sunam developed new process named rce-dr -...
TRANSCRIPT
SuNAM developed new process named RCE-DR:
The practical highest throughput process
Superconductor, Nano & Advanced Materials
Seung Hyun Moon SuNAM Co., Ltd.
2013. 9. 16.
EUCAS 2013 September 15 – 19, 2013, Genova, Italy
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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Introduction Requirements from market : performance & price.
Strategy to achieve the requirements : throughput & yield
RCE-DR : The highest throughput unique SuNAM’s process RCE-DR : Amorphous deposition & fast conversion at once.
Understandings of RCE-DR process
SuNAM’s results
Summary
Contents Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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vs.
Paradigm change in Electrical Power Industry
Cu wire Optical fiber
In communication(or IT) industry,
In electocal power industry, Cu wire vs. HTS 2G wire
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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Applications of Superconductivity
HTS 2G Wire
NMR
MRI Crystal growth Magnetic seperator
Motor
MagLev
FCL Motor & Generator Transformer
Cable
Fusion
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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For real industrialization, …
For practical application of HTS(high Tc superconductor) ceramic material,
high performance and low cost conductor is essential .
It’s a big challenge to make a km long tape using coating technology, but
almost all obstacles have been solved through years.
And now the price & the availability of 2G wire is the real issue for
industrialization. Not only material cost, but throughput and yield is the very
important factors for practical wire production.
“ Throughput” & “Yield”
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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Performance
Price Capacity (Availability) Necessary technical breakthrough
Simplified process New processWide web compatible process Large volume ( > 10,000 km/yr-line)
Critical Current (denisty) Magnetic properties (Pinning) Mechanical properties Joint …
Yield
Complex problem of Performance, Price and Capacity Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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Total Cost = Equipments + Labor + Materials
Cost /length = Total cost / Total production length
Total production length = Throughput X Time X Yield
Low materials cost
High Throughput
Engineering / Q.C for high Yield
Which process should we develop? Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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Cost Analysis : what’s the limiting factor? Assume 500 A/cm-width CC & 4 mm width equivalent wire. Assume throughput/single line & 100 % yield.
Considering yield, the minimum cost increases much higher value. In large volume case, material cost & yield is much more important.
Through - put
(m/hr)
Run time/week
(hrs)
Annual Production
(km)
Equipment depreciation/
yr (M$)
Labor cost (M$)
(Depreciation + labor)/length
($/m) ($/kA-m)
50 60 150 1.5 1.5 20 100
100 100 500 2 2 8 40
500 60 1,500 2 2 2.7 13.3
3,000 100 15,000 4 4 0.53 2.7
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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Price factors for HTS 2G Wire
Wide web process.
RCE DR : ~ 100 nm/sec or faster (SuNAM)
PLD, MOCVD ~ 10 nm/sec, MOD ~ 1 nm/sec
Throughput means volume production rate.
P = A (processing area) x R (thickness growth rate)
RCE-DR process : easy to scale-up to wide strip.
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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If we were to make 100 chips in a wafer, and there are 3 defects, yield can be as low as 97% (loss as high as 3 %) (at most, 88 %)
If there are 3 defects in a 1 km wire and minimum piece-length is 100 m, yield can be as low as 70% (loss as high as 30 %) Thing get worse if customer wants longer piece-length wire Even though we reduce the defect density, customer’s demand for ever-longer wire could over-‘compensate’ our efforts This yield ‘trap’ would persist until we reach 1 km defect-free wire(for many applications) or 2 km wire(for the most of the applications) Or, we need a new definition of yield for CC
80%
70%
Yield is too low?
Keep up QC(quality control) & develop new QC tools.
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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RCE- DR (Reactive Co-Evaporation by Deposition & Reaction)
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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Semi in-line pilot line for 2G wire
Site area : 5,500 m2, Building area : 1,750 m2, Gross floor area : 3,050 m2. Class < 10,000 clean room area : 1,000 m2 .
