oled display training

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-1- OLED Display 기술 1. Introduction 2. OLED & PLED materials 3. Device Operation 4. Device Performance 5. OLED Display - Full color OLED 구현 방법 - PMOLED and AMOLED - Emission type - AMOLED products 6. Summary

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  • - 1 -

    OLED Display 1. Introduction

    2. OLED & PLED materials

    3. Device Operation

    4. Device Performance

    5. OLED Display- Full color OLED - PMOLED and AMOLED- Emission type- AMOLED products

    6. Summary

  • 1. Introduction Display

    - 2 -

    Electronic information displays

    Projection Direct-view Off-screenDMDTMA

    Light valveLCOS

    Flat-panel

    Shadowmask

    Beamindex

    Mono-chrome

    Emitter

    Nonemitter

    Luminescence Incandescence

    CL (Flat CRT)

    Liquid-crystal Electro-chromic

    Electro-phoretic

    Ferro-electric

    Activematrix

    Passivematrix

    Plasmaaddressed TFT MOS MIN Diodeothers TN STN FLC others

    EL LED Gas discharge (PDP)

    OrganicInorganic

    Non-coherentdisplays

    Coherentholograms

    CRTCRT

    FED VFD AC DC

    Polymer Small Molecule

  • 1. Introduction

    - 3 -

    Luminescence

    Excitation Source

    PL Photoluminescence PDP,

    EL Electroluminescence Electric Field OLED, laser diode

    CL Cathodeluminescence Cathode Ray(Electron) CRT, FED

    i

    V

    p n

    Inorganic Semiconductor LEDs(p-n junction LED)

  • 1. Introduction What is OLED display?

    - 4 -

    Light

    SubstrateAnode (ITO, IZO)

    HIL / HTLEML

    EIL / ETLCathode

    OLED (Organic Light Emitting Diode):- , (Exciton) , .

  • 1. Introduction History of OLED

    - 5 -

    LTPS-TFT 24.2 Full color OLED - 2003 Sony

    LTPS-TFT 17 Full color OLED - 2002 TMD

    LTPS-TFT 15.5 Full color OLED - 2003 SS SDI

    a-Si TFT 20 Full color OLED - 2003 CMO LTPS-TFT 20.1 Full color OLED - 2004 LG.Philips LCD

    a-Si TFT 21 Full color OLED - 2004 Samsunga-Si TFT 40 Full color OLED - 2005 Samsung

  • 1. Introduction OLED

    - 6 -

    (Small molecule)

    (Polymer)

    (Fluorescence)

    (Phosphorescence)

    Bottom Emission

    Top Emission

    Color RGB LEDBlue EL + CCM

    White EL + C/F

    Passive Matrix

    Active Matrix

  • 1. Introduction AMOLED vs. TFT-LCD

    - 7 -

    AMOLEDAMOLEDTFT- LCDTFT- LCD

    LC C/F

    B/L

    TFT

    No backlight : Thinner & lighter

    No LC : Fast Response time

    Less cell process : Simple process

    Wide viewing angle

    High brightness

    Better color purity

    Easily applicable to flexible display

    Polyimide

    PolyimideLC

    ITO CathodeOrganic ELTFTGlassPolarizer

    Advantages of AMOLED

    TFT

    OLED/PolyLED

    PolarizerGlassC/F + BM

    Encapsulation

    TFT

    PolarizerGlass

    Back Light

  • 1. Introduction Market Forecast

    - 8 -

    2007 main display AMLCD 50.7% , OLED main display 5,300 , main display 10% .

    Mobile Phone Sub Display()

    0

    200,000

    400,000

    600,000

    MSTN 179,554 132,761 115,590 110,917 CSTN 160,027 170,368 128,770 100,852 AMLCD 153,524 194,789 239,895 272,791 OLED 2,266 10,990 41,120 53,495

    2004 2005 2006 2007

    Mobile Phone Main Display ()

    (

    x

    1

    0

    0

    0

    )

    050,000100,000150,000200,000

    MSTN 50,251 47,442 22,282 17,059 CSTN 34,562 52,706 34,329 21,562 AMLCD 30,537 45,217 59,154 62,002 OLED 18,115 20,780 22,720 24,152

    2004 2005 2006 2007

    (

    x

    1

    0

    0

    0

    )

    Source : DisplaySearch Q4 03 Quarterly mobile phone shipment and forecast report

  • 1. Introduction Display Market

    - 9 -

    10 40

    VGA

    Size (Inch)

    20 30

    SVGA

    XGA

    UXGA

    Digital HD TV

    QVGA

    SXGA

    QXGA

    D-Paper

    IMT2000

    PDA

    Car Navi.

    DesktopMonitorNote PC

    Monitor

    EWS

    FPD PRT TV

    TVMonitor

    Resolution

    50 60

    CRT TV

    Monitor Zone

    TV ZoneMobile Zone

    TFT

    AMOLED

  • 1. Introduction OLED Product Roadmap

    - 10 -

  • 1. Introduction OLED Product Roadmap

    - 11 -

    Display

    Display

    * OLEDs 2003 by UDC

  • 1. Introduction OLED Display History

    - 12 -

    Sony 3.8

    2004

    LPL 20.1

    SS 21

    Epson 40 Tiled

  • 1. Introduction Emission Mechanism

    - 13 -

  • 2. OLED & PLED Materials Small molecular OLED

    - 14 -

    Small molecular OLED

    Formation of organic film and cathode metal9 Vacuum evaporation

  • 2. OLED & PLED Materials Small molecular OLED

    - 15 -

    Optical absorption and photoluminescence

    I-V characteristics of the ITO/TPD/Alq3/Al device

    Absorption and PL emission spectra of Alq3

  • 2. OLED & PLED Materials Polymer LED

    - 16 -

    Polymer LEDJ.H. Burroughes et al.

