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NREL is a national laboratory of the U.S. Department of Energy, Office of Energy Efficiency and Renewable Energy, operated by the Alliance for Sustainable Energy, LLC. Douglas DeVoto Principal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358 This presentation does not contain any proprietary, confidential, or otherwise restricted information. Reliability of Electrical Interconnects Project ID: APE036

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Page 1: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

NREL is a national laboratory of the U.S. Department of Energy, Office of Energy Efficiency and Renewable Energy, operated by the Alliance for Sustainable Energy, LLC.

Douglas DeVoto Principal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

This presentation does not contain any proprietary, confidential, or otherwise restricted information.

Reliability of Electrical Interconnects

Project ID: APE036

Page 2: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

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Overview

Timeline • Project Start Date: FY11 • Project End Date: FY14 • Percent Complete: 80%

Barriers and Targets • Efficiency • Performance and Lifetime

Budget • Total Project Funding:

DOE Share: $1,600K

• Funding Received in FY13: $450K

• Funding for FY14: $300K

Partners • Interactions/Collaborations

o Curamik, Kulicke and Soffa

• Project Lead o National Renewable Energy

Laboratory

Page 3: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

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Relevance

Ribbon Bonding

400 µm

2,000 µm x 200 µm

400 µm

400 µm

Three 400-µm wires can be replaced by a single 2,000-µm x 200-µm ribbon for equivalent current carrying capability.

Traditional Power Electronics Package

Wire Bonding

IGBT/Diode Die

Metalized Substrate Substrate Attach

Base Plate

Die Attach

Interconnect Encapsulant

Enclosure Terminal

Page 4: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

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Relevance

• Technology Benefits o A transition from round wire interconnects to ribbon interconnects

allows for higher current densities, lower inductances, and lower loop heights.

• Overall Objective

o Identify failure modes in ribbon bonds, experimentally characterize their life under known conditions, and develop and validate physics-of-failure (PoF) models that predict life under use conditions.

o Test and model ribbon bonds to prove they exhibit equivalent or greater reliability than industry-accepted wire bond technology.

• Uniqueness and Impacts

o Failure modes and PoF models for emerging interconnect technology.

Page 5: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

5

Milestones 2013 2014

Oct Nov Dec Jan Feb Mar Apr May Jun Jul Aug Sep

Fabricate samples at Kulicke and Soffa for 51 additional test substrates.

Measure baseline ribbon bond strength.

Conduct accelerated life testing plan.

Validate lifetime estimation models for specific failure modes observed in accelerated tests.

Go/ No-Go

Key Deliverable

Go/No-Go: Ribbon bonds must meet minimum pull strength before proceeding with accelerated tests.

Key Deliverable: Report on the reliability of ribbon bond technology to industry.

Page 6: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

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Overview Sample Synthesis

Ribbon Bonding

Accelerated Testing Temperature

Elevation Temperature

Cycling

Power Cycling

Corrosion Testing

Vibration Testing

Pull Testing

Sample Evaluation

Lifetime Estimation

Model Validation

Approach

Bond Pad Optimization

Page 7: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

7

Sample Synthesis

Criterion Variation

Bonding Material Al Ribbon

Cu/Al-Clad

Ribbon Al Wire

Cross Section (µm) 2,000 x

200 Ribbon

1,000 x 100

Ribbon

300⌀ Wire

Ribbon Span (mm) 10 20

Tool Pattern Waffle Three-Ridge

Ribbon Stacking Not Stacked Stacked

Forced Bond Angle (°) 0 20

Bonding Power Level Low High

Bond Pad Interface Cu Si (Al)

Ribbon Material

Ribbon Span

Ribbon Cross Section

Tool Pattern

Forced Bond Angle Stacked Pads

Approach

Page 8: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

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Accelerated Testing Plan Accelerated Test Testing Condition Duration Standard

Initial Pull Test - - -

Temperature Elevation 150°C 500/1,000 hours JESD22-A103D

Temperature Cycling -40°C to 150°C, less than 20 second transition time 1,500/3,000 cycles JESD22-A104D

Corrosion Testing

130°C, 85% relative humidity 96 hours JESD22-A110D

110°C, 85% relative humidity 264 hours JESD22-A110D

121°C, 100% relative humidity 96 hours JESD22-102D

Power Cycling 40°C to 120°C, ~ 2 second cycled DC bias 3,000 cycles JESD22-A105C

Vibration Testing Combined vibration and thermal cycling Until interconnect fails HALT

