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©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 1 22 Bd Benoni Goullin 44200 NANTES - FRANCE +33 2 40 18 09 16 [email protected] www.systemplus.fr Samsung 3D V - NAND 92 - Layer Memory Fifth generation 3D NAND memory chip reveals Samsung’s latest memory technology and fabrication methods. SP19489 - MEMORY report by Belinda Dube Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample REVERSE COSTING® – STRUCTURAL, PROCESS & COST REPORT

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Page 1: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 1

22 Bd Benoni Goullin44200 NANTES - FRANCE +33 2 40 18 09 16 [email protected] www.systemplus.fr

Samsung 3D V-NAND 92-Layer MemoryFifth generation 3D NAND memory chip reveals Samsung’s latest memory technology and fabrication methods.

SP19489 - MEMORY report by Belinda DubeLaboratory Analysis by Véronique LE TROADEC

September 2019 - Sample

REVERSE COSTING® – STRUCTURAL, PROCESS & COST REPORT

Page 2: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 2

Table of Contents

Overview / Introduction 3

o Executive Summary

o Reverse Costing Methodology

Company Profile 8

o Samsung

Market Analysis 12

o NAND Flash Market Revenue

o NAND Market Shipments

o Samsung NAND Flash RoadMap

Physical Analysis 16

o Synthesis of the Physical Analysis

o Physical Analysis Methodology

o 970 EVO Plus SSD Teardown

o Package

Package Views & Dimensions

o Memory Die

View, Dimensions & Marking

Cross-Section

Contacts and Metallization

o 3D NAND Patents

Physical Comparison (64 Layer Vs 92Layer V-NAND) 55

o Comparison Generation 5 92-layer and Generation 4 64-layer

Manufacturing Process Flow 60

o Global Overview

o Memory 3D 92 LayerFab Unit

o Memory 3D 92 Layer Process Flow

Cost Analysis 71

o Synthesis of the cost analysis

o Yields Explanation & Hypotheses

o Memory 3D 92 Layer

Memory Front-End Cost

Memory Front-End Cost per process steps

o Process Steps

o Component

Bonding Front-End Cost

Memory Wafer & Die Cost

Back-End : Final Test Cost

Memory 3D 92 Layer Component Cost

Estimated Price Analysis 88

Feedback 91

Company services 93

Page 3: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 3

Overview / Introductiono Executive Summaryo Reverse Costing

Methodologyo Glossary

Company Profile

Market Analysis

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

Executive Summary

The new technology era has a huge impact on Non-Volatile Memory (NVM), demanding memories with faster speed

and higher storage capacity. Manufacturers have therefore channeled investment into the development of new NVMs

with more memory cells in a single chip.

Samsung continues to dominate the semiconductor industry, including the memory industry, as shown by the

magnificent $22 billion revenue in 2018 generated by its NAND memory business. Its manufacturing techniques change

from one generation to another to produce reliable memory chips with higher capacity.

This report presents a detailed technology study of the latest Samsung 3D Vertical-NAND memory made with 92-Layer

word lines. Thanks to high quality optical images and high-resolution scanning electron microscope (SEM) images, the

physical analysis shows details of die cross sections, including material identification. The report includes a detailed

process to better understand the major fabrication steps. It also includes a cost estimation of producing Samsung’s

new generation 3D NAND chips and the packaging cost.

Finally, this report features a comparison of Samsung’s previous NVM generation with the latest generation. This

identifies the different and similar features in the two generations, and compares the fabrication cost and the impact of

the added layers.

Page 4: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 4

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis o Synthesiso 970 EVO Plus TearDowno Packageo Memory Die

o Patent Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

Packaging

Package Cross Section©2019 by System Plus Consulting

Page 5: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 5

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis o Synthesiso 970 EVO Plus TearDowno Packageo Memory Die

o Patent Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

Logic Area : Transistor Technology

Page 6: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 6

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis o Synthesiso 970 EVO Plus TearDowno Packageo Memory Die

o Patent Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

Vertical NAND Cell

Vertical Cell structure –SEM©2019 by System Plus Consulting

Page 7: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 7

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis o Synthesiso 970 EVO Plus TearDowno Packageo Memory Die

o Patent Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

Charge Trap Flash

Page 8: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 8

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis o Synthesiso 970 EVO Plus TearDowno Packageo Memory Die

o Patent Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

CTF NAND Cell

Cell structure WANOS Region –SEM©2019 by System Plus Consulting

Page 9: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 9

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis o Synthesiso 970 EVO Plus TearDowno Packageo Memory Die

