piezo actuators - piezoelectric materials and devicesmmechc5/images/stories/standard...bending...

Advantages of piezoelectric actuators:

• Very precise movement

• Compact

• High force

• Low energy consumption

• Quick response time (μs range)

• No EMI (ElectroMagnetic Interference)

Piezo actuatorsNoliac Group develops and manufactures piezoceramic actuators of high quality and tailored for custom specifications. The actuators are offered in a wide range of sizes and geometries.

www.noliac.com Piezo actuators Ver1001 1

instrumentation

XYZ tables InterferometersMicropositionering AFM microscopyPiezoelectric positioning stageStepper piezoelectric integrated nanomotionWafer and mask positioning/alignmentTranslation stageActive damping

optics

Fiber positioning applications Add/Drop Multiplexer (ADM)Fiber filters (BGF)Optical switchesAdaptive opticsTunable lasers

aerospace/space

Vibration control and cancellationThrusters (valve and pumps)Structural health monitoringActive trailing edgeFuel injectionValves

Life science/medical

Piezo valves for drug dispensersMedical transducersDroplet generationScalers (dental)Micro-pumps


Piezo actuators Piezo actuator applications


Piezo actuators Linear and stacked actuators

LiNear muLtiLayer actuatorsTypical outline of linear plate actuators (CMAP)

Symbol Parameter Unit

L Length excluding external connections

mm

W Width mm

H Height mm

Typical outline of linear ring actuators (CMAR)


OD Outer diameter excluding external connections

mm

ID Inner diameter mm

H Height mm


Piezo actuators Linear and stacked actuators

stacked muLtiLayer actuatorsTypical outline of stacked plates (SCMAP)



mm

W Width mm

H Height mm

Typical outline of stacked rings (SCMAR)



mm


H Height mm

Stacked multilayer piezoelectric actuators are made of two or several linear actuators glued together. The purpose of the stacking is to obtain more displacement than can be achieved by a single linear actuator. Noliac offers a high degree of flexibility as a wide range of actuator dimensions can be made from a defined number of linear actuator plates or rings.


Piezo actuators

Wire options for linear and stacked actuators

option a option B option c

type 28 AWG Teflon 28 AWG Teflon Custom

Length 200 +/- 10 mm 200 +/- 10 mm To be defined

Position Middle of the actuator Middle of the actuator To be defined

direction Perpendicular to the height Toward top To be defined


Piezo actuators

Mount and connect linear and stacked actuators

eLectricaL coNNectioN external electrodesThe external electrodes are screen printed silver as standard. Other materials, e.g. gold or silver/palladium are available on request. The positive electrode is indicated by a black spot.

Electrical connection to the external electrodes can be achieved by mechanical contacts, soldering, gluing with electrically conductive glues or wire bonding. mechanical connectionsMechanical connections can be arranged by e.g. copper springs contacted to the external electrodes. It is recommended to use external electrodes of gold in order to eliminate oxidation of the electrodes.

solderingSoldering electrical wires to the screen-printed silver electrode makes an excellent and time-stable connection. In order to avoid challenges with wetting the solder on the silver surface, always clean the external electrodes with a glass brush or steel wool.

Soldering material must contain Ag.

Gluing wire contactsElectrical connection can also be arranged by gluing wires to the external silver electrodes. Noliac recommends a two component soft epoxy glue with minimum 75% silver content and a curing temperature below 150ºC to avoid depolarization of the PZT. Gluing is recommended as alternative to soldering the wires when the PZT is working at high frequency or the PZT is subjected to high thermal variations from the environment. It is recommended to use exter-nal electrodes of silver in order to archive good electrical contact between glue and electrode.

Wire bonding contactsElectrical connection can be done by wire bonding to the external gold electrodes. Noliac recommends external gold electrodes as gold generates only a thin oxide layer, which has to be penetrated in the wire bonding friction process and thereby ensures a better mechanical and electrical contact.

V- +

+V-

Typical outline of bending ring (CMBR)



mm


H Height mm


Piezo actuators Bending actuators

BeNdiNG muLtiLayer actuatorsTypical outline of bending plate (CMBP)



mm

Lc Clamping length mm

W Width mm

H Height mm

Bending multilayer piezoelectric actuators are co-fired ceramic actuators with ceramic layers and internal electrodes configured as to generate a bending mode. Bending multilayer piezoelectric actuators can be custom designed in regards to layer thickness, oprating voltage, geometries and electrode design. Bending multilayer actuators may be stacked in order to multiply force or stroke.


