project ‘effortless’

enabling advanced technologies Slide 1

Contact ; Iwan Davies, IQE plc, [email protected] ; 5th June 2014

Project ‘EFFORTLESS’

“Epitaxy Factory of the

Future fOR Transformational

Leverage of Europe’s

Compound Semiconductor

EcoSystem”

Domain: Process Technologies

supplying Smart Health, Energy,

Manufacturing and other

Societal Challenges

mailto:[email protected]


• Compound Semiconductors (CS) will play a critical role in virtually ALL future

KETs; Microelectronic, Photonic, Nano, Bio, Defence and Space Technologies,

because of their highly advanced electronic, optical and thermal properties

• EU collectively, and almost all member states individually, have invested heavily in

CS technologies over many years, including many National, FP1-7 and current and

planned H2020 projects

• Europe’s Micro-electronics, Photonics, Power, Defence and Space Industries have

a high reliance on CS technologies, some critical technologies of which are

sourced outside the EU

• Europe has a wealth of technology in CS technologies, and is home to many

globally competitive CS centric companies

• In order to take full advantage of this technology position, and support EU’s Vision

of providing 20% of Global chip production, Europe requires a high volume source

of lowest cost, highly sophisticated CS epitaxial wafers (epiwafers)

• EFFORTLESS will deliver this vision by bringing together Europe’s supply side and

downstream companies to provide a Globally competitive CS Epi supply chain


Current and Future technologies enabled by

Compound Semiconductors


A high capacity, ultra low cost, open access CS Epi Foundry, located

in De Cymru (South Wales), UK (IQE)

Designed and built using “green” Factory of the Future principles,

highest levels of automation, with low energy and materials

consumption to ensure lowest cost, highly complex CS epiwafer

structures, at up to 300mm diameter

Will provide a critical epiwafer supply to Europe’s growing CS

Ecosystem, bringing together most of Europe’s leading players, both

upstream and downstream

Will provide powerful leverage of existing and planned Pilot lines

Positioned to supply low-cost, high-volume commercial epiwafers to

e.g. existing Pilot-Line projects, from an EU source

Will act as centre of the World’s first CS cluster, Europe’s 5th

Semiconductor cluster

Will provide a clear route for Europe’s advanced semiconductor

industry to be highly competitive in global markets


Substrates

Crystal Growth

Equipment

Metrology Tools

Chemical

Precursors

EASEF

European

Advanced

Semiconductor

Epitaxy

Foundry

GaN, GaAs, InP and Sb–

based epitaxy.

Substrates including

Si, GaAs, InP, Ge, SiC,

GaN & Ga/InSb

ECSEL, Brussels, 5th

June 2014:

R&D / IP

System

Integrators,

SMEs and

RTOs

Chip

Foundries &

IDMs

E

UR

OP

EA

N S

UP

PL

IER

S

Current and

future EU

pilot lines

G

LO

BA

LLY

CO

MP

ET

ITIV

E

EU

SU

PP

LY

CH

AIN


Pre production/production epi wafer supply to

customers own design (std foundry model)

Licence of Epi technology from SME’s, Univ,

RTO’s, or customers for offer to Global Market

Transfer of Epi Technology from SME’s, Univ,

RTO’s or customers for customers own use

Allocation of Epi capacity for customer’s own use

(run by customers own staff, or EASEF staff)

Four modes of operating within

the Foundry

EASEF European Advanced

Semiconductor Epitaxy Foundry

• Factories of the Future

• 5G/LTE communications

• BIG data

• Lighting the future

• Bio-photonics

• Future cities

LEDs

Power / RF

CPV Solar

Wireless

Photonics

CMOS++

Equipment

Metrology

Chemicals

Substrates

• Healthcare

• Clean Energy

• Safety and Security

• Climate

• Transport

• Space / Defence

GaN

on

Si or SiC

VCSELs

IR Sensors &

Imaging

Si Photonics

InP Telecomms

HP Lasers

SMEs Univ,

RTOs

Means of Engagement and Inputs to the Foundry

Pre

-Pro

d /

Pro

d

SMEs - Small–medium

enterprises

RTO – Research and

Technology

Organisations

Univ - Universities

Lic

ence

Tran

sfer

Allo

cati

on


WP1 Equipment Suppliers WP 1.1 Epi-Growth & Processing Equipment Suppliers

Task – High throughput, low-cost ownership of up to 300mm-capable epiwafer tools; fully automated and capable of

clustering with each other and/or characterisation tools.

WP 1.2 Characterisation Equipment Suppliers

Task – Highest throughput, cluster-able tools for in situ and/or ex situ characterisation

WP2 Quick Fab Device Processing Task – Design Quick Fab tests across all product lines

WP3 Precursor / Raw Material Suppliers & Recycling WP 3.1 Precursor Suppliers & Recycling

Key Task – Bulk distribution of Group III metal-organics

Sub Task – onsite generation and / or purification of Group III sources

WP3.2 Substrate Suppliers

Task – low-cost high diameter substrates GaAs up to 200mm

InP 150-200mm

Si 300mm

Ga/InSb 150-200mm

SiC 150-200mm

Ge 150-200mm

FS-GaN 200-300mm

WP 3.3 Reclaim & Recycling

Task – reclaim of substrates, by-product and effluent


WP4 Epi-growth Services & Infrastructure WP4.1 Epi-wafer Supply Business models

Task – develop a business model to facilitate outside epi technologies

Pre production/production epi wafer supply to customers own design (std foundry model)

Licence of Epi technology from SME’s, Univ, RTO’s, or customers for offer to Global Market

Transfer of Epi Technology from SME’s, Univ, RTO’s or customers for customers own use

Allocation of Epi capacity for customer’s own use (run by customers own staff, or EASEF staff)

WP4.2 Information Systems – ERP, SPC, FoF, data handing

WP4.3 Fab Design – infrastructure, clean-room design, air-handling, services

WP5 Micro-Electronic Supply Chain Companies Task – low-cost, high–throughput and reliable epiwafers

WP 5.1 RF Supply Chains

WP 5.2 Power Electronics Supply Chains

WP 5.3 CMOS++ Supply Chains

WP6 Photonics Supply Chain Companies WP7 Impact, Dissemination & Exploitation

Task – low-cost, high–throughput and reliable epiwafers WP8 Management WP 6.1 Infra-red (IR)

WP6.2 Solar CPV

WP6.3 VCSEL

WP6.4 InP Photonics

WP6.5 LEDs

WP6.6 High-Power Lasers


Existing ENIAC Projects AGATE

EPPL

E2COGaN

CSSL

E2SG

VIDaP

Existing FP7 HiPoSwitch

Potential New H2020 Progs. ICT-28 PIC Pilot Line

ICT-28 MWIR Sensors Pilot Line

Potential New ECSEL Projects

Potential interaction with existing and future European Projects:

project ‘effortless’

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