Power Semiconductor Device TestingSolutions Guide

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1www.keithley.com

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High Power Semiconductor Device Testing and Characterization

From its early stages of device and process design through application development, a power

semiconductor device endures a variety of characterization and testing. And, engineers must be

able to configure the most appropriate solution to accomplish the particular requirements in each

stage. Adding to this challenge, the best solution may sometimes need

to be upgraded or enhanced throughout the life of the device.

This selection guide can help you choose the ideal instrument

or system for efficient, flexible test and characterization across

the entire power semiconductor device life cycle.

Choosing the Optimal Solution Throughout the Device Lifecycle

Device and Process Design

Test

Prod

uctio

n

Appli

ca

tions

Deve

lop

ment Characterization

ReliabilityFailureAnalysis

End Use

Designs

POWER SEMI DEVICE

L I FECYCL E

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2460 Interactive High Current SourceMeter® SMU Instrument

A New Intuitive Experience in High Current, High Power DC Source Measure Testing

+4A

+5A

–4A

–5A

+7A

–7A

–1A

+1A

+10V–10V +20V–20V 0V

0A

+100V–100V

DC or Pulsed

Quadrant II– Sink

Quadrant III– Source

Quadrant I+ Source

Quadrant IV+ Sink

Learn Faster; Work Smarter; Invent Easier.• Icon menu system eliminates complex, multi-layer menu structures.

• Change ranges and source values with a simple touch on the display.

• Full charting with “pinch and zoom,” data display and data exportation for immediate analysis.

• The 2460 SMU Instrument couples a highly flexible, four-quadrant voltage and current source/load with precision voltage and current meters.

• With 7A DC and pulse current capability, the 2460 SMU Instrument is optimized for characterizing and testing a wide range of high power materials, devices and modules.

• Typical Power Applications: Power Semiconductor and Materials; Power Devices; LEDs/Lighting; Electrochemistry; Energy Generation and Efficient Energy Consumption.

2460 Power Envelope

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All power semiconductor devices require thorough characterization, from simple two-terminal devices such as resistors,

capacitors and diodes to three-terminal and four-terminal devices such as MOSFETs, BJTs and IGBTs. A source measure

unit (SMU) instrument, such as a Keithley SourceMeter® SMU instrument, is the most versatile instrument for characterizing

power semiconductor devices. From simple, basic curve tracing to detailed on-state and off-state testing, a SourceMeter

SMU instrument is the fundamental building block for DC characterization of power semiconductor devices.

This selector table compares the power levels, connection schemes, communications interfaces, and programming

and software available from the various Keithley SMU instruments. Many even feature TSP-Link® expansion technology,

a master interface that enables combining up to 32 or even 64 SourceMeter SMU instruments for multi-channel parallel

testing without a mainframe.

Benchtop Power Device Characterization Solutions From Basic Curve Tracing to On-State/Off-State Testing

2460 2430 2410 2636B 2651A 2657A 2290-5 2290-10

DC Current Max/Min

7A/1pA 3A/100pA 1A/10pA1.5A/0.1fA or 3.0A in

parallel20A/1pA or 40A in

parallel120mA/1fA 5mA/1µA 1mA/1µA

Pulse Current 7A 10.5A 1A 10A or 20A in parallel 50A or 100A in parallel 120mA/1fA

Voltage Max/Min 100V/100nV 200V/1µV 1000V/1µV 200V/100nV 40V/1µV 3000/100µV 5000V/50V 10,000/100V