Piezo actuators

Mount and connect bending plate actuators

mouNtiNGBending plate actuators may be mounted either by mechanical clamping or gluing. Bending plate actuators are not machined on top and bottom surfaces and as such may have small variations in the surface. For this reason a mechanical clamping should be done with moderate force, approximately 5 times the specified blocking force.

If mounted with glue it should be emphasized that the gluing contact surface is restricted to cover only the inactive part of the bender in order not to reduce the stroke of the bender. Epoxy glues are well suited for gluing piezocer-amics and several alternatives exists.

coNtroL iNstructioNsBending actuator plates can be controlled by: differential voltage controlIn this mode the bending can be controlled both upwards and downwards. Apply +100V to the positive electrode (indicated by the black dot), -100V to the negative electrode and a voltage Vin to the middle electrode such as –100V < Vin< 100V. If 0V < Vin< 100V, the plate will bend down with the black spot facing up. If –100V < Vin< 0V, the plate will bend up with the black spot facing up.

single side voltage controlIn this mode, the bending can be controlled for one side only, i.e. bending up with the black dot facing up. Apply 0V to the negative and middle electrode, and up to 200V to the positive electrode.

0.5

3.0

0.5

Glue-line

3.0

V- +

+100V -100V

Vin +/- 100V

V- +

0V 0V

0V < Vin < 200V


Piezo actuators Mount and connect bending ring actuators

mouNtiNGBending ring actuators may be mounted either by mechanical clamping or gluing. mechanical clampingA mechanical clamping should be done with moderate force, as low as possible to avoid unwanted clamping and thus reduce the maximum stroke.

GluingEpoxy glues are well suited for gluing piezo ceramics and several alternatives exists. Please contact us if you need support on selection of appropriate glue for your application. Important remark: Mounting of bending ring actuators at their outer diameters needs some flexibility at the contact line to avoid unwanted clamping that will reduce the bender's efficiency. Therefore mechanical clamping should be done with moderate forces and if the ring is glued, a flexible epoxy should be used.

coNtroL iNstructioNsBending ring actuators can be controlled by: differential voltage controlIn this mode the bending can be controlled both upwards and downwards. Apply +100V to the positive electrode (indicated by the black dot), -100V to the negative electrode and a voltage Vin to the middle electrode such as –100V < Vin< 100V. If 0V < Vin< 100V, the ring will bend down with the black spot facing up. If –100V < Vin< 0V, the ring will bend up with the black spot facing up. single side voltage control In this mode, the bending can be controlled for one side only, i.e. bending up with the black dot facing up. Apply 0V to the negative and middle electrode, and up to 200V to the positive electrode.

Example of mechanical clamping

0,5 0,5

1 1

0,5 0,5

1 1

Example of gluingRing support

Epoxy glue

1 1

Epoxy glue

1 1

Epoxy glue

1 1

-100V +100V-100V < Vin < +100V

0V 0 < V < +200V0V

Mount and connect shear actuators

mouNtiNGShear plate actuators present electrodes on top and bottom surfaces. They may be mounted either by mechanical clamping or gluing.

In case of clamping, axial stress on shear plate actuators must be controlled. Too low pressure can lead to slippage whereas too high pressure can damage the ceramic. With the appropriate contact surface and in the case of low shear force, a pressure of 1 to 3 MPa can be recommended.

If clamping is used, the stiffness of the loading mechanism in the actuation direction shall be as low as possible in order not to hin-der the movement of the actuator.

The force must be applied on the full surface of the actuator in order to ensure a good load distribution. In particular when apply-ing the pressure, the contact surfaces have to be sufficiently flat or compliant.


Piezo actuators Shear actuators

shear moNoLayer actuatorsTypical outline of shear plate (CSAP)

In comparison with single linear actuators, shear actuators are adapted for small transverse displacements where space is a constraint. They offer short response times (high resonance fre-quency) for a minimum cost.

Clamping and gluing options

CSAPCSAP

AdhesiveAdhesive

Length

Width

Height

Axial loading

Shear loading

Sign convention: A positive voltage on one electrode leads to a relative displacement of this electrode towards the chamfered edge. This displacement is re-corded as positive.

PS

Activation in the case of clamping

CSAP

PS-

+

+

-

Uneven and even loading


Piezo actuators Mount and connect shear actuators

It can be necessary to insulate the contact surfaces from the rest of the structure. This can be achieved by adding inactive ceramic plates in the structure, or polyimide film insulator.

