novel devices and material characterization at mm-wave … · novel devices and material...
TRANSCRIPT
Novel Devices and Material
characterization at mm-wave and
Terahertz
Michel Joussemet
Application Engineer
Agilent Technologies
1
Novel Devices and Material characterization
at mm-wave and Terahertz
Eir
e
Type of material
Radome
material
Circuits
Tissue
Phantom
Chemical
Absorber
Food
Graphene
Meta-materials
Type of material
Industry ApplicationProducts
Electronics CapacitorssubstratesPCB antennas ferrites
absorbers SAR phantom materials
Aerospace
Defense
Stealth RAM (radiation absorbing
materials)radomes
Industrial
Materials
Ceramics amp composites AD and automotive
components coatings
Polymers amp plastics Fibers films Insulation
materials
Hydrogel Disposable diaper soft contact lens
Liquid crystal Displays
Other products containing these materials Tires
paint adhesives etc
Food amp
Agriculture
Food preservation (spoilage) research food
development for microwave packaging moisture
measurements
Mining Moisture measurements in wood or paper oil
content analysis
Pharmaceutical
amp Medical
Drug research and manufacturing bio-implants
human tissue characterization biomass
fermentation
Why are dielectric measurement important
Modeling Electromagnetic problems often requires knowledge of a
materialrsquos dielectric properties
bull How long will it take to propagate the signal on the microstrip line
bull How far will the signal attenuate under water
bull How much signal dispersion will occur in the stripline
bull What is the resonant frequency of the dielectric resonator filter
bull How much of the electromagnetic wave will be reflected or transmitted by the dielectric
bull How much of the electromagnetic wave will be absorbed by the anechoic chamber or
phantom material
0
rrrj
Permittivity and permeability definitions
interaction of a material in the presence
of an external electric field
0rr j
interaction of a material in the presence of an external magnetic field
Permittivity (Dielectric Constant)
Permeability
rrr j
rrr j
Electric Magnetic
Permittivity Permeability
Fields Fields
STORAGE
MUT
STORAGE
Electromagnetic field interaction
rrr j
rrr j
Electric Magnetic
Permittivity Permeability
Fields Fields
STORAGE
LOSS
MUT
STORAGE
LOSS
Electromagnetic field interaction
Loss Tangent
tanr
r
CycleperStoredEnergy
CycleperLostEnergy
QD
1tan
Dissipation Factor D Quality Factor Q
r
r
r
Df
Relaxation Constant t
t = Time required for 1e of
an aligned system to return
to equilibrium or random
state in seconds
cc ft
2
11
1 1
10
100
10 100
Water at 20o C
f
GHz
most energy is lost at 1t
r
r
t
j
s
1
)( equation Debye
A materials measurement system normally includes three main components
Instrument
Material fixture
Software
Materials Measurement System
Network analyzer
Materials Measurement System
Measurement Fixture
S parameters MUT
Impedance AnalyzerLCR meter
Materials Measurement System
The material is stimulated with an AC source and the actual voltage across the material
is monitored Material test parameters are derived by knowing the dimensions of the
material and by measuring its capacitance and dissipation factor
Types of fixtures
Transmission
LIne
Resonant
Cavity Free Space
Coaxial
Probe
85071E-Exx
Frequency
Material
types
Liquid
1 GHz 20 GHz 50 GHz 100 GHz 10 GHz 1 MHz 1 kHz DC
Solid
Semi-
solids
(Powder)
Gel
Substrate
85071E
Dielectric test fixture
Dielectric probe
Materials measurement software
Liquid test fixture
Magnetic material test fixture
16451B 16453A
16452A
Toroidal
core 16454A
10 GHz split
cylinder resonator
Split post dielectric resonators (SPDR)
85072A
85070E
Probe Kit Fixture Portfolio
The measured data from the instrument is not always presented in the most convenient
terminology or format In this case software is required to convert the measured data
to permittivity or permeability Software may also be required to model any interaction
between the fixture and MUT to allow the extraction of the bulk material properties
Materials Measurement System
Software
Frequency of interest
Expected value of er and mr
Required measurement accuracy
Material properties (ie homogeneous isotropic)
Form of material (ie liquid powder solid sheet)
Sample size restrictions
Destructive or non-destructive
Contacting or non-contacting
Temperature
Which Technique is Best
It Dependshellip on
Measurement Techniques vs Frequency and Material Loss
Parallel Plate
Frequency
Loss
Transmission line
Resonant Cavity
Coaxial Probe
Microwave RF Millimeter-wave Low frequency
High
Medium
Low
Free Space
50 MHz 20 GHz 40 GHz 60 GHz 5 GHz 500+ GHz
Coaxial Probe System
Dielectric measurement setup for liquid using the coaxial probe method
Method features
bull Broadband
bull Simple and convenient (non-destructive)
bull Limited r accuracy and tan d low loss resolution
bull Best for liquids or semi-solids
Material assumptions
bull ldquoSemi-infiniterdquo thickness
bull Non-magnetic
bull Isotropic and homogeneous
bull Flat surface
bull No air gaps or bubbles
Coaxial Probe
Three Probe Designs
High Temperature Probe
bull0200 ndash 20GHz (low end 001GHz with impedance analyzer)
bullWithstands -40 to 200 degrees C
bullSurvives corrosive chemicals
bullFlanged design allows measuring flat surfaced solids
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Novel Devices and Material characterization
at mm-wave and Terahertz
Eir
e
Type of material
Radome
material
Circuits
Tissue
Phantom
Chemical
Absorber
Food
Graphene
Meta-materials
Type of material
Industry ApplicationProducts
Electronics CapacitorssubstratesPCB antennas ferrites
absorbers SAR phantom materials
Aerospace
Defense
Stealth RAM (radiation absorbing
materials)radomes
Industrial
Materials
Ceramics amp composites AD and automotive
components coatings
Polymers amp plastics Fibers films Insulation
materials
Hydrogel Disposable diaper soft contact lens
Liquid crystal Displays
Other products containing these materials Tires
paint adhesives etc
Food amp
Agriculture
Food preservation (spoilage) research food
development for microwave packaging moisture
measurements
Mining Moisture measurements in wood or paper oil
content analysis
Pharmaceutical
amp Medical
Drug research and manufacturing bio-implants
human tissue characterization biomass
fermentation
Why are dielectric measurement important
Modeling Electromagnetic problems often requires knowledge of a
materialrsquos dielectric properties
bull How long will it take to propagate the signal on the microstrip line
