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Our Solutions,YourValue 1Panasonic Factory Solutions Co., LTD. Panasonic Confidential
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Our Solutions,YourValue 2Panasonic Factory Solutions Co., LTD. Panasonic Confidential
Main Fraunhofer Gesellschaft building Hansastr. 27c / entrance with main Foyer
OurMicroelectronicTechnology Center
Panasonic M-TeCe
Main Fraunhofer IZM (Munich) building Fraunhofer IZM (Munich) lobby Opening Panasonic M-TeCe
Our Solutions,YourValue 3Panasonic Factory Solutions Co., LTD. Panasonic Confidential
As of 21st May, 2007
Tuesday 15th of May10:00 10:15 Official Tape Cutting Ceremony (IZM Lobby GF)10:15 10:45 Introductory Words by Panasonic (2nd floor 2.44)
PFSC President Factory Solutions: Mr. Kanzaki (5 min)PFSC Director Microelectronics: Mr. Neal Okuda (20 min)PFSE Sales Microelectronic Europe: Reinhard Windemuth
10:45 - 11:15 Introductory Words by Fraunhofer IZM :Prof. Dr.-Ing. Dr. E.h. Herbert Reichl (15min)Dr.-Ing. Karlheinz Bock (15min)
11:15 12:00 Small tour to Panasonic Microel. Tech. Center (1st floor 1.15 / 1.19)
12:15 13:30 Lunch (Fingerfood buffet) in Cafeteria (1st floor)14:00 15:00 Technical presentations in seminar room (2nd floor)
(Plasma Cleaning, Thermosonic Gold to Gold Interconnect GGI, Flipchip)
15:00 17:00 Explain Technology & Equipment (room 1.15)
Wednesday 16th of May9:30 h - 16:00h Technical Workshop
Agenda of official opening
Our Solutions,YourValue 4Panasonic Factory Solutions Co., LTD. Panasonic Confidential
M-TeCe Laboratory
Our Solutions,YourValue 5Panasonic Factory Solutions Co., LTD. Panasonic Confidential
Tape cutting ceremony:Dr. Bock; Dr. D.Lang; Prof.Dr.Dr. Reichl; Mr. Kanzaki; Mr. Okuda; Mr. Kawase
Opening Ceremony
Prof. Dr. Dr. Reichl / Mr. Kanzaki
Shake hands
Our Solutions,YourValue 6Panasonic Factory Solutions Co., LTD. Panasonic Confidential
Opening speaches
Dr. BockMr. Kanzaki / Mr. Sato Prof. Dr. Dr. Reichl
Mr. Okuda Audience
Our Solutions,YourValue 7Panasonic Factory Solutions Co., LTD. Panasonic Confidential
Panasonic Laboratory
Further Pictures
Lunch buffet
Fraunhofer IZM cleanroom
PFAE Intro_E (G1M)
www .Panasonic-industrial.com
Panasonic ideas for lifePanasonic Factory Solutions Co., LTD. Our Solutions,YourValue 8Panasonic Factory Solutions Co., LTD. Panasonic Confidential
Reference
1 m2
Possible Area For Extension
FCB3Full Auto
FCB3Full Auto
PSX303PSX303
F&K
STM6STM6
IR
Stereo
MonitorCureOven
CureOvenVAC
Pack
VACPack
DryBox
CupboardCupboard
ShearTest
Chair
Chair
Chair
TableTable
Panaboard
TableTable
0,73
Chair
Chair
RoomL1.15
M-TeCe Floor Plan
Main equipment List:Panasonic Plasma Cleaner PSX303
Panasonic Flipchip Bonder FCB3
Stereo microscope Olympus SZX10
High resolution measurementmicroscope Olympus STM6
IR microscope Olympus BX51
Sheartester Dage BT24
Pulltester / Wirebonder / Bumper: F&K 5610
programmable oven: Binder
Vacuum packing unit: Komet Vacuboy
Granit table: TMC
Keithley Multimeter + Multiplexer: Type 2700
Contact angle measurement: Krüss
Nitrogen cabinet with humiditycontrol
Low temperature Refrigerator -50°C
High Speed industrial PC for datacollection
PlasmaCleanerPSX303
FlipchipBonderFCB3
Our Solutions,YourValue 9Panasonic Factory Solutions Co., LTD. Panasonic Confidential
FCB3 Flip Chip Bonder
FC Technology: High Flexibility
High accuracy : Chip Placement +/-3µm at 3sigma
UPH: 2000 components / hour (1,8 sec dry cycle)
Process: Thermosonic & Thermocompression
Bond Force: up to 490N
Substrate Size: 50 x 50 mm to 320 x 250mm
Supply Method: 12 wafer, Tray 2 & 4
Chip Size: 0,3 mm to 20 mm sq.
Dipping option: Flux and Ag Paste transfer
Ultrasonics: 60KHz, 0.01sec increments
Footprint: 1.65m x 1.38m
Apps.O2: Med I/O (to 100 pins) (CMOS Image Sensor, HB-LEDs, Memory)
Our Solutions,YourValue 10Panasonic Factory Solutions Co., LTD. Panasonic Confidential
PSX303-MR Plasma Cleaner
Technology: In-Line Parallel Plate Plasma Cleaner
Gas : Argon (etching); Oxygen (surface modification)
UPH: 360 (Ar gold etching 5nm)
Cycle Time: Typically 30 seconds ,Ar etching
Substrate Size: 50x20mm to 250 x 270mm
Substrate thickness: 0.1mm to 2mm
RF Generator : 13.56Mhz, up to 600W
Footprint: 1.67m x 1.0m
Vacuum Chamber: down to 3 pascals
Argon: Au bond pad cleaning, Thin gold etching,
Oxygen: Underfill, mold adhesion on organics
Gas Flow Rates (typically): Ar 5ml/min, O2 100ml/min
Our Solutions,YourValue 11Panasonic Factory Solutions Co., LTD. Panasonic Confidential
PFSEEurope2007
PFSCJapan1980
PFSAUSA2006
PICSSingapore
2006
Techology Centers Worldwide
FactoryDemo Lab
Sales
Demo LabSales
Demo LabSales
Demo LabSales
Our Solutions,YourValue 12Panasonic Factory Solutions Co., LTD. Panasonic Confidential
Please contact for further info:
Dipl.-Ing. Reinhard Windemuth(Sales Manager Microelectronics Europe)
Panasonic Factory Solutions Europea Division of Panasonic Industrial Europe GmbH
Hans-Pinsel-Straße 2D-85540 Haar
Tel.: + 49 (0) 89 / 46159 365Mobile: + 49 (0) 173 / 6 259 225
Fax: 49 (0) 89 / 46159 - 260e-mail: [email protected]