If glued it is important to ensure a very thin glue line between the shear plate actuators and the substrate. This is generally ensured by using low viscosity glue. A pressure, e.g. 2 - 3 MPa, should be applied during the curing process. Epoxy glues are well suited for gluing piezoceramics however several alternatives exist.

eLectricaL coNNectioN external electrodesSince shear plate actuators can be used with bipolar symmetrical electrical supply, both electrodes are identical. The direction of operation is indicated by the chamfers. Sign convention: A positive voltage on one electrode leads to a rela-tive displacement of this electrode towards the chamfered edge. Electrical connection to the external electrodes can be achieved by mechanical contacts, soldering, gluing with electrically conductive glues or wire bonding. mechanical connectionsMechanical connections can be arranged by e.g. copper springs contacted to the external electrodes. Shear plate actuators are provided with gold plated electrodes for optimal electrical contact and to avoid oxidation of the electrodes. For demanding applica-tions, it might be necessary to have both contacts gold plated.

Sign convention

Method for complete electrical insulation

S-

+

Insulation layers

Insulation layers

Activation direction

CSAP

Preferred gluing layout

Adhesive AdhesiveCSAPAdhesive

CSAP

Plates

rings

Linear

stacked

Names

Length (L)/outer diameter (od)

Width (W)/inner diameter (id)

Width max (Wm)

height (h)

Nominal oper-ating voltage

Free stroke @ nominal oprating voltageTol.: +/− 15%

Blocking force @ nominal oprating voltageTol.: +/− 20%

capacitanceTol.: +/− 15%

maximum operating temperature

material

unloaded resonance frequency

mm

Tol.m

mTol.