bull How far will the signal attenuate under water
bull How much signal dispersion will occur in the stripline
bull What is the resonant frequency of the dielectric resonator filter
bull How much of the electromagnetic wave will be reflected or transmitted by the dielectric
bull How much of the electromagnetic wave will be absorbed by the anechoic chamber or
phantom material
0
rrrj
Permittivity and permeability definitions
interaction of a material in the presence
of an external electric field
0rr j
interaction of a material in the presence of an external magnetic field
Permittivity (Dielectric Constant)
Permeability
rrr j
rrr j
Electric Magnetic
Permittivity Permeability
Fields Fields
STORAGE
MUT
STORAGE
Electromagnetic field interaction
rrr j
rrr j
Electric Magnetic
Permittivity Permeability
Fields Fields
STORAGE
LOSS
MUT
STORAGE
LOSS
Electromagnetic field interaction
Loss Tangent
tanr
r
CycleperStoredEnergy
CycleperLostEnergy
QD
1tan
Dissipation Factor D Quality Factor Q
r
r
r
Df
Relaxation Constant t
t = Time required for 1e of
an aligned system to return
to equilibrium or random
state in seconds
cc ft
2
11
1 1
10
100
10 100
Water at 20o C
f
GHz
most energy is lost at 1t
r
r
t
j
s
1
)( equation Debye
A materials measurement system normally includes three main components
Instrument
Material fixture
Software
Materials Measurement System
Network analyzer
Materials Measurement System
Measurement Fixture
S parameters MUT
Impedance AnalyzerLCR meter
Materials Measurement System
The material is stimulated with an AC source and the actual voltage across the material
is monitored Material test parameters are derived by knowing the dimensions of the
material and by measuring its capacitance and dissipation factor
Types of fixtures
Transmission
LIne
Resonant
Cavity Free Space
Coaxial
Probe
85071E-Exx
Frequency
Material
types
Liquid
1 GHz 20 GHz 50 GHz 100 GHz 10 GHz 1 MHz 1 kHz DC
Solid
Semi-
solids
(Powder)
Gel
Substrate
85071E
Dielectric test fixture
Dielectric probe
Materials measurement software
Liquid test fixture
Magnetic material test fixture
16451B 16453A
16452A
Toroidal
core 16454A
10 GHz split
cylinder resonator
Split post dielectric resonators (SPDR)
85072A
85070E
Probe Kit Fixture Portfolio
The measured data from the instrument is not always presented in the most convenient
terminology or format In this case software is required to convert the measured data
to permittivity or permeability Software may also be required to model any interaction
between the fixture and MUT to allow the extraction of the bulk material properties
Materials Measurement System
Software
Frequency of interest
Expected value of er and mr
Required measurement accuracy
Material properties (ie homogeneous isotropic)
Form of material (ie liquid powder solid sheet)
Sample size restrictions
Destructive or non-destructive
Contacting or non-contacting
Temperature
Which Technique is Best
It Dependshellip on
Measurement Techniques vs Frequency and Material Loss
Parallel Plate
Frequency
Loss
Transmission line
Resonant Cavity
Coaxial Probe
Microwave RF Millimeter-wave Low frequency
High
Medium
Low
Free Space
50 MHz 20 GHz 40 GHz 60 GHz 5 GHz 500+ GHz
Coaxial Probe System
Dielectric measurement setup for liquid using the coaxial probe method
Method features
bull Broadband
bull Simple and convenient (non-destructive)
bull Limited r accuracy and tan d low loss resolution
bull Best for liquids or semi-solids
Material assumptions
bull ldquoSemi-infiniterdquo thickness
bull Non-magnetic
bull Isotropic and homogeneous
bull Flat surface
bull No air gaps or bubbles
Coaxial Probe
Three Probe Designs
High Temperature Probe
bull0200 ndash 20GHz (low end 001GHz with impedance analyzer)
bullWithstands -40 to 200 degrees C
bullSurvives corrosive chemicals
bullFlanged design allows measuring flat surfaced solids
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Type of material
Radome
material
Circuits
Tissue
Phantom
Chemical
Absorber
Food
Graphene
Meta-materials
Type of material
Industry ApplicationProducts
Electronics CapacitorssubstratesPCB antennas ferrites
absorbers SAR phantom materials
Aerospace
Defense
Stealth RAM (radiation absorbing
materials)radomes
Industrial
Materials
Ceramics amp composites AD and automotive
components coatings
Polymers amp plastics Fibers films Insulation
materials
Hydrogel Disposable diaper soft contact lens
Liquid crystal Displays
Other products containing these materials Tires
paint adhesives etc
Food amp
Agriculture
Food preservation (spoilage) research food
development for microwave packaging moisture
measurements
Mining Moisture measurements in wood or paper oil
content analysis
Pharmaceutical
amp Medical
Drug research and manufacturing bio-implants
human tissue characterization biomass
fermentation
Why are dielectric measurement important
Modeling Electromagnetic problems often requires knowledge of a
materialrsquos dielectric properties
bull How long will it take to propagate the signal on the microstrip line
bull How far will the signal attenuate under water
bull How much signal dispersion will occur in the stripline
bull What is the resonant frequency of the dielectric resonator filter
bull How much of the electromagnetic wave will be reflected or transmitted by the dielectric
bull How much of the electromagnetic wave will be absorbed by the anechoic chamber or
phantom material
0
rrrj
Permittivity and permeability definitions
interaction of a material in the presence
of an external electric field
0rr j
interaction of a material in the presence of an external magnetic field
Permittivity (Dielectric Constant)
Permeability
rrr j
rrr j
Electric Magnetic
Permittivity Permeability
Fields Fields
STORAGE
MUT
STORAGE
Electromagnetic field interaction
rrr j
rrr j
Electric Magnetic
Permittivity Permeability
Fields Fields
STORAGE
LOSS
MUT
STORAGE
LOSS
Electromagnetic field interaction
Loss Tangent
tanr
r
CycleperStoredEnergy
CycleperLostEnergy
QD
1tan
Dissipation Factor D Quality Factor Q
r
r
r
Df
Relaxation Constant t
t = Time required for 1e of
an aligned system to return
to equilibrium or random
state in seconds
cc ft
2
11
1 1
10
100
10 100
Water at 20o C
f
GHz
most energy is lost at 1t
r
r
t
j
s
1
)( equation Debye
A materials measurement system normally includes three main components
Instrument
Material fixture
Software
Materials Measurement System
Network analyzer
Materials Measurement System
Measurement Fixture
S parameters MUT
Impedance AnalyzerLCR meter