    - Nature 347, 539 (1990)

    Glass

    ITO

    External circuit

    Al or Ca

    PPV

    Formation of organic film 9 Spin coating, Dip-coating, Ink-jet

    Formation of cathode metal9Vacuum evaporation

  • 2. OLED & PLED Materials Polymer LED

    - 17 -

    Optical absorption, PL and EL of PLED

    I-V and L-V characteristics of the ITO/PPVPPV/Al device Absorption, PL and EL emission spectra of PPV

  • - 18 -

    (, ) () ( Joule ) (;Tg ) ( , ) HOMO, LUMO

    OLED

    2. OLED & PLED Materials

    Emissive materials : Small-molecular

  • 2. OLED & PLED Materials

    - 19 -

    Emissive materials : Dye

  • 2. OLED & PLED Materials

    - 20 -

    Phosphorescent sensitizer

    Emissive materials : Polymer

  • 2. OLED & PLED Materials

    - 21 -

    Emissive materials : Polymer

    Hole Transporting Materials

  • 3. Device operation

    - 22 -

    (i) Quantum efficiency

    (ii) Carrier injection and transport mechanism

    (iii) Photonic effects

    Internal quantum efficiency, int = rstq

    is the ratio of number of excition formation events within device to number of electrons in external circuit

    rst is fraction of excitions formed as singlets

    q is efficiency of radiative decay of excitions

    rst

    q

    ext

    h+ - e- pair

    SingletexcitonSingletSingletexcitonexciton

    Triplet excitondirect deactivation

    Triplet Triplet excitonexcitondirect deactivationdirect deactivation

    EmissionEmissionEmission Thermaldeactivation

    ThermalThermaldeactivationdeactivation

    ExternalemissionExternalExternalemissionemission

    Internaldissipation

    InternalInternaldissipationdissipation

    h+ e-

    25% 75%

    rst

    q

    ext

    h+ - e- pair

    SingletexcitonSingletSingletexcitonexciton

    Triplet excitondirect deactivation

    Triplet Triplet excitonexcitondirect deactivationdirect deactivation

    EmissionEmissionEmission Thermaldeactivation

    ThermalThermaldeactivationdeactivation

    ExternalemissionExternalExternalemissionemission

    Internaldissipation

    InternalInternaldissipationdissipation

    h+ e-

    h+ - e- pairh+ - e- pair

    SingletexcitonSingletSingletexcitonexciton

    Triplet excitondirect deactivation

    Triplet Triplet excitonexcitondirect deactivationdirect deactivation

    EmissionEmissionEmission Thermaldeactivation

    ThermalThermaldeactivationdeactivation

    ExternalemissionExternalExternalemissionemission

    Internaldissipation

    InternalInternaldissipationdissipation

    h+h+ e-e-

    25% 75%

    Basic processes :

    (i) injection of electron and hole,

    (ii) capture to form exciton,

    (iii) emission

  • 3. Device operation

    - 23 -

  • 3. Device operation

    - 24 -

  • 3. Device operation

    - 25 -

    Excited State

    Triplet(75%)

    OLED(25%) OLED(100%)

    Singlet(25%)

    Ground state

    ()( & )

    Fast decay time(

  • 3. Device operation

    - 26 -

    (i) Quantum efficiency

    (ii) Carrier injection and transport mechanism

    (iii) Photonic effects

    LUMO : Lowest Unoccupied Molecular Orbital HOMO : Highest Occupied Molecular Orbital

  • 3. Device operation Injection of Charge

    - 27 -

    Injection dominated mechanisms : thermionic and tunneling emission

    y Thermionic emission : J. Gmeiner et al., Acta Polym. 44, 201 (1993)

    Thermionic emission

    Tunneling emission

    y Tunneling emission : J. Appl. Phys. 75, 1656 (1994)

    I F2exp(-/F) = 8(2m*)1/23/2(3qh)-1/2

    MetalPPV

    J = A*T2exp(-b/kT)A* = 4qk2m*/h3

    A*: Richardson constant, m* : effective mass

    In MEH-PPV devices, F-N tunneling model applies at high fields and the barrier is determined by the metal work function and the energy levels of MEH-PPV (I.D. Parker, J. Appl. Phys. 75, 1656, (1994))

  • 3. Device operation

    - 28 -

    Conduction in organic semiconductor : ohmic conduction and SCLC

    y Ohmic conduction :

    J = qn0V/d : P.W.M. Blom et al., Appl. Phys. Lett. 68, 3308 (1996)

    y Space Charge Limited Current :JSCL = 9/8seV2/d3 : no traps

    R.N. Marks et al., Synth. Met. 55, 4128 (1996)P.W.M. Blom et al., Appl. Phys. Lett, 68, 3308 (1996)

    JSCL ~ V(m+1)/d(2m+1) : exponential distribution of traps (m=Tt/T)

    P.E. Burrows et al., J. Appl. Phys. 79, 7991 (1996)

  • 3. Device operation

    - 29 -

    (i) Quantum efficiency

    (ii) Carrier injection and transport mechanism

    (iii) Photonic effects

    y Fraction of internally generated light that emerges in forward direction is approx. 1/2n2 where n is the internal refractive index

    External quantum efficiency, ext ~ 1/(2n2)

    OLED

    glass

    Forward emission

  • 4. OLED Performance

    - 30 -

    Current balance is set by the size of the barriers at the two electrodes. Lower voltage operation Higher efficiency Good thermal stability Longer life time

    To improve device performanceTo improve device performance

    Introduce HTL, ETL, HIL, EILIntroduce HTL, ETL, HIL, EIL i.e.) HeterostructureHTL : Hole transporting layerETL : Electron transporting layerHIL : Hole injecting layerEIL : Electron injecting layer

    Balancing of electron and hole currentsBalancing of electron and hole currents

  • 4. OLED Performance

    - 31 -

    Schematic diagram of the EL emission process in a typical multilayer OLED.

