perpendicular stt mram cells with w insertion layers · 2020. 8. 5. · density of the fl film...

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Thermal stability for domain wall mediated magnetization reversal in perpendicular STT MRAM cells with W insertion layers G. Mihajlović, 1, a) N. Smith, 1, b) T. Santos, 1 J. Li, 1 B. D. Terris, 1 and J. A. Katine 1 Western Digital Research Center, Western Digital Corporation, San Jose, CA 95119 (Dated: 5 August 2020) We present an analytical model for calculating energy barrier for the magnetic field-driven domain wall-mediated magnetization reversal of a magneto-resistive random access memory (MRAM) cell and apply it to study thermal stability factor Δ for various thicknesses of W layers inserted into the free layer (FL) as a function of the cell size and temperature. We find that, by increasing W thickness, the effective perpendicular magnetic anisotropy (PMA) energy density of the FL film monotonically increases, but at the same time, Δ of the cell mainly decreases. Our analysis shows that, in addition to saturation magnetization M s and exchange stiffness constant A ex of the FL film, the parameter that quantifies the Δ of the cell is its coercive field H c , rather than the net PMA field H k of the FL film comprising the cell. Thermal stability factor Δ quantifies retention of the spin-transfer-torque magneto-resistive random access mem- ory (STT MRAM) cell. It is defined as the ratio of the en- ergy barrier E b for magnetization M reversal of the free layer (FL) of the magnetic tunnel junction (MTJ) comprising the memory cell, and the thermal energy k B T , i.e. Δ = E b /(k B T ) (k B is the Boltzmann constant and T is temperature). For a required small memory chip bit error rate BER 1 against thermal bit flip 1,2 and a retention time t , Δ eff > ln( f 0 t /BER) is required, where f 0 = 1 GHz is the attempt frequency and Δ eff = Δ m - σ 2 /2 is the effective Δ value for the memory chip 3 . The latter expression assumes normal distribution of Δ values of individual chip cells, with Δ m and σ being the me- dian and the standard deviation of the distribution. While the direct way to evaluate Δ eff is by examining fraction of bits flipping their Ms as a function of t at various T s (the so- called retention bake method) 3 , this approach is rarely used as it is time consuming. Among many various alternative techniques 4 , Thomas et al. 5 showed that, for the MTJ diame- ters D > 55 nm, Δ m and σ values can also be determined by fitting the magnetic field H induced empirical switching prob- abilitiy distributions P(H) of individual cells to a Neel-Brown relaxation model 1 , namely P(H)= 1 - f 0 t exp [-Δ (H)] 1 - f 0 t exp - E b (H) k B T , (1) with E b (H) calculated assuming domain wall-mediated M re- versal (DWMR). Micro-magnetic 6 and atomistic 7 simulations suggest that MTJ FL with perpendicular magnetic anisotropy (PMA) can prefer DWMR down to D 25 nm. In that case, E b,dw = Dε dw t FL where t FL is the FL thickness and ε dw = 8M s H k A ex is the DW energy density (M s is saturation mag- netization, H k is the net PMA field and A ex is the exchange stiffness constant of the FL). Alternatively, ε dw = 4 K eff A ex where K eff = M s H k /2 is the FL PMA volume energy density. Thus, for the DWMR, Δ is expected to depend on A ex and K eff (i.e. M s and H k ) of the FL film. In addition to sandwiching a) Electronic mail: [email protected] b) Electronic mail: [email protected] the CoFeB-based FL between two MgO layers 8,9 , a common approach to increasing H k is by inserting a thin non-magnetic layer, typically Ta 8,10 , Mo 11,12 or W 10,13 . Recently, however, it has been reported that such insertion layers (ILs) dilute mag- netic moment of the FL which reduces M s , resulting in poor thermal stability performance at higher operational T s 14 . An- other study found that W ILs result in reduction of zero-T A ex , suggesting potential disadvantage of such ILs for achiev- ing high Δ of MRAM cells for DWMR 15 . Ultrathin CoFeB FLs that provide superior STT switching performance without utilizing heavy-metal ILs to promote PMA 16 have also been reported. In all these studies, Δ values for MRAM cell for DWMR were estimated using H k values measured on the full FL film. However, a direct, device-level study of the physical parameters quantifying Δ for DWMR of the FLs at operation- relevant T s has been lacking. Here we present an experimental study of P(H) for perpen- dicular MRAM cells fabricated from FL films having vari- able thickness of the W IL t W at T = 30, 85, and 125 o C. We describe an analytical model for calculating E b,dw which introduces correction to the droplet model previously used in literature 5,7,17,18 . By fitting P(H) using this model, we find that Δ of MRAM cells decreases with increasing t W , even though H k and PMA energy per unit area K eff t FL of the full FL film are increasing. We show that this is not only due to decreasing M s and A ex with increasing t W , but also due to de- creasing H c of the cell. We determine DW width w dw in range of 11 - 17 nm for T s in range 30 - 125 o C, with largest values at highest T . Our results and analysis provide valuable insights into physical factors important for achieving high MRAM cell Δ for technologically relevant cell sizes and operational T s. In the basic droplet model 7,17,18 , a zero-width domain wall inside a circular FL is taken to be a circular arc of radius r forming a right-angle with the FL perimeter (see Fig. 1(a)). This model, however, predicts that E b,dw (H) > 0 for all finite H, an unphysical feature that is removed by including a finite domain wall width w dw 5 . The latter can be implemented by re- ducing the area of both domains via modulation of the wall po- sition (see Fig. 1(b)). In Ref. [5], this was done by modulating length of the radial coordinate as Δr ↔±w dw /2, while main- taining the right-angle constraint. However, this approach is mathematically flawed, since position of the right/exterior end of the radial line r (i.e. point O in Figs. 1(a-b)) will arXiv:2008.00412v2 [cond-mat.mes-hall] 4 Aug 2020