Materials Measurement System
The material is stimulated with an AC source and the actual voltage across the material
is monitored Material test parameters are derived by knowing the dimensions of the
material and by measuring its capacitance and dissipation factor
Types of fixtures
Transmission
LIne
Resonant
Cavity Free Space
Coaxial
Probe
85071E-Exx
Frequency
Material
types
Liquid
1 GHz 20 GHz 50 GHz 100 GHz 10 GHz 1 MHz 1 kHz DC
Solid
Semi-
solids
(Powder)
Gel
Substrate
85071E
Dielectric test fixture
Dielectric probe
Materials measurement software
Liquid test fixture
Magnetic material test fixture
16451B 16453A
16452A
Toroidal
core 16454A
10 GHz split
cylinder resonator
Split post dielectric resonators (SPDR)
85072A
85070E
Probe Kit Fixture Portfolio
The measured data from the instrument is not always presented in the most convenient
terminology or format In this case software is required to convert the measured data
to permittivity or permeability Software may also be required to model any interaction
between the fixture and MUT to allow the extraction of the bulk material properties
Materials Measurement System
Software
Frequency of interest
Expected value of er and mr
Required measurement accuracy
Material properties (ie homogeneous isotropic)
Form of material (ie liquid powder solid sheet)
Sample size restrictions
Destructive or non-destructive
Contacting or non-contacting
Temperature
Which Technique is Best
It Dependshellip on
Measurement Techniques vs Frequency and Material Loss
Parallel Plate
Frequency
Loss
Transmission line
Resonant Cavity
Coaxial Probe
Microwave RF Millimeter-wave Low frequency
High
Medium
Low
Free Space
50 MHz 20 GHz 40 GHz 60 GHz 5 GHz 500+ GHz
Coaxial Probe System
Dielectric measurement setup for liquid using the coaxial probe method
Method features
bull Broadband
bull Simple and convenient (non-destructive)
bull Limited r accuracy and tan d low loss resolution
bull Best for liquids or semi-solids
Material assumptions
bull ldquoSemi-infiniterdquo thickness
bull Non-magnetic
bull Isotropic and homogeneous
bull Flat surface
bull No air gaps or bubbles
Coaxial Probe
Three Probe Designs
High Temperature Probe
bull0200 ndash 20GHz (low end 001GHz with impedance analyzer)
bullWithstands -40 to 200 degrees C
bullSurvives corrosive chemicals
bullFlanged design allows measuring flat surfaced solids
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Type of material
Industry ApplicationProducts
Electronics CapacitorssubstratesPCB antennas ferrites
absorbers SAR phantom materials
Aerospace
Defense
Stealth RAM (radiation absorbing
materials)radomes
Industrial
Materials
Ceramics amp composites AD and automotive
components coatings
Polymers amp plastics Fibers films Insulation
materials
Hydrogel Disposable diaper soft contact lens
Liquid crystal Displays
Other products containing these materials Tires
paint adhesives etc
Food amp
Agriculture
Food preservation (spoilage) research food
development for microwave packaging moisture
measurements
Mining Moisture measurements in wood or paper oil
content analysis
Pharmaceutical
amp Medical
Drug research and manufacturing bio-implants
human tissue characterization biomass
fermentation
Why are dielectric measurement important
Modeling Electromagnetic problems often requires knowledge of a
materialrsquos dielectric properties
bull How long will it take to propagate the signal on the microstrip line
bull How far will the signal attenuate under water
bull How much signal dispersion will occur in the stripline
bull What is the resonant frequency of the dielectric resonator filter
bull How much of the electromagnetic wave will be reflected or transmitted by the dielectric
bull How much of the electromagnetic wave will be absorbed by the anechoic chamber or
phantom material
0
rrrj
Permittivity and permeability definitions
interaction of a material in the presence
of an external electric field
0rr j
interaction of a material in the presence of an external magnetic field
Permittivity (Dielectric Constant)
Permeability
rrr j
rrr j
Electric Magnetic
Permittivity Permeability
Fields Fields
STORAGE
MUT
STORAGE
Electromagnetic field interaction
rrr j
rrr j
Electric Magnetic
Permittivity Permeability
Fields Fields
STORAGE
LOSS
MUT
STORAGE
LOSS
Electromagnetic field interaction
Loss Tangent
tanr
r
CycleperStoredEnergy
CycleperLostEnergy
QD
1tan
Dissipation Factor D Quality Factor Q
r
r
r
Df
Relaxation Constant t
t = Time required for 1e of
an aligned system to return
to equilibrium or random
state in seconds
cc ft
2
11
1 1
10
100
10 100
Water at 20o C
f
GHz
most energy is lost at 1t
r
r
t
j
s
1
)( equation Debye
A materials measurement system normally includes three main components
Instrument
Material fixture
Software
Materials Measurement System
Network analyzer
Materials Measurement System
Measurement Fixture
S parameters MUT
Impedance AnalyzerLCR meter
Materials Measurement System
The material is stimulated with an AC source and the actual voltage across the material
is monitored Material test parameters are derived by knowing the dimensions of the
material and by measuring its capacitance and dissipation factor
Types of fixtures
Transmission
LIne
Resonant
Cavity Free Space
Coaxial
Probe
85071E-Exx
Frequency
Material
types
Liquid
1 GHz 20 GHz 50 GHz 100 GHz 10 GHz 1 MHz 1 kHz DC
Solid
Semi-
solids
(Powder)
Gel
Substrate
85071E
Dielectric test fixture
Dielectric probe
Materials measurement software
Liquid test fixture
Magnetic material test fixture
16451B 16453A
16452A
Toroidal
core 16454A
10 GHz split
cylinder resonator
Split post dielectric resonators (SPDR)
85072A
85070E
Probe Kit Fixture Portfolio
The measured data from the instrument is not always presented in the most convenient
terminology or format In this case software is required to convert the measured data
to permittivity or permeability Software may also be required to model any interaction
between the fixture and MUT to allow the extraction of the bulk material properties
Materials Measurement System
Software
Frequency of interest
Expected value of er and mr
Required measurement accuracy
Material properties (ie homogeneous isotropic)
Form of material (ie liquid powder solid sheet)
Sample size restrictions
Destructive or non-destructive
Contacting or non-contacting
Temperature
Which Technique is Best
It Dependshellip on
Measurement Techniques vs Frequency and Material Loss
Parallel Plate
Frequency
Loss
Transmission line
Resonant Cavity
Coaxial Probe
