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PrecisionPositioning Systems

Walter Uhl, the company is a reputed system supplier of high-precision drive solutions with experience in the field of precision mechanics since its founding in 1943. We offers a broad range of linear and rotary stages as well as motion contollers, stands, and customized systems for research, science and industry.

1. Linear Stages

2. XY Stages

3. Rotary Stages

4. Lift Stages

5. Stands & Accessories

6. Motion Controller

INNOVATION

EXPERIENCE

ACCURACY

PRECISION

QUALITY

1. Linear Stages

LT Series

The linear stages of the LT series are distinguished by their compact design and high accuracy.The bellows protect guides, ball screws and measuring systems against external influences.The linear stages of the LT series are available in travel range of 50 to 300 mm.

1.1

Accuracy Class:A: C: Measuring System:O: M: D: Motors:S:

G: Traveling Range:N:L:M:

Order Code

LT5-LSOC

straightness, flatness: 1 µm / 50 mmdelivery with measuring protocolstraightness, flatness 2.5 µm / 50 mm without measuring systemlinear encoder, 1 Vpp,20 µm pitch, reference mark at midpoint,steel scale, positioning accuracy:2.5 µm + L/200 (L in mm),delivery with measuring protocolrotary encoder stepper motor Phytron ZSS33.200.1,2DC motor Maxon RE025 24V 50 mm100 mm170 mm

LT5-NSOC LT5-MSMA

Sample Configurations:

Linear Stage

LT5

1.2

A

B

C

LT5-Nxxx

100

85

1

LT5-Lxxx

125

115

3

LT5-Mxxx

160

155

3

60

60

80

80

AB

1010

74,5

180

C x

60 =

6M

n10

5,74x M5

20

40 60

50 mm 100 mm170 mmStress-relieved aluminum alloy, black anodizedBacklash-free preloaded cross roller guides with anti-creeping cagesBacklash-free preloaded linear guidewaysBacklash-free preloaded ballscrew, pitch 1 mm1.8 kg2 kg2.7 kg

Specifications:Travel N:Travel L:Travel M:Material:Guiding N, L:Guiding M:Drive:Weight N:Weight L:Weight M: Options:- custom motors- encoder TTL

Version with

linear encoder

1.3

Order Code

LT6-LSMA

straightness, flatness: 1 µm / 100 mmdelivery with measuring protocolstraightness, flatness: 2 µm / 100 mm without measuring systemlinear encoder, 1 Vpp,20 µm pitch, reference mark at midpoint,steel scale, positioning accuracy:2.5 µm + L/200 (L in mm),delivery with measuring protocolrotary encoder stepper motor Phytron ZSS33.200.1,2DC motor Maxon RE025 24Vstepper motor Phytron ZSS43.200.2,5with magnetic brake 200 mm300 mm


G: Z: Traveling Range:N:L:

Linear Stage

LT6


LT6-LZOC

1.4

LT6-Nxxx

225

A

LT6-Lxxx

265

120

160

185

120

160

AA

96,5

50

100

300

100

6M

5,7

10n

4x M5

Specifications:Travel N:Travel L:Material:Guiding:Drive:Weight N:Weight L: Options:- custom motors- encoder TTL

200 mm300 mmStress-relieved aluminum alloy, black anodizedBacklash-free preloaded linear guidewaysBacklash-free preloaded ballscrew, pitch 2 mm7 kg9.5 kg

1.5


Z: Traveling Range:N:L:

straightness, flatness: 1 µm / 100 mmdelivery with measuring protocolstraightness, flatness: 2 µm / 100 mm without measuring systemlinear encoder, 1 Vpp,20 µm pitch, reference mark at midpoint,positioning accuracy:2.5 µm + L/200 (L in mm),delivery with measuring protocolrotary encoder stepper motor Phytron RSS65.200.2,5stepper motor Phytron RSS65.200.2,5with magnetic brake 200 mm300 mm

Order Code

LT8-LSMA

Linear Stage

LT8

1.6

LT8-Nxxx

225

A

LT8-Lxxx

275

120

160 2030

120

160

AA

113

120

360

120

4x M8

n11

6,8

8M

80

Specifications:Travel N:Travel L:Material:Guiding:Drive:Weight N:Weight L: Options:- custom motors- encoder TTL

200 mm300 mmStress-relieved aluminum alloy, black anodizedBacklash-free preloaded cross roller guidesBacklash-free preloaded ballscrew, pitch 5 mm14 kg18 kg

1.7

2x LT8-LSMA

PT6-NSOC

Walter Uhltechnische Mikroskope GmbH & Co. KG

Loherstrasse 7D-35614 Asslar

Telefon: ++49 (0) 6441 8 86 03Telefax: ++49 (0) 6441 8 57 18email: [email protected]: www.walteruhl.com

Application exampleSpecial setup for measuring semiconductor structures

1.8

Linear Stages

PT Series

The linear stages of the PT series are distinguished by their compact design and high accuracy. Because of theirstructure without protruding roller cages they are more accurate and have a higher load capacity than the LT series. They are particularly suitable for use as a vertical axis. The linear stages of the PT series are available in travel range of 25 to 300 mm.

1.9

Order Code

PT3-NSOC

straightness, flatness: 2 µm / 25 mm without measuring systemrotary encoder stepper motor Faulhaber AM1524with gearbox 15/5 or 15/8DC motor Faulhaber 1524E012SRwith gearbox 15/5 or 15/8 25 mm

Accuracy Class:C: Measuring System:O: D: Motors:S: G: Traveling Range:N:

3-Axis-Manipulator

PT3-D3L

Precision Linear Stage

PT3


1.10

27

60

44

60

23,5

23,5

32

n14

27

44

27

44

8x M2,5

25 mmStress-relieved aluminum alloy, anodizedBacklash-free preloaded cross roller guidesLow-backlash leadscrew, pitch 0.5 mm0.3 kg

Specifications:Travel :Material:Guiding:Drive:Weight: Options:- custom motors- encoder TTL

