Ulrich Heintz - HF plan 1

SOME COMMENTSUlrich Heintz

Brown University

7/23/2015

Ulrich Heintz - HF plan

UV glue

7/23/2015 2

Applied a dab of UV glue to fix slide during cure

Ulrich Heintz - HF plan 3

Sensor size

7/23/2015

129.4

49.16

49.16

98.74

5.83

We have enough space to make the sensor a little longer to accommodate alignment marks and to apply UV glue to fix the sensor during curing

Heintz, Narain, Patterson, Spencer - PS Assembly 4

Sensor size• Make top sensor wider by 1.1 mm to simplify electronics

hybrid

2/25/2015

Ulrich Heintz - HF plan

Feedback about Novati wafers• The oxide layer that forms the dielectric for the AC coupling

capacitors should be less than 200 nm thick. It is 500 nm right now. The ability to reliably make AC coupled strips with a thin oxide without pin holes has to be demonstrated for vendor qualification. This may be difficult to achieve with SiO2 and require Si3N4 (Frank) • Can we modify the process to include a thinner dielectric?• Can we include some long AC strips to check for pin holes (eg a PS s-

sensor)?

• We need to understand the low breakdown voltage of the strips. The AC strips showed break down at 30 V or so. All strips had a lower breakdown voltage than the diodes, ranging between 100 and 250 V, depending on structure and on wafer.

• Add a p-stop to surround the entire active area in addition to the p-stops around the individual strips (Martin Printz) 7/23/2015 5

Ulrich Heintz - HF plan 6

Some suggestions• Add a small strip sensor with identical design as used for other CMS

silicon productions to compare performance.• Add one or more MaPSA light sensors. • Add the new Vienna test structure designs

7/23/2015

T. Bergauer (HEPHY Vienna) 7

Details on new test structure set

20 May 2015

Diode

MOS

Gate Controlled Diode (GCD)

Sheetmeander

Sheetmeander

Ulrich Heintz - HF plan 8

Some suggestions• We should discuss the CERN market survey with Novati

• Do they intend to apply?• Which of the specifications can we already meet with the SBIR phase 1

run?

7/23/2015