max

mm

Tol.V

µmN

nF◦C

Nce

hz

xx

CMAP01

3+/- 0.1

3+/- 0.1

2+/- 0.05

602.6

360500

125N

CE59>500k

xx

CMAP02

5+/- 0.1

5+/- 0.1

2+/- 0.05

602.8

10001460

125N

CE59>500k

xx

CMAP03

3+/- 0.1

3+/- 0.1

3+/- 0.05

1504.4

360105

200N

CE57>300k

xx

CMAP04

5+/- 0.1

5+/- 0.1

3+/- 0.05

1504.8

1000250

200N

CE57>300k

xx

CMAP05

7+/- 0.1

7+/- 0.15

2+/- 0.05

1503.1

1960410

200N

CE57>500k

xx

CMAP06

3+/- 0.1

3+/- 0.1

2+/- 0.05

2002.9

36030

200N

CE57>500k

xx

CMAP07

5+/- 0.1

5+/- 0.1

2+/- 0.05

2003.1

1000100

200N

CE57>500k

xx

CMAP08

7+/- 0.15

7+/- 0.15

2+/- 0.05

2003.2

1960220

200N

CE57>500k

xx

CMAP09

10+/- 0.2

10+/- 0.2

2+/- 0.05

2003.2

4000440

200N

CE57>500k

xx

CMAP10

3+/- 0.1

3+/- 0.1

2+/- 0.05

2001.8

29025

200N

CE46>500k

xx

CMAP11

5+/- 0.1

5+/- 0.1

2+/- 0.05

2002

80075

200N

CE46>500k

xx

CMAP12

2+/- 0.1

2+/- 0.1

2+/- 0.05

1202.8

16036

200N

CE57>500k

xx

SCMAP01

3+0.3/-0.1

3+0.3/-0.1

4.84 – 30

+/- 0.2 or 1%*60

2.3 – 33360

450 - 6300125

NCE59

>250 k - >35 k

xx

SCMAP02

5+0.3/-0.1

5+0.3/-0.1

5.84 – 50

+/- 0.2 or 1%*60

2.7 – 641000

1400 - 33300125

NCE59

>250 k - >22 k

xx

SCMAP03

3+0.3/-0.1

3+0.3/-0.1

4.85 – 30

+/- 0.2 or 1%*150

4.2 - 39360

100 - 950150

NCE57

>200 k - >35 k

xx

SCMAP04

5+0.3/-0.1

5+0.3/-0.1

6.85 – 50

+/- 0.2 or 1%*150

4.6 - 731000

238 - 3800150

NCE57

>200 k - >22 k

xx

SCMAP05

7+0.35/-0.15

7+0.35/-0.15

8.94 – 70

+/- 0.2 or 1%*150

2.9 - 1001960

390 - 13250150

NCE57

>250 k - >16 k

xx

SCMAP06

3+0.3/-0.1

3+0.3/-0.1

4.84 – 30

+/- 0.2 or 1%*200

2.8 - 39360

29 - 400150

NCE57

>250 k - >35 k

xx

SCMAP07

5+0.3/-0.1

5+0.3/-0.1

6.84 – 50

+/- 0.2 or 1%*200

2.9 - 711000

100 - 2300150

NCE57

>250 k - >22 k

xx

SCMAP08

7+0.35/-0.15

7+0.35/-0.15

8.94 – 70

+/- 0.2 or 1%*200

3 - 1031960

209 - 7100150

NCE57

>250 k - >16 k

xx

SCMAP09

10+0.4/-0.2

10+0.4/-0.2

11.94 – 100

+/- 0.2 or 1%*200

3 - 1494000

418 - 20500150

NCE57

>250 k - >11 k

xx

SCMAP10

3+0.3/-0.1

3+0.3/-0.1

4.84 – 30

+/- 0.2 or 1%*200

1.7 - 24290

24 - 350150

NCE46

>250 k - >35 k

xx

SCMAP11

5+0.3/-0.1

5+0.3/-0.1

6.84 – 50

+/- 0.2 or 1%*200

1.9 - 46800

71 - 1700150

NCE46

>250 k - >22 k

xx

SCMAP12

2+0.3/-0.1

2+0.3/-0.1

3.84 – 20**

+/- 0.2 or 1%*120

2.4-21160

34 - 310150

NCE57

>250 k - >52 k

xx

CMAR01

6+/- 0.2

2+/- 0.1

2+/- 0.05

2002.7

1000100

200N

CE57>500k

xx

CMAR02

8+/- 0.25

3+/- 0.1

2+/- 0.05

2002.7

1700170

200N

CE57>500k

xx

CMAR03

12+/- 0.4

6+/- 0.2

2+/- 0.05

2002.8

2670350

200N

CE57>500k

xx

CMAR04

15+/- 0.45

9+/- 0.3

2+/- 0.05

2002.8

4530500

200N

CE57>500k

xx

CMAR05

20+/- 0.6

12+/- 0.4

2+/- 0.05

2003

8000825

200N

CE57>500k

xx

SCMAR01

6+0.4/-0.2

2+0.1/-0.3

7.94 – 60

+/- 0.2 or 1%*200

2.6 - 741000

95 - 2750150

NCE57

>250k - >18k

xx

SCMAR02

8+0.45/-0.25

3+0.1/-0.3

104 – 80

+/- 0.2 or 1%*200

2.6 - 1001700

162 - 6300150

NCE57

>250k ->14k

xx

SCMAR03

12+0.6/-0.4

6+0.2/-0.4

14.14 – 120

+/- 0.2 or 1%*200

2.7 - 1572670

333 - 19600150

NCE57

>250k - >9 k

xx

SCMAR04

15+0.65/-0.45

9+0.3/-0.5

17.24 – 150

+/- 0.2 or 1%*200

2.7 - 1974530

475 - 35150150

NCE57

>250k - >7 k

xx

SCMAR05

20+0.8/-0.6

12+0.4/-0.6

22.34 – 200

+/- 0.2 or 1%*200

2.9 - 2828000

784 - 77600150

NCE57

>250k - >6 k


* Whichever is largest

** For stacks higher than 10mm, it may be necessary to add a support within the application in order to avoid bending and buckling during mounting and operation

Actuator specifications Specifications on Noliac Actuators


Plates

rings

Linear

stacked

Bending

shear

Names

Length (L)/outer diameter (od)

Width (W)/inner diameter (id)

height (h)

Nominal oper-ating voltage

Free stroke @ nominal oprating voltageTol.: +/− 15%

Blocking force @ nominal Tol.: +/− 20%

capacitance

maximum operating temperature

material

unloaded resonance frequency

chamfers/clamping length (Lc)

mm

Tol.m

mTol.

mm

Tol.V

µmN

nFTol.

