recent development in superconducting filtershome.eps.hw.ac.uk/~ceejh3/presentations/2006...
TRANSCRIPT
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
Recent Development in Superconducting Filters
(Invited Talk)
Jia-Sheng Hong
Heriot-Watt University Edinburgh, UK
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
Outline
Introduction
HTS materials and substrates
Recent developed HTS Filters
Summary
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
Introduction
• The driving force behind the development of superconducting filters remains for mobile, satellite communications and some other niche applications.
• The extremely low resistance of superconducting materials has enabled the realization of miniature thin film filters with exceptional performances.
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
IntroductionIntroduction-- HTS Filter PublicationsHTS Filter Publications
05
101520253035404550
1996 1997 1998 1999 2000 2001 2002 2003 2004 2005
Search from IEEE Xplore
Total 260+ in recent 10 yearsTotal 260+ in recent 10 years
Year
Number
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
What is the Superconductor and HTS?What is the Superconductor and HTS?
Superconductors are materials which, when cooled below a certaintemperature, exhibit a zero intrinsic resistance to direct current (d.c.) flow.
The temperature at which the intrinsic resistance undergoes an abrupt change is referred to as the critical temperature or transition temperature (Tc).
The superconductors with transition temperature greater than 77 K, the boiling point of liquid nitrogen, are referred to as the high-temperature superconductors (HTS).
For alternating current (a.c.) flow, the surface resistance of the superconductor does not go to zero below Tc, but increases with increasing frequency.
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
HTS Materials HTS Materials
There are many hundreds of high-temperature superconductors with varying transition temperature Tc.
YBCO (yttium barium copper oxide) and TBCCO (thallium barium calcium copper oxide) are the two most popular and commercially available HTS materials.
Typical HTS materials
Materials TC (K)
YBa2Cu3O7-x (YBCO)
Tl2Ba2Ca1Cu2Ox (TBCCO)
≈92
≈105
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
Frequency (GHz)
1 10 100
Sur
face
Res
ista
nce
(mΩ
)
0.001
0.01
0.1
1
10
100
YBCO @77K
Cu @77K
Cu @300K
Surface Resistance of HTS Surface Resistance of HTS at RF/Microwave Frequenciesat RF/Microwave Frequencies
Micro ohms
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
HTS Thin Film TechnologyHTS Thin Film Technology
Devices can be patterned using wet or dry etching techniques, e.g.HTS thin films can be grown on a suitable
substrate using sputtering, laser ablation, or other thin film deposition techniques. HTS microstrip
Dielectric substrate
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
Substrates for HTS Thin FilmsSubstrates for HTS Thin Films
To obtain good quality film, the dimensions of crystalline lattice at the surface of the substrate should match that of lattice of HTS.
For RF applications the substrate should also have a low dielectric loss at RF.
There are three widely used substrates for growing HTS thin films for RF applications: Magnesium Oxide (MgO), Lanthanum Aluminate (LaAlO3), and Sapphire.
Substrates for HTS films
substrate rε (typical) δtan (typical)
LaAlO3 24.2 @ 77K 6106.7 −× @ 77K and 10 GHz
MgO 9.6 @ 77K 6105.5 −× @ 77K and 10 GHz
Sapphire 11.6 || c-axis @ 77K
9.4 ⊥ c-axis @ 77K
8105.1 −× @ 77K and 10 GHz
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
HTS filters for licensed frequency spectrum of mobile communications
Implement CQT (cascaded-quadruplet-trisection) or CQ designs for low insertion loss, high selectivity and/or linear group delay.