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Page 1: perpendicular STT MRAM cells with W insertion layers · 2020. 8. 5. · density of the FL film monotonically increases, but at the same time, Dof the cell mainly decreases. Our analysis

Thermal stability for domain wall mediated magnetization reversal inperpendicular STT MRAM cells with W insertion layers

G. Mihajlović,1, a) N. Smith,1, b) T. Santos,1 J. Li,1 B. D. Terris,1 and J. A. Katine1

Western Digital Research Center, Western Digital Corporation, San Jose, CA 95119

(Dated: 5 August 2020)

We present an analytical model for calculating energy barrier for the magnetic field-driven domain wall-mediatedmagnetization reversal of a magneto-resistive random access memory (MRAM) cell and apply it to study thermalstability factor ∆ for various thicknesses of W layers inserted into the free layer (FL) as a function of the cell size andtemperature. We find that, by increasing W thickness, the effective perpendicular magnetic anisotropy (PMA) energydensity of the FL film monotonically increases, but at the same time, ∆ of the cell mainly decreases. Our analysis showsthat, in addition to saturation magnetization Ms and exchange stiffness constant Aex of the FL film, the parameter thatquantifies the ∆ of the cell is its coercive field Hc, rather than the net PMA field Hk of the FL film comprising the cell.

Thermal stability factor ∆ quantifies retention of thespin-transfer-torque magneto-resistive random access mem-ory (STT MRAM) cell. It is defined as the ratio of the en-ergy barrier Eb for magnetization M reversal of the free layer(FL) of the magnetic tunnel junction (MTJ) comprising thememory cell, and the thermal energy kBT , i.e. ∆ = Eb/(kBT )(kB is the Boltzmann constant and T is temperature). For arequired small memory chip bit error rate BER 1 againstthermal bit flip1,2 and a retention time t, ∆eff > ln( f0t/BER)is required, where f0 = 1 GHz is the attempt frequency and∆eff = ∆m − σ2/2 is the effective ∆ value for the memorychip3. The latter expression assumes normal distribution of∆ values of individual chip cells, with ∆m and σ being the me-dian and the standard deviation of the distribution. While thedirect way to evaluate ∆eff is by examining fraction of bitsflipping their Ms as a function of t at various T s (the so-called retention bake method)3, this approach is rarely usedas it is time consuming. Among many various alternativetechniques4, Thomas et al.5 showed that, for the MTJ diame-ters D > 55 nm, ∆m and σ values can also be determined byfitting the magnetic field H induced empirical switching prob-abilitiy distributions P(H) of individual cells to a Neel-Brownrelaxation model1, namely

P(H) = 1− f0t exp [−∆(H)]≡ 1− f0t exp[−Eb (H)

kBT

], (1)

with Eb(H) calculated assuming domain wall-mediated M re-versal (DWMR). Micro-magnetic6 and atomistic7 simulationssuggest that MTJ FL with perpendicular magnetic anisotropy(PMA) can prefer DWMR down to D ≈ 25 nm. In that case,Eb,dw = DεdwtFL where tFL is the FL thickness and εdw =√

8MsHkAex is the DW energy density (Ms is saturation mag-netization, Hk is the net PMA field and Aex is the exchangestiffness constant of the FL). Alternatively, εdw = 4

√KeffAex

where Keff = MsHk/2 is the FL PMA volume energy density.Thus, for the DWMR, ∆ is expected to depend on Aex and Keff(i.e. Ms and Hk) of the FL film. In addition to sandwiching

a)Electronic mail: [email protected])Electronic mail: [email protected]

the CoFeB-based FL between two MgO layers8,9, a commonapproach to increasing Hk is by inserting a thin non-magneticlayer, typically Ta8,10, Mo11,12 or W10,13. Recently, however,it has been reported that such insertion layers (ILs) dilute mag-netic moment of the FL which reduces Ms, resulting in poorthermal stability performance at higher operational T s14. An-other study found that W ILs result in reduction of zero-TAex, suggesting potential disadvantage of such ILs for achiev-ing high ∆ of MRAM cells for DWMR15. Ultrathin CoFeBFLs that provide superior STT switching performance withoututilizing heavy-metal ILs to promote PMA16 have also beenreported. In all these studies, ∆ values for MRAM cell forDWMR were estimated using Hk values measured on the fullFL film. However, a direct, device-level study of the physicalparameters quantifying ∆ for DWMR of the FLs at operation-relevant T s has been lacking.

Here we present an experimental study of P(H) for perpen-dicular MRAM cells fabricated from FL films having vari-able thickness of the W IL tW at T = 30, 85, and 125 oC.We describe an analytical model for calculating Eb,dw whichintroduces correction to the droplet model previously used inliterature5,7,17,18. By fitting P(H) using this model, we findthat ∆ of MRAM cells decreases with increasing tW, eventhough Hk and PMA energy per unit area KefftFL of the fullFL film are increasing. We show that this is not only due todecreasing Ms and Aex with increasing tW, but also due to de-creasing Hc of the cell. We determine DW width wdw in rangeof 11 - 17 nm for T s in range 30 - 125 oC, with largest values athighest T . Our results and analysis provide valuable insightsinto physical factors important for achieving high MRAM cell∆ for technologically relevant cell sizes and operational T s.

