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The top documents tagged [euv blanks]
Layout Small-Angle Rotation and Shift for EUV Defect Mitigation Hongbo Zhang 1, Yuelin Du 2, Martin D.F. Wong 2, Yunfei Deng 3, Pawitter Mangat 3 1 Synopsys
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Layout Small-Angle Rotation and Shift for EUV Defect Mitigation
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