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The top documents tagged [high aspect ratio su]
John D. Williams, Wanjun Wang Dept. of Mechanical Engineering Louisiana State University 2508 CEBA Baton Rouge, LA 70808 Producing Ultra High Aspect Ratio
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X-ray lithography (XRL) 1.Overview and resolution limit. 2.X-ray source ( electron impact and synchrotron radiation). 3.X-ray absorption and scattering
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