In the basic droplet model7,17,18, a zero-width domain wallinside a circular FL is taken to be a circular arc of radius rforming a right-angle with the FL perimeter (see Fig. 1(a)).This model, however, predicts that Eb,dw(H)> 0 for all finiteH, an unphysical feature that is removed by including a finitedomain wall width wdw

5. The latter can be implemented by re-ducing the area of both domains via modulation of the wall po-sition (see Fig. 1(b)). In Ref. [5], this was done by modulatinglength of the radial coordinate as ∆r↔±wdw/2, while main-taining the right-angle constraint. However, this approachis mathematically flawed, since position of the right/exteriorend of the radial line r (i.e. point O in Figs. 1(a-b)) will

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Page 2: perpendicular STT MRAM cells with W insertion layers · 2020. 8. 5. · density of the FL film monotonically increases, but at the same time, Dof the cell mainly decreases. Our analysis

2

FIG. 1. Illustrations of (a) circular FL with reversed domain area Adformed at a distance x from the right edge and (b) DW length Ldwand finite DW width wdw.

also be modulated. From Fig. 1, the correct identification is∆x↔±wdw/2, with the right end of line x fixed in positionat the perimeter (point P in Figs. 1(a-b)). A more completedescription of the required mathematical transformations canbe found in Section I of the Supplementary Material. Definingq≡ x/R, δ ≡ wdw/D and q± ≡ q±δ , the results are:

θ(q) = tan−1[

q(1−q/2)1−q

],

(2a)

Ad(θ) =D2

4

[θ − tanθ +

2−θ

)tan2

θ

],

(2b)

Ldw(θ) = D(

π

2−θ

)tanθ ,

(2c)

E(q) = Ldw(q)εdwtFL + |H|MstFL

[D2π

4−Ad(q+)−Ad(q−)

],

(2d)

Eb,dw(H;δ )∼= E(q1)−π

4D2MsHtFL,

(2e)

q1 = 1+ ε−√

1+ ε2,(2f)

ε =εdw

Ms |H|D.

(2g)

The solutions (2e)-(2g) for Eb,dw(H) are accurate to first or-der in δ and can be used to determine εdw and wdw by fittingP(H) using Eq. (1). A 2nd order solution with q1→ q1 +βδ 2

is described in the Supplemental Material, though the differ-ence is quite small in practical cases. By contrast, the r-basedsolution of Ref. [5] has leading error term of order δ .

The MRAM film stacks used in this study consist of a Ta/Ptseed layer (8.0 nm), (Co/Pt)/Ru/(Co/Pt)/CoFeB synthetic an-tiferromagnet reference layer (RL) (7.1 nm), MgO tunnel bar-rier, CoFeB/CoFe/W/CoFe FL, MgO cap layer for enhancingHk, and Ru/Ta cap layer (3 nm). In the FL, the thickness ofthe magnetic layers was fixed at 1.5 nm, while the thicknessof the W spacer layer was varied, i.e. tW = 1.1, 1.5, 2.0 and2.6 Å. The films were deposited by magnetron sputtering inan Anelva C-7100 system and then annealed at 335C for 1

TABLE I. Transport and magnetic properties of free layer films usedin this study. The parameter values are expressed to the last sig-nificant digit based on the corresponding error analysis. Ki is theintrinsic interfacial PMA surface energy density, physically indepen-dent of Ms, but here extracted from the values of Ms and Hk using therelation Ki = MstFL(Hk +4πMs)/2.

tW RA TMR Ms Hk KefftFL Ki(Å) (Ωµm2) (%) (emu/cm3) (kOe) (erg/cm2) (erg/cm2)1.1 11.2 135 1495 1.81 0.22 2.481.5 11.1 142 1360 3.03 0.34 2.262.0 11.1 141 1211 4.25 0.44 2.002.6 11.2 134 1052 5.14 0.48 1.70

hour. The MgO layers were rf-sputtered from a MgO target.RA ∼= 11 Ωµm2 and TMR ∼= 140% values are measured onthe annealed films by current-in-plane tunneling (CIPT)19 atroom T (see Table I). Ms was obtained by measuring the mag-netic moment of the FL using vibrating sample magnetome-try and dividing it with the FL volume assuming the full FLthickness tFL, including tW. Hk of the FL was measured by fullfilm ferromagnetic resonance. From Table I, one can see thatwhile Ms monotonically decreases with increasing tW , Hk andKefftFL calculated using corresponding Ms and Hk values in-crease. However, Ki decreases with increasing tW (see the lastcolumn of Table I), implying that intrinsic interfacial PMAalso decreases with increasing tW and that the net increase inHk and KefftFL at room T is solely due to reduction of the Msof the FL.

Circular MRAM test device cells are fabricated using193 nm deep UV optical lithography, followed by reactive ionetching a hard mask, ion milling the MRAM film, SiO2 refilland chemical mechanical planarization. Electrical critical di-mension CD of each device is determined using film-level RAprovided in Table I and the device resistance in parallel stateRP as CD =

√4RA/(πRP). CD values were clustered around

four target sizes of 65, 90, 105 and 120 nm.The P(H) distributions are obtained by sweeping H via a

staircase ramp with the step of 5 Oe and with a dwell time of0.2 ms, and measuring the MTJ resistance R at low bias volt-age of 10 mV to minimize STT effects on M reversal. Fig. 2(a)shows an example of one hundred R vs H transfer loops mea-sured at T = 30 oC, for a device having CD ≡ D ∼= 65 nm,while the corresponding empirical P(H) and fit to Eq (1) us-ing Eb(H) as expressed in Eqs. (2e)-(2g) is shown in Fig. 2(b).P→ AP and AP→ P branches are fit simultaneously by sub-stituting H→H−Hoffset with fixed Hoffset = HP=0.5

P→AP−HP=0.5AP→P

and fixed Ms, leaving εdw and δ as the only two fitting pa-rameters. From here, ∆ = DtFLεdw/kBT , wdw = Dδ . For thedevice shown in Fig. 2(b) we obtained wdw = 12.7 nm andεdw = 6.2 erg/cm2, corresponding to ∆ = 154.