Microwave RF Millimeter-wave Low frequency
High
Medium
Low
Free Space
50 MHz 20 GHz 40 GHz 60 GHz 5 GHz 500+ GHz
Coaxial Probe System
Dielectric measurement setup for liquid using the coaxial probe method
Method features
bull Broadband
bull Simple and convenient (non-destructive)
bull Limited r accuracy and tan d low loss resolution
bull Best for liquids or semi-solids
Material assumptions
bull ldquoSemi-infiniterdquo thickness
bull Non-magnetic
bull Isotropic and homogeneous
bull Flat surface
bull No air gaps or bubbles
Coaxial Probe
Three Probe Designs
High Temperature Probe
bull0200 ndash 20GHz (low end 001GHz with impedance analyzer)
bullWithstands -40 to 200 degrees C
bullSurvives corrosive chemicals
bullFlanged design allows measuring flat surfaced solids
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Why are dielectric measurement important
Modeling Electromagnetic problems often requires knowledge of a
materialrsquos dielectric properties
bull How long will it take to propagate the signal on the microstrip line
bull How far will the signal attenuate under water
bull How much signal dispersion will occur in the stripline
bull What is the resonant frequency of the dielectric resonator filter
bull How much of the electromagnetic wave will be reflected or transmitted by the dielectric
bull How much of the electromagnetic wave will be absorbed by the anechoic chamber or
phantom material
0
rrrj
Permittivity and permeability definitions
interaction of a material in the presence
of an external electric field
0rr j
interaction of a material in the presence of an external magnetic field
Permittivity (Dielectric Constant)
Permeability
rrr j
rrr j
Electric Magnetic
Permittivity Permeability
Fields Fields
STORAGE
MUT
STORAGE
Electromagnetic field interaction
rrr j
rrr j
Electric Magnetic
Permittivity Permeability
Fields Fields
STORAGE
LOSS
MUT
STORAGE
LOSS
Electromagnetic field interaction
Loss Tangent
tanr
r
CycleperStoredEnergy
CycleperLostEnergy
QD
1tan
Dissipation Factor D Quality Factor Q
r
r
r
Df
Relaxation Constant t
t = Time required for 1e of
an aligned system to return
to equilibrium or random
state in seconds
cc ft
2
11
1 1
10
100
10 100
Water at 20o C
f
GHz
most energy is lost at 1t
r
r
t
j
s
1
)( equation Debye
A materials measurement system normally includes three main components
Instrument
Material fixture
Software
Materials Measurement System
Network analyzer
Materials Measurement System
Measurement Fixture
S parameters MUT
Impedance AnalyzerLCR meter
Materials Measurement System
The material is stimulated with an AC source and the actual voltage across the material
is monitored Material test parameters are derived by knowing the dimensions of the
material and by measuring its capacitance and dissipation factor
Types of fixtures
Transmission
LIne
Resonant
Cavity Free Space
Coaxial
Probe
85071E-Exx
Frequency
Material
types
Liquid
1 GHz 20 GHz 50 GHz 100 GHz 10 GHz 1 MHz 1 kHz DC
Solid
Semi-
solids
(Powder)
Gel
Substrate
85071E
Dielectric test fixture
Dielectric probe
Materials measurement software
Liquid test fixture
Magnetic material test fixture
16451B 16453A
16452A
Toroidal
core 16454A
10 GHz split
cylinder resonator
Split post dielectric resonators (SPDR)
85072A
85070E
Probe Kit Fixture Portfolio
The measured data from the instrument is not always presented in the most convenient
terminology or format In this case software is required to convert the measured data
to permittivity or permeability Software may also be required to model any interaction
between the fixture and MUT to allow the extraction of the bulk material properties
Materials Measurement System
Software
Frequency of interest
Expected value of er and mr
Required measurement accuracy
Material properties (ie homogeneous isotropic)
Form of material (ie liquid powder solid sheet)
Sample size restrictions
Destructive or non-destructive
Contacting or non-contacting
Temperature
Which Technique is Best
It Dependshellip on
Measurement Techniques vs Frequency and Material Loss
Parallel Plate
Frequency
Loss
Transmission line
Resonant Cavity
Coaxial Probe
Microwave RF Millimeter-wave Low frequency
High
Medium
Low
Free Space
50 MHz 20 GHz 40 GHz 60 GHz 5 GHz 500+ GHz
Coaxial Probe System
Dielectric measurement setup for liquid using the coaxial probe method
Method features
bull Broadband
bull Simple and convenient (non-destructive)
bull Limited r accuracy and tan d low loss resolution
bull Best for liquids or semi-solids
Material assumptions
bull ldquoSemi-infiniterdquo thickness
bull Non-magnetic
bull Isotropic and homogeneous
bull Flat surface
bull No air gaps or bubbles
Coaxial Probe
Three Probe Designs
High Temperature Probe
bull0200 ndash 20GHz (low end 001GHz with impedance analyzer)
bullWithstands -40 to 200 degrees C
bullSurvives corrosive chemicals
bullFlanged design allows measuring flat surfaced solids
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
0
rrrj
Permittivity and permeability definitions
interaction of a material in the presence
of an external electric field
0rr j
interaction of a material in the presence of an external magnetic field
Permittivity (Dielectric Constant)
Permeability
rrr j
rrr j
Electric Magnetic
Permittivity Permeability
Fields Fields
STORAGE
MUT
STORAGE
Electromagnetic field interaction
rrr j
rrr j
Electric Magnetic
Permittivity Permeability
Fields Fields
STORAGE
LOSS
MUT
STORAGE
LOSS
Electromagnetic field interaction
Loss Tangent
tanr
r
CycleperStoredEnergy
CycleperLostEnergy
QD
1tan
Dissipation Factor D Quality Factor Q
r
r
r
Df
Relaxation Constant t
t = Time required for 1e of
an aligned system to return
to equilibrium or random
state in seconds
cc ft
2
11
1 1
10
100
10 100
Water at 20o C
f
GHz
most energy is lost at 1t
r
r
t
j
s
1
)( equation Debye
A materials measurement system normally includes three main components
Instrument
Material fixture
Software
Materials Measurement System
Network analyzer
Materials Measurement System
Measurement Fixture
S parameters MUT
Impedance AnalyzerLCR meter
Materials Measurement System
The material is stimulated with an AC source and the actual voltage across the material
is monitored Material test parameters are derived by knowing the dimensions of the
material and by measuring its capacitance and dissipation factor
Types of fixtures
Transmission
LIne
Resonant
Cavity Free Space
Coaxial
Probe
85071E-Exx
Frequency
Material
types
Liquid
1 GHz 20 GHz 50 GHz 100 GHz 10 GHz 1 MHz 1 kHz DC
Solid
Semi-
