si nanocrystaline diamond foil hibachi window testing and development background and theory pulsed...

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Si Nanocrystaline Diamond Foil Hibachi Si Nanocrystaline Diamond Foil Hibachi Window Testing and Development Window Testing and Development Background and Theory Background and Theory Pulsed Power System Electron Beam Electron Transmission Window (Hibachi) Laser Cell Output Optics Laser Output Lase r Inpu t Laser Gas Recirculati on Key Components of the KrF Laser Amplifier Abstract Abstract In support of Inertial Fusion Energy (IFE) a 150 µm thick silicon (Si) wafer coated on one side with a 1.2 µm nanocrystalline diamond foil has been fabricated as an electron beam transmission (hibachi) window for use in a repetitively pulsed e-beam pumped laser. The hibachi window separates the lasing medium from the electron beam source while allowing the electron beam to pass through. The hibachi window must be capable of withstanding the challenging environment presented in the lasing chamber, which can include; fluorine gas, delta pressures > 2 atm @ 5 Hz, and a high heat flux due to the transmission of electrons passing through the foil. Recent tests conducted on single Si window panes under simulated operational conditions have shown that the techniques and materials being developed can withstand the harsh environment for extended periods of operation. The responses to pressure, heat, and chemical attack have all been explored and are discussed. This work is supported by the Naval Research Laboratory (NRL) in collaboration with the Princeton Plasma Physics Laboratory (PPPL). Yield Strength: 7000 MPa 53000 MPa Young’s Modulus: 180 GPa 7000 GPa Properties Silicon (SCS) Nanocrystalline Diamond Yield Strength: 241 MPa 1400 MPa Young’s Modulus: 193 GPa 120 GPa Properties (comparison) Stainless Steel Titanium 80 85 90 95 100 1 m il Titanium 2 m il Titanium 50 um Silicon 100 um Silicon 150 um Silicon P ercentTransm ission 150 K eV E lectrons 500 K eV E lectrons 750 K eV E lectrons Electron Transmission Efficiency of Foil Materials Prototype Testing Results Prototype Testing Results We Can Take the Heat & Pressure 14.5 19.5 24.5 29.5 34.5 39.5 44.5 49.5 54.5 59.5 64.5 0 10 20 30 40 50 60 70 D eflectio n (.0 0 1 ") P ressu re (p sia) Gasket Settling Test Window Configuration 1.5” aperture diameter Si window mounted with RTV silicone sealant inside a modified 4.5” Con-Flat flange pressurized with compressed air. For dynamic testing a solenoid actuated valve alternately pressurized and vented the chamber. Test setup was also placed in ovens to simulate electron heating of the window. Experimental Results Experimental Results Test Press. (psia) Temperature (°C) Rep. Rate (Hz) Cycles Long Duration 44-26 psia (pulsed) 135°C (limited by oven) 5 250,000 Static Pressure 60 psia 21 °C ~ ~ High Temperature 28-18 psia (pulsed) 600 °C 5 400 1.5” D 150μm Si Window Deflection Test Flange Undergoing High Temperature Testing As seen through tubing feed thru in oven Diamond Coating Diamond Coating Durability Durability Nanocrystalline Diamond Coating Durability Study A Si wafer coated with a 1.2μm thick coat of nanocrystalline diamond applied was subjected to the same deflections that the bare Si window experienced for 50,000 cycles. The window was then removed scribed and prepared into samples for analysis in a SEM. A unstressed wafer was also prepared in a similar manner. Comparison of the two samples showed no discernable degradation of the coating due to mechanical stress (see electrographs above) . Scribed and broken edge of wafer showing diamond/silicon interface. Surface of wafer appears to have been damaged as diamond was broken away during the cut. unstressed surface stressed surface The tests performed on a single pane uncooled flange at PPPL indicate that the Si/Diamond coat windows presents an attractive alternative foil that can survive the challenged to the habachi structure. Chemical, thermal, and mechanical threats have been addressed by this unique combination of materials. A prototype cooled anode insert containing an array of these windows is currently in assembly for near future testing in NRL’s Summary and Future Work Summary and Future Work Si material strains are linear/elastic over the range, fatigue should not be a major limitation C. Priniski 1 , C. Gentile 1 , R. Parsells 1 , S. Langish 1 , C. Jun 1 , L. Ciebiera 1 , J.Sethian 2 , J. Butler 2 1 Princeton Plasma Physics Lab, 2 Naval Research Lab

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Page 1: Si Nanocrystaline Diamond Foil Hibachi Window Testing and Development Background and Theory Pulsed Power System Electron Beam Electron Transmission Window

Si Nanocrystaline Diamond Foil Hibachi Window Si Nanocrystaline Diamond Foil Hibachi Window Testing and DevelopmentTesting and Development