4x M4 &

Counterbore f. M2.5/DIN84

1.11

Order Code

PT4-NSOC

straightness, flatness: 0.5 µm / 25 mmdelivery with measuring protocolstraightness, flatness: 1 µm / 25 mm without measuring systemlinear encoder, 1 Vpp,20 µm pitch, reference mark at midpoint,gold-scale, positioning accuracy:2.5 µm + L/200 (L in mm),delivery with measuring protocolrotary encoder stepper motor Phytron ZSS33.200.1,2DC motor Maxon RE025 24V 25 mm


G: Traveling Range:N:

PT4-NSMA PT4-NGDC


PT4


1.12

3-Axis-Manipulator

PT4-S3

60

65

80

1560

80

1775

n26

48 15

50

50

65

33,5

4x M4

4x M5

4x M3

25 mm Stress-relieved aluminum alloy, black anodizedBacklash-free preloaded cross roller guidesBacklash-free preloaded ballscrew, pitch 1 mm1.2 kg

Specifications:

Travel N:Material:Guiding:Drive:Weight: Options:

- custom motors- encoder TTL

4x Counterbore

f. M3/DIN912

1.13


G:Z: Traveling Range:N:

straightness, flatness: 0,5 µm / 50 mmdelivery with measuring protocolstraightness, flatness: 1 µm / 50 mm without measuring systemlinear encoder, 1 Vpp,20 µm pitch, reference mark at midpoint,steel scale, positioning accuracy:1.5 µm + L/200 (L in mm),delivery with measuring protocolrotary encoder stepper motor Phytron ZSS33.200.1,2DC motor Maxon RE025 24Vstepper motor Phytron ZSS43.200.2,5with magnetic brake 50 mm

Order Code

PT5-NSOC

PT5-NSOCPT5-NZOC



PT5

1.14

A A

40

7,5

30

30

30

30

7,5

()

135

75

60

85

10050

5M 5M

n8

4,6

6M

n10

5,7

Specifications:

Travel:Material:Guiding:Drive:Weight: Options:- custom motors- encoder TTL


1.15

straightness, flatness: 1 µm / 100 mmdelivery with measuring protocolstraightness, flatness: 3 µm / 100 mm without measuring systemlinear encoder, 1 Vpp,20 µm pitch, reference mark at midpoint,steel scale, positioning accuracy:1.5 µm + L/200 (L in mm),delivery with measuring protocolrotary encoder stepper motor Phytron ZSS33.200.1,2DC motor Maxon RE025 24Vstepper motor Phytron ZSS43.200.2,5with magnetic brake 100 mm

Accuracy Class:A: C: Measuring System:O: M: D: Motors:S: G:Z: Traveling Range:N:

Order Code

PT6-NSOC

PT6-NZOCPT6-NSMA



PT6

1.16

5M n8

4,6

10,5

6Mn10

60

60

60

12,5

12,5

60

130

40

3,5

42

205

83

Specifications:

Travel N:Material:Guiding:Drive:Weight: Options:- custom motors- encoder signal TTL

100 mmStress-relieved aluminum alloy, black anodizedBacklash-free preloaded cross roller guidesBacklash-free preloaded ballscrew, pitch 1 mm3 kg

1.17

Order Code

PT7-NSOC


G: Z: Traveling Range:N:

straightness, flatness: 1 µm / 100 mmdelivery with measuring protocolstraightness, flatness: 2 µm / 100 mm without measuring systemlinear encoder, 1 Vpp,20 µm pitch, reference mark at midpoint,steel scale, positioning accuracy:1.5 µm + L/200 (L in mm),delivery with measuring protocolrotary encoder stepper motor Phytron ZSS33.200.1,2DC motor Maxon RE025 24Vstepper motor Phytron ZSS43.200.2,5with magnetic brake 150 mm

PT7 custom version withsealed linear encoder

PT7-NZOC



PT7

1.18

6090

150

60

60

60

60

65

65

20

100

90

90

90

310

18059

50

81,5

4x M6

60

150

60

60

60

150

280

15

6580

Specifications:

Travel N:Material:Guiding:Drive:Weight: Options:- custom motors- encoder signal TTL- sealed linear encoder


20x M5 &

Counterbore f. M4/DIN912 4x M5 &

Counterbore f. M4/DIN912

8x M6 &


4x M6 &


1.19

straightness, flatness: 1 µm / 100 mmdelivery with measuring protocolstraightness, flatness: 2 µm / 100 mm without measuring systemlinear encoder, 1 Vpp,20 µm pitch, reference mark at midpoint,steel scale, positioning accuracy:1.5 µm + L/200 (L in mm),delivery with measuring protocolrotary encoder stepper motor Phytron ZSS33.200.1,2DC motor Maxon RE025 24Vstepper motor Phytron ZSS43.200.2,5with magnetic brake 200 mm300 mm


G: Z: Traveling Range:N:

L:

Order Code

PT8-NSOC

PT8-NZOC PT8-LSOC


PT8


1.20

A

B

C

D

E

PT8-Lxxx

460

4

7

20

50

PT8-Nxxx

360

3

5

30

0

60

100

150

18059

D420

Cx60=

30

400

Bx100=

A

76,5

15E

330

50

D420

Cx60=

60

150

50

16x M5

10x M6

4x M6

8x M5

Specifications:Travel N:Travel L:Material:Guiding:Drive:Weight N:Weight L: Options:

- custom motors- encoder signal TTL- sealed linear encoder

200 mm300 mmStress-relieved aluminum alloy, black anodizedBacklash-free preloaded cross roller guidesBacklash-free preloaded ballscrew, pitch 2 mm13.2 kg14.5 kg

24x M6 &

Counterbore f.

M5/DIN912

1.21




3x PT6-NZMA

KT7-NSMA

RT5-NSMA

Application exampleSpecial setup for measuring shaving heads

1.22

2. XY Stages

KT Series

The XY stages of the KT series are especially suitable foruse in measuring microscopy. Due to the open frame design, the measuring objects can also be captured in transmitted light. Another application of open frame stages is the thickness measurement of flat components, such as wafers, with two oppositely arranged sensors. The XY stages of the KT series are available in travel ranges of 50 x 50 to 420 x 300 mm.