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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SuNAM’s 2G Wire Architecture – 12 mm width
Hastelloy C276 (Ni-alloy tape) or Stainless Steel-tape
Seed layer (Y2O3) ~ 7 nm
IBAD-MgO layer ~ 10 nm
Homoepi-MgO layer ~ 20 nm
Diffusion barrier (Al2O3) ~ 40 nm
Hastelloy or SUS
Al2O3
Y2O3
IBAD-MgO
Epi-MgO
LaMnO3
ReBCO
Ag
Buffer layer ~20 nm
Superconducting layer (1.2 ~ 1.8 µm)
Protecting layer (0.6 µm)
IBAD (sputter & E-beam)
sputter
RCE-DR
DC sputter
Electro -polishing
Typical Ic ~ > 600 A/12 mm at 77 K self-field (Jc ~ > 4 MA/cm2)
( + Cu electroplating (+ lamination)) * Linear speed of each process : 120 m/hr or more.
or SDP (Solution
Deposition Planarization)
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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RCE process
Reactive Co-Evaporation (RCE) : Using inherently least expensive sources High deposition rate can be used & adjustable composition Especially easy to scalable to large deposition area Very promising methods for HTS wafer production : Theva, STI
(Y, Gd, Sm) Ba Cu
RCE-CDR process
RCE
SuNAM develops RCE-DR process.
~ 6 mil. sq. m /year Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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Conventional RCE-CDR process RCE-CDR : Reactive Co-Evaporation
by Cyclic Deposition & Reaction (EDDC(KAIST/ KERI, batch) & STI, R2R(planned))
CDR : Co-evaporation at low O2 pressure followed by reaction in high PO2 in cyclic manner.
Pulsed deposition : low average growth rate.
High speed(> 100 rpm), high temperature(> 800 oC) mechanically rotated drum is required : complexity, cost, difficult to scale up
KAIST/ KERI
LANL/ STI
Massive(> 100’s of kg on scale-up)
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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New SuNAM RCE-DR process RCE-DR : Reactive Co-Evaporation
by Deposition & Reaction (SuNAM, R2R) : Patent pending(PCT)
High rate co-evaporation at low temperature & pressure to the target thickness(> 1 µm) at once in deposition zone (6 ~ 10nm/s)
Fast (<< 30 sec. ) conversion from amorphous glassy phase to superconducting phase at high temperature and oxygen pressure in reaction zone
Simple, higher deposition rate & area, low system cost
Easy to scale up :single path SuNAM DR path
(single time)
Conventional CDR path (repeat more than >>1,000
times)
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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SuNAM DR path
(single time)
Conventional CDR path
(repeat more than >>1,000 times)
MOCVD PLD
Sputtering
MOD (BaF2 is very Important for High Jc)
MBE
Comparison of various deposition methods Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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Understanding of phase diagram at low PO2
Liquid phase is very important
RCE – DR Process : Phase Diagram Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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RCE – DR Results : XRD θ-2θ
The same batch, PO2 increases.
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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The same batch, PO2 increases.
RCE – DR Results : XRD φ-scan (103) Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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R-T & XRD for optimized tape by RCE – DR Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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Electronic Materials & Devices Laboratory Seoul National University Department of Materials Science & Engineering
Stability phase diagram of GdBCO
log PO2(Torr) = 10.85 – 13,880/T(K)
[20≤PO2≤100mTorr]
log PO2(Torr) = 9.263 – 12,150/T(K)
[1≤PO2≤10mTorr]
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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Electronic Materials & Devices Laboratory Seoul National University Department of Materials Science & Engineering
GdBCO – Gd211 compatible region
GdBCO – Gd2O3 compatible region
Our understanding of Gd123 Phase diagram Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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Electronic Materials & Devices Laboratory Seoul National University Department of Material Science & Engineering
500 nm
Gd
Ba
Cu O
Cu
Cu
Cu Cu Gd
Ba Cu
O O
Cu Cu
Gd
Ba O
O
L
Gd2O3
GdBCO
Gd2O3
Cu-O
• Very low PO2 zone (~ 10-5 Torr): Amorphous Film
• Lower PO2 zone (~30 mTorr): Gd2O3 + Liquid (< 5 sec)
• Higher PO2 zone (~100 mTorr): GdBCO Film (< 20 sec)
GdBCO growth mechanism: a seeded melt-textured growth!!!
