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Microstructural Characterization Microstructural Characterization of of Materials Materials Eun Eun Soo Soo Park Park Office: 33-316 Telephone: 880-7221 Email: [email protected] Office hours: by an appointment 2009 spring 05. 13. 2009

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Page 1: SEM and TEMocw.snu.ac.kr/sites/default/files/NOTE/5286.pdf · 2018. 1. 30. · SEM Auger e- AES, SAM Diffracted e- 'elastic ; SAD, microD, CBED 'inelastic ; Kikuchi, EELS TEM, STEM

Microstructural CharacterizationMicrostructural Characterizationof of

MaterialsMaterials

EunEun SooSoo ParkPark

Office: 33-316 Telephone: 880-7221Email: [email protected] hours: by an appointment

2009 spring

05. 13. 2009

Page 2: SEM and TEMocw.snu.ac.kr/sites/default/files/NOTE/5286.pdf · 2018. 1. 30. · SEM Auger e- AES, SAM Diffracted e- 'elastic ; SAD, microD, CBED 'inelastic ; Kikuchi, EELS TEM, STEM

• 영상분석: 미세조직분석– SEM, TEM, STEM

(surface morphology)• 전자회절분석: 결정구조분석

– CBSD, CBED, SAED, Kikuchi pattern(crystllograhic structrue)

• 화학분석: 화학성분분석– EDS, EELS, AES

– (Element, composition)

09

Type of analysis

Page 3: SEM and TEMocw.snu.ac.kr/sites/default/files/NOTE/5286.pdf · 2018. 1. 30. · SEM Auger e- AES, SAM Diffracted e- 'elastic ; SAD, microD, CBED 'inelastic ; Kikuchi, EELS TEM, STEM

09

Type of analysis

Page 4: SEM and TEMocw.snu.ac.kr/sites/default/files/NOTE/5286.pdf · 2018. 1. 30. · SEM Auger e- AES, SAM Diffracted e- 'elastic ; SAD, microD, CBED 'inelastic ; Kikuchi, EELS TEM, STEM

• EDS : Energy Dispersion Spectroscopy• WDS: Wavelength Dispersive Spectroscopy• XRF: X-Ray Fluorescence

• EELS: Electron Energy Loss Spectroscopy

09

Type of analysis Chemical element

X-Ray

Electron

Page 5: SEM and TEMocw.snu.ac.kr/sites/default/files/NOTE/5286.pdf · 2018. 1. 30. · SEM Auger e- AES, SAM Diffracted e- 'elastic ; SAD, microD, CBED 'inelastic ; Kikuchi, EELS TEM, STEM

EDS

• 특성 X-선은 원자의 종류및 전자 궤도에 따라 다르므로 이를 이용하여 시편의 화학적 성분을 정성 혹은 정량분석을 할 수 있다.

• EDS 는 정성분석에, WDS는 정량분석에

이용한다.

Type of analysis Chemical element

Page 6: SEM and TEMocw.snu.ac.kr/sites/default/files/NOTE/5286.pdf · 2018. 1. 30. · SEM Auger e- AES, SAM Diffracted e- 'elastic ; SAD, microD, CBED 'inelastic ; Kikuchi, EELS TEM, STEM

EDSType of analysis Chemical element

X-Ray Spectrum 분석 Image Mapping

Page 7: SEM and TEMocw.snu.ac.kr/sites/default/files/NOTE/5286.pdf · 2018. 1. 30. · SEM Auger e- AES, SAM Diffracted e- 'elastic ; SAD, microD, CBED 'inelastic ; Kikuchi, EELS TEM, STEM

EELS

atomic composition, chemical bonding, valence and conduction band electronic properties, surface properties, and element-specific pair distance distribution functions

Type of analysis Chemical element

http://en.wikipedia.org/wiki/File:EELS_Idealised.svg
Page 8: SEM and TEMocw.snu.ac.kr/sites/default/files/NOTE/5286.pdf · 2018. 1. 30. · SEM Auger e- AES, SAM Diffracted e- 'elastic ; SAD, microD, CBED 'inelastic ; Kikuchi, EELS TEM, STEM

• AES : Auger Electron Spectroscopy• SAM: Scanning Auger Microscopy

09

Type of analysis Chemical element: surface-specific analytical technique

Page 9: SEM and TEMocw.snu.ac.kr/sites/default/files/NOTE/5286.pdf · 2018. 1. 30. · SEM Auger e- AES, SAM Diffracted e- 'elastic ; SAD, microD, CBED 'inelastic ; Kikuchi, EELS TEM, STEM

• CBED: Convergent Beam Electron Diffraction• SAD: Selected Area electron Diffraction

09

Type of analysis Crystallographic structure


Formas de Participação - V CBED

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