2.1

KT5-NMLC KT5-LHMA KT5-LSOC

Accuracy Class:A: C: Measuring System:O: M: D:A:L: Motors:H:S:

G: M: Traveling Range:N:L:

straightness, flatness: 1 µmdelivery with measuring protocolstraightness, flatness: 5 µm without measuring systemlinear encoder, 1 Vpp,20 µm pitch, reference mark at midpoint,sealed glass scale, positioning accuracy:2.5 µm + L/200 (L in mm),delivery with measuring protocolrotary encoderanalog micrometerdigital micrometer manually operated with coarse and fine drivestepper motor Phytron ZSS33.200.1,2DC motor Maxon RE025 24Vmicrometer (mearuring range 25 mm) 50 mm x 50 mm100 mm x 50 mm

Order Code

KT5-NSMA


XY Stage

KT5

2.2

A

KT5-Nxxx

145

KT5-Lxxx

205

50 A 10

90

90

145

135

75

n100

52

4x M5

4x M5

Specifications:

Travel N:Travel L:Material:Guiding:Drive:Weight N:Weight L: Options:- custom motors- encoder signal TTL

50 mm x 50 mm (25 mm x 25 mm with micrometer)100 mm x 50 mmStress-relieved aluminum alloy, black anodizedBacklash-free preloaded cross roller guidesBacklash-free preloaded ballscrew, pitch 1 mm4 kg5 kg

2.3

KT6-NSMA KT6-LHMA KT6-LGDC

Accuracy Class:A: C: Measuring System:O: M: D: Motors:H:S:

G: Traveling Range:N:L:

straightness, flatness: 1 µmdelivery with measuring protocolstraightness, flatness: 5 µm without measuring systemlinear encoder, 1 Vpp,20 µm pitch, reference mark at midpoint,sealed glass scale, positioning accuracy:2.5 µm + L/200 (L in mm),delivery with measuring protocolrotary encoder manually operated with coarse and fine drivestepper motor Phytron ZSS33.200.1,2DC motor Maxon RE025 24V 100 mm x 100 mm150 mm x 100 mm

Order Code

KT6-LSOC


XY Stage

KT6

2.4

A

B

C

KT6-Nxxx

210

150

135

KT6-Lxxx

260

200

185

C

130

150

210

B

A50 1060

4x M5

4x M5

100 mm x 100 mm150 mm x 100 mmStress-relieved aluminum alloy, black anodizedBacklash-free preloaded cross roller guidesBacklash-free preloaded ballscrew, pitch 1 mm7,5 kg9 kg

Specifications:Travel N:Travel L:Material:Guiding:Drive:Weight N:Weight L: Options:- custom motors- encoder signal TTL

2.5

XY Stage

KT6-VM3

150 mm x 100 mm Stress-relieved aluminium alloy, black anodized Backlash-free preloaded cross roller guides straightness, flatness: 1 µmdelivery with measuring protocol Backlash-free fine drive with0.5 mm pitch in a range of 10 mmand quick release for free movement Linear encoder, TTL, 20 µm pitch,reference mark at midpoint,steel scale, positioning accuracy [µm]:1.8 + L/200 (L in mm),delivery with measuring protocol 10 kg

Order-Nr.: VM3-602

SpecificationsTravel: Material: Guiding: Accuracy Drive: Measuring system: Weight: Options:- encoder signal 1 Vpp

2.6

205

150

286

150

75,5

250

n159

n9

150

4x M5

2.7

XY Stage

KT6-VM4

150 mm x 100 mm± 5° Stress-relieved aluminium alloy, black anodized Backlash-free preloaded cross roller guides straightness, flatness: 1 µmdelivery with measuring protocol Backlash-free fine drive with0.5 mm pitch in a range of 10 mmand quick release for free movement Linear encoder, TTL, 20 µm pitch,reference mark at midpoint,steel scale, positioning accuracy [µm]:1.8 + L/200 (L in mm),delivery with measuring protocol 19 kg

Order-Nr.: VM4-602 SpecificationsTravel:Swivelling range: Material: Guiding: Accuracy: Drive: Measuring system: Weight: Options:- encoder signal 1 Vpp

2.8

260

114

n60

180

196

210

240

320

14638,5

81,5

180

256

77,5

29

110,2

135,2

4x M6

34

2x Counterbore f.

M8/DIN912

4x M6 &


2.9

XY Stage

KT7-VM4

250 mm x 150 mm Stress-relieved aluminium alloy, black anodized,top plate hard anodizedBacklash-free preloaded cross roller guidesstraightness, flatness: 1 µm / 100 mmdelivery with measuring protocol Backlash-free fine drive with0.5 mm pitch in a range of 10 mmand quick release for free movementLinear encoder, TTL, 20 µm pitch,reference mark at midpoint,steel scale, positioning accuracy [µm]:1,8 + L/200 (L in mm),delivery with measuring protocol28 kg Backlash-free ball screw with2 mm pitch, stepper motorPhytron ZSS43.200.2,5Linear encoder, TTL, 20 µm pitch,reference mark at midpoint,steel scale, positioning accuracy [µm]:1,8 + L/200 (L in mm),delivery with measuring protocol30 kg

Specifications

Travel:Material: Guiding:Accuracy: Order-Nr.: VM4-600

Drive: Measuring system: Weight: Order-Nr.: VM4-601

Drive: Measuring system: Weight:

2.10

340

114

120

n60

210

310

240

289

420 185

72

108

173

110

146

24

29

136

118

3x M8

2x M6

2x Counterbore f.