Growth mechanism of the GdBCO film by RCE-DR Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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SuNAM’s Results
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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0 200 400 600 800 10000
100
200
300
400
500
Ic
( A /
10 m
m )
Length ( m )
RCE – DR Results on Stainless steel substrate (2011. 10)
Ic x L :
(1) 275A x 1,005m = 277,380 (2) 355A x 920m = 326,600
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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0 100 200 300 400 500 600 700 800 900 10000
100
200
300
400
500
600
700
800
900
This shows the average vlaues for each 2 meters.
Ic ( A
/ cm
)
Length ( m )
RCE – DR Results on Hastelloy substrate (2012. 01)
Ic x L :
422A x 1,000m =421,700
Tot.Length Avg.Ic Max.Ic Min Ic 1 sigma (m) (A) (A) (A) (%)
1000.2 692.5 796.2 421.7 10.7
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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Development of HTS 2G Wire
(by Dr. Izumi @ ISTEC-SRL)
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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QCM Feedback program
RHEED spot Feedback program
Control computer
An appropriate feedback algorithm can keep the shape of the RHEED spot in the
specific range, while QCM monitoring to adjust the e-gun power.
Quality Control : RHEED Vision System Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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0 100 200 300 400 500 6000
200
400
600
800-0.2
0.0
0.2
0.4
0.6
0.8
1.0
I C ( A
/ 12
mm
)
Position ( m )
Norm
alize
d In
tens
ityof
spot
(022
)
1 51 101 1510.0
0.5
1.0
Inte
nsity
(brig
htne
ss)
Position(pixel)1 51 101 151
0.0
0.5
1.0
Inte
nsity
(brig
htne
ss)
Position(pixel)1 51 101 151
0.0
0.5
1.0
Inte
nsity
(brig
htne
ss)
Position(pixel)
QC : RHEED vs. Ic Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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[Start] [End]
50
60
7080
90100
110120
130140
150160
170180
140
150
160
170
180
190
Green
Blue
Red
Quality Control : RCE Vision System
Start color
End color
RCE Vision System will be introduced for increasing the uniformity of composition in RCE-DR process. The control computer takes (RGB) values in three-dimensional vector space which is transformed from the color of the tape surface.
Control the power
Color detection
Is the (RGB) vector in the range?
Yes
No
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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QCM Feedback program Control computer
E-gun(30 kW)
CCD camera
Vision feedback program
An appropriate feedback algorithm can keep the color of the tape surface
in the specific range, while QCM monitoring to adjust the e-gun power.
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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Quality Control : Visual inspection
c a
b
c
a b
d
e f g
a. 2G CC tape b. Tape support c. Inspection camera
※ Defect information is taken from the binary image. ※ Matlab program converts images into data real-time. 12 mm width can be sliced as 55 lines with the resolution 0.22 mm size.
(1) Original image (2) Intensity image (3) Binary image (1) + (3)
Matrix data image
12 m
m
24.4 m
d. LED light e, f. Guide roller g. Dark room box
• Installation of the inspection equipment for zero surface defect on the silver sputtering process.
• Digitalize the silver sputtered surface of 2G CC tape.
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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0 5 10 15 20 250
100200300400500600700800
Ic ( A
/ 12
mm
)
Position ( m )
Optimization properties of GdBCO CC on STS substrate
Section Avg. IC SD min. IC max. IC Uniformity(%) (m~m) (A) SD min-max
60 cm section Continuous IC (A/12mm) 0~23.3 776 10 750 804 98.7% 96.4%
Thickness : ~ 1.32 um
Average Ic = 647 A/cm Jc ~ 4.9 MA/cm2
1sigma ~ 10 A (1.3 %)
( ) 100.
..,.
..% ×
−−=−
C
CC
C
CC
IAvgIMinIAvg
IAvgIAvgIMaxMaxUniformatyMaxMin
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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0 10 20 30 400
200
400
600
800
1000
Ic (A
/12m
m)
Length (m)-100 0 100 200 300 400 500 600 700 800 9001000
0.0
5.0x10-6
1.0x10-5
1.5x10-5
2.0x10-5
2.5x10-5
3.0x10-5
Volta
ge (V
)
Current (A)
Average Ic = 742 A/cm Jc ~ 5.3 MA/cm2
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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0 100 200 300 400 500 600 700 800 900 10000
100
200
300
400
500
600
700
800
900
This shows the average vlaues for each 2 meters.
