massadi, Naillon - LAAS
25 µm
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124
Ho, LOC 2015
L Malaquin
“3D printing has the potential to revolutionize the way we make almost everything”
3D printing
Exception,
Nanoscribe
Sub-µm but
Low speed,
small size, Price…
Resolution
>>10 µm- President Obama (State of the Union Address, Feb 2013)
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125
Source: L Malaquin
3D printing for microfluidics
Master fabrication for molding
Direct fabrication of devices
G. Comina, A. Suska and D. Filippini.
PDMS lab-on-a-chip fabrication using
3D printed templates. Lab Chip 2014,
14, 424-430.
A. I. Shallan, P. Smejkal, M. Corban,
R. M. Guijt and M. C. Breadmore.
Cost-effective three-dimensional
printing of visibly transparnet
microchips within minutes. Anal.
Chem. 2014,86, 3124-3130.
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126
Source: L Malaquin
3D printing for microfluidics
K. C. Bhargava, B. Thompson and N. Malmstadt. Discrete elements for 3D microfluidics. PNAS 2014
LEGO-like microfluidics
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127L Malaquin
3D Bioprinting: tissues and organs
Murphy, S. V., & Atala, A. (2014). 3D bioprinting of tissues
and organs. Nature biotechnology
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3D printing for microfluidics
Solving the world to chip interface problem
O. H. Paydar, C.N. Parede, Y. Hwang, J. Paz, N.B. Shah and R.N. Candler. Characterization of 3D-
printed microfluidic chip interconnects with integrated O-rings. Sensors and Actuators A : Physical 2014,
205, 199-203.
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Among challenges: world-to-chip interface
edito Lab Chip 2011,
GM Whitesides (chair, ed Board): « What comes next? », 7 topics
Nanofluidics
Digital microfluidics
Inside biology
New types of use
New fluids, fluidics, and materials
Cheap, interconnectable, stackable systems
Interfaces and standards
« science »« technologies »
« plumbing », instrumentation, integration
Standard needed?
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World-chip interface
Microelec Eng 2015
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131
IV. Openings
3D?
Microfluidics FOR fabrication
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132
Electrode integration: microsolidics
Siegel et al., Adv Mater. (2007)
Best Solder is Indium:
Low Melting 158°C, low hardness
Microsolidics: Fill microchannel with metallic solder, then dry
Note on classical technologies: Metal evaporation, Electrochemical growth, Conductive ITO layer
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133
Electrode integration: electronics
Siegel et al., Adv Mater. (2007)
Soft, reconfigurable electronics
Twisted & patterned wires
PDMS/Indium tasting
rolled cake
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Cofabrication (microfluidic assisted fabrication)
134
Ex: optofluidic waveguide
Siegel, Whitesides Accounts Chemical Research 2009
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Cofabrication (microfluidic assisted fabrication)
135
Ex: magnets
Siegel, Whitesides Accounts Chemical Research 2009
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136
Continuous flow lithography
microfluidics = fabrication tool !
*Flow photosensitive prepolymers
*Photopolymerization through an optical mask (flash exposition)
*Inhibition of reaction by oxygen, PDMS permeable to O2: continue flowing !
Continuous fabrication or microparticles
Ingredients:
Dendukuri et al (Doyle, MIT) Nature Materials 2006
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137
Continuous Flow lithography
Dendukuri et al (Doyle, MIT) Nature Materials 2006, Langmuir 2007
Many shapes and functions
Chosen shape
Janus particles
Amphiphilic Polymeric Microparticles
And micelle-like assembly
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138
Flow Lithography: encoded microparticles
Pregibon, Toner, Doyle, (MIT), Science 2007
(1) Fabrication: 1/2 identifyer (2D barcode), 1/2 functional material
(2) Analysis for a mixture of particles: high throughput (« Lab On Chip » !)
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139
Flow Lithography: ameliorations and alternatives
Stop-flow lithography
Dendukuri et al Lab Chip 2007
Faster, higher throughput
http://www.rsc.org/suppdata/LC/b7/b703457a/b703457a.mpg
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Microfluidic assisted fabrication from droplets
Synthesis of Janus (« bicolor ») particles
Nisisako et al. Adv. Mater. (2006)
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141
Microfluidic assisted fabrication from droplets
In-situ reticulation possibly out of equilibrium patterns
Pannacci et al. PRL (2008)
Tetradecane in
Tripropylèneglycol-diacrylate (TPGA) in
Water
Multiple emulsion
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142
Conclusion & Opening…
Not evoked
Nanofluidics
Other techniques (laser ablation, sand blasting, precision micromachining…)
World to chip interface (dark side of microfluidics)
Bottom-up approach (here top-down)
Many technologies
Choose Material & technology according to application & needs
(soft/hard, hydrophobic/philic, transparent, cost important, biocompatibility)
Keep it simple Trends:
- Integration, Hybrid systems
- Biocompatible, chemically resistant polymers
- 3D printing
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Grossmann, Quake, Plant Cell 2011
regulation of microenvironment
Integration: the root chip
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Platform: the slip chip
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Slip Chip, LOC2009 Du, Ismagilov
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Laboratoire d’analyse et d’architecture des systèmes du CNRSLaboratoire d’analyse et d’architecture des systèmes du CNRS
Thank you!
MILE team at LAAS: Micro/nanofluidics for Life Science and Environment
TEAM service at LAAS
L Malaquin
J Espeut
+ Orga Microfluidics’19