M8/DIN912

4x M6 &


2.11

KT7-NSMA KT7-LHMA

straightness, flatness: 2 µmdelivery with measuring protocolstraightness, flatness: 6 µm without measuring systemlinear encoder, 1 Vpp,20 µm pitch, reference mark at midpoint,sealed glass scale, positioning accuracy:2.5 µm + L/200 (L in mm),delivery with measuring protocolrotary encoder stepper motor Phytron ZSS43.200.2,5DC motor Maxon RE035 42V 90Wironless linear motormanually operated with coarse and fine drive 150 mm x 150 mm250 mm x 150 mm


G: L:H: Traveling Range:N:L:

Order Code

KT7-LSOC


XY Stage

KT7

2.12

KT7-Nxxx

310

230

A

B

KT7-Lxxx

410

280

6M

n10

5,7

B

200

A59

180

200

310

18

85

81,54x M6

Specifications:Travel N:Travel L:Material:Guiding:Drive:Weight N:Weight L: Options:- custom motors- encoder signal TTL

150 mm x 150 mm250 mm x 150 mmStress-relieved aluminum alloy, black anodizedBacklash-free preloaded cross roller guidesBacklash-free preloaded ballscrew, pitch 2 mm22 kg27 kg

2.13

KT8-NLMA

KT8-LHMA

straightness, flatness: 1 µm / 100 mmdelivery with measuring protocolstraightness, flatness: 3 µm / 100 mm without measuring systemlinear encoder, 1 Vpp,20 µm pitch, reference mark at midpoint,sealed glass scale, positioning accuracy:2.5 µm + L/200 (L in mm),delivery with measuring protocolrotary encoder stepper motor Phytron ZSS43.200.2,5DC motor Maxon RE035 42V 90Wironless linear motormanually operated with coarse and fine drive 250 mm x 200 mm350 mm x 200 mm



Order Code

KT8-NSMA

XY Stage

KT8


2.14

KT8-Nxxx

410

280

A

B

KT8-Lxxx

510

380

6M

10n

5,7

85

B

300

A

230

250

360

1859

81,5

4x M6

Specifications:Travel N:Travel L:Material:Guiding:Drive:Weight N:Weight L: Options:

- custom motors- encoder signal TTL- linear encoder with 2 or 4 µm pitch, glass scale


2.15

KT9-NSOC

Custom version



straightness, flatness: 1 µm / 100 mmdelivery with measuring protocolstraightness, flatness: 3 µm / 100 mm without measuring systemlinear encoder, 1 Vpp,20 µm pitch, reference mark at midpoint,sealed glass scale, positioning accuracy:2.5 µm + L/200 (L in mm),delivery with measuring protocolrotary encoder stepper motor Phytron ZSS43.200.2,5DC motor Maxon RE035 42V 90Wironless linear motormanually operated with coarse and fine drive 350 mm x 300 mm420 mm x 300 mm

Order Code

KT9-LSMA


XY Stage

KT9

2.16

KT9-Nxxx

510

380

A

B

KT9-Lxxx

580

460

100

6M

n116,8

400

B

A59

330

350

460

76,5

4x M681,5

Specifications:Travel N:Travel L:Material:Guiding:Drive:Weight N:Weight L: Options:- custom motors- encoder signal TTL- linear encoder with 2 or 4 µm pitch, glass scale


2.17




KT7-NSMA

Application examplePrototype of confocal microscope

2.18

XY Stages

GT Series

The XY stages of the GT series were specially developedfor applications in surface metrology. Due to the compactdesign and the use of selected cross roller bearings as well as special grinded ballscrews highest requirements of accuracy and noise are achieved. The XY stages of the GT series are available in travel ranges of 50 x 50 to 350 x 350 mm.

2.19

straightness, flatness: 1 µmdelivery with measuring protocolstraightness, flatness: 5 µm without measuring systemlinear encoder, 1 Vpp,20 µm pitch, reference mark at midpoint,sealed glass scale, positioning accuracy:2.5 µm + L/200 (L in mm),delivery with measuring protocolrotary encoder stepper motor Phytron ZSS33.200.1,2DC motor Maxon RE025 24V 50 mm x 50 mm100 mm x 50 mm


G: Traveling Range:N:L:

Order Code

GT5-NSOC

XY Stage

GT5

2.20

A

GT5-Nxxx

145

GT5-Lxxx

205

60

60

A

145

50

135

75

120

90

90

52

5M

n8

4,6

2xn3H7

8x M5

50 mm x 50 mm100 mm x 50 mmStress-relieved aluminum alloy, black anodized,top plate hard anodizedBacklash-free preloaded cross roller guidesBacklash-free preloaded ballscrew, pitch 1 mm4 kg5 kg

Specifications:Travel N:Travel L:Material: Guiding:Drive:Weight N:Weight L: Options:

- custom motors- encoder signal TTL

2.21

straightness, flatness: 1 µmdelivery with measuring protocolstraightness, flatness: 5 µm without measuring systemlinear encoder, 1 Vpp,20 µm pitch, reference mark at midpoint,steel scale, positioning accuracy:1 µm + L/200 (L in mm),delivery with measuring protocolrotary encoder stepper motor Phytron ZSS33.200.1,2DC motor Maxon RE025 24V 100 mm x 100 mm

Accuracy Class:A: C: Measuring System:O: M: D: Motors:S: G: Traveling Range:N:

Order Code

GT6-NSOC

XY Stage

GT6

2.22

5M

n8

4,1

60

100

60

100

150

150

210

210

75

75

80

100 mm x 100 mmStress-relieved aluminum alloy, black anodizedBacklash-free preloaded cross roller guidesBacklash-free preloaded ballscrew, pitch 2 mm9 kg

Specifications:Travel:Material:Guiding:Drive:Weight: Options:- custom motors- linear encoder with 2 or 4 µm pitch, glass scale- encoder signal TTL- ballscrew, pitch 1 mm

8x M5x6

8,4

4x M5x8,4

Counterbore f. M4 DIN912

2.23


G: L: Traveling Range:N:

straightness, flatness: 2 µmdelivery with measuring protocolstraightness, flatness: 6 µm without measuring systemlinear encoder, 1 Vpp,20 µm pitch, reference mark at midpoint,steel scale, positioning accuracy:1.5 µm + L/200 (L in mm),delivery with measuring protocolrotary encoder stepper motor Phytron ZSS43.200.2,5DC motor Maxon RE035 42V 90Wironless linear motor 200 mm x 200 mm

Order Code

GT8-NSOC

XY Stage

GT8

2.24

60

150

200

310 164,5

60

150

200

310

164,5

120

5,7

6M

10n

4x M5x10

4x M5x10

200 mm x 200 mmStress-relieved aluminum alloy, black anodizedBacklash-free preloaded cross roller guidesBacklash-free preloaded ballscrew, pitch 4 mm30 kg