Fig. 3(a) shows εdw, obtained by fitting P(H) usingEqs. (1)-(2), as a function of D at T = 30 oC for FLs with dif-ferent tW. εdw increases for thinner W, as well as for smallerD. The latter is quite moderate and can be attributed to mildlyincreasing Hk with decreasing D due to reduction of dipolarshape anisotropy. On the other hand, the dependence on tW is

Page 3: perpendicular STT MRAM cells with W insertion layers · 2020. 8. 5. · density of the FL film monotonically increases, but at the same time, Dof the cell mainly decreases. Our analysis

3

FIG. 2. (a) One hundred R vs H loops measured for a MRAM cellwith tW = 1.1 Å and D = 65 nm at T = 30 oC. (b) Empirical P(H)(black circles) corresponding to switching fields shown in part (a) ofthe Figure and fit to DWMR model (red lines) as described in text.

much stronger, resulting in about 30 % increase of εdw, fromapproximately 4.5 erg/cm2 for tW = 2.6 Å to approximately6 erg/cm2 for tW = 1.1 Å. This suggests that reduction of Hkwith decreasing tW is more than compensated by increases inMs and, possibly, Aex.

Fig. 3(b) shows the corresponding ∆ values as a functionof D. ∆ is highest for the FL with lowest tW, and lowest forthe FL with highest tW. This is in direct opposition to thetrends of Hk and KefftFL (see Table I). One can also see thatwhile the difference in ∆ values between thinnest and thickestW IL is significant, this difference is quite small between FLswith 1.1 Å and 1.5 Å W IL. This suggests that for the givenmagnetic thickness and composition of the FL in our study,the optimal tW resulting in maximum ∆ is ≈ 1 Å.

Another parameter obtained directly by fitting P(H) is wdw,shown in Fig. 3(c). We find wdw∼= 11−15 nm for all D and tWvalues. These are smaller than reported previously for PMAthin films where wdw was measured by magneto-optical Kerrmicroscopy imaging20,21, but are consistent with device-levelmicromagnetic simulation results6. However, unlike εdw and∆, wdw does not depend monotonically on tW: it is largestfor tW = 1.1 Å, smallest for tW = 1.5 Å, while the values fortW = 2.0 Å and 2.6 Å are in between.

The co-existence of highest εdw and wdw for thinnest W,suggests largest Aex for this case, as both are ∝

√Aex (wdw =

2ln2√

Aex/Keff, see Section II of Supplementary Materialfor derivation of this expression). This is indeed the case,as can be seen in Fig. 3(d) where we plot calculated Aex =εdwwdw/(8ln2). Indeed, Aex is highest for thinnest W and de-creases with increasing W thickness. This decrease, averaged

FIG. 3. (a) εdw, (b) wdw, (c) ∆, (d) Aex, (e) Hc and (f) KefftFL =(ln2/2)(εdw/wdw)tFL (full symbols) and KefftFL =MsHctFL/2 (opensymbols) as a function of device diameter for FLs with various tWdetermined by fitting P(H) at T = 30 oC using DWMR model. Eachdata point corresponds to median and standard error from tens ofstudied MRAM cells of the same nominal size. The legend shown inpart (b) of the Figure refers to other parts as well.

over all device sizes, is monotonic (see also Fig.4(e)). This isconsistent with previously reported findings15,21, although thevalues Aex ∼= 1.0− 1.7 µerg/cm that we obtain are approxi-mately a factor of 2-3 higher compared to these reports. Thus,based on simple relation between wdw, Aex and Keff, the non-monotonic dependence of wdw on tW suggests non-monotonicdependence of Keff and likely KefftFL in our fabricated cells,contrary to the results obtained from full films (see Table I).This is indeed the case, as can be seen in Fig. 3(f) where weplot KefftFL = (ln2/2)(εdw/wdw)tFL (full symbols). KefftFL in-creases when tW is increased from 1.1 Å to 1.5 Å, but it thendecreases for larger tW. Surprisingly, the observed trend canbe well reproduced by assuming that Keff in our devices isdetermined by device-level coercive field Hc (see Fig. 3(e))instead of the film level Hk, i.e. Keff = MsHc/2. The KefftFLvalues calculated this way are shown in Fig. 3(f) as open sym-bols, and are in good quantitative as well as qualitative agree-ment with KefftFL results from fitting to the DWMR model(full symbols in the same figure).