    ITO

    HIL

    HTL

    ETL

    EIL

    EML

    Metal

    Exciton

    1000 ~ 1500

    Cathode(low work function metal: Ca, Al:Li, Mg:Ag, etc)

    Anode(Transperent electrode:ITO, IZO, etc)

  • 4. OLED Performance

    - 32 -

  • 4. OLED Performance Lifetime

    - 33 -

    :

    - ( ) : () ( 1/L0 , L0: )

    - :

    Log(T) = -a Log(I) + b (T: , I: (/), a: )

  • 4. OLED Performance Lifetime

    - 34 -

  • 4. OLED Performance Lifetime

    - 35 -

  • 5. OLED Display

    - 36 -

    OLED

    OLED with high efficiency

    - Device structure

    - Material(Phosphorescent OLED)

    - Processing

    - Outcoupling, full color

    --

  • 5. OLED Display What is pixel ?

    - 37 -

    Sub-pixel

    Pixel

    R G B

    R G

    BGR G B

    RG

    BR B

    G

    (a) Stripe (b) Delta Triad (c) Quad

    Cf.) RGBW sub-pixel

  • 5. OLED Display Color Mix

    - 38 -

    Color mix of sub-pixel

    < 0.03 mixed color

    15.0 XGA : 0.297mm x 0.099 (85.5 ppi)

    17.0 SXGA : 0.264mm x 0.088 (96.2 ppi)

    19.0 SXGA : 0.294mm x 0.098 (86.4 ppi)

    20.1 UXGA : 0.255mm x 0.085 (99.6 ppi)

    * ppi : pixel per inch

  • 5. OLED Display Color Generation

    - 39 -

    Number of Color White balance Control# of Color = 2n (R) x 2n (G) x 2n (B)n: # of video data bits

    Dynamic range of RGB data - current, voltage

    RGB driving TFT size RGB emission time White OLED + color filter

    3 bit= 8-gray/RGB = 512 colors 4 bit= 16-gray/RGB = 4,096 colors 6 bit= 64-gray/RGB = 262,144 colors 8 bit = 256-gray/RGB = 16,777,216 colors

    %100

    =

    NTSCRGBDisplay

    ) LCD - Note PC : 45%~65%- Monitor : 65%~72%- LCD-TV : 72%

  • 5. OLED Display Driving Method of FPD

    - 40 -

    CRT : E-beam scanning

    FPD : Electrical signal scanning

    0.1~1 msec

    Brightness

    time

    Passive matrix Active matrix

    Brightness Brightness

    timetime

  • - 41 -

    5. OLED Display

    (b) Color Filter(CF)

    (c) Color Change Media(CCM)

    White OLED

    Blue OLED

    (a) RGB

    RGB C/F CCM

    RGB Patterning

    RGB Patterning

    ColorReproductionQuality

    Approaches to Full Color OLED

    EL & Color

    Filter

    EL&

    Color Filter

  • 5. OLED Display RGB OLED

    - 42 -

    Shadow mask () Pattern Metal Mask (Shadow Mask), Pixel

    Issues

    Fine Metal Mask

    - Mask ( < 50, )- Mask - Mask (Mask )

    - Mask Alignment ( Mask )

    - Mask ( )

    - Mask High Resolution- Mask Particle(/Metal) Device (Line , Dark Spot..)

    Source

    Substrate

    Shadow Mask

    Source

    Substrate

    10-7 Torr

    Shadow Mask

  • 5. OLED Display RGB OLED

    - 43 -

    Ink-Jet ITO Ink- Jet Printing Polymer Ink- Jet Print Process

    ITOPassivation

    TR Units

    Glass Substrate

    Bank Channel

    Insulator

    Conducting polymer (PFDT/PSS)

    Bank

    Red emitterRhodamine 101/PPV)

    Ink-jetGreen emitter (PPV)

    Blue emitter (Poly(dialkylfluorene))

    Cathode

  • 5. OLED Display RGB OLED

    - 44 -

    Laser Coating Donor Film Coating Pixel- : Evaporated onto the LITI Donor Film- : Blending onto the LITI Donor Film

    Laser Induced Thermal Imaging (LITI)

    Substratewith

    Anode

    HTL (Spin Coating)

    Laser

    Donor Film

    LEPCoating

    Cathode(Evaporation)

    LITI PLEDDevice

    Encapsulation

    Nd:YAGLASER Beam

    Substrate

    Donor Film

    LTHCLEP

    adhesioncohesion

    adhesion

    LITI Process(R,G,B, 3 times)

    LTHC : Light-To-Heat Conversion Layer, LEP : Light Emitting Polymer

  • 5. OLED Display

    - 45 -

    Passive matrix

    Digital driving method- Time ratio gray scale method - Area ratio gray scale method

    Analog driving method- Simple pixel circuit(Two TFT + 1 Capacitor)- Compensation pixel circuit

    Active matrix

    OLED Displays

  • 5. OLED Display PMOLED vs. AMOLED

    - 46 -

    Cathode

    Organicfilm

    AnodeGlasssubstrate

    Glasssubstrate

    TFT

    Matrix EL device Line Emission

    Passive Matrix (PM) Active Matrix (AM)

    Matrix EL TFT Frame time Emission

    1)

    1) TFT : Thin Film Transistor

  • 5. OLED Display PMOLED

    - 47 -

    Glass

    ITO Inter Insulator

    Organic layerCathode

    Cathode separatorInter insulator

    ITOGlass

    AA

    Cathode

    Anode(ITO)

    Glass

    Scan1

    Scan2

    Scan3

    Scann

    Data1 Data2 Data3 Datam

    A A

  • 5. OLED Display PMOLED

    - 48 -

    PMOLED Scan Line, Data Line Pixel.