Implement HTS filters on sapphire wafers for low-cost
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
PLCID =r3L=l o3 nHC=co3 pF
TLINID= m34Z0=z34 OhmEL= 90 DegF0=F MHz
PLCID=r4L= lo4 nHC= co4 pF
TLINID=m45Z0=z45 OhmEL=90 DegF0=F MHz
PLCID=r1L= lo1 nHC= co 1 pF
TLINID= m12Z0= z12 Oh mEL =90 DegF0= F MHz
PLCID= r2L=lo 2 nHC=co2 pF
T LINID=m23Z 0=z23 OhmEL=9 0 DegF 0=F MHz
PL CID= r7L=lo7 nHC=co7 pF
TLINID=m78Z0=z78 OhmEL= 90 De gF0=F MHz
PLCID=r8L= lo8 nHC= co8 pF
TL INID=m89Z0 =z89 O hmEL=90 DegF0 =F MH z
PLCID=r5L=l o5 n HC=co5 pF
TLINID=m56Z0=z56 OhmEL= 90 D egF0=F MHz
PLCID= r6L=lo6 nHC=co6 pF
T LINID=m67Z 0=z67 O hmEL=90 DegF 0=F MHz
PLCID= r9L=lo 9 nHC=co9 pF
TLINID= m91 0Z0= z91 0 O hmEL =90 DegF0= F MHz
PLCID= r10L=lo 10 nHC=co10 pF
TLINID=zZ0=50 OhmEL=90 DegF0=F MHz
TLINID= z1Z0= 50 O hmEL =90 DegF0= F MHz
T LINID=M13Z 0=z13 OhmEL=-90 DegF 0=F MHz
TL INID=m47Z0 =z47 O hmEL=-90 DegF0 =F MH z
T LINID=m810Z 0=z810 OhmEL=90 DegF 0=F MHz
PORTP=1Z= 50 O hm
PORTP=2Z=50 Ohm
1010--pole CQT 10pole CQT 10--MHz HTS FilterMHz HTS FilterDesignDesign
10PORT 1 PORT 2
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
1010--pole CQT 10pole CQT 10--MHz HTS FilterMHz HTS FilterDesignDesign
1945 1950 1955 1960 1965
10 pole 10 MHz ideal
-100
-80
-60
-40
-20
0
S11
S21 M a g n i t u d e
(dB)
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
1010--pole CQT 10pole CQT 10--MHz HTS FilterMHz HTS FilterFabrication & packagingFabrication & packaging
•The designed filter was fabricated on a 0.43mm-thick sapphire wafer with double-sided YBCO films.
•The YBCO thin films have a thickness of 300 nm and a characteristic temperature of 87K.
•Both sides of the wafer are gold-plated with 200 nm thick gold (Au). The gold RF contacts are epoxy bonded to K-connectors with sliding contacts.
•The fabricated HTS filter used a wafer size of 47x17 mm.
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
1010--pole CQT 10pole CQT 10--MHz HTS FilterMHz HTS FilterMeasured performanceMeasured performance
dB 0
-10
-20
-30
-40
-50
-60
-70
-80
-90
-100
S21
Start: 1.880000 GHz Stop: 2.200000 GHz
1
1 S211.975000 GHz
-0.4885 dB
dB
0dB
0
-10 -5
-20 -10
-30 -15
-40 -20
-50 -25
-60 -30
-70 -35
-80 -40
-90 -45
-100 -50
S11 S21
Start:
1.960000 GHz Stop: 1.985000 GHz
1
1 S21 1.974000 GHz-0.7590 dB
Excellent narrow-band response with a good rejection over the entire UMTS transmission band (2110 - 2170 MHz).
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
18-pole HTS Filter with Group Delay EqualisationIntroduction
• The selectivity can be significantly increased with the use of high-order filters, and there is a trend to develop high-order HTS filters to take advantages of miniature high Q HTS resonators .
• Unfortunately, higher order selective-only filters tend to result in a poorer phase performance even over the band center.
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
18-pole HTS Filter with Group Delay EqualisationIntroduction
Frequency (MHz)
1955 1960 1965 1970 1975 1980
Tran
smis
sion
(dB)
-140
-120
-100
-80
-60
-40
-20
030-pole Chebyshev18-pole quasi-elliptic 18-pole quasi-ellipticwith linear phase
Frequency (MHz)
1960 1962 1964 1966 1968 1970 1972 1974
Gro
up d
elay
(ns)
200
400
600
800
1000
1200
140030-pole Chebyshev18-pole quasi-elliptic 18-pole quasi-ellipticwith linear phase
All the three filters have a pass band of 15 MHz from 1960 MHz to 1975 MHz with the same ripple level, and are supposed to meet a selectivity of
70-dB rejection bandwidth of about 16 MHz
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
18-pole HTS Filter with Group Delay EqualisationDesign
1 2 65 9
3 74 8
1810 1413 17
11 1512 16
PORT 1
PORT 2
M25Qe1 Qe2M69 M10,13 M14,17
Coupling structure (cascaded quadrupletCoupling structure (cascaded quadruplet))
For our design, only one quadruple section, which consists of the resonators 10 to 13, will be used for the group delay equalization, while the
other three quadruplet sections are arranged for the high selectivity.