This finding suggests that ∆ in devices, in the DWMRregime, is determined, in addition to the Ms and Aex of theFL film, by the device level Hc, which may, or may not bedirectly proportional to Hk of the film (compare Hc values inFig. 3(e) and Hk values in Table I). Our finding contrasts previ-ous reports, where KefftFL measured at the film level was usedto either evaluate Aex from ∆ measured on cells14, or to esti-

Page 4: perpendicular STT MRAM cells with W insertion layers · 2020. 8. 5. · density of the FL film monotonically increases, but at the same time, Dof the cell mainly decreases. Our analysis

4

FIG. 4. (a) Ms, (b) εdw, (c) wdw, (d) ∆, (e) Aex and (f) KefftFL =(ln2/2)(εdw/wdw)tFL (full symbols) and KefftFL =MsHctFL/2 (opensymbols) as a function of thickness of W insertion layers for T = 30,85 and 125 oC. The legend shown in part (a) of the Figure refers toother parts as well. Each data point in (b)-(e) is an average value overCD = 65, 90, 105 and 120 nm.

mate ∆ from KefftFL and Aex measured on FL films16. Lowerthan expected values of Aex in the former case and ∆ in thelatter case both can be explained by our finding that ∆ is moredirectly determined by cell-level Hc rather than film-level Hkof the FL.

We further perform the same study at higher T = 85 oC and125 oC. Fig. 4 summarizes our T -dependent results. WhileMs, εdw, ∆ and Aex decrease monotonically with increasing tWat all T s (see Figs. 4(a), 4(b), 4(d), and 4(e), respectively), wdw(see Fig. 4(c)) and KefftFL (see Fig. 4(f)), show non-monotonicdependence on tW. In addition, one can see that KefftFL val-ues calculated from the obtained εdw and wdw (filled symbols)agree well with those obtained from MsHc product (open sym-bols) for all T s, although for higher T s the latter values tendto be smaller. This discrepancy increases with increasing T .Our numerical modeling shows that this behavior is expected,as the ratio ξ = MsHc/(εdw ln2/wdw) has no universal value,but is a monotonically increasing function of Hc: ξ ∼= 1 forHc = 2−2.5 kOe (corresponding to values in our experimentsat T = 30 oC, see Fig. 3(e)), but decreasing for lower valuesHc < 2 kOe that we measure at higher T s (see Section III andFigs 5 and 6 of the Supplementary Material).

Our results show that thinner W IL could be advantageous

for producing high thermal stability ∆, despite having weakerPMA energy density KefftFL. The advantage stems fromhigher Ms and Aex of the FL film, as well as weaker T de-pendence of the latter parameters. Our results agree with filmlevel studies presented in References2,15,16.

In conclusion, we report an analytical model for calculat-ing energy barrier for domain wall mediated magnetizationreversal of the MRAM cell which describes correction to thedroplet model previously used in literature. Using our model,we study thermal stability factor ∆ for various thicknesses ofW layers inserted into FL as a function of device size andtemperature. We find that, by increasing W thickness, theeffective PMA energy density of the FL film monotonicallyincreases, but at the same time, ∆ of the cell decreases. Ouranalysis shows that in order to maximize ∆ for DWMR, onehas to maximize Ms and Aex of the FL film, and Hc of the cellFL. Our results also show that thinner W IL could be advan-tageous for producing high ∆ for MRAM cell sizes down to≈ 25 nm.1W. F. Brown, Phys. Rev. 130, 1677 (1963).2A. Meo, P. Chureemart, S. Wang, R. Chepulskyy, D. Apalkov, R. W.Chantrell, and R. F. L. Evans, Sci. Rep. 7, 16729 (2017).

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5L. Thomas, G. Jan, S. Le, Y.-J. Lee, H. Liu, J. Zhu, S. Serrano-Guisan,R.-Y. Tong, K. Pi, D. Shen, R. He, J. Haq, Z. Teng, A. Rao, V. Lam, Y.-J. Wang, T. Zhong, T. Torng, and P.-K. Wang, 2015 IEEE InternationalElectron Devices Meeting (IEDM) , 26.4.1 (2015).

6C. Yoshida, T. Tanaka, T. Ataka, J. Fujisaki, K. Shimizu, T. Hirahara, andH. Shitara, J. J. Appl. Phys. 58, SBBB05 (2019).

7A. Meo, R. Chepulskyy, D. Apalkov, R. W. Chantrell, and R. F. L. Evans,arXiv , 1912.09761v1 (2019).

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11H. Almasi, D. Reifsnyder Hickey, T. Newhouse-Illige, M. Xu, M. R. Ros-ales, S. Nahar, J. T. Held, K. A. Mkhoyan, and W. G. Wang, App. Phys.Lett. 106, 182406 (2015).

12H. Almasi, M. Xu, J. Xu, T. Newhouse-Illige, and W. G. Wang, App. Phys.Lett. 109, 032401 (2016).

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Page 5: perpendicular STT MRAM cells with W insertion layers · 2020. 8. 5. · density of the FL film monotonically increases, but at the same time, Dof the cell mainly decreases. Our analysis

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1

Supplementary Material for

Thermal stability for domain wall mediated magnetization reversal in

perpendicular STT MRAM cells with W insertion layers

G. Mihajlović1, N. Smith1*, T. Santos1, J. Li1, B. D. Terris1 and J. A. Katine1

1Western Digital Research Center, Western Digital Corporation, San Jose, CA, 95119

*Corresponding author. Email: [email protected]

Section I. Fig. 1a shows the geometry of the “droplet”

domain-wall model[1-4] in the case of infinitesimal domain

wall width. This model imposes the geometric constraint that

the curved wall intersects the perimeter at a right angle. The

area 𝐴𝑑 of the (smaller) domain is obtained by subtracting

areas 𝐴green and 𝐴blue from right triangle 1

2𝑟𝑅

1

2𝑟𝑅 =

1

2𝐴𝑑 + 𝐴green + 𝐴blue

1

2𝑟2𝜙 = 1

2𝐴𝑑 + 𝐴blue, 𝜙 = 𝜋

2− 𝜃

1

2𝑅2𝜃 = 1

2𝐴𝑑 + 𝐴green, 𝑟 = 𝑅 tanθ

Combining these results yields the following:

𝐴𝑑 = 1

4𝐷2[𝜃 − tanθ + (𝜋

2− 𝜃)tan2𝜃] (1a)

𝐿dw = 2𝑟𝜙 = 𝐷(𝜋

2− 𝜃)tan𝜃 (1b)

𝐿dw being the domain wall arc length. Including the

combination of domain wall energy 𝐿dw𝑡휀dw (where 휀dw is

the domain-wall energy density, and 𝑡 the free-layer film

thickness), and Zeeman energy in the presence of a uniform

external (perpendicular) field 𝐻, the energy 𝐸 of the free-

layer is expressed as

𝐸 = 𝐿dw𝑡휀dw + |𝐻|𝑀𝑠𝑡[𝜋

4𝐷2 − 𝐴𝑑 − 𝐴𝑑] (2)

𝐴𝑑 is the area of the domain whose magnetization is parallel

to the direction of field 𝐻. (𝜋

4𝐷2 − 𝐴𝑑 is the area of the other

domain.) It then follows that

𝐸max = 𝐸(𝜃0), 𝑑𝐸

𝑑𝜃|𝜃0

= 0 (3a)

𝑑𝐴𝑑 𝑑𝜃⁄ = 1

2𝐷tanθ 𝑑𝐿𝑑w 𝑑𝜃⁄ (from (1)) (3b)

→ tan𝜃0 = 휀dw (|𝐻|𝑀𝑠𝐷)⁄ (3c)

Finally, the energy barrier 𝐸𝑏 for domain-wall reversal is then

𝐸𝑏(𝐻) = 𝐸(𝜃0) − 𝜋

4𝐷2𝑀𝑠𝑡𝐻 (4)

The latter reference term in (4) is the Zeeman energy of the

initial uniform magnetization state of the free-layer. Here, a

positive 𝐻 corresponds to a magnetic field that is antiparallel

to the initial magnetization direction. The result in (4)

implicitly assumes the 𝑡/𝐷 → 0 limit so demagnetizing fields

are local, and so the anisotropy energy does not depend on

the position of the (zero wall-width) domain wall.

Unlike the macrospin model where 𝐸𝑏 → 0 at finite 𝐻 →

𝐻𝑘⊥, the “droplet” model of [1-4] predicts that 𝐸𝑏 → 0 in the

limit 𝐻 → ∞. This unphysical feature may be eliminated by

inclusion of a small but finite domain-wall width 𝑤dw, as

shown previously.[4] This was implemented by reducing the

area of both domains by modulating the wall position (see

Fig. 1b) by an amount ±𝑤dw/2 = |𝑎-𝑏| = |𝑏-𝑐| from

original position 𝑏 (with 𝑟 = |𝑏-𝑏′|) while maintaining the

aforementioned right-angle constraint at the perimeter. Using

𝑟 = 𝑟(𝜃) = 𝑅 tanθ as the metric, (2) is re-expressed as

𝐸(𝑟) = 𝐿dw(𝑟)𝑡휀dw + |𝐻|𝑀𝑠𝑡[𝜋

4𝐷2 − 𝐴𝑑(𝑟 +

1

2𝑤dw)

−𝐴𝑑(𝑟 − 1

2𝑤dw)]. (5)

R

r

12 Ad

domain wall

D = 2R 12 Ad

x

r

a b cc' b' a'

p

wdw

a)

b)

Fig. 1. (a) Droplet model with new length parameter x. (b) geometric illustration of corrected finite domain-wall width model.

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However, there is a geometric error in (5). Modulation

±𝑤dw/2 in wall position is not equal to the modulation ±∆𝑟

in 𝑟 since the position of points 𝑎′, 𝑏′, and 𝑐′ simultaneously

vary, e.g., +∆𝑟 = |𝑎-𝑎′| − |𝑏-𝑏′| > |𝑎-𝑏| = +𝑤dw/2, e.g.,

see Fig. 1b. The error here is first order in 𝑤dw 𝐷⁄ .

At the cost of some trigonometric complexity, this problem

can be solved by using length 𝑥 (Fig. 1a) as the metric for

wall position, since it is referenced to the fixed point 𝑝. Here,

+∆𝑥 = |𝑎-𝑝| − |𝑏-𝑝| = |𝑎-𝑏| = +𝑤dw/2, exactly.

Geometrically, 𝑥 ≡ 𝑅 + 𝑟 − √𝑅2 + 𝑟2, but it is here

preferred to work with the dimensionless variable 𝑞 ≡ 𝑥/𝑅.

Given that 𝑟 = 𝑅tanθ, the relationship 𝜃(𝑞) is readily shown

to be

𝜃(0 ≤ 𝑞 < 1) = tan−1 (𝑞(1 − 𝑞/2)

1 − 𝑞)

𝜃(1 < 𝑞 < 2) = 𝜋 − tan−1 (𝑞(1−𝑞/2)

𝑞−1) (6)

Defining 𝛿 ≡ 𝑤dw/𝐷, the corrected expression for 𝐸(𝑞)

replaces (5) with

𝐸(𝑞) = 𝐿dw(𝑞)𝑡휀dw + |𝐻|𝑀𝑠𝑡[𝜋

4𝐷2 − 𝐴𝑑(𝑞 + 𝛿)

−𝐴𝑑(𝑞 − 𝛿)] (7)

It is understood that 𝐴𝑑(𝑞 ± 𝛿) = 𝐴𝑑(𝜃(𝑞′))|𝑞′=𝑞±𝛿 . The

case 𝜃(𝑞′ > 1) in (6) may arise in (7) when evaluating

𝐴𝑑(𝑞 + 𝛿) using (1a) for “small” |𝐻| and “large” 𝛿.

