PROCEEDINGS OF SPIE

SERIES

Sensors, Sensor Systems, and Sensor Data Processing

O t m a r Loffe ld Chair/Editor

June 1 6 - 1 7 1997 Munich, FRG

Sponsored by EOS—The European Optical Society SPIE—The International Society for Optical Engineering The Commission of the European Communities, Directorate General

for Science, Research, and Development

Published by SPIE—The International Society for Optical Engineering

Volume 3100

SPIE is an international technical society dedicated to advancing engineering and scientific applications of optical, photonic, imaging, electronic, and optoelectronic technologies.

Contents

vi i Conference Committee ix Introduction

SESSION 1 DISTRIBUTED SENSOR SYSTEMS: DATA FUSION AND SIGNAL PROCESSING

2 Signal processing technique for proper online exponential decay monitoring in the presence of nonexponential and multiexponential contributions [3100-01] A. Kobe, J. Mozina, Univ. of Ljubljana (Slovenia)

9 Online quality visualization and mathematical evaluation of thin metal laser cuts [3100-02] G. Hutflesz, Technical Univ. of Vienna (Austria); M. Bohrer, EMCO Lasertec GmbH (Austria); St. Fazeny, D. Schuöcker, Technical Univ. of Vienna (Austria)

14 Pulsed TV holography: system description and some applications [3100-18] S. Schedin, P. Gren, Luleä Univ. of Technology (Sweden)

22 How to create pseudoredundant measurements [3100-04] C. Arndt, O. Loffeld, Univ.-Gesamthochschule Siegen (FRG)

30 Optimal weighting of phase data with varying signal to noise ratio [3100-05] C. Arndt, O. Loffeld, Univ.-Gesamthochschule Siegen (FRG)

39 Flexible calibration method for an image-guided 3D laser radar scanner applicable for large volumina [3100-06] J. Weber, Univ.-Gesamthochschule Siegen (FRG)

51 Multisensor system for surface inspection and 3D geometry assessment [3100-07] M. Becker, J. Weber, E. Schubert, Univ.-Gesamthochschule Siegen (FRG)

SESSION 2 SENSORS AND COMPONENTS

64 High-speed identification of polymers by laser-induced breakdown spectroscopy [3100-08] I. Mönch, R. Sattmann, R. Nol l , Fraunhofer-Institut für Lasertechnik (FRG)

75 Integrated synchronous receiver channel for optical instrumentation applications [3100-10] H. G. P. H. Benten, Eindhoven Univ. of Technology (Netherlands); T. Ruotsalainen, A. J. Mäkynen, T. Rahkonen, H. K. Kopola, Univ. of Oulu (Finland)

89 CMOS position-sensitive photodetectors (PSDs) for integrated sensor systems [3100-11] A. j . Mäkynen, H. G. P. H. Benten, T. Ruotsalainen, T. Rahkonen, J. T. Kostamovaara, Univ. of Oulu (Finland)

101 CMOS binary position-sensitive photodetector (PSD) array [3100-12] A. J. Mäkynen, T. Rahkonen, J. T. Kostamovaara, Univ. of Oulu (Finland)

11 0 Position sensing resolution in atmospheric turbulence using a position-sensitive detector (PSD) [3100-13] A. J. Mäkynen, J. T. Kostamovaara, Univ. of Oulu (Finland)

1 1 9 Photodiodes for high-frequency applications implemented in CMOS and BiCMOS processes [3100-14] P. Palojärvi, T. Ruotsalainen, J. T. Kostamovaara, Univ. of Oulu (Finland); G. S. Simin, A.F.Ioffe Physical-Technical Institute (Russia)

1 27 Submicron-grating adaptive sensor [3100-1 5] G. E. Dovgalenko, Univ. of Arkansas; W. Eskov-Soskovetz, Interbranch Research and Production Association Rotor-Control (Ukraine)

1 32 Performances of a CCD camera from 1- to 1100-nm spectral region [3100-16] L. Poletto, A. Boscolo, M. G. Pelizzo, L. Placentino, G. Tondello, Univ. degli Studi di Padova (Italy)

SESSION 3 COHERENT TECHNIQUES, INTERFEROMETRY, AND PHASE AND FRINGE ANALYSIS

144 FMCW technique using self-mixing inside a LiTa03-Nd:YAG microchip laser for absolute distance and velocity measurements [3100-25] P. Nerin, P. Labeye, P. Besesty, P. Puget, G. H. Chartier, M. Bergeon, CEA-LETI (France)

1 56 Automatic adaption of projected fringe patterns using a programmable LCD projector [3100-26] M. K. Kalms, W. P. Jüptner, W. Osten, Bremen Institute of Applied Beam Technology (FRG)

166 New results in calculating the unambiguous phase for SAR interferometry [3100-2 7] R. Krämer, O. Loffeld, Univ.-Gesamthochschule Siegen (FRG)

1 75 C40 online demodulation of phase-modulated signals using different Kaiman filter models [3100-28] D. Balzer, O. Loffeld, C. Arndt, Univ.-Gesamthochschule Siegen (FRG)

185 Shape measurement by temporal phase unwrapping and spatial-light-modulator-based fringe projector [3100-29] J. M. Huntley, Loughborough Univ. (UK); H. O. Saldner, Optronic Consult AB (Sweden)

1 93 Reducing vibration effects in phase-shifting interferometry [3100-30] L. L. Deck, Zygo Corp.