Max Power 105W 1100W 22W 200W 2000W 180W 25W 10W

Connectors Banana, 8 pin mass terminated

Banana Banana Triax2 pin and 8 pin mass

terminatedHigh Voltage Triax

5KV SHV Coax

10KV SHV Coax

CommunicationsGPIB, USB,

Ethernet, Digital I/O,TSP-Link

GPIB, RS232, Digital I/O, Trigger Link

GPIB, RS232, Digital I/O, Trigger Link

GPIB, USB, RS232, Ethernet, Digital I/O,

TSP-LINK

GPIB, USB, RS232, Ethernet, Digital I/O,

TSP-LINK

GPIB, USB, RS232, Ethernet, Digital I/O,

TSP-LINKGPIB

GPIB, RS-232

Programming TSP, SCPI, IVI Drivers

SCPI, IVI Drivers

SCPI, IVI Drivers

TSP, IVI Drivers TSP, IVI Drivers TSP, IVI DriversSCPI,

IVI DriversSCPI,

IVI Drivers

Software KickStart, TS Builder, LabView

ACS, ACS Basic,

LabView

ACS, ACS Basic,

LabView

Ivy, ACS, ACS Basic, TSP Express, TS Builder, LabView

ACS, ACS Basic, TSP Express, TS Builder,

LabView

ACS, ACS Basic, TSP Express, TS Builder, LabView

ACS, ACS Basic,

LabView

ACS, ACS Basic,

LabView

Probe Station Interface

8020Contact Keithey

Contact Keithey

8020 8020 8020Contact Keithey

Contact Keithey

Contact Keithley for configuration assistance or to learn more about product selection.

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Complete Power Device Characterization Systems

Engineered for Optimum Performance and Price

3kV

200V SMU

200V SMU

200V SMU

50A SMU

50A SMU

CVU

Manages

• Series resistors

• High voltage bias tees

• Overvoltage protection

• Cabling dif ferences between measurements

• Connector interface to probe stations and fixtures

Model 8020 High Power Interface Panel

Keithley Parametric Curve Tracers (PCT) support a broad range of device characterization tasks, including:

• Device and Process Design

• Modeling

• Reliability Testing

• Power Device Applications Development

• Failure Analysis

• Production Test

Based on Keithley’s family of high power SourceMeter

SMU instruments, PCTs support up to 3kV for off-state

test and 100A for on-state test. Optionally, multi-frequency

capacitance vs. voltage (C-V) testing capability is available

for any PCT configuration. PCTs are engineered to provide a

comprehensive solution, so they include all the instruments

required, as well as specialized interconnects and cables,

safe test fixtures, probe station interfaces, and powerful

software, to support test development, data acquisition, graphing, and data analysis. Sample libraries are

provided for all common device types, including resistors, capacitors, diodes, bipolar transistors,

MOSFETS, IGBTs and many other devices. More than 400 test libraries are included, as well as

software tools to develop fully customized tests quickly in a variety of ways.

8020 High Power Interface Panel

2600-PCT-4B Parametric Curve Tracer connected through the 8020 High Power Interface Panel to the Signatone 3kV/100A Wafer Probe Station

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Parametric Curve Tracer Configurations

Complete Test Development, Data Acquisition, Graphing, and Data Analysis

ModelCollector/Drain Supply Step Generator

Base/Gate SupplyAuxilliary-

SupplyHigh Voltage Mode High Current Mode

Low Power 2600-PCT-1B 200V/10A 200V/10A 200V/10A NA

High Current 2600-PCT-2B 200V/10A 40V/50A 200V/10A 200V/10A

High Voltage 2600-PCT-3B 3KV/120mA 200V/10A 200V/10A 200V/10A

High Current and High Voltage 2600-PCT-4B 3KV/120mA 40V/50A 200V/10A 200V/10A

Capacitance-Voltage Option PCT-CVU Add C-V to any PCT. Can be used with either the 8020 (requires 8020-CVU option) or the 8010

(requires CVU-3K-KIT or CVU-200-KIT).

1. Contact your Keithley field applications engineer for custom configurations. 2. Add one 2651A to increase high current mode to 50A or two 2651As for 100A. 3. PCT-CVU Multi-Frequency Capacitance Meter can be added to any configuration.

8010 High Power Device Test Fixture — Safe and easy connections for testing packaged high power devices up to 3000V or 100A.

• The full range of PCT measurements can be realized from pA to 100A, µV to 3000V, and high voltage capacitance-voltage (C-V) from pF to nF.

• Choose from a variety of sockets, including a Tektronix Curve Tracer Socket Adaptor that is compatible with nearly every seven-pin curve tracer socket.

• Complete interlock and protection modules capability for high performance and safety.

• Unique access port provides access for oscilloscope, thermal, and other probes.

• 8020 High Power Interface Panel compatibility allows converting easily from packaged part testing to wafer probing.

8020 High Power Interface Panel — Safe and easy connections from the PCT to most legacy and new probe stations.

• Achieve a full range of PCT measurements from pA to 100A, µV to 3000V, and high voltage C-V from pF to nF.