o Patent Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

Cross Section- Staircase

©2019 by System Plus Consulting

Page 10: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 10

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis o Synthesiso 970 EVO Plus TearDowno Packageo Memory Die

o Patent Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

Cross Section- Metal Contacts

Page 11: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 11

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis o Synthesiso 970 EVO Plus TearDowno Packageo Memory Die

o Patent Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

NAND Memory Circuit Diagram

Cross Section-SEM©2019 by System Plus Consulting

Page 12: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 12

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis o Synthesiso 970 EVO Plus TearDowno Packageo Memory Die

o Patent Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

Physical Analysis Comparison Gen 4 vs Gen 5

• The 5th generation V-NAND Dies are more dense than Gen4 dies.• Memory Array efficiency is higher for 5th generation dies. (NAND active area occupies less space on the die.)

Page 13: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 13

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis o Synthesiso 970 EVO Plus TearDowno Packageo Memory Die

o Patent Comparison

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

Gen 5- 92 layer NAND vs Gen 4- 64 layer NAND

Page 14: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 14

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis

Manufacturing Process Flowo Global Overviewo Driver Front-End Processo Memory Process

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

Bit Line Formation and Contact Formation

Page 15: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 15

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis

Manufacturing Process Flow

Cost Analysiso Synthesiso Yieldso Driver Wafer & Die Costo Memory Wafer & Die

Costo Package Costo Final Costo Component Costo Cost per GB

Selling Price Analysis

Related Reports

About System Plus

Memory Wafer & Die Cost

Page 16: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 16

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis

Manufacturing Process Flow

Cost Analysiso Synthesiso Yieldso Driver Wafer & Die Costo Memory Wafer & Die

Costo Package Costo Final Costo Component Costo Cost per GB

Selling Price Analysis

Related Reports

About System Plus

Component Cost

Page 17: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 17

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Plus

MARKET AND TECHNOLOGY REPORTS - YOLE DÉVELOPPEMENT

MEMORY• NAND Service – Memory Research• Status of the Memory Industry 2019• Emerging Non-Volatile Memory 2018• MRAM Technology and Business 2019

REVERSE COSTING ANALYSES - SYSTEM PLUS CONSULTING

MEMORY• Leading-edge 3D NAND Memory Comparison 2018• Toshiba Sandisk 64 Layers 3D NAND Memory

Related Reports

Page 18: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

The new technology era has a huge

impact on Non-Volatile Memory (NVM),

demanding memories with faster speed

and higher storage capacity.

Manufacturers have therefore channeled

investment into the development of new

NVMs with more memory cells in a single

chip.

Samsung continues to dominate the

semiconductor industry, including the

memory industry, as shown by the

magnificent $22 billion revenue in 2018

generated by its NAND memory business.

Its manufacturing techniques change from

one generation to another to produce

reliable memory chips with higher

capacity.

This report presents a detailed technology

study of the latest Samsung 3D Vertical-

NAND memory made with 92-Layer word

lines. Thanks to high quality optical

images and high-resolution scanning

electron microscope (SEM) images, the

physical analysis shows details of die cross

sections, including material identification.

The report includes a detailed process to

better understand the major fabrication

steps. It also includes a cost estimation of

producing Samsung’s new generation 3D

NAND chips and the packaging cost.

Finally, this report features a comparison

of Samsung’s previous NVM generation

with the latest generation. This identifies

the different and similar features in the

two generations, and compares the

fabrication cost and the impact of the

added layers.

COMPLETE TEARDOWN WITH

• Detailed optical and SEM photos and

cross-sections

• Precise measurements

• Material analysis

• Manufacturing process flow

• Supply chain evaluation

• Manufacturing cost analysis

• Comparison of 92-layer with 64-layer

V-NAND

• Estimated sales price

Fifth generation 3D NAND memory chip reveals Samsung’s latest memorytechnology and fabrication methods.