Specifications:

Travel:Material:Guiding:Drive:Weight: Options:

- custom motors- linear encoder with 2 or 4 µm pitch, glass scale- encoder signal TTL- ballscrew, pitch 2 mm

4x M6 &

Counterbore

f. M5 DIN 912

2.25

straightness, flatness: 1 µm / 100 mmdelivery with measuring protocolstraightness, flatness: 3 µm / 100 mm without measuring systemlinear encoder, 1 Vpp,20 µm pitch, reference mark at midpoint,steel scale, positioning accuracy:2.5 µm + L/200 (L in mm),delivery with measuring protocolrotary encoder stepper motor Phytron ZSS43.200.2,5DC motor Maxon RE035 42V 90W 300 mm x 300 mm350 mm x 350 mm

Accuracy Class:A: C: Measuring System:O: M: D: Motors:S: G: Traveling Range:N:L:

Order Code

GT9-NSOC

XY Stage

GT9

2.26

120

10M

n15

9

60

150

200

300

410N / L: /460 176,5

60

150

200

300

410

N / L:

/460

176,5

4x M5x10

4x M5x10

4x M6x12


Specifications:

Travel N:Travel L:Material:Guiding:Drive:Weight N:Weight L: Options:- custom motors- linear encoder with 2 or 4 µm pitch, glass scale- encoder signal TTL- ballscrew, pitch 2 mm

4x M10 &

Counterbore

f. M8 DIN 912

2.27




Application examplePositioning system for measuring surface topography

2.28

The rotary stages of the RT series are used, when rotationally symmetric components must be measured or positioned with high accuracy. Pre-loaded bearings provide a very precise radial and axial runout. The exact positioning is ensured by a zero-backlash pre-loaded worm drive. The rotary stages can be combined in various ways with other components of the UHL modular system.

3. Rotary Stages

RT Series

3.1

Accuracy Class:A: C: Measuring System:O: M:D: Motors:S:

G: H: Traveling Range:N:

axial and radial runout 2 µm at ∅37 mmdelivery with measuring protocolaxial and radial runout 18 µm at ∅37 mm without measuring systemrotary encoder, 3600 counts, 1 Vpprotary encoder on motor shaft stepper motor Phytron ZSS33.200.1,2DC motor Maxon RE025 24Vmanually operated normal

Order Code

RT4-NSOC

RT4-NSMA RT4-NSOC RT4-NHOC


Rotary Stage

RT4

3.2

4x M4x4 & 2x n3H7x5

4x M4x4 & 2x n3H7x5

4x M4x4

n74

80

60

60

80

87

40

n26

50

60

60

2x M5x10

n20

Infinite, limit switch for reference positionStress-relieved aluminum alloy, black anodizedBacklash-free preloaded angular contact ball bearingsBacklash-free preloaded worm gear ( i = 70 : 1 )1,0 kg / 1,2 kg

Specifications:

Travel:Material:Bearing:Drive:Weight O/M: Options:- custom motors- encoder signal TTL

Version RT4-NSOx

Version RT4-NSMx

2x Counterbore

f. M5/DIN912

n60

n50

30o

3.3

Order Code

RT5-NSMA

Accuracy Class:A: C: Measuring System:O: M:D: Motors:S:


axial and radial runout 5 µm at ∅60 mmdelivery with measuring protocolaxial and radial runout 15 µm at ∅60 mm without measuring systemrotary encoder, 9000 counts, 1 Vpprotary encoder on motor shaft stepper motor Phytron ZSS43.200.2,5DC motor Maxon RE035 42V 90W normal

RT5-NGMA RT5-NHMA

Rotary Stage

RT5


3.4

60o70o

60o

100

120

100

120

1696,5

48

n116n60

90100

90

100

4x M6x12

4x M4x8

4x M5x6

8x M4x6

Specifications:Travel:Material:Bearing:Drive:Weight O/M: Options:- custom motors- encoder signal TTL

Infinite, limit switch for reference positionStress-relieved aluminum alloy, black anodizedBacklash-free preloaded crossed roller bearingBacklash-free preloaded worm gear ( i = 128 : 1 )2,0 kg

100

2xn4H7x6

4x Counterbore

f. M5/DIN912

3.5

Accuracy Class:C: Measuring System:O: D: Motors:S:

Traveling Range:N:

axial and radial runout 30 µm at ∅60 mm without measuring systemrotary encoder on motor shaft stepper motor Sanyo Denki 103H7123-6840 normal

Order Code

RT6-NSOC

Rotary Stage

RT6

3.6

n150

100

100`0,0280o

80o90o

2xn4H7x11

n11

1720

8M

160

20

53,8

n52

120o160

Specifications:Travel:Material:Bearing:Drive:Weight: Options:- custom motors

Infinite, limit switch for reference positionStress-relieved aluminum alloy, black anodizedBacklash-free preloaded ball bearingsBacklash-free preloaded worm gear ( i = 106 : 1 )6.3 kg

4xM5x10

4xM5x8

4xM6x11

3.7


Traveling Range:N:

axial and radial runout 20 µm at ∅110 mm without measuring systemrotary encoder on motor shaft stepper motor Sanyo Denki 103H7123-6840 normal

Order Code

RT7-NSOC

Rotary Stage

RT7

3.8

n12

2020

8M

90

n100

n210

110o120o200o

225o

3

62

150`0,02

2xn5H7x10

Specifications:Travel:Material:Bearing:Drive:Weight: Options:- custom motors

Infinite, limit switch for reference positionStress-relieved aluminum alloy, black anodizedBacklash-free preloaded crossed roller bearingBacklash-free preloaded worm gear ( i = 100 : 1 )13.4 kg

8xM5x10

3.9




Application exampleSpecial setup for measuring shaving heads

3.10

The lift stages of the HT series provides accurate positioning in vertical direction. By standardized mounting holes, they fit seamlessly into the UHL modular program.