solids
(Powder)
Gel
Substrate
85071E
Dielectric test fixture
Dielectric probe
Materials measurement software
Liquid test fixture
Magnetic material test fixture
16451B 16453A
16452A
Toroidal
core 16454A
10 GHz split
cylinder resonator
Split post dielectric resonators (SPDR)
85072A
85070E
Probe Kit Fixture Portfolio
The measured data from the instrument is not always presented in the most convenient
terminology or format In this case software is required to convert the measured data
to permittivity or permeability Software may also be required to model any interaction
between the fixture and MUT to allow the extraction of the bulk material properties
Materials Measurement System
Software
Frequency of interest
Expected value of er and mr
Required measurement accuracy
Material properties (ie homogeneous isotropic)
Form of material (ie liquid powder solid sheet)
Sample size restrictions
Destructive or non-destructive
Contacting or non-contacting
Temperature
Which Technique is Best
It Dependshellip on
Measurement Techniques vs Frequency and Material Loss
Parallel Plate
Frequency
Loss
Transmission line
Resonant Cavity
Coaxial Probe
Microwave RF Millimeter-wave Low frequency
High
Medium
Low
Free Space
50 MHz 20 GHz 40 GHz 60 GHz 5 GHz 500+ GHz
Coaxial Probe System
Dielectric measurement setup for liquid using the coaxial probe method
Method features
bull Broadband
bull Simple and convenient (non-destructive)
bull Limited r accuracy and tan d low loss resolution
bull Best for liquids or semi-solids
Material assumptions
bull ldquoSemi-infiniterdquo thickness
bull Non-magnetic
bull Isotropic and homogeneous
bull Flat surface
bull No air gaps or bubbles
Coaxial Probe
Three Probe Designs
High Temperature Probe
bull0200 ndash 20GHz (low end 001GHz with impedance analyzer)
bullWithstands -40 to 200 degrees C
bullSurvives corrosive chemicals
bullFlanged design allows measuring flat surfaced solids
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
rrr j
rrr j
Electric Magnetic
Permittivity Permeability
Fields Fields
STORAGE
MUT
STORAGE
Electromagnetic field interaction
rrr j
rrr j
Electric Magnetic
Permittivity Permeability
Fields Fields
STORAGE
LOSS
MUT
STORAGE
LOSS
Electromagnetic field interaction
Loss Tangent
tanr
r
CycleperStoredEnergy
CycleperLostEnergy
QD
1tan
Dissipation Factor D Quality Factor Q
r
r
r
Df
Relaxation Constant t
t = Time required for 1e of
an aligned system to return
to equilibrium or random
state in seconds
cc ft
2
11
1 1
10
100
10 100
Water at 20o C
f
GHz
most energy is lost at 1t
r
r
t
j
s
1
)( equation Debye
A materials measurement system normally includes three main components
Instrument
Material fixture
Software
Materials Measurement System
Network analyzer
Materials Measurement System
Measurement Fixture
S parameters MUT
Impedance AnalyzerLCR meter
Materials Measurement System
The material is stimulated with an AC source and the actual voltage across the material
is monitored Material test parameters are derived by knowing the dimensions of the
material and by measuring its capacitance and dissipation factor
Types of fixtures
Transmission
LIne
Resonant
Cavity Free Space
Coaxial
Probe
85071E-Exx
Frequency
Material
types
Liquid
1 GHz 20 GHz 50 GHz 100 GHz 10 GHz 1 MHz 1 kHz DC
Solid
Semi-
solids
(Powder)
Gel
Substrate
85071E
Dielectric test fixture
Dielectric probe
Materials measurement software
Liquid test fixture
Magnetic material test fixture
16451B 16453A
16452A
Toroidal
core 16454A
10 GHz split
cylinder resonator
Split post dielectric resonators (SPDR)
85072A
85070E
Probe Kit Fixture Portfolio
The measured data from the instrument is not always presented in the most convenient
terminology or format In this case software is required to convert the measured data
to permittivity or permeability Software may also be required to model any interaction
between the fixture and MUT to allow the extraction of the bulk material properties
Materials Measurement System
Software
Frequency of interest
Expected value of er and mr
Required measurement accuracy
Material properties (ie homogeneous isotropic)
Form of material (ie liquid powder solid sheet)
Sample size restrictions
Destructive or non-destructive
Contacting or non-contacting
Temperature
Which Technique is Best
It Dependshellip on
Measurement Techniques vs Frequency and Material Loss
Parallel Plate
Frequency
Loss
Transmission line
Resonant Cavity
Coaxial Probe
Microwave RF Millimeter-wave Low frequency
High
Medium
Low
Free Space
50 MHz 20 GHz 40 GHz 60 GHz 5 GHz 500+ GHz
Coaxial Probe System
Dielectric measurement setup for liquid using the coaxial probe method
Method features
bull Broadband
bull Simple and convenient (non-destructive)
bull Limited r accuracy and tan d low loss resolution
bull Best for liquids or semi-solids
Material assumptions
bull ldquoSemi-infiniterdquo thickness
bull Non-magnetic
bull Isotropic and homogeneous
bull Flat surface
bull No air gaps or bubbles
Coaxial Probe
Three Probe Designs
High Temperature Probe
bull0200 ndash 20GHz (low end 001GHz with impedance analyzer)
bullWithstands -40 to 200 degrees C
bullSurvives corrosive chemicals
bullFlanged design allows measuring flat surfaced solids
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
rrr j
rrr j
Electric Magnetic
Permittivity Permeability
Fields Fields
STORAGE
LOSS
MUT
STORAGE
LOSS
Electromagnetic field interaction
Loss Tangent
tanr
r
CycleperStoredEnergy
CycleperLostEnergy
QD
1tan
Dissipation Factor D Quality Factor Q
r
r
r
Df
Relaxation Constant t
t = Time required for 1e of
an aligned system to return
to equilibrium or random
state in seconds
cc ft
2
11
1 1
10
100
10 100
Water at 20o C
f
GHz
most energy is lost at 1t
r
r
t
j
s
1
)( equation Debye
A materials measurement system normally includes three main components
Instrument
Material fixture
Software
Materials Measurement System
Network analyzer
Materials Measurement System
Measurement Fixture
S parameters MUT
Impedance AnalyzerLCR meter
Materials Measurement System
The material is stimulated with an AC source and the actual voltage across the material
is monitored Material test parameters are derived by knowing the dimensions of the
material and by measuring its capacitance and dissipation factor
Types of fixtures
Transmission
LIne
Resonant
Cavity Free Space
Coaxial
Probe
85071E-Exx
Frequency
Material
types
Liquid
1 GHz 20 GHz 50 GHz 100 GHz 10 GHz 1 MHz 1 kHz DC
Solid
Semi-
solids
(Powder)
Gel
Substrate
85071E
Dielectric test fixture
Dielectric probe
