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The top documents tagged [mems applications]
Pressure sensor 2.008-spring-2003. Surface Micromachining 2.008-spring-2003 Deposit sacrificial layer Pattern anchors Deposit/pattern structural layerEtch
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Examen cours Cristaux Photoniques Mechanical tuning of Photonic Crystals July 23, 2009 Fabio Jutzi PhD student EDMI Ecole Polytechnique Fédérale de Lausanne
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MEMS Applications in Seismology Nov 11, 2009 Seismic Instrumentation Technology Symposium B. John Merchant Technical Staff Sandia National Laboratories
270 views
B.Sc. Thesis 1 - MEMS Vibratory Gyroscope and Readout Circuit
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Mems seismology
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Thermal Oxidation
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Emerging MEMS Patent Investigation SAMPLE
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Emerging MEMSPatent Investigation 2014 Report by Yole Developpement
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Status of the MEMS Industry 2015 Report by Yole Developpement
4.252 views
MEMS and its Applications Optical Routing, an example Shashi Mysore Computer Science UCSB
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Chapter 14: Fundamentals of Microelectromechanical Systems Jon Mah Eric Wilson
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Making_Micro_Machines_DVD_LM_PG.pdf
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