• Choose from a variety of connectors to configure the 8020 for nearly any probe type, including Keithley high voltage triax, Keysight high voltage triax, and safe high voltage (SHV) coax.

• Unique four-terminal C-Vcapability gives the most accurate C

ISS, C

OSS, and C

RSS results available.

• Compatible with 8010 High Power Device Test Fixture to convert easily from wafer probing to packaged part testing.

• Compatible probe stations include Signatone, Cascade Microtech, Wentworth, Vector, and more.

8010 High Power Device Test Fixture

PACKAGED PARTS CHARACTERIZATION

PCT CONFIGURATION 2600-PCT-4B

8020 High Power Interface Panel

Probe Chuck

Wafer

Prober

PROBE STATION

WAFER LEVEL CHARACTERIZATION

RESULTS

Keithley’s Parametric Curve Tracer configurations support both package part and wafer level testing.

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Semiconductor Parametric Test Systems

S530 Semiconductor Parametric Test Systems are engineered to handle the DC and C-V measurements required in

process control monitoring, process reliability monitoring, and device characterization. These parametric test systems

are used in production and lab environments that entail a broad range of devices and technologies. For specialized

applications, S500 Integrated Test Systems offer semi-custom configurability and can be built to accommodate from

small to large numbers of devices.

Contact Keithley for configuration assistance or to learn more about product selection.

Pre-Stress Characterization

Record Data

Record Data

Interim Increase Stress Time

Stress

Yes

Yes

No

No

Stop

Fail?

Fail/Exit?

Fail?

Model Wiring & Pin Count SMU Channels Max Voltage Max Current

S530 Low Current Parametric Test System

Up to 60 pins (4-wire or “Kelvin”)

2 to 8 200V (2636B SMU) 1A

S530 High Voltage Parametric Test System

Up to 24 pins (4-wire or “Kelvin”)

3 to 7 1100V (2410 SMU), 200V (2636B

SMU) 1A

S500 Integrated Test System Up to 60 pins with switch (2-wire), or 32 pins (direct wiring from SMU)

1 to 8 with switch, or 1 to 32 without switch

1100V with 7072-HV switch, or Max voltage of SMU with no switch

1A with switch, or Max current of SMU with no switch

Typical Wafer Level Reliability Test Flow

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Learn more about choosing the appropriate power semiconductor device testing solution from this special

collection of reference material from our on-line library.

Resources for You

e-Guide: Testing High Power Semiconductor Devices from Inception to Market

This e-Guide examines the life cycle of a power semiconductor device

and the tremendous variety of test and characterization activities and

measurements challenges that engineers face in each stage

throughout the cycle.

YouTube Video: High Power Connection Dilemma

Watch this short, introductory video to learn how

easy it can be to avoid the complications associated

with interconnecting high power test equipment to

a wafer probe station using the 8020 High Power

Interface Panel.

Application Note: Solving Connection Challenges

in On-Wafer Power Semiconductor Device Testing. Get details from this application

note on how to minimize connection changes and user errors when performing

comprehensive DC I-V and C-V testing of power semiconductor devices.

Webinar: Simple and Accurate Power Semiconductor Device Design

Validation This webinar demonstrates how to select and configure elements

of your test setup to minimize connection changes and protect your

instrumentation investment while producing high quality measurements.

Visit www.keithley.com/products to access additional

resources for high power semiconductor device testing,

including application notes, customer testimonial videos, data sheets, how-to videos,

on-line demos, white papers, and more.

Contact Keithley for configuration assistance or to learn more about product selection.

Semiconductor Parametric Test Systems

Copyright © 2015, Tektronix. All rights reserved. Tektronix products are

covered by U.S. and foreign patents, issued and pending. Information in this

publication supersedes that in all previously published material. Specification

and price change privileges reserved. TEKTRONIX and TEK are registered

trademarks of Tektronix, Inc. All other trade names referenced are the service

marks, trademarks or registered trademarks of their respective companies.

07/15 KI 1KW-60183-0

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For Further InformationTektronix and Keithley maintain a comprehensive, constantly expanding collection of application notes, technical briefs and other resources to help engineers working on the cutting edge of technology. Please visit www.tektronix.com and www.keithley.com.

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