Materials measurement software
Liquid test fixture
Magnetic material test fixture
16451B 16453A
16452A
Toroidal
core 16454A
10 GHz split
cylinder resonator
Split post dielectric resonators (SPDR)
85072A
85070E
Probe Kit Fixture Portfolio
The measured data from the instrument is not always presented in the most convenient
terminology or format In this case software is required to convert the measured data
to permittivity or permeability Software may also be required to model any interaction
between the fixture and MUT to allow the extraction of the bulk material properties
Materials Measurement System
Software
Frequency of interest
Expected value of er and mr
Required measurement accuracy
Material properties (ie homogeneous isotropic)
Form of material (ie liquid powder solid sheet)
Sample size restrictions
Destructive or non-destructive
Contacting or non-contacting
Temperature
Which Technique is Best
It Dependshellip on
Measurement Techniques vs Frequency and Material Loss
Parallel Plate
Frequency
Loss
Transmission line
Resonant Cavity
Coaxial Probe
Microwave RF Millimeter-wave Low frequency
High
Medium
Low
Free Space
50 MHz 20 GHz 40 GHz 60 GHz 5 GHz 500+ GHz
Coaxial Probe System
Dielectric measurement setup for liquid using the coaxial probe method
Method features
bull Broadband
bull Simple and convenient (non-destructive)
bull Limited r accuracy and tan d low loss resolution
bull Best for liquids or semi-solids
Material assumptions
bull ldquoSemi-infiniterdquo thickness
bull Non-magnetic
bull Isotropic and homogeneous
bull Flat surface
bull No air gaps or bubbles
Coaxial Probe
Three Probe Designs
High Temperature Probe
bull0200 ndash 20GHz (low end 001GHz with impedance analyzer)
bullWithstands -40 to 200 degrees C
bullSurvives corrosive chemicals
bullFlanged design allows measuring flat surfaced solids
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Loss Tangent
tanr
r
CycleperStoredEnergy
CycleperLostEnergy
QD
1tan
Dissipation Factor D Quality Factor Q
r
r
r
Df
Relaxation Constant t
t = Time required for 1e of
an aligned system to return
to equilibrium or random
state in seconds
cc ft
2
11
1 1
10
100
10 100
Water at 20o C
f
GHz
most energy is lost at 1t
r
r
t
j
s
1
)( equation Debye
A materials measurement system normally includes three main components
Instrument
Material fixture
Software
Materials Measurement System
Network analyzer
Materials Measurement System
Measurement Fixture
S parameters MUT
Impedance AnalyzerLCR meter
Materials Measurement System
The material is stimulated with an AC source and the actual voltage across the material
is monitored Material test parameters are derived by knowing the dimensions of the
material and by measuring its capacitance and dissipation factor
Types of fixtures
Transmission
LIne
Resonant
Cavity Free Space
Coaxial
Probe
85071E-Exx
Frequency
Material
types
Liquid
1 GHz 20 GHz 50 GHz 100 GHz 10 GHz 1 MHz 1 kHz DC
Solid
Semi-
solids
(Powder)
Gel
Substrate
85071E
Dielectric test fixture
Dielectric probe
Materials measurement software
Liquid test fixture
Magnetic material test fixture
16451B 16453A
16452A
Toroidal
core 16454A
10 GHz split
cylinder resonator
Split post dielectric resonators (SPDR)
85072A
85070E
Probe Kit Fixture Portfolio
The measured data from the instrument is not always presented in the most convenient
terminology or format In this case software is required to convert the measured data
to permittivity or permeability Software may also be required to model any interaction
between the fixture and MUT to allow the extraction of the bulk material properties
Materials Measurement System
Software
Frequency of interest
Expected value of er and mr
Required measurement accuracy
Material properties (ie homogeneous isotropic)
Form of material (ie liquid powder solid sheet)
Sample size restrictions
Destructive or non-destructive
Contacting or non-contacting
Temperature
Which Technique is Best
It Dependshellip on
Measurement Techniques vs Frequency and Material Loss
Parallel Plate
Frequency
Loss
Transmission line
Resonant Cavity
Coaxial Probe
Microwave RF Millimeter-wave Low frequency
High
Medium
Low
Free Space
50 MHz 20 GHz 40 GHz 60 GHz 5 GHz 500+ GHz
Coaxial Probe System
Dielectric measurement setup for liquid using the coaxial probe method
Method features
bull Broadband
bull Simple and convenient (non-destructive)
bull Limited r accuracy and tan d low loss resolution
bull Best for liquids or semi-solids
Material assumptions
bull ldquoSemi-infiniterdquo thickness
bull Non-magnetic
bull Isotropic and homogeneous
bull Flat surface
bull No air gaps or bubbles
Coaxial Probe
Three Probe Designs
High Temperature Probe
bull0200 ndash 20GHz (low end 001GHz with impedance analyzer)
bullWithstands -40 to 200 degrees C
bullSurvives corrosive chemicals
bullFlanged design allows measuring flat surfaced solids
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Relaxation Constant t
t = Time required for 1e of
an aligned system to return
to equilibrium or random
state in seconds
cc ft
2
11
1 1
10
100
10 100
Water at 20o C
f
GHz
most energy is lost at 1t
r
r
t
j
s
1
)( equation Debye
A materials measurement system normally includes three main components
Instrument
Material fixture
Software
Materials Measurement System
Network analyzer
Materials Measurement System
Measurement Fixture
S parameters MUT
Impedance AnalyzerLCR meter
Materials Measurement System
The material is stimulated with an AC source and the actual voltage across the material
is monitored Material test parameters are derived by knowing the dimensions of the
material and by measuring its capacitance and dissipation factor
Types of fixtures
Transmission
LIne
Resonant
Cavity Free Space
Coaxial
Probe
85071E-Exx
Frequency
Material
types
Liquid
1 GHz 20 GHz 50 GHz 100 GHz 10 GHz 1 MHz 1 kHz DC
Solid
Semi-
solids
(Powder)
Gel
Substrate
85071E
Dielectric test fixture
Dielectric probe
Materials measurement software
Liquid test fixture
Magnetic material test fixture
16451B 16453A
16452A
Toroidal
core 16454A
10 GHz split
cylinder resonator
Split post dielectric resonators (SPDR)
85072A
85070E
Probe Kit Fixture Portfolio
The measured data from the instrument is not always presented in the most convenient
terminology or format In this case software is required to convert the measured data
to permittivity or permeability Software may also be required to model any interaction
between the fixture and MUT to allow the extraction of the bulk material properties
