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LPICMAdministration 33 1 69 33 43 03
www.lpicm.polytechnique.fr
ContactPere Roca i Cabarrocas 33 1 69 33 43 14
Website
Academic and Industrial partners
LABORATORY OF PHYSICS OF INTERFACES AND THIN FILMS
The Laboratory of Physics of Interfaces and Thin Films (LPICM) is jointly supported by both the CNRS and the École polytechnique. The LPICM was established in 1986 and become a recognized research unit (UMR7647) in 1997. Today, the laboratory is associated with the Institute for Engineering and Systems Sciences (INSIS) while it also has a partnership with the Institute of Physics (INP) and the Institute of Chemistry (INC).
Since its founding, the LPICM has considerably evolved to become a multidisciplinary laboratory where fundamental research on plasma processes, materials science, chemistry, optics and electronics is carried out. Building on this foundation, we design and develop new electrical and optoelectronic devices, covering the � elds of solar energy harvesting and storage, innovative sensors based on nanomaterials, and large-area electronic devices. Our research strategy is based on a bottom-up approach, wherein the optimization of materials and processes relies on in-situ real-time diagnostic techniques developed in-house, backed up with ex-situ characterization and numerical modelling. In particular the laboratory has developed innovative optical characterization techniques such as Mueller polarimetry, which we apply to thin � lms for microelectronics as well as in the biomedical � eld for the diagnosis of cancer tissues. Tip Enhanced Raman Spectroscopy (TERS) has also been recently developed to characterize nano-objects (nanowires, nanotubes, and graphene) and successfully transferred to industry.
LPICM Director
Pere Roca i Cabarrocas
Thin-Film Platform: Deposition and in-situ diagnostics Eight PECVD reactors (ARCAM 100 and 200, Philix, Plasmat, Plas� l, Venus, Nextral, Atos), evaporators, sputtering tools. Characterization tools: SE, QMS, OES, TRMC, J(V)Materials palette: Si � lms and alloys (Si, Ge, SiGe, SiC, SiO2, a-SiN), TCOs, Nanocrystals and nanowires.
Organic Electronics: ORGATECH and CHIMORGA5 evaporators for organic materials, metals, and hybrid perovskites; 3 glove box-es, Dr. Blade, spin coating, Ink jet printer, probe stations, impedance meter, spectrascan, spectrometers, integrating sphere, furnaces,…
Nanomaterials & Electronic ApplicationsNanoMade has developed a unique home-made experimental platform in � eld of nanotechnology: six CVD reactors (two in Thales R&T clean room), MBE, micro and nanofabrication tools, two multi-environmental electrical character-ization benches, and the “Fenix” facility for the in-situ and real time character-ization (XPS, UPS, AES, EELS, LEED) of nanomaterials either during their growth or upon exposure to electrons, ions or radicals beams.1D and 2D materials: C, Si, MoS2, Nanocristals, nanowires,…
Opto-electronic Characterization Microwave re� ectivity, carrier lifetime, solar simulator, EQE, Raman micro-scopes (confocal, polarized, and AFM coupled), Mueller imagers (macro-, micro-scopic with R and T modes), polarized-light colposcope, spectroscopic ellipsometry, polarimeters (visible and IR), AFM, and a pro� lometer.
PVSiXT Multi-chamber PECVD cluster tool with 2 in-situ ellipsometers, laser-scribing tool, laminator, two AFMs, solar simulator, EQE, multi-wavelength scanning Ra-man, e-beam evaporator, oven, TMS microscope, climate chamber.
PLATINEEnvironmental chamber (temperature & humidity) with electromechanical characterization and in-situ imaging. Ink-jet printer, wire-bonding, microscope, solar simulator, centrifuge.
In-situ TEM, growth of nano-objects: NanoMAX (Equipex TEMPOS) Transmission Electron Microscope with atomic resolution and safe handling of precursor gases for the in-situ observation of thin-� lm and nano-objects growth.