◦CN

ceh

z

xx

CMBP01

21+/- 0.45

7.8+/- 0.15

0.7+/- 0.1

200+/- 195

1.22 × 110

+/- 15%150

NCE57

>730L

c =3.5 mm

xx

CMBP02

21+/- 0.45

7.8+/- 0.15

1.25+/- 0.1

200+/- 120

3.72 × 220

+/- 15%150

NCE57

>1300L

c =3.5 mm

xx

CMBP03

21+/- 0.45

7.8+/- 0.15

1.8+/- 0.1

200+/- 85

5.52 × 330

+/- 15%150

NCE57

>1880L

c =3.5 mm

xx

CMBP04

32+/- 0.65

7.8+/- 0.15

0.7+/- 0.1

200+/- 475

0.752 × 160

+/- 15%150

NCE57

>275L

c =3.5 mm

xx

CMBP05

32+/- 0.65

7.8+/- 0.15

1.25+/- 0.1

200+/- 345

2.252 × 320

+/- 15%150

NCE57

>490L

c =3.5 mm

xx

CMBP06

32+/- 0.65

7.8+/- 0.15

1.8+/- 0.1

200+/- 210

4.32 × 480

+/- 15%150

NCE57

>705L

c =3.5 mm

xx

CMBP07

50+/- 1

7.8+/- 0.15

0.7+/- 0.1

200+/- 1270

0.42 × 250

+/- 15%150

NCE57

>100L

c =3.5 mm

xx

CMBP08

50+/- 1

7.8+/- 0.15

1.25+/- 0.1

200+/- 850

1.62 × 500

+/- 15%150

NCE57

>180L

c =3.5 mm

xx

CMBP09

50+/- 1

7.8+/- 0.15

1.8+/- 0.1

200+/- 635

2.92 × 750

+/- 15%150

NCE57

>265L

c =3.5 mm

xx

CMBR01

20+/- 0.6

4+/- 0.15

0.7+/- 0.1

200+/- 47

92 × 180

+/- 15%150

NCE57

>6.9 k

xx

CMBR02

20+/- 0.6

4+/- 0.15

1.25+/- 0.1

200+/- 28

162 × 400

+/- 15%150

NCE57

>12.8 k

xx

CMBR03

20+/- 0.6

4+/- 0.15

1.8+/- 0.1

200+/- 20

222 × 670

+/- 15%150

NCE57

>18.4 k

xx

CMBR04

30+/- 0.9

6+/- 0.2

0.7+/- 0.1

200+/- 108

112 × 470

+/- 15%150

NCE57

>3.7 k

xx

CMBR05

30+/- 0.9

6+/- 0.2

1.25+/- 0.1

200+/- 70

292 × 940

+/- 15%150

NCE57

>6 k

xx

CMBR06

30+/- 0.9

6+/- 0.2

1.8+/- 0.1

200+/- 48

392 × 1,470

+/- 15%150

NCE57

>8 k

xx

CMBR07

40+/- 1.2

8+/- 0.25

0.7+/- 0.1

200+/- 185

132 × 800

+/- 15%150

NCE57

>1.8 k

xx

CMBR08

40+/- 1.2

8+/- 0.25

1.25+/- 0.1

200+/- 115

392 × 1,740

+/- 15%150

NCE57

>3.4 k

xx

CMBR09

40+/- 1.2

8+/- 0.25

1.8+/- 0.1

200+/- 83

562 × 2,740

+/- 15%150

NCE57

>4.8 k

xx

CSA

P012

+/- 0.12

+/- 0.10.5

+/- 0.05+/- 320***

1.5****133

+/- 20%200

NCE51

1,7500.2 m

m × 45 °

xx

CSA

P025

+/- 0.15

+/- 0.10.5

+/- 0.05+/- 320***

1.5****830

+/- 20%200

NCE51

1,7500.5 m

m × 45 °

xx

CSA

P0310

+/- 0.210

+/- 0.20.5

+/- 0.05+/- 320***

1.5****3320

+/- 20%200

NCE51

1,7501 m

m × 45 °

electrodes and wires

xx

External electrodesScreen printed Ag, Ag/Pd or Au

xx

External electrodesFired on Ag, Ag/Pd or Au

xExternal electrodes

Screen-printed Ag and soldered bus wire (option: glued connections)

xExternal electrodes

Au on Ni, plated

xx

xx

Wires

None as standard

xx

xx

Wires

28 AWG × 200 m

m (+/- 20 m

m) teflon if height ≥ 1.2 m

m

xx

xW

ires30 AW

G × 200 m

m (+/- 20 m

m) teflon if height <1.2m

m.

*** At ambient temperature **** From −Vmax to +Vmax. Stroke measured under up to

3.5 MPa axial load without loss of performance.

Actuator specifications Specifications on Noliac Actuators

piezo actuators - piezoelectric materials and devicesmmechc5/images/stories/standard...bending...

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