Because 𝐿dw(𝑞) and 𝐴𝑑(𝑞 ± 𝛿) in (7) are evaluated for

different arguments, the method of (3) cannot be used to

obtain an exact solution for 𝑞0 such that 𝑑𝐸

𝑑𝑞|𝑞0

= 0. However,

one can use (3c) and (6) to obtain an approximate solution:

𝑞01 = 1 + tan𝜃0 − √1 + tan2𝜃0, tan𝜃0 = 휀dw (|𝐻|𝑀𝑠𝐷)⁄ ,

that is accurate to first order in 𝛿. The energy barrier can then

be estimated to be

𝐸𝑏(𝐻; 𝛿) ≈ 𝐸(𝑞01) − 𝜋

4𝐷2𝑀𝑠𝑡𝐻 (8)

using (7) to evaluate 𝐸(𝑞01). Implicitly assumed here is that

the wall core has zero net contribution to Zeeman energy. If

𝛿 > 𝑞01, 𝐴𝑑(𝑞01 − 𝛿) in (7) is taken to be zero.

A second order accurate solution 𝑞02 = 𝑞01 + 𝛽𝛿2 may be

found by Taylor expanding 𝑑𝐸

𝑑𝑞= 0 from (7) to order 𝛿2 using

(3b), and substituting 𝑞 = 𝑞01 + 𝛽𝛿2. One finds:

𝛽 = −𝜕1𝑇𝑞01

𝜕2𝐿𝑞01+ 1

2𝑇0𝜕3𝐿𝑞01

+ 12𝜕2𝑇𝑞01

𝜕1𝐿𝑞01

𝜕1𝑇𝑞𝜕1𝐿𝑞

𝑇0 = 𝜀dw|𝐻|𝑀𝑠𝐷

, 𝑇𝑞 =𝑞(1−𝑞/2)

1−𝑞, 𝜕1𝑇𝑞 = 1

2[1 +

1

(1−𝑞)2] (9)

𝜕1𝐿𝑞 =𝑑𝐿dw

𝑑𝑞= 𝐷[

𝜋

2− 𝜃(𝑞) −

𝑇𝑞

1 + 𝑇𝑞2

] ∙ 𝜕1𝑇𝑞

using notation 𝜕𝑛𝐹𝑞′ = 𝑑𝑛𝐹(𝑞) 𝑑𝑞𝑛|𝑞=𝑞′⁄ . The explicit

expression for 𝛽 is obviously quite cumbersome. The results

from (8), with or without the 𝛽-correction from (9), will be

referred to below as the “𝑞-method”.

Fig. 2 shows normalized 𝐸𝑏(𝐻; 𝛿) via the 𝑞-method with

varied 𝛿 ≡ 𝑤dw/𝐷. As referred to earlier, 𝐸𝑏 remains finite

for all 𝐻 when 𝛿 → 0. Even for “large” 𝛿 = 0.5 (beyond

which the model itself becomes questionable), the 2nd order

𝛽-correction has minimal impact on 𝐸𝑏 , particularly in the 𝐻-

range of most interest where 𝐸𝑏 > 0. The primary reason is

that 𝐸𝑏 is evaluated at the energy maximum, making its value

insensitive to more finite differences between 𝑞01 and 𝑞02.

However, it is only 𝐸𝑏(𝐻; 𝛿) that plays a role when fitting

field-switching probability data.

If one returns to (5), and defines 𝑝 ≡ 𝑟/𝑅 = tanθ, one can

rewrite it in a form analogous to (7):

𝐸(𝑝) = 𝐿dw(𝑝)𝑡휀dw + |𝐻|𝑀𝑠𝑡[𝜋

4𝐷2 − 𝐴𝑑(𝑝 + 𝛿)

−𝐴𝑑(𝑝 − 𝛿)] (10a)

𝐸𝑏(𝐻; 𝛿) ≈ 𝐸(𝑝0) − 𝜋

4𝐷2𝑀𝑠𝑡𝐻,

0 2 4 6 8 10-1

0

1

2

H/[ /(M D)]dw s

E /( t D)dwb

= 0, 0.125, 0.25, 0.5

q-method

= 0

Fig. 2. Normalized 𝐸𝑏(𝐻; 𝛿) for the q-method for indicated δ. Dotted lines are for results (δ = 0.25, 0.5) without 2nd order correction (9).

-1 0 1 2 3 4 5

0

1

2

H/[ /(M D)]dw s

E /( t D)dwb

= 0

q-method p-method

= 0.125, 0.25, 0.5

Fig. 3. Normalized 𝐸𝑏(𝐻; 𝛿) comparing p-method (dashed) with 1st-order q-method (solid) for indicated δ.

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𝜃0 = tan−1 (𝑝0 = dw

|𝐻|𝑀𝑠𝐷) (10b)

The results of (10) will be referred to as the “𝑝-method”, the

equivalent of Ref. [4]. It is only exact to zeroth order in 𝛿.

Unlike the 𝑞-method, the 𝑝-method is ill defined when field

𝐻 → 0 and 𝛿 > 0, and some “care” is required in that case.