Numerical Modelling and Simulations Fluid model, Monte Carlo, ab initio electronic structure calculations, molecular dynamics simulations.2D & 3D � nite elements simulation of thin � lm electronic devices (SILVACO, COMSOL).SPICE behavioural simulation of electronic devices and circuits.
Contact Pere Roca i Cabarrocas 33 1 69 33 43 14
Research Platforms
Developments & Communication
• Follow-up after new technological platform installation, including related safety issues
• Industrial and academic partnerships, contact with local government
• Communication
Characterization Tools & Informatics Support• Maintenance and updating
of the computer equipment• Installation and maintenance
of the characterization tools• Automation and centralization
of safety systems• Instrumentation and data acquisition systems
Administration & Management
• Administration of LPICM and management of human and economic resources: personnel, budgets, research contracts, travel arrange-ments, and organization of conferences and workshops...
ContactCyril Jadaud 33 1 69 33 43 58 [email protected]
ContactJean-Charles Vanel 33 1 69 33 43 57 [email protected]
ContactLaurence Gérot 33 1 69 33 43 03 [email protected]
ContactJean-Luc Moncel 33 1 69 33 43 61 [email protected]
Research Equipment Design Team (BEER)
• Conceptualization, design, fabrication, and validation of vacuum deposition reactors• On-demand fabrication of custom mechanical parts• Maintenance and management of the research platforms• Safety: Training of users and maintenance of installation systems
Research Support Teams
L’INSTITUTMUTUALISTEMONTSOURIS
ContactPere Roca i Cabarrocas 33 1 69 33 43 14
ContactCostel Sorin Cojocaru 33 1 69 33 43 56 [email protected]
Contact Yvan Bonnassieux 33 1 69 33 43 02
Printed organic and large area devices have numerous advantages such as low cost of production, ease of design, light-weight deploy-ment, and � exibility. The OLAE research team focuses on chemi-cal synthesis, integration and physical modelling of organic, hybrid and printable materials, in connection with the de-sign of high performance electronic large area devic-es and systems. Based on a fundamental approach such as the synthesis of new molecules and poly-mers and the modelling of charge transport, as well as on three speci� c technolo-gy facilities (ORGATECH, CHIMORGA and PLA-TINE), OLAE team aims to design reliable components for energy harvesting (perovskite and tandem solarcells, OLED, LED) and sensors (biomedical and smart-city). OLAE researchers collaborate with CEA and IFSTTAR in the framework of ORGASACLAY and NACRE joint research teams respectively.
Over the past 15 years NanoMaDe’s research topics focused on the synthesis of 1D and 2D nanomaterials and the development of in-novative nanodevices for electronics, energy, health, and environ-mental applications:
• Understanding nanomaterial properties and their growth mechanisms through in-situ and real-time process diagnosis, and the observation of nano-object growth through the high-est resolution microscopy and spectroscopy techniques
• Development of next-generation bottom-up nanotechnologi-cal processing and characterization tools
• Absolute control over nanomaterial synthesis, including tai-lored properties and nanod evice fabrication and characteri-zation
• Innovative functional nanomaterials and devices for electron-ics, energy, and environmental applications
Polarimetry and its applications in materials science
The group’s research activity addresses the study of the polarization of light in itself, and its modi� cation upon interaction with matter. Our group activity involves both theoretical and instrumental developments:• Mathematical formalisms describing fundamental polarimetry proper-
ties (Mueller algebra)• Original spectroscopic and imaging instruments often transferred
to industry (Horiba Sci.)• Characterization of thin � lm and nanostructured materials for microe-
lectronics, solar cells, low emissivity windows,…• A platform for spectroscopic imaging infrared polarimetry installed
at synchrotron SOLEIL• A new method to determine the electric � eld in plasma discharges using
polarimetric measurements
Imaging polarimetry of biological tissues and scattering mediaWe use polarized light to characterize the optical properties of complex media, in particular human tissues, aiming at medical diagnostics. This activity includes:• Development of innovative in-vivo and ex-vivo multi-wavelength imaging
polarimeters• Modelling the propagation of polarized light in anisotropic and scatter-
ing media• Development of algorithms for image analysis in collaboration
with IOGS, ICUBE, and Arizona State University• Biomedical diagnostics in hospital settings: cancer diagnosis,
post-treatment follow-up, evaluation of the risk of preterm labor• Collaboration with hospitals in France (IMM, IGR, CHU Kremlin
Bicêtre) and CHU Brugmann in Brussels
Near-� eld Raman spectroscopy
This advanced optical characterization technique, also called TERS (Tip-Enhanced Raman Spectroscopy) couples the unprecedented spa-tial resolution of scanning probe microscopies (AFM or STM) with the extreme chemical sensitivity of Raman spectroscopy through the phe-nomenon of tip enhancement. This activity includes:• Instrumentation development (optimiza-
tion of tip performance, novel near-� eld operation modes, etc.)
