pressure sensor and strain sensor - … sensor and...typical bridge for capacitance measurement. ......

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PRESSURE SENSOR AND STRAIN SENSOR

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Page 1: PRESSURE SENSOR AND STRAIN SENSOR - … SENSOR AND...Typical bridge for capacitance measurement. ... • Industrial Products, ... Samer Elalam “Mems application leading • the small”

PRESSURE  SENSORAND 

STRAIN SENSOR

Page 2: PRESSURE SENSOR AND STRAIN SENSOR - … SENSOR AND...Typical bridge for capacitance measurement. ... • Industrial Products, ... Samer Elalam “Mems application leading • the small”

Pressure sensor

• A pressure sensor measures pressure typically of gases  or of liquids. 

• Pressure is an expression of the force required to stop a fluid from expanding, and    is usually stated in terms of force per unit area.

• A pressure sensor generates a signal related to the pressure imposed. 

Page 3: PRESSURE SENSOR AND STRAIN SENSOR - … SENSOR AND...Typical bridge for capacitance measurement. ... • Industrial Products, ... Samer Elalam “Mems application leading • the small”

Types of pressure sensor measurement

• Absolute pressure sensor

• Gauge pressure sensor

• Vacuum pressure sensor 

• Differential pressure sensor 

• Sealed pressure sensor

Page 4: PRESSURE SENSOR AND STRAIN SENSOR - … SENSOR AND...Typical bridge for capacitance measurement. ... • Industrial Products, ... Samer Elalam “Mems application leading • the small”

Different ways to apply pressure to the diaphragm

Page 5: PRESSURE SENSOR AND STRAIN SENSOR - … SENSOR AND...Typical bridge for capacitance measurement. ... • Industrial Products, ... Samer Elalam “Mems application leading • the small”

Packaged pressure sensor

Page 6: PRESSURE SENSOR AND STRAIN SENSOR - … SENSOR AND...Typical bridge for capacitance measurement. ... • Industrial Products, ... Samer Elalam “Mems application leading • the small”

Packaged pressure ready for testing

Page 7: PRESSURE SENSOR AND STRAIN SENSOR - … SENSOR AND...Typical bridge for capacitance measurement. ... • Industrial Products, ... Samer Elalam “Mems application leading • the small”

Crossection

Page 8: PRESSURE SENSOR AND STRAIN SENSOR - … SENSOR AND...Typical bridge for capacitance measurement. ... • Industrial Products, ... Samer Elalam “Mems application leading • the small”

Wheatstone bridge Circuit 

Page 9: PRESSURE SENSOR AND STRAIN SENSOR - … SENSOR AND...Typical bridge for capacitance measurement. ... • Industrial Products, ... Samer Elalam “Mems application leading • the small”

A micro pressure sensing unit utilizing capacitance 

signal transduction

Page 10: PRESSURE SENSOR AND STRAIN SENSOR - … SENSOR AND...Typical bridge for capacitance measurement. ... • Industrial Products, ... Samer Elalam “Mems application leading • the small”

Typical bridge for capacitance measurement

Page 11: PRESSURE SENSOR AND STRAIN SENSOR - … SENSOR AND...Typical bridge for capacitance measurement. ... • Industrial Products, ... Samer Elalam “Mems application leading • the small”

Piezoresistive pressure sensor

• Piezoresistive pressure sensors used diffused or implanted resistors that measure the strain on a silicon diaphragm.

• Piezoresistive pressure sensors are one of the very-first products of MEMS technology.

• Used in biomedical applications, automotive industry and household appliances.

Page 12: PRESSURE SENSOR AND STRAIN SENSOR - … SENSOR AND...Typical bridge for capacitance measurement. ... • Industrial Products, ... Samer Elalam “Mems application leading • the small”
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Advantages

• Low cost sensor fabrication.• Advanced processing technology.• Different pressure levels can be achieved

according to the application.• Also, various sensitivities can be obtained.

Page 14: PRESSURE SENSOR AND STRAIN SENSOR - … SENSOR AND...Typical bridge for capacitance measurement. ... • Industrial Products, ... Samer Elalam “Mems application leading • the small”

Application

• Health care Industry,

• Aerospace Industry,

• Industrial Products,

• Consumer Products,

• Telecommunication ,etc

Page 15: PRESSURE SENSOR AND STRAIN SENSOR - … SENSOR AND...Typical bridge for capacitance measurement. ... • Industrial Products, ... Samer Elalam “Mems application leading • the small”

Strain sensor

• Strain is defined as the change in length of a component divided by the length of a component.

• Most widely used method to measure small strains in mechanical components. 

• It does not  have a unit of measurement.

• The unit of microstrain or strain times 10 to the 6th power, is often used.    

Page 16: PRESSURE SENSOR AND STRAIN SENSOR - … SENSOR AND...Typical bridge for capacitance measurement. ... • Industrial Products, ... Samer Elalam “Mems application leading • the small”

• A strain gauge is the primary sensor type used to measure strain.

• The primary type of strain gauge is a metal foil gauge.

• A strain gauge consists of a long thin “wire” of metal foil that is wrapped back and forth across a grid, called a matrix. 

• The matrix is attached to a thin flexible backing material with an adhesive, often a cyanoacrylate.

Page 17: PRESSURE SENSOR AND STRAIN SENSOR - … SENSOR AND...Typical bridge for capacitance measurement. ... • Industrial Products, ... Samer Elalam “Mems application leading • the small”

Types of strain sensor

Surface strain sensor• Attached to the surface of a structure

• Measure with strain gage and strain gage are thin and light so it can be attached to thin plates or structure.

Strain pin sensor• Inserted to the prepared mounting bores to measure strain within the structure.

• Here pin shaped sensor that  mount in a specially prepared bore.

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Strain gauge in different structure

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Strain Gauge Configurations

• Strain gauges are available in a wide variety of sizes and configurations, depending on the material and geometry of the part to be tested and the expected strain levels..

• The most common multiple matrix configuration is the bi‐axial strain gauge. 

Page 20: PRESSURE SENSOR AND STRAIN SENSOR - … SENSOR AND...Typical bridge for capacitance measurement. ... • Industrial Products, ... Samer Elalam “Mems application leading • the small”

Strain Gauge Functionality

• Resistive sensor. 

• Calculated based on a measured voltage.

• Cross‐section area increases if it is compressed.

• Reduces the resistance of the wire.

• Increases the resistance of the gauge.

• Measured voltage is converted to strain by wheatstone  Bridge

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• REFERENCES:• [1] Janusz Bryzek, BN Ventures “Principles of• MEMS”, Fremont, CA, USA.• [2] Samer Elalam “Mems application leading• the small” 76512567 12-01-04• [3] Jeremy A. Walraven Sandia, “Introduction• to Applications and Industries for• Microelectro- mechanical Systems• (MEMS)”, National Laboratories.• Albuquerque, NM USA

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Thank you!!!!