REVERSE COSTING® – STRUCTURE, PROCESS & COST REPORT

Title: Samsung 3D V-NAND 92-Layer Memory

Pages: 100

Date: September 2019

Format: PDF & Excel file

Price: EUR 3,990

Samsung 3D V-NAND 92-Layer Memory

IC – LED – RF – MEMS – IMAGING – PACKAGING – SYSTEM – POWER - MEMORY - DISPLAY

Page 19: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

TABLE OF CONTENTS

Overview/Introduction

• Executive Summary

• Reverse Costing Methodology

Samsung Company Profile

Market Analysis

• NAND Flash Market Revenue

• NAND Market Shipments

• Samsung NAND Flash RoadMap

Physical Analysis

• Synthesis of the Physical Analysis

• Physical Analysis Methodology

• 970 EVO Plus SSD Teardown

• Package View and Dimensions

• Memory Die

View, dimensions & marking

Cross-section

Contacts and metallization

• 3D NAND Patents

Manufacturing Process Flow

• Overview

AUTHORS

• Fab Unit

• Process Flow

Cost Analysis

• Summary of the Cost Analysis

• Yields Explanation & Hypotheses

• Memory 3D 92-Layer

Memory front-end cost

Memory front-end cost per process steps

• Process Steps

• Component

Bonding front-end cost

Memory wafer & die cost

Back-end: Final test cost

Memory 3D 92-layer component cost

Selling Price

Comparison between Samsung 92-Layer and 64-Layer V-NAND

SAMSUNG 3D V-NAND 92-LAYER MEMORY

RELATED REPORTS

Leading-edge 3D NAND Memory Comparison 2018A deep technology analysis and cost comparison report on cutting edge 3D NAND memory chips from Toshiba/SanDisk, Samsung, SK Hynix and Intel/Micron.December 2018 - EUR 4,990*

Toshiba SanDisk 64 Layers 3D NAND MemoryThe latest 3D NAND Flash memory produced by Toshiba and SanDisk for the IPhone X.November 2018 - EUR 3,990*

NAND Service –Memory ResearchNAND market downturn continues into early 2019, with recovery expected in the second half.June 2019 - EUR 30,000*

Belinda Dube is working for SystemPlus Consulting as Analyst inSemiconductor Memories andIntegrated Circuits. She holds aMasters degree in Nano Scienceand Nanotechnologies from EcoleCentral Lyon and INSA Lyon.

Véronique Le Troadec has joinedSystem Plus Consulting as alaboratory engineer. Coming fromAtmel Nantes, she has extensiveknowledge in failure analysis ofcomponents and in deprocessing ofintegrated circuits.

Page 20: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

COSTING TOOLS

REVERSE COSTING® – STRUCTURE, PROCESS & COST REPORT

Process-BasedCosting Tools

ParametricCosting Tools

WHAT IS A REVERSE COSTING®?

Reverse Costing® is the process of disassembling a device (or asystem) in order to identify its technology and calculate itsmanufacturing cost, using in-house models and tools.

IC Price+

MEMS CoSim+

MEMS Price+

Power CoSim+

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CONTACTS

ABOUT SYSTEM PLUS CONSULTING

System Plus Consulting is specialized

in the cost analysis of electronics

from semiconductor devices to

electronic systems.

A complete range of services and

costing tools to provide in-depth

production cost studies and to

estimate the objective selling price of

a product is available.

Our services:

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www.systemplus.fr

[email protected]

Our analysis is performed with our costing tool IC Price+.

System Plus Consulting offers powerful costing tools to evaluate the production cost and selling price from

single chip to complex structures.

IC Price+The tool performs the necessary cost simulation of any Integrated Circuit: ASICs, microcontrollers, memories,DSP, smartpower…

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Page 21: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

ORDER FORMPlease process my order for “Samsung 3D V-NAND 92-Layer Memory” Reverse Costing® – Structure, Process & Cost Report Ref: SP19489

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REVERSE COSTING® – STRUCTURE, PROCESS & COST REPORTSAMSUNG 3D V-NAND 92-LAYER MEMORY

Each year System Plus Consultingreleases a comprehensive collectionof new reverse engineering andcosting analyses in various domains.You can choose to buy over 12months a set of 3, 4, 5, 7, 10 or 15Reverse Costing® reports.

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Page 22: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 18

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Page 23: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 19

Overview / Introduction

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Market Analysis

Physical Analysis

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Cost Analysis

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Page 24: Samsung 3D V-NAND 92-Layer Memory · 2019-09-23 · Laboratory Analysis by Véronique LE TROADEC September 2019 - Sample ... Samsung 3D V-NAND 92-Layer Memory | Sample 3 Overview

©2019 by System Plus Consulting | Samsung 3D V-NAND 92-Layer Memory | Sample 20

Overview / Introduction

Company Profile

Market Analysis

Physical Analysis

Manufacturing Process Flow

Cost Analysis

Selling Price Analysis

Related Reports

About System Pluso Company serviceso Contact

Contact

Headquarters22 bd Benoni Goullin44200 NantesFRANCE+33 2 40 18 09 [email protected]

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