4. Lift Stages

HT Series

4.1

HT4-NHOCHT4-NSOC

straightness : 5 µm without measuring systemrotary encoder on motor shaft stepper motor Phytron ZSS33.200.1,2DC motor Maxon RE025 24Vmanually operated 12 mm


G: H: Traveling Range:N:

Order Code

HT4-NSOC

Lift Stage

HT4


4.2

60

60

80 87

80

n26

40+12

2xn5,5

v n10x5,7

Specifications:

Travel:Material:Guiding:Drive: Weight: Options:

- custom motors

12 mmStress-relieved aluminum alloy, black anodizedBacklash-free preloaded roller guidesBacklash-free preloaded worm gear and multi start thread,pitch in Z direction 0.07143 mm1 kg

2xM5x6

2x M5x10

60`

0,01

2xn4H7x8,5

4.3

Positioningsystem XYZ:HT7-LSOC mounted on a GT8-NSOC

Accuracy Class:C: Measuring System:O: D:M: Motors:S:


straightness: 5 µm without measuring systemrotary encoder on motor shaftlinear encoder, 1 Vpp,20 µm pitch, reference mark at midpoint,gold-scale, positioning accuracy:2.5 µm + L/200 (L in mm),delivery with measuring protocol stepper motor Phytron ZSS43.200.2,5DC motor Maxon RE035 42V 90W 30 mm

Order Code

HT7-NSOC

Lift Stage

HT7


4.4

80+30

4040

60

60

200

300

315164,5

207 153

200

300

315

4xn6,4

vn11x4,7

Specifications:Travel:Material:Guiding:Drive: Weight: Options:- custom motors- encoder signals TTL

30 mmStress-relieved aluminum alloy, black anodizedBacklash-free preloaded cross roller guidesBacklash-free preloaded ball screw with pitch 4 mm and wedge 25°,pitch in Z direction 1.8652 mm10 kg

4xM5x10

4xM4x8

4xM8

4.5

HT7-LGMC

GT8-NGMA

B40-GN5G

B40-GN9G




Application exampleSpecial setup for measuring semiconductor structureswith magnetic field sensors

4.6

5. Standsand

Accessories

Especially for the OEM market, a number of stands has been developed that facilitate essentially the use of our linear and XY stages for customized applications. The stands have a high basic accuracy regarding the flatness and squareness of the mounting areas. Depending on their applications the stands are made out of granite, greycast or aluminium. In addition there is a large selection of adapter plates and brackets to combine our stages in many different ways.

5.1

KT5-LHxx

100 x 50

KT5-Lxxx

100 x 50

KT5-Nxxx

50 x 50

KT5-NMLC

25 x 25KT5-NMAC

25 x 25

B40-G

B40-KR

B40-NSOC

KT5-NHxx

50 x 50

GT5-Lxxx

100 x 50

GT5-Nxxx

50 x 50

MS2-GxxMS2-Exx

A:B:C:D: A:B:C: D: E:F: G: E: G:

MS2-EDB

dovetail guide 300 mmdovetail guide 380 mmdovetail guide 430 mmdovetail guide 500 mm profiled column 300 mmprofiled column 350 mmprofiled column 400 mmprofiled column 480 mmprofiled column 549 mmprofiled column 608 mmprofiled column 750 mm slidecoarse drive with rack and pinion(possible with dovetail guide A,B und D)

5.2

KT5-LHxx

100 x 50

KT5-Lxxx

100 x 50

KT5-Nxxx

50 x 50

KT5-NMLC

25 x 25

KT5-NMAC

25 x 25

B40-G

B40-KR

B40-NSOC

WM2-101

KT5-NHxx

50 x 50

GT5-Lxxx

100 x 50

GT5-Nxxx

50 x 50

WM2-101:Stable grey cast stand suitable for all stages of size 5.The focus drives of the B40 series are additionally

adjustable in height by a dovetail guide.

5.3

KT5-Lxxx

100 x 50

KT5-Nxxx

50 x 50

LT5-Nxxx

50 mm

GT5-Nxxx

50 x 50

GT5-Lxxx

100 x 50

LT5-Lxxx

100 mm

PT5-Nxxx

50 mm

PT6-Nxxx

100 mm

LT5-Mxxx

170 mm

MS2-110

MS2-110:Stable stand made of granite and massiv aluminium suitable for all stages of size 5. Only motorized stages are used as Z-axis.

5.4

VM3-200

VM3-200M

VM3-101

VM3-602

150 x 100

KT6-Lxxx

150 x 100

VM3-105

KT5-NMLC

25 x 25KT5-NMAC

25 x 25

KT5-Nxxx

50 x 50KT5-Lxxx

100 x 50

GT5-Lxxx

100 x 50

GT5-Nxxx

50 x 50

KT6-Nxxx

100 x 100

VM3-KT6

VM3-KT5

5.5

VM3-200

VM3-200M

VM3-101

KT6-Lxxx

150 x 100

KT6-Nxxx

100 x 100

KT6-VMHx

150 x 100

GT6-Nxxx

100 x 100

LT5-Nxxx

50 mm

LT5-Lxxx

100 mm

VM3-B40

MS3-111

MS3-107

200 mm

PT5-Nxxx

50 mm

VM3-106

150 mm

LT5-Mxxx

170 mm

PT6-Nxxx

100 mm

5.6

VM3-200

VM3-200M

VM3-101

LT5-Nxxx

50 mm

LT5-Lxxx

100 mm

PT5-Nxxx

50 mm

VM3-106

150 mm

MS4-111

MS4-102

200 mm

VM3.072

GT8-Nxxx

200 x 200

KT7-Nxxx

150 x 150

KT7-Lxxx

250 x 150

KT8-Nxxx

250 x 200

KT8-Lxxx

350 x 200

LT5-Mxxx

170 mm

PT6-Nxxx

100 mm

5.7

LT5-Nxxx

50 mm

LT5-Lxxx

100 mm

PT5-Nxxx

50 mm

KT8-Nxxx / KT8-Lxxx

250 x 200 / 350 x 200

LT5-Mxxx

170 mm

GT8-Nxxx

200 x 200

GT9-Nxxx / GT9-Lxxx

300 x 300 / 350 x 350

KT9-Nxxx / KT9-Lxxx

350 x 300 / 420 x 300

MS5-111

PT8-Nxxx

200 mm

PT8-Lxxx

300 mm

SI.109

MS5.14

PT7-Nxxx

150 mm

PT6-Nxxx

100 mm

5.8

4xn5,3

v10x5,7

4x n6,4

vn11x6,8

Adapter Plate suitable for KT5, GT5 and PT7 with 7 x 7 M4 threaded holes in a grid of 20 mm Order-No.: KT5-NP42 suitable for KT5, GT5 and PT7 with 5 x 5 M5 threaded holes in a grid of 30 mm Order-No.: KT5-NP53