Ic ( A
/ cm
)
Length ( m )
RCE – DR Results on Hastelloy substrate
Ic x L : 422A x 1,000m =421,700
Tot.Length Avg.Ic Max.Ic Min Ic 1 sigma (m) (A) (A) (A) (%)
1000.2 692.5 796.2 421.7 10.7
0 100 200 300 400 500 6000
100
200
300
400
500
600
700
800
900
This shows the average vlaues for each 1 m
Ic (
A / c
m )
Length ( m ) Mean Standard Deviation Minimum Maximum
IC ( A ) 510 19.3 452 570
Min-Max Uniformity(%) COV ( % ) COV|min-max| ( % )
88.2 4.5 23.2
( )%100) variationofcient COV(coeffi ×=χσ
( )%100COV min,max,max-min ×
−=
χCC II
CIχσ Mean: , DeviationStandard :
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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0 100 200 300 400 5000
100
200
300
400
500
600
700
800
900
This shows the average vlaues for each 1 meters.
Ic (
A / 1
2 m
m )
Length ( m )
Mean Standard Deviation Minimum Maximum
IC ( A ) 594 22.7 519 640
Min-Max Uniformity(%) COV ( % ) COV|min-max| ( % )
87.5 4.6 20.4
( )%100) variationofcient COV(coeffi ×=χσ( )%100COV min,max,
max-min ×−
=χ
CC II
CIχσ Mean: , DeviationStandard :
0 100 200 300 400 500 6000
100
200
300
400
500
600
700
800
900
This shows the average vlaues for each 1 met
Ic (
A / 1
2 m
m )
Length ( m )
Mean Standard Deviation Minimum Maximum
IC ( A ) 619 18.8 506 667
Min-Max Uniformity(%) COV ( % ) COV|min-max| ( % )
81.8 3.6 26.0
RCE – DR Results on Hastelloy substrate Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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0 100 200 300 400 5000
100
200
300
400
500
600
700
800
900
This shows the average vlaues for each 1 meters.
Ic (
A / 1
2 m
m)
Length ( m )
Mean Standard Deviation Minimum Maximum
IC ( A ) 678 40.3 542 761
Min-Max Uniformity(%) COV ( % ) COV|min-max| ( % )
79.9 5.9 32.2
( )%100) variationofcient COV(coeffi ×=χσ( )%100COV min,max,
max-min ×−
=χ
CC II
CIχσ Mean: , DeviationStandard :
0 100 200 300 400 500 6000
100
200
300
400
500
600
700
800
900
This shows the average vlaues for each 1 m
Ic (
A / 1
2 m
m)
Length ( m )
Mean Standard Deviation Minimum Maximum
IC ( A ) 762 28.5 686 810
Min-Max Uniformity(%) COV ( % ) COV|min-max| ( % )
90.0 3.7 16.4
RCE – DR Results on Stainless steel substrate Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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0 100 200 300 400 5000
100
200
300
400
500
600
700
800
900
This shows the average vlaues for each 1 meters.
Ic (
A / 1
2 m
m )
Length ( m )
Mean Standard Deviation Minimum Maximum
IC ( A ) 804 40.0 643 869
Min-Max Uniformity(%) COV ( % ) COV|min-max| ( % )
80.0 5.0 28.1
( )%100) variationofcient COV(coeffi ×=χσ( )%100COV min,max,
max-min ×−
=χ
CC II
CIχσ Mean: , DeviationStandard :
0 100 200 300 400 5000
100
200
300
400
500
600
700
800
900
This shows the average vlaues for each 1 meters.
Ic (
A / 1
2 m
m )
Length ( m )
Mean Standard Deviation Minimum Maximum
IC ( A ) 726 24.6 614 770
Min-Max Uniformity(%) COV ( % ) COV|min-max| ( % )
84.6 3.4 21.5
RCE – DR Results on Stainless steel substrate Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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0 100 200 300 400 5000
100
200
300
400
500
600
700
800
900
This shows the average vlaues for each 1 meters.