    Scan 1

    Scan 2

    Scan 3

    Scan 4

    Data 1

    Data 2

    Data 3

    Data 4

    t1 t2 t3 t4 t5

    Data 5

    Data 6

    Data

    1 2 3 4 5 6

    S

    c

    a

    n

    1

    2

    3

    4

  • 5. OLED Display PMOLED Layout

    - 49 -

    Metal

    Metal/ITO

    Inter-Insul. Cathode

    Separator

    Mask #4Mask #3

    Mask #2Mask #1

  • 5. OLED Display PMOLED Process

    - 50 -

    (1) Metal & ITO patterning (2) Inter-insulator

    ITO glass Cleaning Metal(Mo, Cr) Sputtering

    () Metal & ITO patterning : Mask #1 Metal patterning : Mask #2

    Insulator layer formation : MASK #3(ITO edge breakdown )

    - Photosensitive polymer

  • 5. OLED Display PMOLED Process

    - 51 -

    (3) Cathode Separator (4)

    Pretreatment- Plasma treatment : ITO Work function - UV cleaning

    (Shadow mask )

    Cathode separator : Mask #4 ( pixel cathode line short )Reverse Taper angle ( Negative PR )

  • 5. OLED Display PMOLED Process

    - 52 -

    (5) (Cathode) (6) UV

    Out Going Inspec.COF BondPol Lamin. Probe TestCell CutAging

    COF Film

    Out Going Inspec.COF BondPol Lamin. Probe TestCell CutAging

    COF FilmCOF Film

    (7) Aging, Scribing, Module

  • 5. OLED Display PMOLED Grayscale

    - 53 -

    Grayscale methods

    1datai 2datai 3datai tandai

    Pulse-Amplitude modulation(PAM)- Current level control- Multiple Current sources- Matching problem

    Pulse-Width Modulation(PWM)- ON/OFF timing control- Only One current source

    CCV

  • 5. OLED Display PMOLED vs. AMOLED

    - 54 -

    AMOLED PMOLED ( : Resolution => 640 x 480, Luminance =>100cd/m2)

    100cd/m2

    52500cd/m2

    16.7ms32us

    AM

    ~~~~ ~~ ~~

    PM??

    1 Frame Time : 16.7 ms( 60Hz )1 line scan time : 32 us( 525 line in 1 frame )Duty Driving = 100 x 16.7m / 32u 52500 cd/m2

  • 5. OLED Display

    - 55 -

    0 5000 10000 15000 20000 25000 300007

    8

    9

    10

    11

    12

    Luminescence [cd/m2]

    E

    f

    f

    i

    c

    i

    e

    n

    c

    y

    [

    c

    d

    /

    A

    ]

    0

    2

    4

    6

    8

    10

    Voltage [V]

    AM Operation PM Operation

    PMOLED vs. AMOLED

  • 5. OLED Display PMOLED Power dissipation

    - 56 -

    In a poly-LED display, there are three sources of power dissipation.

    1. Light production:Plight = ILED VLED

    2. Capacitive losses:Pcap = C Vswing Vsupply freq.

    3. Resistive losses:Pres = I2 R

    Power Dissipation in poly-LED Displays with Increasing Size and Resolution

    Resolutioncolumn/row

    80 60160 120320 240640 480

    Diagonal(in.)1.22.45

    10

    Plight(mW)

    15804002000

    Pcap(mW)

    1011013001800

    Pres(mW)

    1103008000

    Ptotal(mW)

    262002000

    28000

    Efficacy(lm/W)

    5.32.81.10.3

    (Pixel : 300300 um, luminance : 100 cd/m2, efficiency : 15 cd/A, green poly-LED)

  • 5. OLED Display AMOLED

    - 57 -

    TFT-LCD TFT : switching

    AMOLED TFTs : switching + current driving

    Pixel array

    LCCstStorage line

    Gate line

    Data line

    Data

    G

    a

    t

    e

    VDDGate line

    Data line Pixel array

    SW

    DRV_TFT

    Cst

    OLED

    GND

    Data

    G

    a

    t

    e

    TFT-LCD AMOLED

  • 5. OLED Display AMOLED Process

    - 58 -

    INPUTINPUTTFT for AMTFT for AM

    Evaporation

    Seal Dispensing Canister CleanGetter Input

    Out Going Inspec.COF BondPol Lamin. Probe TestCell CutAging

    Encapsulation

    Evaporation

    Back End

    Sealing

    UV Expose

    EvaporationMetal Source R/G/B Source

    COF Film

    Pre Treatment

    INPUTINPUTTFT for AMTFT for AM

    Evaporation

    Seal Dispensing Canister CleanGetter Input

    Out Going Inspec.COF BondPol Lamin. Probe TestCell CutAging

    Encapsulation

    Evaporation

    Back EndBack End

    Sealing

    UV Expose

    Sealing

    UV Expose

    EvaporationMetal Source R/G/B Source

    COF FilmCOF Film

    Pre Treatment

  • 5. OLED Display AMOLED

    - 59 -

    AMOLED Scan Line , Data Line Pixel ( Frame) .