Adapter Plate suitable for KT6-N and GT6 with 5 x 5 M5 threaded holes in a grid of 30 mm Order-No.: KT6-NP53 suitable for KT6-L with 7 x 5 M5 threaded holes in a grid of30 mm Order-No.: KT6-LP53

Adapter Plate suitable for KT7 and GT8 with7 x 7 M5 threaded holes in a grid of 30 mm Order-No.: KT7-NP53 suitable for KT8 with 9 x 7 M5threaded holes in a grid of 30 mm Order-No.: KT8-NP53

4xn5,3

v n10x5,7

KT5-NP42: 49x M4

KT5-NP53: 25x M5

M5x8

M5x8

5.9

4xn6

8xn4,3vn8x4,6

4xn5,5vn10x5,7

4xn5,5vn10x5,7

Adapter Plate suitable for mounting B40-microscopes on stages with threaded holes M5 in a grid of 60 mm, such as linear stage LT5 Order-No.: LT5-B40

Adapter Plate suitable for mounting precision linear stage PT4 on stages with threaded holes M5 in a grid of 60 mm, such as linear stage LT5 Order-No.: LT5-M80

Adapter Plate suitable for mounting rotary stages RT5 on stages with threaded holes M5 in a grid of 60 mm, such as linear stage LT5 Order-No.: LT5-RT5

4xM4

4xM3

4xM5

5.10

4xn5,7vn10x5,3

10xn6,4vn11x6,8

n26

4xn4,3

4xn5,3

4xn5,5vn10x5,7

Bracket suitable for mounting stages with threaded holes M5 in a grid of 60 mm, such as linear stage LT5 Order-No.: LT5-W

Bracket suitable for mounting stages PT4, HT4 and RT4 on stages with threaded holes M5 in a gridof 60 mm, such as linear stage LT5 Order-No.: LT5-W80

Bracket suitable for mounting rotary stages RT5 on stages with threaded holes M5 in a grid of 60 mm, such as linear stage LT5 Order-No.: LT5-RT5W

4xM5

4xn5,5vn10x5,7

4xM5x10

5.11

4xn4,5vn11x6,8

4xn6,4vn11x6,8

4xn5,3vn10x5,7

4xn5,5vn10x5,7

4xn5,5vn10x5,7

Adapter Plate suitable for mounting stages LT5, RT4, HT4 and PT4 on linear stages LT6 Order-No.: LT6-LT5

Adapter Plate suitable for crosswise mounting of linear stages LT6 Order-No.: LT6-LT6

Bracket suitable for mounting rotary stage RT5 on linear stages LT6 Order-No.: LT6-RT5W

4xM5

4xM5

5.12

n80

n210

14

304xn4,5vn8x4,6

60

60o90o110o

4xn4,5vn8x4,6

8xn5,5vn10x5,7

8xn5,5vn10x5,7

n210

n170

14

30

60 8

8

Wafer-Chuck 4", 5", 6" and 8" selectablesurface grinded and hard-anodizedflatness 2 µmvacuum connection threaded hole M5mountable on rotary stage RT4 Order-No.:WC5-8HC

Wafer-Chuck 4", 5", 6" and 8" selectablesurface grinded and hard-anodizedflatness 2 µmvacuum connection threaded hole M5mountable on rotary stages RT5, RT6 and RT7 Order-No.:WC6-8HC

n60

5.13

200o4xM8x1.25

vn11x6,6

n210

14

30

310

n

3030o70o

110

o150

o

8xM6x1

vn10x5,7

4xn4,5vn8x4,6

4xn4,5vn8x4,6

250o

608

60

8

Wafer-Chuck 4", 5", 6" and 8" selectablesurface grinded and hard-anodizedflatness 2 µmvacuum connection threaded hole M5mountable on XY stages KT7 and GT8 Order-No.:WC8-8HC

Wafer-Chuck 4", 5", 6", 8", 10 and 12" selectablesurface grinded and hard-anodizedflatness 2 µmvacuum connection threaded hole M5mountable on rotary stages RT5 and RT7as well on XY stages GT8 and GT9 Order-No.:WC6-12HC

5.14


F9S-3-M

The F9S-3-M is a high resolution motion controller for 2-phase stepper motors. It runs up to3 axis and is suitable for positionings down to 0.1 µm. It is characterized by a very smooth operation of the motor. The controller operates in vector mode, i.e. the target position is approached linearly, with automatically generated and freely adjustable ramps and decreased motor current in the end position. In all modes of operation limit switches monitor the connected axis. Additionally, the controller is capable of processing position data from incremental measuring systems for all axis. The differential voltage signal(1 Vpp) is analyzed with a 1000-times interpolation. Without measuring systems the controller orientates by the number of motor steps. The F9S-3-M can be used as a stand-alone unit via joystick or controlled by a PC via the RS232 interface. Copious commands like homing, moving range measurement, absolute position, relative distance, interrupt, joystick on/off etc. are available for usage with a PC. During joystick controlled mode the current positions can be read via the RS232 interface. A multi-functional interface enables some special functions like, for example, a trigger signal can be generated to synchronize external equipment like a camera or a Z-measurement sensor. A snapshot input can be used to save current positions during the movement and an emergency-stop can be connected.The controller is supplied completly with joystick and cable set for the Uhl measuring stages. Technical Data:- max. motor speed with 200 motor steps:- step resolution with 200 motor steps:- max. motor current:- max. motor voltage:- power supply: - interface:- dimensions:- weight: Options:- encoder signal TTL- 19" housing- two axis- various motor currents