Approach

Temperature

Vibration

Temperature + Vibration

Shear Stress

Flexural Stress Corrosion

Intermetallics

CTE (x 10-6/K) Silicon: 2.6 Copper: 16.5 Aluminum: 22.7

20

40

60

80

100

0 2 4 6 8

Tem

pera

ture

(°C)

Time (s)

Power CyclingThermal Cycling

Page 9: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

9

Sample Evaluation

1

2 3

4 5

Failure Modes 1: Wire/ribbon break 2: Heel failure – substrate 3: Heel failure – die 4: Bond lift-off – substrate 5: Bond lift-off – die

• Ribbon pull testing indicates the strength of the ribbon bond. • Bond strength and failure mode is recorded for each bond.

Approach

Page 10: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

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Sample Evaluation

Failure Mode: Wire Break

Approach

Page 11: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

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Sample Evaluation

Failure Mode: Heel Failure from Substrate

Approach

Page 12: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

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Sample Evaluation

Failure Mode: Bond Pad Lift-off from Substrate

Approach

Page 13: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

13

Sample Evaluation • The minimum bond strength is specified by MIL-STD-883H Method

2011.8. o Minimum bond strength requirement increases with respect to

increasing interconnect cross-sectional area.

1,000 x 100 µm, 1.28 N 500 µm, 2.13 N 2,000 x 200 µm, 3.50 N

300 µm, 0.96 N

0.01

0.1

1

10

10 100 1,000

Min

imum

Bon

d Pu

ll Li

mit

(N)

Equivalent Wire Diameter (µm)

Minimum Bond Strength

Approach

Page 14: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

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Sample Test Substrates • 51 test boards bonded at Kulicke and Soffa.

o 48 ribbons bonded per board in 12 parallel electrical paths. o Loop height to span ratio is 1:2.2.

Ribbon Bonding Test Board Layout

10 mm span, 0° angle, 8x

20 mm span, 0° angle, 7x 20 mm span, 20° angle, stacked, 3x

20 mm span, 20° angle, 6x

Low Power Level High Power Level

Technical Accomplishments

Page 15: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

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Bond Optimization

10

14

18

22

26

1,000 1,200 1,400 1,600 1,800

Defo

rmat

ion

(μm

)

Current (mA)

Current (mA)

Deformation (µm)

Deformation (visual)

1,070 11

1,210 15

1,370 19

1,490 21

1,630 23

• Ultrasonic bonding power, force, and application time contribute to the quality of the bond pad.

• Bond quality is measured by: o Bond pad deformation o Pull strength o Failure mode.

• Deformation pattern depth increases with increasing current levels.

Technical Accomplishments

Page 16: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

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Bond Optimization • Pull strength of test bonds was

measured to be approximately 9.8 N. • Pull failure modes varied with bond

current levels. o These criteria were used for

final selection of optimized bonding current level.

1

2 3

4 5

Failure Modes 1: Wire/ribbon break 2: Heel failure – substrate 3: Heel failure – die 4: Bond lift-off – substrate 5: Bond lift-off – die

0%

25%

50%

75%

100%

1,070 1,210 1,370 1,490 1,630

Failu

re M

ode

Perc

enta

ge

Bonding Current Level (mA)

1: Wire/ribbon break

2: Heel failure – substrate

3: Heel failure – die

4: Bond lift-off – substrate

5: Bond lift-off – die

Technical Accomplishments

Page 17: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

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Baseline Evaluation • Initial pull testing was completed on test substrates prior to accelerated

testing: o Al wire has a cross-section of 500 µm. o Ribbon interconnects have 1,000 µm x 100 µm cross-sections. o Bonding power for ribbon interconnects is specified as either low or

high.

Technical Accomplishments

0

5

10

15

20

25

30

Pull

Forc

e (N

)

Interconnect Material

10 mm20 mm

Al Wire Cu/Al Ribbon (low) Cu/Al Ribbon (high) Al Ribbon (high) Al Ribbon (low)

Page 18: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

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0%

25%

50%

75%

100%

Al Wire Cu/Al Ribbon (low) Cu/Al Ribbon (high) Al Ribbon (low) Al Ribbon (high)

Failu

re M

ode

Perc

enta

ge

Bonding Method

Wire/ribbon break

Heel failure

Bond lift-off

Baseline Evaluation • The failure mode was recorded for each

bond prior to accelerated testing: o Al wire bonds and Cu/Al-clad

ribbon failures showed bond lift-off failures.

o Al ribbon bonds exhibited heel failures.