    t1 t2 t3 t4 t5

    Data

    1 2 3 4 5 6

    S

    c

    a

    n

    1

    2

    3

    4

    Scan 1

    Scan 2

    Scan 3

    Scan 4

    Data 1

    Data 2

    Data 3

    Data 4

    Data 5

    Data 6

  • 5. OLED Display AMOLED

    - 60 -

    TFT(Thin Film Transistor)Gate

    Source Drain

    G

    S D

    TFT : CdSe TFT, Organic TFT, a-Si TFT, Poly-Si TFT,

  • 5. OLED Display Silicon

    - 61 -

    Semiconductor layer

    Single Crystalline Silicon Polycrystalline Silicon amorphous Silicon

    Grain boundaryGrain

    Long range orderEg = 1.1 eVNo defect

    CMOSHigh mobility=> ~ 600Low leakage

    Long range orderEg = 1.1 eVGrain boundary

    No long range orderLarge bandgapMany Trap states

    CMOSMedium mobility=> ~ High off current

    NMOS Low mobility=> 0.5 ~ 1High photo current

  • 5. OLED Display a-Si:H

    - 62 -

    a-Si:H formation SiH4 + H2 amorphous Si deposition

    Gas phase transport

    Migration & chemical reaction

    Surface desorption of byproduct(Exhaust)

    Plasma

    Deposition film

    Substrate

    Electron drift mobility 1 cm2/VsHole drift mobility 0.003 cm2/VsOptical band gap 1.5~1.8 eV300K conductivity 10-11/cm n+ a-Si conductivity 10-2/ /cmH content 10 at%

  • 5. OLED Display a-Si:H TFT

    - 63 -

    a-Si:H TFT GATE DATA Bank /

    / (Deposition & Patterning Process) Photo Lithography

    Patterning

    (Cleaning)

    SUBSTRATE

    AlDC

    AlAlAlAl

    Ar+

    Al

    Ar+

    TARGET

    SPUTTER

    R F

    HSi SiNSi N

    HSiHH

    HN

    NH H

    HHH

    PECVD

    (Deposition)

    PR (PR Coating)

    (Exposure)

    (Develop)

    PR (PR Strip)

    (Inspection)

    (Wet Etch)

    (Dry Etch)

    FO Si

    SiF4

    SiPLASMA

    Gas RF

    (Etch)

  • 5. OLED Display a-Si:H TFT

    - 64 -

    a-Si:H TFT I-V Transfer curve Output curve

  • 5. OLED Display a-Si:H TFT

    - 65 -

    a-Si:H TFT Stability : SNU (SID 2005)

  • 5. OLED Display Poly-Si TFT

    - 66 -

    Poly-Si formation Solid Phase Crystallization (SPC) base

    Pure SPC

    - High Temperature SPC

    - Low Temperature SPC

    Metal induced Crystallization ( MILC )

    - Metal Induced Lateral Crystallization ( MILC )

    - Continuous Grain Silicon (CGS)

    - Field Enhanced Metal Induced Crystallization (FEMIC)

    Alternating Magnetic Field Crystallization (AMFC)

    Laser base Excimer Laser Annealing (ELA)

    Sequential Lateral Solidication (SLS)

  • 5. OLED Display LTPS TFT

    - 67 -

    Excimer laser crystallization Overlapped pulse scanning

    ScanningDistanceper Pulse(Ls)

    Laser BeamWidth(Lw)

    L

    a

    s

    e

    r

    B

    e

    a

    m

    L

    e

    n

    g

    t

    h

    OverlappingRate

    = 100 X (Lw-Ls)/Lw

    A

    v

    r

    g

    .

    G

    r

    a

    i

    n

    S

    i

    z

    e

    [

    A

    ]

    Laser Energy Density [mJ/cm2]E0 E0+10 E0+20

    1000

    2000

    3000

    4000

    5000

    6000

    7000

    8000

    Non-Uniform GrainRegion

    Overlap : 90% (10 Shot)Overlap : 92% (13 Shot)Overlap : 94% (17 Shot)Overlap : 96% (25 Shot)

    E0+30 E0+40 E0+50 E0+60

  • 5. OLED Display LTPS TFT

    - 68 -

    1 Shot 5 Shots

    10 Shots 20 Shots

    Multiple shot effect Excimer laser crystallization

  • 5. OLED Display LTPS TFT

    - 69 -

    LTPS TFT Process Buffer SiO2 depo.a-Si:H depo.

    Dehydrogenation

    Laser annealing

    Active patterning

    Gate SiO2 depo.

    Gate metal depo.

    Gate patterning

    Annealing

    LDD doping

    Interlayer SiO2Contact hole open

    Passivation depo.

    ITO Patterning

    ITO depo.

    S/D metal depo.

    S/D Patterning

    Passi hole open

    Storage doping

    n-type doping

    p-type doping Bank Patterning

    Bank layer depo.

    n-type TFTp-type TFT

    Buffer SiO2

    Source

    Passi-SiNx

    INT-SiO2Drain

    P-Si

    Gate

    Drain Source

    ITO

    P-Si

    Bank layer

    Gate

    Storagecapacitor

  • 5. OLED Display LTPS TFT

    - 70 -

    I-V characteristics of LTPS TFTs

    -20 -15 -10 -5 0 5 10 15 20 251E-15

    1E-14

    1E-13

    1E-12

    1E-11

    1E-10

    1E-9

    1E-8

    1E-7

    1E-6

    1E-5

    1E-4

    1E-3

    0.01

    D

    r

    a

    i

    n

    C

    u

    r

    r

    e

    n

    t

    (

    A

    )

    Gate Voltage (V)

    ??? ??? ??? ?? ? ? ?? ??

    ??? ?? ???? ???????