40 rev. / s 50,000 steps / rev.2.5 A40 V110 -120 V, 200 - 240 V,50 / 60 Hz, 100VA9600 - 57600 Baud250 x 230 x 100 mm4.5 kg

6.1

Motion Controller

F9S-3-O

The F9S-3-O is a high resolution motion controller for 2-phase stepper motors. It can run up to 3 axis and is suitable for positionings down to 0.1 µm. It is characterized by a very smooth operation of the motors. The controller operates in vector mode, i.e. the target position is approached linearly, with automatically generated and freely adjustable ramps and decreased motor current in the end position. In all modes of operation, limit switches monitor the connected axis. The F9S-3-O can be used as a stand-alone unit via joystick or controlled by a PC via the RS 232 interface. The mode of operation (manual or automatic) is selectable by a toggle switch at the front plate. Copious commands like homing, moving range measurement, absolute position, relative distance, interrupt, joystick on/off etc. are available for the usage with a PC. During joystick controlled mode the current positions can be read via the RS232 interface. The motion controller is supplied completly with joystick and cable set for the Uhl measuring stages. Technical Data:

- max. motor speed with 200 motor steps:- step resolution with 200 motor steps:- max. motor current:- max. motor voltage:- power supply: - interface:- dimensions:- weight: Options:

- two axis- various motor currents

10 rev. / s 40,000 steps / rev.1.2 A+/- 16 V V110 -120 V, 200 - 240 V,50 / 60 Hz, 100VAmax. 9600 Baud250 x 230 x 95 mm3.5 kg

6.2

Motion Controller

F9L-3-M

The F9L-3-M is a new compact servo controller for highest dynamic and precision. It can control alternatively 2 or 3 phase synchron servo motors (linear / rotating) and works in thecapacity range of 48V and max. 10A. The F9L-3-M allows very quick positioning operations with highest precision. The controller is characterised by a very smooth run and can alternatively be operated by a USB or RS232 interface. A wide range of options make the F9L-3-M the optimal controller for your task of automation. Enhanced functionality is always possible by a bus adapter for add-on modules.

Technical Data:- max. motor current: - max. motor voltage: - encoder signal: - interface: - power supply: - dimensions: - weight: Options:- two or three axis- LCD display and control panel

5 A (max. 10 A for one axis) 48 V TTL or 1 Vss with 8.000x interpolation USB and RS232, 9.600 up to 921.600 Baud 90 - 264 V47 -63 Hz, 300 W 360 x 280 x 95 mm 5,2 kg

6.3

Motion Controller

F9E-3-M

The F9E-3-M is a high resolution motion controller for 2-phase stepper motors. It runs up to3 axis and is suitable for positionings down to 0.1 µm. It is characterized by a very smooth operation of the motor. The controller operates in vector mode, i.e. the target position is approached linearly, with automatically generated and freely adjustable ramps and decreased motor current in the end position. In all modes of operation limit switches monitor the connected axis. Additionally, the controller is capable of processing position data from incremental measuring systems for all axis. The differential voltage signal (1 Vpp) is analyzed with a 8,000-times interpolation. Without measuring systems the controllerorientates by the number of motor steps. The F9S-3-M can be used as a stand-alone unit via joystick or controlled by a PC via USB or RS232 interface. Copious commands like homing, moving range measurement, absoluteposition, relative distance, interrupt, joystick on/off etc. are available for usage with a PC. During joystick controlled mode the current positions can be read via the interface. A multi-functional interface enables some special functions like, for example, a trigger signal can be generated to synchronize external equipment like a camera or a Z-measurement sensor. A snapshot input can be used to save current positions during the movement and an emergency-stop can be connected.The controller is supplied completly with joystick and cable set for the Uhl measuring stages. Technical Data:- max. motor speed with 200 motor steps:- step resolution with 200 motor steps:- max. motor current:- max. motor voltage:- power supply: - interface:- dimensions:- weight: Options:- encoder signal TTL- 19" housing- fourth axis- various motor currents

70 rev. / s 1.638.400 steps / rev.5 A (4. axis max. 10 A)48 V90 - 264 V,50 / 60 Hz, 100VAUSB and RS232 (up to 921.600 Kbd)270 x 230 x 100 mm3,4 kg

6.4

6

5

8

1 4 2 142

9

1

1 4 2

5

15

8

6

8

142

RSS65

ZSS43

ZSS33

2

1

4

3

Specification

2-Phase Stepper Motors

Type:

Nominal current / phase [A]:

Holding torque [mNm]:

Steps:

ZSS33

1.2

75

200

RSS65

2.5

950

200

ZSS43

2.5

260

200

forwards backwards

15-pin sub-D connector (male)

limit switch

forwards backwards

violet

blue

M

1 (brown)

2 (black)

blu

e

vio

let

white

gre

en

black

3 (white)

4 (blue)

red

bro

wn

bla

ck yello

w

brownwhite

blackwhite

red

brown

blue

green

yellow

gre

en

vio

let

white

blu

ere

d

yello

w

bro

wn

bla

ck

M

yellow

green

orange

yellow

green

orange


Wiring Diagram Stepper Motor

6.5

142241

159

81

RE 35

RE 25

cc

RE 35

6

8

5

9

3

13

4

10

11/12

RE 25

HEDL5560

HEDL5560

1

2

RE 25

10 / 20

24

136 / 240

3.1 / 10.3

0.662 / 1.23

Type:

Assigned power rating [W]:

Nominal voltage [V]:

Stall torque [mNm]:

Starting current [A]:

Nominal current [A]:

orange

15-pin sub-D connector (male)

yellow

green

Encoder HEDL 5560

with Line Driver

Supply voltage:

Output signal:

Counts per turn:

Current per channel:

Max. operating frequency:

Pin assignment:

Channel A:

Channel A:

Channel B:

Channell B:

V :

Ground:

5 V ± 10%

EIA Standard RS 422

1000 (no Index)

min. -1 mA, max. 5 mA

100 kHz

RE 35

90

42

1070

20.3

2,15

forwards backwards

Specification

DC-Motors

white

black


Wiring Diagram DC-Motors

6.6

precision positioning systems - walter uhlwalteruhl.com/rokdownloads/downloads/brochures/positioning...

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