Background and TheoryBackground and Theory

Pulsed Power System

Electron Beam

Electron Transmission Window (Hibachi)

Laser Cell

Output Optics

Laser Output

Laser Input

Laser Gas Recirculation

Key Components of the KrF Laser Amplifier

AbstractAbstractIn support of Inertial Fusion Energy (IFE) a 150 µm thick silicon (Si) wafer coated on one side with a 1.2 µm nanocrystalline diamond foil has been fabricated as an electron beam transmission (hibachi) window for use in a repetitively pulsed e-beam pumped laser. The hibachi window separates the lasing medium from the electron beam source while allowing the electron beam to pass through. The hibachi window must be capable of withstanding the challenging environment presented in the lasing chamber, which can include; fluorine gas, delta pressures > 2 atm @ 5 Hz, and a high heat flux due to the transmission of electrons passing through the foil. Recent tests conducted on single Si window panes under simulated operational conditions have shown that the techniques and materials being developed can withstand the harsh environment for extended periods of operation. The responses to pressure, heat, and chemical attack have all been explored and are discussed.This work is supported by the Naval Research Laboratory (NRL) in collaboration with the Princeton Plasma Physics Laboratory (PPPL).

Yield Strength: 7000 MPa 53000 MPa

Young’s Modulus: 180 GPa 7000 GPa

Properties Silicon (SCS) Nanocrystalline Diamond

Yield Strength: 241 MPa 1400 MPa

Young’s Modulus: 193 GPa 120 GPa

Properties (comparison) Stainless Steel Titanium

80

85

90

95

100

1 mil Titanium 2 mil Titanium 50 um Silicon 100 umSilicon

150 umSilicon

Per

cen

t T

ran

smis

sio

n

150 KeV Electrons 500 KeV Electrons 750 KeV Electrons

80

85

90

95

100

1 mil Titanium 2 mil Titanium 50 um Silicon 100 umSilicon

150 umSilicon

Per

cen

t T

ran

smis

sio

n

150 KeV Electrons 500 KeV Electrons 750 KeV Electrons

Electron Transmission Efficiency of Foil Materials

Prototype Testing ResultsPrototype Testing ResultsWe Can Take the Heat & Pressure

14.519.524.529.534.539.544.549.554.559.564.5

0 10 20 30 40 50 60 70

Deflection (.001")P

ressu

re (

psia

)

14.519.524.529.534.539.544.549.554.559.564.5

0 10 20 30 40 50 60 70

Deflection (.001")P

ressu

re (

psia

)

Gasket Settling

Test Window Configuration1.5” aperture diameter Si window mounted with RTV silicone sealant inside a modified 4.5” Con-Flat flange pressurized with compressed air. For dynamic testing a solenoid actuated valve alternately pressurized and vented the chamber. Test setup was also placed in ovens to simulate electron heating of the window.

Experimental ResultsExperimental ResultsTest Press.

(psia)

Temperature(°C)

Rep. Rate(Hz)

Cycles

Long Duration

44-26 psia (pulsed)

135°C

(limited by oven)

5 250,000

Static Pressure

60 psia 21 °C ~ ~

High Temperature

28-18 psia (pulsed)

600 °C 5 400

1.5” D 150μm Si Window Deflection

Test Flange Undergoing High Temperature Testing As seen through tubing feed thru in oven

Diamond Coating DurabilityDiamond Coating Durability

Nanocrystalline Diamond Coating Durability Study

A Si wafer coated with a 1.2μm thick coat of nanocrystalline diamond applied was subjected to the same deflections that the bare Si window experienced for 50,000 cycles. The window was then removed scribed and prepared into samples for analysis in a SEM. A unstressed wafer was also prepared in a similar manner. Comparison of the two samples showed no discernable degradation of the coating due to mechanical stress (see electrographs above) .

Scribed and broken edge of wafer showing diamond/silicon interface. Surface of wafer appears to have been damaged as

diamond was broken away during the cut.

unstressed surface stressed surface

The tests performed on a single pane uncooled flange at PPPL indicate that the Si/Diamond coat windows presents an attractive alternative foil that can survive the challenged to the habachi structure. Chemical, thermal, and mechanical threats have been addressed by this unique combination of materials. A prototype cooled anode insert containing an array of these windows is currently in assembly for near future testing in NRL’s Electra test bed this summer. Further optimization of window geometry and cooling will be conducted with the data collected during Electra testing

Summary and Future WorkSummary and Future Work

Si material strains are linear/elastic over the range, fatigue should not be a major limitation

C. Priniski1, C. Gentile1, R. Parsells1, S. Langish1, C. Jun1, L. Ciebiera1, J.Sethian2, J. Butler2 1Princeton Plasma Physics Lab, 2Naval Research Lab