    Mobility : 68 cm2/V.secIoff : 0.16 pA/um

    Mobility : 68 cm2/V.secIoff : 2.78 pA/um

    Transfer curve

  • 5. OLED Display LTPS TFT

    - 71 -

    Uniformity of LTPS TFTsVth [V]

    -2.5

    -2.25

    -2

    -1.75

    -1.5

    -1.25

    -11 4 7 10 13 16 19 22 25 28

    Vth

    Vth [V]

    -2.5

    -2.25

    -2

    -1.75

    -1.5

    -1.25

    -11 4 7 10 13 16 19 22 25 28

    Vth

    ufl_m [cm2/Vs]

    505560657075808590

    1 4 7 10 13 16 19 22 25 28

    ufl_m

    ufl_m [cm2/Vs]

    505560657075808590

    1 3 5 7 9 11 13 15 17 19 21 23 25 27

    ufl_m

  • 5. OLED Display TFT Hysteresis

    - 72 -

    a-Si TFT Hysteresis : SNU (SID 2005)

  • 5. OLED Display TFT Hysteresis

    - 73 -

    LTPS TFT Hysteresis : POSTECH & LPL (JJAP, 43, p. L482 (2004)

    10 5 0 -5 -10 -151E-14

    1E-13

    1E-12

    1E-11

    1E-10

    1E-9

    1E-8

    1E-7

    1E-6

    1E-5

    1E-4

    Vds = -0.1V

    Vds = -10 V

    Vth = 0.6 [V]

    TFT W/L=8/20 [m/m] forward gate voltage sweep reverse gate voltage sweep

    I

    d

    s

    [

    A

    ]

    Vgs [V]

  • 5. OLED Display AMOLED

    - 74 -

    Two TFT and One capacitor pixel structure

    Saturation region operation:

    Device-to-device variation on panel

    : Brightness uniformity on panel

    Run-to-run variation

    : Panel-to-to panel brightness uniformity

    VDD IR drop problem

    TFT hysteresis : Image Sticking

    2)(2 thpSGpoxDSsat

    OLED VVLWCII ==

    data Line

    Gate Line

    SW_TFT DRV_TFT

    Cst

    OLED

    GND

    VDD

    Ids

    VDD

    VOLED < Chess pattern >

    VGS

    Vds VTFT

  • 5. OLED Display AMOLED

    - 75 -

    Voltage distribution of VDD line : POSTECH & KIT (ITC 2005)

    ColumnRow ColumnRow

    V

    D

    D

    [

    V

    ]

    ColumnRow ColumnRow

    V

    D

    D

    [

    V

    ]

    < Voltage distribution for full white >

    RP

    RPV

    RHIPIXEL

    VDD 1

    VDDN

    VDD2

    IPIXEL

    IPIXEL

    IPIXEL

    IPIXEL IPIXEL

    RH

    RH

    RH

    RH RH

    RP

    RPV

    RPV

    RP

    < VDD structure >

    A

    A

    B

    B

    Row Column

    A

    A

    B

    B

    A

    A

    B

    B

    Row Column

    V

    D

    D

    [

    V

    ]

    150 300 450 60013

    13.5

    14

    14.5

    15

    V

    D

    D

    [

    V

    ]

    A-A'B-B'

    < Voltage distribution for test chess pattern>

  • 5. OLED Display AMOLED

    - 76 -

    Voltage distribution of VDD line : POSTECH & KIT (ITC 2005)

    R P

    `

    IPIXEL

    RH

    RV

    RPV

    VDD1

    VDDN

    VDD2

    R P

    R P

    RPV

    RPV

    RPV

    RPV

    RPVRV

    IPIXEL

    IPIXEL

    RH

    RH

    RH RHRVRV

    RV

    RHRH

    IPIXEL

    IPIXEL IPIXEL

    R P

    R P

    R P

    RV RV RV

    RH

    RVRVRV

    VDDN

    DDV1

    DDV1

    DDV2

    DDV2

    VDDM

    DDV1

    DDV2

    VDDM

    R P R P R P

    R P R P R P

    RPH RPH RPH

    RPH RPH RPH

    < VDD structure >

    ColumnRow

    V

    D

    D

    [

    V

    ]

    ColumnRow

    V

    D

    D

    [

    V

    ]

    < Voltage distribution for full white >

    Row Column

    A

    A

    B

    B

    V

    D

    D

    [

    V

    ]

    Row Column

    A

    A

    A

    A

    B

    B

    B

    B

    V

    D

    D

    [

    V

    ]

    150 300 450 60013

    13.5

    14

    14.5

    15

    A-A'B-B'

    < Voltage distribution for test chess pattern>

  • 5. OLED Display AMOLED

    - 77 -

    Poly-Si TFT AMOLED Non-uniformity of electrical characteristics in driving TFTs

    Mobility, subthreshold swing, threshold voltage Luminance non-uniformity

    a-Si TFT AMOLED Low cost, flexible displays

    Well-established large manufacturing base for AMLCD displays

    Poor mobility and reliability

    Large-sized driving TFT

    High operation voltage power consumption increase Stress-induced threshold voltage shift

    Luminance non-uniformity & degradation

  • 5. OLED Display AMOLED Driving Methods

    - 78 -

    Digital DrivingDigital Driving

    Conventional Voltageprogrammed Compensation Circuit

    Compensation Circuit

    Analog DrivingAnalog Driving

    AMOLED DrivingAMOLED Driving

    TFT

    TFT

    TFT

    *1) Area ratio gray scale method*2) Time ratio gray scale method

    Hybrid Driving Feedback Driving

    Voltage Programmed Current Programmed ARG*1 TRG*2

    TFT

    TFT

    TFT

  • 5. OLED Display Digital Driving Methods

    - 79 -

    Area ratio gray scale method (ARG)

    2m gray scales can be acquired.

    m=2, the areas of the sub-pixels are 1 : 2.

    Four gray scales are acquired.