Ic (
A / 1
2 m
m )
Length ( m )
Mean Standard Deviation Minimum Maximum
IC ( A ) 745 38.9 545 793
Min-Max Uniformity(%) COV ( % ) COV|min-max| ( % )
73.2 5.2 33.3
( )%100) variationofcient COV(coeffi ×=χσ( )%100COV min,max,
max-min ×−
=χ
CC II
CIχσ Mean: , DeviationStandard :
0 100 200 300 400 500 6000
100
200
300
400
500
600
700
800
900
This shows the average vlaues for each 1 mete
Ic (
A / 1
2 m
m )
Length ( m )
Mean Standard Deviation Minimum Maximum
IC ( A ) 794 17.0 744 832
Min-Max Uniformity(%) COV ( % ) COV|min-max| ( % )
93.7 2.1 11.1
RCE – DR Results on Stainless steel substrate Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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0 100 200 300 400 500 6000
50
100
150
200
250
300
Ic ( A
/ 4 m
m )
Length ( m )
joint1 joint2
TOT Mean Standard Deviation Minimum Maximum
IC(A) 253 5.6 236 264 Unif|min-max| COV COV|min-max|
93.2 2.2 11.2
0 50 100 150 200 2500.0
1.0x10-5
2.0x10-5
3.0x10-5
4.0x10-5
5.0x10-5
6.0x10-5
7.0x10-5
Joint Resistance(Rj) = 24 nΩ
Volta
ge (V
)
Current (A)
0 50 100 150 200 250 3000.0
1.0x10-5
2.0x10-5
3.0x10-5
4.0x10-5
5.0x10-5
6.0x10-5
7.0x10-5
Joint Resistance (Rj) = 38 nΩ
Volta
ge (V
)
Current (A)
Typical overlap joint length is 100 mm ~ 150 mm.
Ic / 4mm and joint resistance for brass laminated CC Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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Flux pinning improvement by controlling Gd2O3 particles
0.2 µm
- 840°C sample :
Particles are aligned with arrow direction.
0.2 µm
- 880°C sample :
Particle size is bigger & randomly located.
41 Seoul National University Department of Material Science & Engineering
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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42 Seoul National University Department of Material Science & Engineering
Angular dependence of Jc at 77K & 65 K(840, 860, and 880°C)
0 30 60 90 120 150 180 210 2400.20.40.60.81.01.21.41.61.82.0 840oC
860oC 880oC
H//ab77K, 1T
Angle (deg.)
J c (MA/
cm2 )
0 30 60 90 120 150 180 210 2400.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
840oC 860oC 880oC
H//ab77K, 3T
Angle (deg.)
J c (MA/
cm2 )
0 30 60 90 120 150 180 210 240
0.5
1.0
1.5
2.0
2.5
3.0
3.5H//ab 840oC
860oC 880oC
65K, 1T
Angle (deg.)
J c (MA/
cm2 )
0 30 60 90 120 150 180 210 2400.0
0.5
1.0
1.5
2.0
2.5 840oC 860oC 880oC
H//ab65K, 3T
Angle (deg.)
J c (MA/
cm2 )
30 A/cm
100 A/cm
100 A/cm
200 A/cm
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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0 30 60 90 120 150 1800.0
0.1
0.2
0.3
0.4
0.5
0.6
0.7
0.8
0.9
1.0
No
rmali
zed
Ic ( A
/ M
ax.Ic
)
Angle ( degree )
RCE-DR : in B-field Properties add APC (Short sample)
77 K, 6300 gauss
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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Simplified buffer layer – Solution Deposition Planarization (SDP)
10 20 30 40 50 600
10000
20000
30000
40000
50000
Inte
nsity
(cps
)
2θ (deg.)
Ni(1
11)
Cu2O
Gd2O
3
(003
)
(006
)
(001
)
(002
)
(004
)
(005
)
MgO
(002
)
Ni(0
02)
(007
)
14 16 18 20 22 240
5600
11200
16800
22400
28000 GdBCO(005) FWHM=1.60o
Inten
sity (
a. u.
)
ω (degree)-50 0 50 100 150 200 250 300 350
0
1100
2200
3300
4400
5500GdBCO(103)FWHM=3.23o
Inten
sity (
a. u.
