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The top documents tagged [moderate ion energies]
SPACE AND PHASE RESOLVED MODELING OF ION ENERGY ANGULAR DISTRIBUTIONS FROM THE BULK PLASMA TO THE WAFER IN DUAL FREQUENCY CAPACITIVELY COUPLED PLASMAS*
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AGENDA
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DEVELOPMENT OF ION ENERGY ANGULAR DISTRIBUTION THROUGH THE PRE-SHEATH AND SHEATH IN DUAL-FREQUENCY CAPACITIVELY COUPLED PLASMAS* Yiting Zhang a, Nathaniel
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AGENDA
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* Work supported by National Science Foundation and Semiconductor Research Corp
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* Work supported by SRC 2071.025, National Science Foundation and Lam Research
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COMPUTATIONAL INVESTIGATION OF DUAL-FREQUENCY POWER TRANSFER IN CAPACITIVELY COUPLED PLASMAS* Yiting Zhang and Mark J. Kushner
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AGENDA
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