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
18-pole HTS Filter with Group Delay EqualisationDesign
Circuit modelling Circuit modelling
1955 1960 1965 1970 1975 1980Frequency (MHz)
Magnitude Response
-150
-100
-50
0
DB(|S[1,1]|)18_pole_15_MHz
DB(|S[2,1]|)18_pole_15_MHz
1960 1965 1970 1975Frequency (MHz)
Group Delay
-200
0
200
400
600
800
1000
1200
1400
GD[1,2] ~ (ns)18_pole_15_MHz
The 18-pole filter was designed to have a 15 MHz pass band at a canter frequency of 1967.5 MHz.
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
18-pole HTS Filter with Group Delay Equalisation
Implementation of Microstrip Quadruplet A Implementation of Microstrip Quadruplet A
(1)
03460.001822.03460.005706.0005706.004089.0
1822.004089.00
10
0000
0000
2
4525
4534
3423
2523
⎥⎥⎥⎥
⎦
⎤
⎢⎢⎢⎢
⎣
⎡
−−
⋅=
⎥⎥⎥⎥
⎦
⎤
⎢⎢⎢⎢
⎣
⎡
−
MMMM
MMMM
The desired coupling matrix for the first quadruplet, The desired coupling matrix for the first quadruplet, i.e. coupled resonators 2, 3, 4 and 5, is given byi.e. coupled resonators 2, 3, 4 and 5, is given by
Normalized frequency
0.990 0.995 1.000 1.005 1.010
S21
(dB
)
-100
-80
-60
-40
-20
0
Theory Simulation
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
18-pole HTS Filter with Group Delay Equalisation
Implementation of Microstrip Quadruplet B Implementation of Microstrip Quadruplet B
The desired coupling matrix for the first quadruplet, The desired coupling matrix for the first quadruplet, i.e. coupled resonators 10, 11, 12 and 13, is given byi.e. coupled resonators 10, 11, 12 and 13, is given by
(2)
03423.001785.03423.002047.0002047.003419.0
1785.003419.00
10
0000
0000
2
13,1213,10
13,1212,11
12,1111,10
13,1011,10
⎥⎥⎥⎥
⎦
⎤
⎢⎢⎢⎢
⎣
⎡
⋅=
⎥⎥⎥⎥⎥
⎦
⎤
⎢⎢⎢⎢⎢
⎣
⎡
−
MMMM
MMMM
Normalized frequency
0.990 0.995 1.000 1.005 1.010
S21
(dB
)
-100
-80
-60
-40
-20
0
Theory Simulation
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
18-pole HTS Filter with Group Delay Equalisation
Final layout of 18Final layout of 18--pole HTS microstrip filter pole HTS microstrip filter
The overall chip size is 74 mm x 17 mm on sapphire substrate
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
18-pole HTS Filter with Group Delay Equalisation
Fabricated 18Fabricated 18--pole HTS microstrip filter pole HTS microstrip filter
The filter was then fabricated on a 0.43mm-thick sapphire (Al2O3) wafer with double-sided YBCO films. The YBCO thin films have
a thickness of 300 nm and a characteristic temperature of 87K. Both sides of the wafer are gold-plated with 200 nm thick gold
(Au) for the RF contacts.