  • 5. OLED Display Digital Driving Methods

    - 80 -

    ARG & TRG

    The frame time is divided into plural sub-frames.

    2m n gray scales can be acquired.

    m=n=2, the time of the sub-frames are 1 : 4.

    16 gray scales are acquired.

  • 5. OLED Display Digital Driving Methods

    - 81 -

    Similar to PDP driving method. TU has no contribution to light emission. Cathode voltage variation required TLn have the ratio of 1:2:4:8:16:32 in length.

    SF1 SF2 SF3TU1 TL1 TU3 TL3

    OFF ON

    SEL (SID 2000) : Display Period Separated (DPS) Driving

    Gate 1

    Gate 2

    Gate NEL_cathode

  • 5. OLED Display Digital Driving Methods

    - 82 -

    SEL (SID 2000) : Simultaneously Erased Scan (SES) Driving

    Good uniformity

    Difficult to embody the driver system

    Frame memory is needed.

    The degradation of image quality is more serious than analog driving method

  • 5. OLED Display Digital Driving Methods

    - 83 -

    Hitachi (SID 2002) : Clamped Inverter Driving

    SID 2003 SID 2004 SID 2004

  • 5. OLED Display Digital Driving Methods

    - 84 -

    Ryukoku (IDW 2004) : TRG + Current uniformization

  • 5. OLED Display Digital Driving Methods

    - 85 -

    SEL & Pioneer (SID 2004) - Resolve Luminance variation depending on ambient temperature &

    degradation of OLED

  • 5. OLED Display Voltage Programmed Driving Methods

    - 86 -

    2

    223

    222

    21

    21

    21

    )(/

    )])([/

    )_(/

    __

    _

    dataDD

    TthTthdataDD

    TthTGSD

    VVk

    VVVVk

    VVkI

    ==

    =

    If Vth_T3=Vth_T2

    ResetStoring Data

    VDD

    C1

    T2

    T4

    T3

    T1Vdata

    Select

    OLED

    GND

    A

    B

    SNU (SID 2002)

    Compensation : Vth (o), mobility (x), VDD (x) Mismatch problem between T2 and T3 Low contrast ratio Emission control S/W between OLED & T2 (IDW 2002)

  • 5. OLED Display Voltage Programmed Driving Methods

    - 87 -

    Hanyang Univ. & SS SDI (Euro-display 2002)

    ( ) ( )2221

    21

    dataSGOLED VVDDKVKI

    VI

    ===

  • 5. OLED Display Voltage Programmed Driving Methods

    - 88 -

    SS SDI (SID 2003)

    Hanyang Univ. (IMID 2003) VDDData Line

    Select [n]

    Select [n-1]

    C1T1

    T2

    T4T3

    em [n]

    T5

    em[n]

    II IIIISelect [n-1]

    Select [n]

    Improve contrast ratio (C/R)

  • 5. OLED Display Voltage Programmed Driving Methods

    - 89 -

    Sarnoff Corp. (IEDM 1998)

    Vdata

    1 2 3

    ( ) 2221

    21

    +==

    +=

    =

  • 5. OLED Display Voltage Programmed Driving Methods

    - 90 -

    SS SDI & Hanyang Univ. (IDW 2003)

    12

    th_M1dataSG_M1 VV += VVDD

    2

    21

    2121

    )(

    )V( I th_M1_ OLED

    dataDD

    MSG

    VVK

    VK

    =

    =

    Compensation : Vth (o), mobility (x), VDD (x)

  • 5. OLED Display Voltage Programmed Driving Methods

    - 91 -

    SS SDI & Hanyang Univ. (IDW 2003)

    th_M1dataSG_M1 VV += VVDD

    2

    21

    2121

    )(

    )V( I th_M1_ OLED

    dataDD

    MSG

    VVK

    VK

    =

    =

    Compensation : Vth (o), mobility (x), VDD (x)

  • 5. OLED Display Voltage Programmed Driving Methods

    - 92 -

    Hanyang Univ. & SS SDI (SID 2004)

    th_T1DDdataCST VV-V +=V

    + -

    1. Scan ON

    2. Scan OFF

    th_T1SUSdata

    _SG_T1

    VV-

    V

    +==

    V

    VV TGDD 1

    2

    21

    2121

    )(

    )V( I th_T1_ OLED

    SUSdata

    TSG

    VVK

    VK

    =

    =

    Compensation : Vth (o), mobility (x), VDD (o)

    1TthDDdataSUS VVVV

    V

    _

    CSTSUSG_T1 V-V

    +==

  • 5. OLED Display Voltage Programmed Driving Methods

    - 93 -

    KAIST (IDW 2001)

    VD

    VC

    Data line

    Select2 Select1

    Select1

    C1C2T1

    T2

    T3T4OLED

    (1) (2) (3)

    Select1

    Select2

    Data line

    (1) Initialization, VG_T1 = GND(2) Compensation, VC1 = Vth_T1(3) Data input, VG_T1 = Vdata +Vth_T1

    Vcomp

    Compensation : Vth (o), mobility (x), Vc (X)

  • 5. OLED Display Voltage Programmed Driving Methods

    - 94 -

    SSE (SID 2005)

    TNO

    +-

    (1) Initialization, VC1=VDD (when, Vref = 0 V)(2) Compensation, VC1= VTO_OLED +Vth(3) Data input, VG_DTFT = Vdata +VTO_OLED +Vth

    Compensation : Vth (o), mobility (x), GND (x) Low contrast ratio

  • 5. OLED Display Current Programmed Driving Methods

    - 95 -

    Sarnoff Corp. (IEDM 1998) Toshiba (SID 2003)

    Compensation : Vth (o), mobility (o), VDD (o) Difficult to display low gray level