Materials Measurement System
Software
Frequency of interest
Expected value of er and mr
Required measurement accuracy
Material properties (ie homogeneous isotropic)
Form of material (ie liquid powder solid sheet)
Sample size restrictions
Destructive or non-destructive
Contacting or non-contacting
Temperature
Which Technique is Best
It Dependshellip on
Measurement Techniques vs Frequency and Material Loss
Parallel Plate
Frequency
Loss
Transmission line
Resonant Cavity
Coaxial Probe
Microwave RF Millimeter-wave Low frequency
High
Medium
Low
Free Space
50 MHz 20 GHz 40 GHz 60 GHz 5 GHz 500+ GHz
Coaxial Probe System
Dielectric measurement setup for liquid using the coaxial probe method
Method features
bull Broadband
bull Simple and convenient (non-destructive)
bull Limited r accuracy and tan d low loss resolution
bull Best for liquids or semi-solids
Material assumptions
bull ldquoSemi-infiniterdquo thickness
bull Non-magnetic
bull Isotropic and homogeneous
bull Flat surface
bull No air gaps or bubbles
Coaxial Probe
Three Probe Designs
High Temperature Probe
bull0200 ndash 20GHz (low end 001GHz with impedance analyzer)
bullWithstands -40 to 200 degrees C
bullSurvives corrosive chemicals
bullFlanged design allows measuring flat surfaced solids
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
A materials measurement system normally includes three main components
Instrument
Material fixture
Software
Materials Measurement System
Network analyzer
Materials Measurement System
Measurement Fixture
S parameters MUT
Impedance AnalyzerLCR meter
Materials Measurement System
The material is stimulated with an AC source and the actual voltage across the material
is monitored Material test parameters are derived by knowing the dimensions of the
material and by measuring its capacitance and dissipation factor
Types of fixtures
Transmission
LIne
Resonant
Cavity Free Space
Coaxial
Probe
85071E-Exx
Frequency
Material
types
Liquid
1 GHz 20 GHz 50 GHz 100 GHz 10 GHz 1 MHz 1 kHz DC
Solid
Semi-
solids
(Powder)
Gel
Substrate
85071E
Dielectric test fixture
Dielectric probe
Materials measurement software
Liquid test fixture
Magnetic material test fixture
16451B 16453A
16452A
Toroidal
core 16454A
10 GHz split
cylinder resonator
Split post dielectric resonators (SPDR)
85072A
85070E
Probe Kit Fixture Portfolio
The measured data from the instrument is not always presented in the most convenient
terminology or format In this case software is required to convert the measured data
to permittivity or permeability Software may also be required to model any interaction
between the fixture and MUT to allow the extraction of the bulk material properties
Materials Measurement System
Software
Frequency of interest
Expected value of er and mr
Required measurement accuracy
Material properties (ie homogeneous isotropic)
Form of material (ie liquid powder solid sheet)
Sample size restrictions
Destructive or non-destructive
Contacting or non-contacting
Temperature
Which Technique is Best
It Dependshellip on
Measurement Techniques vs Frequency and Material Loss
Parallel Plate
Frequency
Loss
Transmission line
Resonant Cavity
Coaxial Probe
Microwave RF Millimeter-wave Low frequency
High
Medium
Low
Free Space
50 MHz 20 GHz 40 GHz 60 GHz 5 GHz 500+ GHz
Coaxial Probe System
Dielectric measurement setup for liquid using the coaxial probe method
Method features
bull Broadband
bull Simple and convenient (non-destructive)
bull Limited r accuracy and tan d low loss resolution
bull Best for liquids or semi-solids
Material assumptions
bull ldquoSemi-infiniterdquo thickness
bull Non-magnetic
bull Isotropic and homogeneous
bull Flat surface
bull No air gaps or bubbles
Coaxial Probe
Three Probe Designs
High Temperature Probe
bull0200 ndash 20GHz (low end 001GHz with impedance analyzer)
bullWithstands -40 to 200 degrees C
bullSurvives corrosive chemicals
bullFlanged design allows measuring flat surfaced solids
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Network analyzer
Materials Measurement System
Measurement Fixture
S parameters MUT
Impedance AnalyzerLCR meter
Materials Measurement System
The material is stimulated with an AC source and the actual voltage across the material
is monitored Material test parameters are derived by knowing the dimensions of the
material and by measuring its capacitance and dissipation factor
Types of fixtures
Transmission
LIne
Resonant
Cavity Free Space
Coaxial
Probe
85071E-Exx
Frequency
Material
types
Liquid
1 GHz 20 GHz 50 GHz 100 GHz 10 GHz 1 MHz 1 kHz DC
Solid
Semi-
solids
(Powder)
Gel
Substrate
85071E
Dielectric test fixture
Dielectric probe
Materials measurement software
Liquid test fixture
Magnetic material test fixture
16451B 16453A
16452A
Toroidal
core 16454A
10 GHz split
cylinder resonator
Split post dielectric resonators (SPDR)
85072A
85070E
Probe Kit Fixture Portfolio
The measured data from the instrument is not always presented in the most convenient
terminology or format In this case software is required to convert the measured data
to permittivity or permeability Software may also be required to model any interaction
between the fixture and MUT to allow the extraction of the bulk material properties
Materials Measurement System
Software
Frequency of interest
Expected value of er and mr
Required measurement accuracy
Material properties (ie homogeneous isotropic)
Form of material (ie liquid powder solid sheet)
Sample size restrictions
Destructive or non-destructive
Contacting or non-contacting
Temperature
Which Technique is Best
It Dependshellip on
Measurement Techniques vs Frequency and Material Loss
Parallel Plate
Frequency
Loss
Transmission line
Resonant Cavity
Coaxial Probe
Microwave RF Millimeter-wave Low frequency
High
Medium
Low
Free Space
50 MHz 20 GHz 40 GHz 60 GHz 5 GHz 500+ GHz
Coaxial Probe System
Dielectric measurement setup for liquid using the coaxial probe method
Method features
bull Broadband
bull Simple and convenient (non-destructive)
bull Limited r accuracy and tan d low loss resolution
bull Best for liquids or semi-solids
Material assumptions
bull ldquoSemi-infiniterdquo thickness
bull Non-magnetic
bull Isotropic and homogeneous
bull Flat surface
bull No air gaps or bubbles
Coaxial Probe
Three Probe Designs
High Temperature Probe
bull0200 ndash 20GHz (low end 001GHz with impedance analyzer)
bullWithstands -40 to 200 degrees C
bullSurvives corrosive chemicals
bullFlanged design allows measuring flat surfaced solids