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
18-pole HTS Filter with Group Delay Equalisation
Measured responses Measured responses
dB 0
dB 0
-10 -5
-20 -10
-30 -15
-40 -20
-50 -25
-60 -30
-70 -35
-80 -40
-90 -45
-100 -50
S11 S21
Start: 1.960000 GHz Stop: 1.980000 GHz
ns1400
1200
1000
800
600
400
200
0
-200
-400
-600
Group Delay
Start: 1.963000 GHz Stop: 1.978000 GHz
The measured bandwidth is close to 15 MHz. The insertion loss of1.4 dB at the band center was measured, including the losses of the
contacts. The resonator Q is estimated to be larger than 50,000.
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
4-pole HTS Elliptic Filter2005
The filters were fabricated by using e-beam lithography and wet etching process. YBCO film is double side polished type. YBCO film thickness is 700 nm in both sides and one side isprotected with a gold layer. The substrate is LaAlO3 with the thickness of 0.5 mm.
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
Superconducting filters for radio astronomySuperconducting filters for radio astronomyBirmingham University, 2006
Measured at 22K
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
An Eight Pole Self-Equalised Quasi-EllipticSuperconductor Planar Filter For Satellite
Applications2005
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
An Eight Pole Self-Equalised Quasi-EllipticSuperconductor Planar Filter For Satellite
Applications2005
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
Qu ~ 4000 at 77K1.5 dB insertion loss at 77K
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
Tuning Fork Filter Design for Hand Scribe TuningGenichi Tsuzuki, Matthew P. Hernandez and Balam A. Willemsen
Superconductor Technologies, Santa Barbara, CAIEEE MTT-S 2005
Tuning HTS filters:
•Mechanical tuning (e.g. tuning screws)
•Laser trimming
•Thin dielectric layer deposition
•Hand scribe tuning ->
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
Tuning Fork Filter Design for Hand Scribe Tuning
Scribing here
So as not to damage HTS resonator
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
Tuning Fork Filter Design for Hand Scribe Tuning
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
Highly-Selective Electronically-Tunable Cryogenic Filters Using Monolithic, Discretely-Switchable MEMS Capacitor Arrays
The use of Micro Electromechanical Systems (MEMS) with High Temperature Superconductors (HTS) has enabled a new class of highly-selective tunable filters. HTS microstrip filters are generally planar, and are thus very well suited to subsequent monolithic processing such as MEMS technology.
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
Highly-Selective Electronically-Tunable Cryogenic Filters Using Monolithic, Discretely-Switchable MEMS Capacitor Arrays
A low loss electronically tunable filter was demonstrated using HTS/Au MEMS switched capacitor arrays. The two-pole filter was tuned by simultaneously varying the capacitance of each resonator by equal amounts. The total tuning range was about 25% with an average Q of 7,000 at 77 K.
MEMS switches
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
Improvement of Power Handling Capability
A research team at NTT (Nippon Telegraph and Telephone) Corporation has focussed on improving power handling of HTS filters and found that
• IP3 is enhanced by increasing HTS thin film thickness t. For YBCO filters, IP3 at 70 K increased from 53 to 65 dBm as t increased from 620 nm to 800 nm.
• Different materials and deposition methods can affect the powerhandling.
• A possible trade-off between the passband insertion loss, i.e.|S21|, and power handling capability in HTS bandpass filters.
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
2005
High impedance line would result in a smaller Qu, but can reduce maximum current density so as to increase the power handling.
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
Improvement of Power Handling CapabilityNTT, 2005
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
Improvement of Power Handling CapabilityNTT, 2005
Measured IP3Measured IP3
The IP3 of the 100-ohm CPW HTS filter is 62 dBm at 60K, while the IP3 of the 50-ohm CPW HTS filter is 54 dBm.
This means that the former can handle over 6 times as much power as that of the latter.
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Dr. J.-S. Hong Department of Electrical, Electronic and Computer EngineeringHeriot-Watt University, UKEmail: [email protected]
Summary
• Some recent developments of HTS filters have been reviewed, including miniature high performances HTS filters for wireless and satellite communications as well as radio astronomy applications.
• There is also a new trend to develop electronically tunable HTS filters using RF MEMS and ferroelectronic devices.
• Power handling capability can be improved through designs, fabrications processes and materials.
• Superconducting filter R&D will certainly continue at least for niche applications.