5-axis micro processing

precSYS

The precSYS micromachining sub system enables ultra-short-pulsed laser micro processing of flexibly variable geometries, e.g. fabrication of positively/negatively conical or ideal cylindrical, round or elliptical drill holes with high aspect ratios. The precSYS com-bines leading-edge high-end scan technology, integrated control, embedded PC and user-friendly software. This enables laser micro processing with ultimate dynamic performance and precision.

Its graphical user interface facilitates straightforward creation and testing of micro-processing jobs. precSYS's robust, innovative construction ensures maximum dependability in industrial applica-tions. Its compact, modular design and specially adapted hard-ware and software interfaces allow easy, optimal integration into customer-specific laser machines. precSYS offers two observation ports for process-monitoring add-ons.

For time-efficient system alignment, SCANLAB provides factory pre-alignment and calibration and offers an optional automatic fine adjustment package. Key advantages:

• Flexible processing with variable angle of incidence

• Maximum dependability and stability for highest precision

• Speed-independent contour fidelity thanks to innovative control algorithms

• Ultra-precise pre-calibration and optional automatic fine adjustment

• User-friendly creation of micro-processing operations with 3D visualization

• Industrial suitability and highly-integrated, modular design

Typical applications:

• Structuring • Ablation • Drilling • Cutting

Typical industries:

• Automotive • Aerospace • Textiles • Medical technology • Precision engineering

precSYS

Principle of Operation

precSYS positions the focal spot in 3D onto workpieces with precise AOI tracking (angle of incidence). You can vary progression of focal motion, angles of incidence and laser intensities etc.

High-end scan technology and low moving masses ensure highly dynamic processing with trepanning or precession frequencies up to 500 Hz (30 000 rpm). Advanced digital encoders, control algorithms and optimized servo control enable contour-true, speed-independent processing with maximum precision.

And active water cooling makes the system robust against load-dependent temperature fluctuations.

Moreover, the system's innovative beam guidance provides suitability for high-power lasers. A sealed, gas-purged optical beam path guarantees optimum cleanliness even in harsh industrial conditions – thereby enhancing system service life and processing accuracy.

Due to precSYS's possibility to position the laser beam in 5 axis, it offers highest flexibility for process development beyond typical percussion drilling, spiral drilling and trepanning.

Quality

The high quality, dependability and indus-trial suitability of SCANLAB's scan solutions are the result of long-standing experi-ence in developing and manufacturing galvanometer scanners and scan systems. SCANLAB scan heads have been deployed by industry in large quantities for many years. Each individual scan head earns ap-proval for customer delivery only after first passing the SCANcheck endurance test.

Replaceable protective window tray

Industry-proven connectors Mounting holes near objective for precise positioning of the beam exit (3-point support)

AOI < 0°AOI > 0° AOI = 0°

xy

z

x

yz

α,β

laser focus

laser beam axis

angular orientation

3D positioning

process gas nozzle

3D laser focal motion examples

Angle of incidence (AOI) during laser focal motion

High industrial suitability

Laser focus

laser beam axis

opticalaxis

precSYS

DrillControl software and graphical user interface (GUI)

An intuitive interface (GUI) with 3D job visualization helps you easily create and simulate processing jobs. Control and remote communication are via Ethernet. Factory calibration enables description of laser motion directly in metric units within precSYS's cartesian image field coordinate system.

Job designer

The job designer depicts processing steps in 3D and enables straightforward job pro-gramming, as well as varying the diverse process parameters.

• Drill sequence definition with 3D viewer

• Manage drill jobs on the precSYS system (embedded PC)

• Comprehensive testing possibilities

• Series production: easy management of one or several systems

Remote interface for defining, selec-ting and running jobs

• Simple protocol for integrating with process control

• Job definition via XML (incl. validation)

• Parameter adaption for compensating workpiece tolerances

200-µm bore holes in steel – compared to a hair

100-µm bore holes in steel – burr-free, molten-free entry point with very good inner-wall surface quality

screw geometry ellipse with marking negative cone 2 positive cones

Processing results

The precSYS has been developed to ra-pidly machine fine hole diameters in the sub-millimeter range (e.g. ≥ 40 µm) with high aspect ratios. In combination with ultra short pulsed laser beams and adap-ted process management, perfectly sharp edges at a cylindrical hole entry and exit with smooth wall surface roughness can be achieved (see the right SEM picture).

DrillControl graphical user interface

3D visualisation of the laser focal motion

Processcontrol

Embedded PCand RTC5

DrillControlsoftware

Ethernet network(optionally with DHCP server)

Ethernetinterface

Power/SPS/Laserinterface

Laser andother systemcomponents

Beamconditioning

SCANLAB America, Inc. · 100 Illinois St · St. Charles, IL 60174 · USA

Tel. +1 (630) 797-2044 · Fax +1 (630) 797-2001

info@scanlab-america.com · www.scanlab-america.com

precSYS

SCANLAB AG · Siemensstr. 2a · 82178 Puchheim · Germany

Tel. +49 (89) 800 746-0 · Fax +49 (89) 800 746-199

info@scanlab.de · www.scanlab.de

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Preliminary specifications

Wavelength 1030 nmLaser pulse energy ≤ 250 µJ

Typ. average power 50 W

Typ. pulse length 300 fs – 10 psField size (diameter)Precision processing 2.5 mmMarking 5 mmEntrance beam diameter (1/e2) 2 mmClear aperture at entrance 4 mmObjective focal length 75 mmFocus diameter in image field (1/e2) approx. 20 µmConvergence angle of focused beam (full opening angle at 1/e2 level)

0.08 rad

Max. focus range in z direction ± 1.0 mmMax. speed in z direction 10 mm/sTheoretical position resolution in z direction 42 nmMax. angle of incidence (AOI) ± 7.5°Trepanning / precession frequency ≤ 500 Hz (30 000 rpm)Position resolution in image field 17 nmTyp. positioning accuracy in image field 0.5 µmFocus polarization circular Weight approx. 30 kgDimensions W x H x D without optional components approx. 360 mm x 335 mm x 300 mmwith optional components approx. 725 mm x 335 mm x 300 mm (Beam conditioner unit and sensor for automatic fine adjustment)

Observation port wavelength 880 nmProcess gas nozzle opening (optional: other nozzle openings available if needed)

1 mm

Replaceable protective window yes

Options

• Beam conditioning components for adapting the entrance beam's diameter and divergence, as well as adjusting cir-cular polarization within the image field (alternatively as unit with housing)

• Beam position sensor with software-based automatic fine adjustment

• Components for optical process moni-toring

Side view precSYS Beam Entrance Side

all dimensions in mm

92100.03

303.5 8

3119

4x M4 - 7 deep

50

2x Ø4H7 - 7

deep

49.4

2.1

133.

5

164111.08 200250

108.

4

3x Ø6.65

3xØ10+0.010/+0.019

Ø90 h6

Ø80 h6

263.5 96

5527

1

3±0.

3

73

132

beam entrance

55.7

+1/

-1.4

9.9±

0.5

beam exit

beam position sensor *

process-monitoring components *

beam conditioning unit *

* optional