• Fundamental studies (modelling of the Raman effect in the near � eld)
• Nanoscale imaging of strain and chemical composition with high spatial resolution
Nano-Materials:
• Carbon nanotubes: SWNTs with controlled electronic proper-ties, MWCNTs and vertically aligned CNTs, cup-stacked CNTs
• Graphene (SLG, FLG), nanographene and graphitic nanolaces, low (room) temperature, catalyst-free, localized direct growth
• Hybrid (sp-sp2) nanostructures• Semiconductor nanowires (Si…)• Hybrid, core-shell nanostructures• Nanoporous alumina membranes
Applications:
• Nanoelectronics: SiNWs-FETs, CNT-FETs, G-FETs, logic circuits, memories, memristors
• Optoelectronics: photodetectors, RF optoelectronics* • Vacuum electronics*: TOP, X-ray guns based on � eld emission
CNT-microcathodes • Electrochemical Energy Storage: nanostructured Li-ion batteries• Environmental nanosensors**
* Research developed within the joint research team “NANOCARB” with Thales R&T
** Research partly developed within the joint research team “NACRE” with IFSTTAR
Expertise:
New semi-conducting and luminescent materials for coating large areas• Design, characterization and reliability of innovative compo-
nents (OLED, OPV, TFTs, sensors)• Carrier transport and interface characterization• Physical and compact modeling of components (SPICE, � nite elements)• Design of analog and numerical circuits
Materials:• Organic and hybrid Polymers and molecules• Hybrid perovksite• Carbone nanotube ink
Applications and devices:• Devices for energy (solar cells and OLED)• Sensors (biomedical applications and smart cities)• Large area electronics
NanoMaterials & Electronic Devices(NanoMaDe)
Applied Optics and Polarimetry (AOP)
Organic Large Area Electronics (OLAE)
Antonello De Martino
The research of the NanoSil group on nanostructured materials for large-area optoelectronics starts with low temperature (200°C) material synthesis by Plasma Enhanced Chemical Vapor Deposition (PECVD). Areas of study include plasma processing, material char-acterization, in-situ studies for the optimization of materials and interfaces, and � nally, the combination of such materials to fabri-cate devices. We integrate the full research value chain, from vac-uum system design to device characterization, including numerical modeling of plasmas, nanostructures, and devices (particle-in-cell, � uid-dynamics, Monte-Carlo, rigorous coupled wave analysis, and ab initio molecular dynamics.) We collaborate closely with Total on photovoltaic research through the PVSiXT joint research team.
Materials and Structures: • Hydrogenated amorphous
and polymorphous silicon• Nanocrystaline silicon • Alloys
(SiGe, SiC, SiN, SiOx, etc)• Low-temperature epitaxial
layers by PECVD• Si and Ge nanowires• Dielectrics• Graphene
(cleaning and doping)
In-situ Diagnostics:• Spectroscopic ellipsometry,
plasma diagnostics (OES, MS, electrical probes)• Kelvin probes, Time Resolved
Microwave Conductivity
Optoelectronic Devices:• Solar cells• Thin-� lm transistors• Light-emitting diodes
and photodetectors
ContactErik Johnson 33 1 69 33 43 19 [email protected]
Nanostructured Materials for Photo-voltaics and Optoelectronics (NanoSil)