1

2 2

3 3

Failure Modes 1: Wire/ribbon break 2: Heel failure 3: Bond lift-off

Technical Accomplishments

Page 19: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

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Accelerated Test Testing Condition Duration Temperature Elevation 150°C 500/1,000 hours

Post-Accelerated Testing Evaluation Technical Accomplishments

6789

101112

Pull

Forc

e (N

)

Testing Time

Al Ribbon (low) Temperature Elevation 10 mm20 mm

Initial 500 hours 1,000 hours

4

5

6

7

8

9

10

Pull

Forc

e (N

)

Testing Time

Al Ribbon (high) Temperature Elevation 10 mm20 mm

Initial 500 hours 1,000 hours

Page 20: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

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Temperature Elevation Evaluation • The failure mode was recorded for each

bond after temperature elevation testing: o Al ribbon heel failure mode

remained the same through temperature elevation testing.

1

2 2

3 3

Failure Modes 1: Wire/ribbon break 2: Heel failure 3: Bond lift off

Technical Accomplishments

0%

25%

50%

75%

100%

Initial 500 hours 1,000 hours

Failu

re M

ode

Perc

enta

ge

Testing Time

Al Ribbon (low) Temperature Elevation

Wire/ribbon break

Heel failure

Bond lift-off

0%

25%

50%

75%

100%

Initial 500 hours 1,000 hours

Failu

re M

ode

Perc

enta

ge

Testing Time

Al Ribbon (high) Temperature Elevation

Wire/ribbon break

Heel failure

Bond lift-off

Page 21: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

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Responses to Previous Year Reviewers’ Comments

The reviewer requested that the summary provide general observations and conclusions.

Knowledge transfer of failure modes to industry is a key milestone of this project.

… it was unclear to the reviewer how ultrasonic ribbon bonding labor and new equipment costs compares to standard wire bonding.

In many cases, wire bonding equipment can be retrofitted to add ribbon bonding capability.

The reviewer suggested that in the future an EV component manufacturer might be added to the collaborators.

Knowledge transfer to manufacturers will be accomplished through industry visits.

Page 22: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

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Collaboration and Coordination

• Partners o Curamik (Industry): technical partner on substrate design o Kulicke and Soffa (Industry): technical partner on wire and ribbon

bonding procedure

Page 23: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

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Remaining Challenges and Barriers

• The design-of-experiments required to cover all combinations is large: o Strategically choosing key experiments reduces

the overall set of combinations. o Sought experience from the technical community

to guide our choices in experimental tests and ribbon bonding geometries.

Page 24: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

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Proposed Future Work (FY14)

• Complete thermal, power, and environmental testing on ribbon bonds.

• Report on mechanical reliability of ribbon bonds under testing, and make recommendations to industry partners.

• Validate lifetime estimation models for specific failure modes observed in accelerated tests.

Page 25: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

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Summary • DOE Mission Support:

o Transitioning from wire bonding to ribbon bonding manufacturing will advance power electronics technology for compact, reliable packaging with higher current capabilities.

• Approach: o Synthesize ribbon bonds with varying material (Al, Cu/Al) and geometry

(cross section, span and loop height, pad length, number of stitches, stacked pads, and forced angles) parameters.

o Conduct comprehensive reliability testing, including temperature elevation, temperature cycling, power cycling, and corrosion testing.

o Revise wire bond models to be applicable to ribbon bonding. • Accomplishments:

o Test samples were synthesized, and reliability testing was initiated. o Initial accelerated tests and interconnect bond strength evaluations were

completed.

Page 26: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

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Summary • Collaborations:

o Curamik, Kulicke and Soffa • Future Work:

o Complete thermal, power, and environmental testing on ribbon bonds. o Report on mechanical reliability of ribbon bonds under testing and make

recommendations to industry partners. o Validate lifetime estimation models for specific failure modes observed in

accelerated tests.

Page 27: Reliability of Electrical InterconnectsPrincipal Investigator National Renewable Energy Laboratory Annual Merit Review and Peer Evaluation Meeting June 18, 2014 Washington, D.C. PR-5400-61358

For more information, contact:

Principal Investigator Douglas DeVoto [email protected] Phone: (303) 275-4256 APEEM Task Leader

Sreekant Narumanchi [email protected] Phone: (303) 275-4062

Acknowledgments:

Susan Rogers and Steven Boyd, U.S. Department of Energy Team Members:

Paul Paret Tao Xu (K&S)