properties of ferromagnetic layers grown on semiconductor …...properties of ferromagnetic layers...
TRANSCRIPT
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Properties of ferromagnetic layers grown on semiconductor by electrodeposition
C. Scheck, P. Evans, R. Schad and G. Zangari
University of AlabamaCenter for Materials for Information Technology, Box870209
Tuscaloosa, AL 35487, USA
Research supported by NSF-ECS-0070236. Made use ofNSF MRSEC Shared Facilities grant DMR-98-09423
Fall review MINT, 18 Nov. 2002Center For Materials For Information Technology
An NSF Materials Research Science and Engineering Center
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Motivation• Integration of ferromagnetic films with semiconductors⇒ implementation of novel devices based on spin-
dependent transport (spin transistor, MRAM)
• ECD is a particularly suitable process:• low energy → avoid interdiffusion, clean interface• high quality, epitaxial films can be produced
• Objective: understand and control growth and magnetic properties of magnetic films on GaAs(structure, intermixing, Hc, anisotropy, electric properties)
Center For Materials For Information TechnologyAn NSF Materials Research Science and Engineering Center
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ExperimentalGrowth
• Substrate: n-GaAs (011)/(001)• 1017 cm-3 Te doped• Back contact: Ga/In eutectic• EG&G 273A Galvanostat• Room Temperature• Graphite counter electrode
Galvanostat
Characterization• Structural: XRD (θ, φ), NMR,TEM• Magnetic: VSM, Torque• Electrical: 4-point probe• Thickness: XRR, XPS
Electrolyte: sulfate solution 0.1 M, pH 2.5Center For Materials For Information Technology
An NSF Materials Research Science and Engineering Center
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Thickness calibration
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0 50 100 150 2000
40
80
120 ~45% current efficiency
Thic
knes
s (n
m)
Deposition Time (Sec)
1° 2° 3° 4°
102
103
104
105
106 50 seconds 3.5mAcm2 GaAs (001)
Inte
nsity
(CPS
(log
10))
2θ
• X-ray reflectivity carried out on center part of large sample
• XRD measures Ni film + oxide layer
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Interface properties: XPS analysis (2)
-865 -860 -855 -850
0
100
200
pure Nioxidizedfilm
∆EDifference
Ni 2p
Inte
nsity
(Cou
nts
X 1k
)
Binding energy (eV)
∆E=3.2eV corresponds to Ni(OH)2
Oxide thickness Ni(OH)2 = 1.9nm
Shift in energy NiO = 1.4eV,Ni(OH)2 = 3.2eV
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A NSF Materials Research Science and Engineering Center
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Interface properties: XPS analysis (3)
X-rays
X-rays
-50 -45 -40 -35 -30 -25 -2050
100
150
200
250
300
350
6 nm 0°
6 nm 40°
14 nm 0°
As 3d
Inte
nsity
(Cou
nts)
Binding energy (eV)
-1170 -1140 -1110
5200
5400
5600
5800
6000
6200
6400 Ga 2p6nm 0°
Inte
nsity
(Cou
nts)
Binding energy (eV)
No Ga, As at the surfaceNo or little diffusion at interface
mfp @ 1444eV(As 3d) in Ni = 1.9nm
mfp @ 370eV(Ga 2p) in Ni = 0.75nm
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A NSF Materials Research Science and Engineering Center
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Electrical and magnetic measurements
No or little intermixing at the interface
Fuchs model:ρ(T) = ρ∝ + (3/8) (1-p)(ρ∝ × l∝ ) / T
with the bulk resistivity ρ∝ , the bulk mean free path l∝ , the “reflectivity” coefficient p0 20 40 60 80 100 120
0
400
800
1200
16000
200
400
600
(a)
0 10 20 300
250
500
ρ *T
(µΩ
.cm
.nm
)
Ni layer Thickness (nm)
(b)
MS (
emu/
cc) Bulk Ni : Ms=484 emu/cc
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Ni-Crystalline Structure (XRD):Out of plane In plane
30° 40° 50° 60° 70° 80° 90°
100
200
300
40° 45° 50°
100
200
300
GaAs (220)
Ni (111)
GaAs (220)
Ni (111) θ offset by 0.5°
Inte
nsity
(Cou
nts)
2θ
-180° -90° 0° 90° 180°
220
200
111
NiGaAs[110]GaAs[100]
Inte
nsity
(Cou
nts)
Φ
Epitaxial relationship Ni(111)[110] // GaAs(011)[110]
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Co-Crystalline Structure (XRD) (1):
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30° 40° 50° 60°
100
200
300
400
500
hcp-Co 100 hcp-Co 101
GaAs (220)θ offset 0.3°
Inte
nsity
(Cou
nts)
2θ
-180° -90° 0° 90° 180°
5
10
15
20
25
30
35
40
45
50
55
44.16° 280nm
Inte
nsity
(Cou
nts)
Φ
Co fcc (111) or hcp(002)
Hexagonal (hcp) or cubic (fcc) ???
Out of plane In plane
-180° -90° 0° 90° 180°0
5
10
15
20
2575.6° 280nm
Coun
tsΦ
Co fcc (220) or hcp (110)
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Co-Crystalline Structure (XRD) (2):
mixture of fcc and hcp phases confirmed by NMR
TEM
190 200 210 220 230 240
0
20
40
60
80
FCC HCP
Co-GaAs [011]30 nm3.5ma/cm
2 60 secs
Spin
-Ech
o In
tens
ity (a
.u.)
frequency (MHz)
NMR
FeNi: both perpendicular and in-plane XRD scan do not show any clear peaks besides GaAs (011).
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Magnetic Properties (1)
-180° -90° 0° 90° 180°0.0
0.5
1.00.0
0.5
1.00.0
0.5
1.0
GaAs[110]
GaAs[100]
21nm
Applied Field Angle
25nm
18nm
0 20 40 60 80 100 1200.0
0.5
1.00.0
0.5
1.00.0
0.5
1.0
Ni Thickness (nm)
Co
e.a h.a
FeNi
-1000 0 1000
-1
0
1
-1
0
1
-1
0
1
21nm
[110]GaAs [100]GaAs
Applied Field (Oe)
[110]GaAs [100]GaAs
25nm
Norm
aliz
ed M
agne
tizat
ion
[110]GaAs [100]GaAs
18nm
Uniaxial anisotropy e.a [001]GaAs for Ni e.a [011]GaAs for Co and FeNi
Hysterisis Remanence Squareness
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Magnetic Properties (2)
0 50 100 150 200 250 3000
100
200
300
400
500 Easy Ni Hard Ni Easy Co Hard Co Easy FeNi Hard FeNi
H c(O
e)
Thickness (nm)-20 -10 0 10 20 30 40 50 60 70 80
0
200
400
600
800
1000
FeNi
Co
Ni
H k(O
e)
Thickness
•Co films keep its anisotropy even for large thicknesses (>250nm) and so does Ni (up to 90nm for the range studied).
•Ni film exhibit a larger HK value (950 Oe) than anisotropy normal to crystalline anisotropy, which would be ascribed to stress
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Conclusions•No or little intermixing at the interface
•Epitaxial relationship for Ni Ni(111)[110] // GaAs(011)[110]
•Mixed structure fcc/hcp for Co but no clear peaks for FeNi
•Uniaxial anisotropy e.a [001]GaAs for Ni e.a [011] GaAs for Co, FeNi
•Future work:•Investigation of the Shottky barrier properties•Spin injection from Ferromagnetic contacts into semiconductor
Center For Materials For Information TechnologyAn NSF Materials Research Science and Engineering Center