)
φ (degree)
RMS roughness: 0.54nm(2) 0.72nm(3)
RMS roughness: 70 nm(1)
SDP
Structural properties of GdBCO on SDP substrate
Furn
ace
Chemical solution
bath
Dip coating Process
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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GdBCO
50nm 50nm
STS
Y2O3-ZrO2
SDP layer : ~ 0.4 um-thick
50nm
Substrate SDP layer
LMO/MgO/IBAD
GdBCO
GdBCO
CuO
Ic=523 A / 12mm Jc ~ 3.4 MA/cm2
0 100 200 300 400 500 6000.0
5.0x10-6
1.0x10-5
1.5x10-5
2.0x10-5
2.5x10-5
3.0x10-5
Volta
ge (V
)
Current (A)
523 A
Simplified buffer layer – Solution Deposition Planarization (SDP) Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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4T, 203 mm diameter RT bore cryogen free magnet
Superconducting magnet parameter
Conductor Width; Thickness [mm] 4.1(12.1); 0.21(0.1)
Ic @ 20 K, B⊥=1.5 T [A] > 180A
Coil
# of DP coils,
(4mmW; 12mmW) 28; 2
turn per pancake 133
Winding i.d.; o.d.; [mm] 245(274); 300.9
Overall height [mm] 452
Conductor per DP
(4mmW; 12mmW) [m] 232; 255
Total Conductor
(4mmW; 12mW) [m] 6,496; 510
Operation
Bc [T] 4.0
Iop [A] 205
Top [K] 8
Cryostat Clear bore [mm] 203
Cold bore [mm] 245
72hr to 8K
(1P- LS3-06, Mon. Afternoon)
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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Development of Ic (B, T, θ) measurement system
Parameters Specification
Maximum current 1000A
Temperature 12K ~ 70K
Angle 0~135º
Sample length, width 30 ~ 90mm, <15mm
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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Direction of Technology Development in the Future Price Reduction
100
25 10
(Unit: USD / kAm)
12 mm 120 mm 360 mm Width :
Capacity : 1,000 km/y 15,000 km/y 75,000 km/y
CAPEX* :
* Capital Expense : Required Investment in Production Line
$ 7 Mil. $ 20 Mil. $ 30 Mil.
Max Revenue : $ 20 Mil. $ 75 Mil. $ 150 Mil.
Achievable with Existing Line of
SuNAM
“Increasing Demand for HTS 2G wire has surpassed the
supply”
“For market entrance $ 50 / kAm is the threshold ”
“Price Reduction will ignite an exponential growth of demand for HTS 2G wire”
“High throughput, low material cost, High yield is 3
Critical Success Factor”
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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Stainless Steel
(100 µm)
Al2O3 (40 nm)
Y2O3 (7 nm)
IBAD-MgO (10 nm)
Epi-MgO (20 nm)
LaMnO3 (20 nm)
GdBCO (1.35 mm)
Ag
Low cost(~1/5 of Hastelloy), high performance non-magnetic STS substrate
Textured buffer based on IBAD-MgO Fast & reproducible process Because of small thickness(~ 100 nm total), process
cost is relatively low Possible to use various kind of substrates
Superconducting layer : RCE-DR Low material cost, high throughput process Easy to scale up Typical Ic : ~ > 150A/4 mm width (t = 1.3 ), & max. Ic
~ 318 A/4 mm width (t = 1.8 )
High Ic tape (for ac & dc cables) & good in B-field property tape with APC(for rot. machines & magnets) are available.
Summary Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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Acknowledgement
SuNAM : W. S. Jeong, J. H. Lee, H. K. Kim, G. H. Choi ,C. Y. Jang, J. S. Yang,
G. H. Shin, H. W. Cho, B. I. Park, Y.S. Yoo, J. H. Lee2, G. H. Lee, D. G. Park, D.
W. Song, S. J. Ahn, W. G. Cho, J. W. Choi, S. W. Yoon, S. J. Ahn, G. T. Jang, W.
Kwon, H. J. Lee.
Seoul Nat’l Univ. : J. W. Lee, S. M. Choi, S. I. Yoo.
KERI :H. S. Ha, S. S. Oh.
Korea Polytech. Univ. : G. W. Hong.
Stanford University : R. H. Hammond.
iBeam Materials : V. Matias.
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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Thanks for Attention !
www.i-sunam.com
Paper based on this presentation was published by Superconductor Science & Technology (SuST, IOP) 27, No. 4, 044018 (2014)IEEE/CSC & ESAS SUPERCONDUCTIVITY NEWS FORUM (global edition), October 2013
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