    2

    21 )V( I th Data = SGVK

    KIV DataSG 2+= thV

    1. Programming Period 2. Driving Period

    Data

    SG

    I

    VK

    == 2

    21 )V( I th OLED

  • 5. OLED Display Current Programmed Driving Methods

    - 96 -

    Sony (SID 2001) : Current mirror type,

    Compensation : Vth (o), mobility (o), VDD (o) W/L of T4 is larger than that of T2

    Reduce settling time Mismatch problem between T2 and T4

  • 5. OLED Display Current Programmed Driving Methods

    - 97 -

    SNU (IDW 2002) : Current scaling type

    Compensation : Vth (o), mobility (o), VDD (o) Current scaling type

    Reduce settling time Mismatch problem between T3 and T4

  • 5. OLED Display Current Programmed Driving Methods

    - 98 -

    Hanyang Univ. & SS SDI (IDW 2002)

    Compensation : Vth (o), mobility (x), VDD (o) Capacitive coupling of C2

    Solve settling problem

  • 5. OLED Display Current Programmed Driving Methods

    - 99 -

    Michigan Univ & Kyushu Univ. (IEEE2001)

    Waterloo Univ. (Eurodisplay. 2002)

  • 5. OLED Display Feedback Driving Methods

    - 100 -

    Hanyang Univ. & SS SDI (SID 2005)

  • 5. OLED Display Feedback Driving Methods

    - 101 -

    Waterloo Univ. & Ignis (SID 2005)

  • 5. OLED Display Feedback Driving Methods

    - 102 -

    Philips SID 2002 SID 2004

  • 5. OLED Display Hybrid Driving Methods

    - 103 -

    Hanyang Univ. (AMLCD 2005)

  • 5. OLED Display Hybrid Driving Methods

    - 104 -

    Ignis (SID 2005)

  • 5. OLED Display Emission Type

    - 105 -

    Bottom Emission OLED Top Emission OLED

    Metal Anode

    Semi-transparent Cathode

    Transparent Plate

    Light Buffer Layer

    Emissive Layer

    Al Wiring Light

    Metal Cathode Transparent Anode

    Emissive Layer

    Pixel

  • - 106 -

    Shift Register

    Sampling Latch

    Holding Latch

    Voltage or Current DAC

    Output Buffer

    ReferenceVoltage or Current

    Integrated data driving circuit Voltage mode

    - Accurate output buffer

    Current mode- Accurate current DAC Control nano-level current Devices non-uniformities

    - Accurate current S/H circuit design- Accurate pre-charge circuit design- gamma correction

    Data Driver IC

    Data driver IC

    5. OLED Display

    HSYNCHCLK

    RGB data

    LOAD

    Channel Outputs

  • 5. OLED Display Integrated Data Driving circuits

    - 107 -

    SS SDI (IDW 2004) : External D-IC + analog sampling

  • 5. OLED Display Integrated Data Driving circuits

    - 108 -

    SS SDI (SID 2005) : RGB adjustable gamma compensation

    6-bit DAC : 3-bit decoder and voltage selector+ 3-bit decoder and resister ladder

  • 5. OLED Display Integrated Data Driving circuits

    - 109 -

    SS SDI & Hanyang Univ. (IDW 2004) : External D-IC + DeMux

  • 5. OLED Display Integrated Data Driving circuits

    - 110 -

    AU (IDW 2004)

  • 5. OLED Display Integrated Data Driving circuits

    - 111 -

    AU (SID 2004)

  • 5. OLED Display

    - 112 -

    NEC (IDW 2002)

  • 5. OLED Display Integrated Data Driving circuits

    - 113 -

    NEC (Eurodisplay 2002)

  • 5. OLED Display Integrated Data Driving circuits

    - 114 -

    AU (IDW 2003)

  • 5. OLED Display AMOLED Product

    - 115 -

    Digital Still Camera ( Kodak Easyshare LS633, 2003. 5 ) 2.16 inch, 521 x 218 Dot pitch ; 0.084 x 0.151 mm2

    Color arrangement : RGB delta Gate driver integration Analog sampling data driver integration

  • 5. OLED Display PHOLED Product

    - 116 -

    Sub-Display of Mobile Phone ( Fujitsu F5005iGPS, 2004. 4)

    1.1 inch, 96 x 72

    Pioneer, PM-PHOLED

    4,096 color

    Phosphorescent developed by UDC

  • 5. OLED Display AMOLED Product

    - 117 -

    PDA ( Sony Clie PEG-VZ90, 2004. 9 )

    3.8 inch, 480 x 320 Top emission Contrast ratio : 1000: 1 Viewing angle : 180 Response time : 1 us

  • 5. OLED Display AMOLED Development

    - 118 -

    SS SDI (SID 2005)- LTPS TFT - 2.6 480 x 640 (302ppi)- LITI (Laser-induced thermal imaging)- Top emission-200 cd/m2

    LPL LGE (2004)- LTPS TFT - 20.1 1280 x 800- Small Molecule- > 1,000 cd/m2

    SSE (2005)- a-Si TFT- 40 1280 x 800- White OLED + Color filter- 600 cd/m2

    - Color Purity : 80%

  • 6. Summary

    - 119 -

    OLED performance is rapidly improving Lifetime Efficiency & power consumption Color purity

    Innovation is needed OLED performance & fabrication processes

    Brightness uniformity

    Global uniformity : IR drop of power lines

    Local uniformity : Electrical characteristics of Driving TFT (Poly-Si TFT)

    Reliability

    OLED device : lifetime, thermal reliability

    Driving TFT : degradation (a-Si:H TFT)

    In the near future,OLED display will be widely used and the most attractive display of FPD.