SESSION 4 3D SENSORS AND 3D IMAGING

206 Telecentric scanner for 3D profilometry of very large objects [3100-31] S. Thibault, National Optics Institute (Canada) and COPL/Univ. Laval (Canada); E. F. Borra, COPL/Univ. Laval (Canada); S. Szapiel, COM DEV Ltd. (Canada)

21 5 Multiple-channel passive 3D range sensor [3100-32] R. H. Schaefer, J. Schwab, CORRSYS GmbH (FRG)

225 High-speed multichannel length measurement with a CCD scanning line [3100-33] B. Huhnke, Technische Univ. Braunschweig (FRG)

236 White-light heterodyne principle for 3D measurement [3100-34] C. Reich, R. Ritter, J. Thesing, Technische Univ. Braunschweig (FRG)

245 New electro-optical mixing and correlating sensor: facilities and applications of the photonic mixer device (PMD) [3100-35] R. Schwarte, Z. Xu, H. C. Heinol, J. Oik, R. Klein, B. Buxbaum, H. Fischer, J. Schulte, Univ.-Cesamthochschule Siegen (FRG)

254 Electro-optical correlation arrangement for fast 3D cameras: properties and facilities of the electro-optical mixer device [3100-36] H. G. Heinol, Z. Xu, R. Schwarte, J. Oik, R. Klein, Univ.-Gesamthochschule Siegen (FRG)

261 Full-hemisphere automatical optical 3D measurement system [3100-37] P. Kühmstedt, IVB GmbH (FRG); G. Notni, W. Schreiber, J. Gerber, Fraunhofer Institute for Appl ied Optics and Precision Engineering (FRG)

SESSION 5

SESSION 6

1D/2D/3D SENSORS: VISUAL INSPECTION I

268 High-accuracy liquid-level meter based on pulsed time-of-flight principle [3100-38] K. E. Määttä, J. T. Kostamovaara, Univ. of Oulu (Finland)

278 Microcontroller-based intelligent low-cost linear-sensor camera for general edge detection [3100-40] S. Hußmann, D. Justen, Univ.-Gesamthochschule Siegen (FRG)

286 Fresnel diffraction for fast and accurate in-process measurement of the diameters of rotational symmetric workpieces [3100-41] B. Huhnke, Technische Univ. Braunschweig (FRG)

297 Enhanced imaging by fusion of illumination series [3100-42] F. Puente Leon, Univ. Karlsruhe Technische Hochschule (FRG)

309 Influence of the focusing element for C 0 2 laser beams on monitored process signals [3100-43] St. Fazeny, A. Penz, Technical Univ. of Vienna (Austria); M. Bohrer, EMCO Lasertec GmbH (Austria); D. Schuöcker, Technical Univ. of Vienna (Austria)

318 Contactless highly exact torsion measurement of special section tubes [31 00-44] T. Krieger, K. Hartmann, Univ.-Gesamthochschule Siegen (FRG)

1D/2D/3D SENSORS: VISUAL INSPECTION II

328 Image processing for automated visual surface inspection [3100-46] M. Fuß, Basler Image Processing (FRG); P. Scharf, F.-J. Lücke, Univ.-Gesamthochschule Siegen (FRG)

340 Fast inspection of radius, wall thickness, eccentricity, and ovality at the end of high-precision tubes: TRUDE 60-28 in production [3100-47] W. Kleuver, J. Weber, D. Justen, K. Hartmann, Univ.-Gesamthochschule Siegen (FRG)

349 New triangulation sensor for inside inspection of small drillings and hollows with integrated image processing [3100-48] W. Kleuver, M. Fuß, D. Justen, K. Hartmann, Univ.-Gesamthochschule Siegen (FRG)

357 Surface inspection of transparent materials with a compact reflection sensor [3100-49] M. Koscheck, W. Kleuver, J. Weber, K. Hartmann, Univ.-Gesamthochschule Siegen (FRG)

366 Fiber optic multichannel laser radar with parallel processing [3100-51] C. Bätzel, J. K. Schaller, C. G. Stojanoff, Technical Univ. of Aachen (FRG)

SESSION 7 POSTERSESSION

3 76 Color imaging on rastered photothermoplastics [3100-1 7] I. V. Chapurin, L M. Panasyuk, State Univ. of Moldova

381 Analog-domain FPN-compensation circuit for random access CMOS imagers [31 00-1 9] W. Ogiers, G. Meynants, B. Dierickx, R. P. Mertens, Interuniv. Microelectronics Ctr. (Belgium)

388 Fringe superposition with computer-generated moire applied to position control [3100-21 ] M. Lehman, L. De Pasquale, D. Patrignani, J. L. Pombo, Univ. Nacional del Sur (Argentina)

396 Frequency analysis for roughness of optical surface by focal plane CCD camera [3100-23] J. Li, A. Ying, X. Li, X. Zhang, A. Zao, Jiangxi Academy of Sciences (China)

400 Single-element refractive optical device for laser beam profiling [3100-24] G. Erdei, G. Szarvas, E. Lörincz, S. Värkonyi, Technical Univ. of Budapest (Hungary)

41 3 Laser-scan-based spatial image encoder used in 3D vision [3100-52] X. Yu, J. Zhang, L. Wu, Harbin Univ. of Science and Technology (China); X. Qiang, Harbin Institute of Technology (China)

41 7 Improvement of lidar system by modulation of an optical pulse laser for underwater detection [3100-54] J. P. Lagaye, L. Vinay, J. Richou, Univ. de Toulon et du Var (France)

424 Author Index