Fig. 3 shows a comparison of 𝑞-method and 𝑝-method

computations of normalized 𝐸𝑏(𝐻; 𝛿). Not unexpectedly, the

𝑝-method suffers serious error for 𝛿 ≳ 0.25, where the 𝑝-

method overestimates by roughly a factor of 2 the value of 𝛿

that will most closely reproduce the 𝐸𝑏(𝐻; 𝛿) curves

generated by the more exact 𝑞-method.

Section II. The domain-wall width parameter 𝑤dw in (5) or

(7) is used to quantify the loss in Zeeman energy with a sharp

wall of finite thickness when abandoning the zero-thickness

domain wall of the original droplet model. To relate 𝑤dw to

exchange stiffness 𝐴 and anisotropy constant 𝐾eff that

characterize an analytic form of (Bloch) domain wall[5], one

can equate the loss of Zeeman energy using these two wall

profiles 𝑚𝑧(𝑥). Since the Zeeman energy scales

proportionately to ∫ 𝑚𝑧(𝑥)𝑑𝑥, this comparison is expressed

as

∫ [1 − 𝑚𝑧sharp

(𝑥)]𝑑𝑥𝐿

0= ∫ [1 − 𝑚𝑧

Bloch(𝑥)]𝑑𝑥𝐿

0 (11a)

𝑚𝑧sharp

(𝑥) = 0 (if 𝑥 < 𝑤dw/2), or 1(if 𝑥 > 𝑤dw/2)

(11b)

𝑚𝑧Bloch(𝑥) = tanh(√𝐾eff 𝐴⁄ 𝑥) (11c)

the “1” in the integrands of (11a) representing the zero-

thickness wall. Solving (11a) with 𝐿 ≫ (𝑤dw/2, √𝐴 𝐾eff⁄ ),

one finds

𝑤dw = 2 ln2√𝐴 𝐾eff⁄ (12)

The result in (12) is similar to that proposed in Ref. [4]. It is

notably distinct from the classical domain-wall width

𝜋√𝐴 𝐾eff⁄ based on extrapolation of the wall-profile shape[5],

but which is not directly relevant to the Zeeman energy

consideration of importance here.

Section III. Expressing the results illustrated in Fig. 2 as

𝐸𝑏/휀dw𝐷𝑡 = 𝐹(𝐻𝑧𝑀𝑠𝐷/휀dw; 𝛿) (13)

with 𝐹( ) defined through (7)-(9). For an Arrhenius model for

field-switching probability 𝑃sw = 1 − exp(−𝑓0𝑡sw𝑒−Δ) in a

time 𝑡sw, where Δ = 𝐸𝑏/𝑘𝐵𝑇 and “attempt-frequency 𝑓0 ~

109sec-1, the coercivity 𝐻𝑐 is the 𝐻𝑧where 𝑃sw = 50%, or

Δ50% = ln(𝑓0𝑡sw/ln2). Letting 𝐻𝑧 → 𝐻𝑐 and ∆→ ∆50%, it

follows from (13) that

휀dw𝐷𝑡/𝑘𝐵𝑇 𝐹(𝐻𝑐𝑀𝑠𝐷/휀dw; 𝛿) = ∆50% (14)

Treating ∆50% as a known constant, (14) can be solved

numerically to obtain 휀dw as a function of 𝐻𝑐 . Some examples

for 휀dw(𝐻𝑐) are shown in Fig. 4. The value of Δ50% 13

corresponds to 𝑡sw ~ 2 msec. The parameter value choices are

relevant to the experimental conditions presented in our

publication.

In terms of exchange stiffness 𝐴 and anisotropy constant 𝐾eff,

the domain wall energy density 휀dw = 4√𝐴𝐾eff for the

aforementioned Bloch wall model.[5] This, along with (12),

can be used to solve for 𝐾eff = 1

2ln2 휀dw 𝑤dw⁄ . One can

compare this value of 𝐾eff to that of a “quasi-macrospin”

model 𝐾eff′ = 1

2𝑀𝑠𝐻𝑐 which replaces 𝐻𝑘⊥

eff of the true

macrospin model by the coercivity 𝐻𝑐 . In Fig. 5, the solutions

shown in Fig. 4 can be re-expressed as plots of 𝐾eff′ /𝐾eff vs

𝐻𝑐 . Interestingly, this ratio is close to unity for parameter

values relevant to the experimental conditions presented in

our publication (e.g. see Fig. 6). However, this behavior is

not universal, particularly for lower 𝐻𝑐 .

0 1 2 3 4

0

2

4

6

8

10

Hc (kOe)

Ms = 1200 emu/cc

t_FL = 1.7nm

dw(erg/cm2)

= 1350%

T = 300K

D = 60, 120 nm

= 10, 12.5, 15 nmdww

Fig. 4. Solutions of (14) for values of FL diameter D and domain wall-width 𝑤𝑑𝑤 (increasing in direction of arrow) as indicated.

0 1 2 3 4

0

0.2

0.4

0.6

0.8

1

1.2

1.4

D = 60, 120 nm

Hc (kOe)

Ms = 1200 emu/cc

t_FL = 1.7nm

(Ms*Hc)/2

dw dww/(ln2/2)

= 1350%

T = 300K

= 10, 12.5, 15 nmdww

Fig. 5. The ratio 𝐾𝑒𝑓𝑓′ /𝐾𝑒𝑓𝑓 vs 𝐻𝑐. Based on the solutions of Fig. 4.

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Fig. 6. 𝐻𝑐 vs W thickness at different Ts.

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