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ION BEAM SLOPE CUTTING

APPLICATIONS

The Gatan Precision Etching Coating System (PECS) is a versatile

tool offering features for various TEM and SEM applications

depending on the operating conditions and parameters. Some

of these features are ion beam cleaning, smoothing, thinning,

selective etching, sputter coating and slope cutting. Slope cutting

alone may not produce the high quality images required for todays

SEM applications; but when integrated into the PECS, the unique

cutting, etching and coating features result in samples with a

superior level of image clarity and detail.

Slope cutting reveals not only the internal microstructure of the cut surface, but also the initial top surface

(the third dimension). Special microscopic technologies are necessary to characterize the sample in all three

dimensions. Various surface analyzing methods and microscopic imaging techniques can be applied on the

processed samples. The cut surface can be investigated by SEM and microanalysis in direct correlation to the

initial surface and both surfaces can also be etched simultaneously.

Typical mechanical cross-sectioning followed by conventional metallographic preparation is not always sufficient

for revealing artifact-free microstructures for optical or EM observation. Ion beam processing not only permits

deformation-free preparation but also removes damaged layers produced during mechanical treatment. After

making the cut, short selective ion beam etching (2) at a fixed incidence direction reveals the internal structure

combining material contrast with topographical contrast (e.g. at grain and phase boundaries).

Before

Perpendicular Cut: No sample rocking; noselective etching

After

Same Sample after selective Ion BeamEtching

Poslorocstri

PECS Lead-Free Solder Applmagnification; distinct grain bomaterials

After

Ni

Cu

After

PECS Lead-Free Solder App

magnification; Cu grain appare

2. Specimen Mounting and Alignment

The specimen is secured under the metal clamp attached to the

stub or carbon tape can be used.

The sample stub inserts into a simple collet arrangement in the SC

fixture.

The target site is precisely aligned relative to the knife edge using

the X and Y drives.

The SC fixture is mounted to the insertion rod.

The rod is inserted into the PECS airlock for cutting.

3. Set Cutting Parameters

The PECS sample rocking (standard feature) can be used to eliminate

formation of striations in heterogeneous materials. The ion beam cutting voltage, current and time are set.

As the ion bombardment proceeds, a cross sectional cut surface

develops.

Position 2: Permitscutting without rock-ing, or selective ionbeam etching or sput-ter coating

SEM APPLICATIONS

Precision ion beam cutting to reveal internal

microstructure

Ion beam polishing

Selective ion beam etching

Ion Beam sputter coating

3-D sample characterization

Sample investigation without embedding or

mechanical treatment.

MATERIAL APPLICATIONS

Semiconductors

Ceramics

Metals

Organic materials Polymers

OPERATION

Getting started is quick and easy, a sample is mounted to an SEM

stub that mounts to the SC-Fixture and attaches to the insertion rod

for loading into the airlock of the PECS. This insertion rod replaces

the standard PECS holder and is programmed to either remain

fixed during cutting or to rock. Rocking avoids ion beam induced

furrows/streaking caused by differential milling (metallization layers

in Semiconductors). Once inside the vacuum chamber, the ion beam

parameters are set and the slope cutting procedure processed.

A two step process after cutting, ion beam polishing and selective

etching at nearly normal incidence onto the cut area removes ion

beam damage and re-dep to greatly improve internal grain contrast

variation.

NO SPECIAL SKILL REQUIRED

Mechanical polishing of cross sections, particularly for soft materials

(Lead or Lead-free solder) require considerable training and skill

levels. The SC-Tool allows quick and easy cutting of perfect cross

sections after minimal training. Three simple steps:

1. Cut and Trim the Specimen to size

The maximum specimen size for the SC-Tool is 12mm (W) x 8mm (D)

x 4mm (H). A diamond cutoff saw can easily cut specimens to size.

Target area can be within 1.5mm from the edge of the specimen.

Any mechanical polisher can be used to remove excess material in

front of the target site.