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Impedance AnalyzerLCR meter
Materials Measurement System
The material is stimulated with an AC source and the actual voltage across the material
is monitored Material test parameters are derived by knowing the dimensions of the
material and by measuring its capacitance and dissipation factor
Types of fixtures
Transmission
LIne
Resonant
Cavity Free Space
Coaxial
Probe
85071E-Exx
Frequency
Material
types
Liquid
1 GHz 20 GHz 50 GHz 100 GHz 10 GHz 1 MHz 1 kHz DC
Solid
Semi-
solids
(Powder)
Gel
Substrate
85071E
Dielectric test fixture
Dielectric probe
Materials measurement software
Liquid test fixture
Magnetic material test fixture
16451B 16453A
16452A
Toroidal
core 16454A
10 GHz split
cylinder resonator
Split post dielectric resonators (SPDR)
85072A
85070E
Probe Kit Fixture Portfolio
The measured data from the instrument is not always presented in the most convenient
terminology or format In this case software is required to convert the measured data
to permittivity or permeability Software may also be required to model any interaction
between the fixture and MUT to allow the extraction of the bulk material properties
Materials Measurement System
Software
Frequency of interest
Expected value of er and mr
Required measurement accuracy
Material properties (ie homogeneous isotropic)
Form of material (ie liquid powder solid sheet)
Sample size restrictions
Destructive or non-destructive
Contacting or non-contacting
Temperature
Which Technique is Best
It Dependshellip on
Measurement Techniques vs Frequency and Material Loss
Parallel Plate
Frequency
Loss
Transmission line
Resonant Cavity
Coaxial Probe
Microwave RF Millimeter-wave Low frequency
High
Medium
Low
Free Space
50 MHz 20 GHz 40 GHz 60 GHz 5 GHz 500+ GHz
Coaxial Probe System
Dielectric measurement setup for liquid using the coaxial probe method
Method features
bull Broadband
bull Simple and convenient (non-destructive)
bull Limited r accuracy and tan d low loss resolution
bull Best for liquids or semi-solids
Material assumptions
bull ldquoSemi-infiniterdquo thickness
bull Non-magnetic
bull Isotropic and homogeneous
bull Flat surface
bull No air gaps or bubbles
Coaxial Probe
Three Probe Designs
High Temperature Probe
bull0200 ndash 20GHz (low end 001GHz with impedance analyzer)
bullWithstands -40 to 200 degrees C
bullSurvives corrosive chemicals
bullFlanged design allows measuring flat surfaced solids
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Types of fixtures
Transmission
LIne
Resonant
Cavity Free Space
Coaxial
Probe
85071E-Exx
Frequency
Material
types
Liquid
1 GHz 20 GHz 50 GHz 100 GHz 10 GHz 1 MHz 1 kHz DC
Solid
Semi-
solids
(Powder)
Gel
Substrate
85071E
Dielectric test fixture
Dielectric probe
Materials measurement software
Liquid test fixture
Magnetic material test fixture
16451B 16453A
16452A
Toroidal
core 16454A
10 GHz split
cylinder resonator
Split post dielectric resonators (SPDR)
85072A
85070E
Probe Kit Fixture Portfolio
The measured data from the instrument is not always presented in the most convenient
terminology or format In this case software is required to convert the measured data
to permittivity or permeability Software may also be required to model any interaction
between the fixture and MUT to allow the extraction of the bulk material properties
Materials Measurement System
Software
Frequency of interest
Expected value of er and mr
Required measurement accuracy
Material properties (ie homogeneous isotropic)
Form of material (ie liquid powder solid sheet)
Sample size restrictions
Destructive or non-destructive
Contacting or non-contacting
Temperature
Which Technique is Best
It Dependshellip on
Measurement Techniques vs Frequency and Material Loss
Parallel Plate
Frequency
Loss
Transmission line
Resonant Cavity
Coaxial Probe
Microwave RF Millimeter-wave Low frequency
High
Medium
Low
Free Space
50 MHz 20 GHz 40 GHz 60 GHz 5 GHz 500+ GHz
Coaxial Probe System
Dielectric measurement setup for liquid using the coaxial probe method
Method features
bull Broadband
bull Simple and convenient (non-destructive)
bull Limited r accuracy and tan d low loss resolution
bull Best for liquids or semi-solids
Material assumptions
bull ldquoSemi-infiniterdquo thickness
bull Non-magnetic
bull Isotropic and homogeneous
bull Flat surface
bull No air gaps or bubbles
Coaxial Probe
Three Probe Designs
High Temperature Probe
bull0200 ndash 20GHz (low end 001GHz with impedance analyzer)
bullWithstands -40 to 200 degrees C
bullSurvives corrosive chemicals
bullFlanged design allows measuring flat surfaced solids
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
85071E-Exx
Frequency
Material
types
Liquid
1 GHz 20 GHz 50 GHz 100 GHz 10 GHz 1 MHz 1 kHz DC
Solid
Semi-
solids
(Powder)
Gel
Substrate
85071E
Dielectric test fixture
Dielectric probe
Materials measurement software
Liquid test fixture
Magnetic material test fixture
16451B 16453A
16452A
Toroidal
core 16454A
10 GHz split
cylinder resonator
Split post dielectric resonators (SPDR)
85072A
85070E
Probe Kit Fixture Portfolio
The measured data from the instrument is not always presented in the most convenient
terminology or format In this case software is required to convert the measured data
to permittivity or permeability Software may also be required to model any interaction
between the fixture and MUT to allow the extraction of the bulk material properties
Materials Measurement System
Software
Frequency of interest
Expected value of er and mr
Required measurement accuracy
Material properties (ie homogeneous isotropic)
Form of material (ie liquid powder solid sheet)
Sample size restrictions
Destructive or non-destructive
Contacting or non-contacting
Temperature
Which Technique is Best
It Dependshellip on
Measurement Techniques vs Frequency and Material Loss
Parallel Plate
Frequency
Loss
Transmission line
Resonant Cavity
Coaxial Probe
Microwave RF Millimeter-wave Low frequency
High
Medium
Low
Free Space
50 MHz 20 GHz 40 GHz 60 GHz 5 GHz 500+ GHz
Coaxial Probe System
Dielectric measurement setup for liquid using the coaxial probe method
Method features
bull Broadband
bull Simple and convenient (non-destructive)
bull Limited r accuracy and tan d low loss resolution
bull Best for liquids or semi-solids
Material assumptions
bull ldquoSemi-infiniterdquo thickness
bull Non-magnetic
bull Isotropic and homogeneous
bull Flat surface
bull No air gaps or bubbles
Coaxial Probe
Three Probe Designs
High Temperature Probe
bull0200 ndash 20GHz (low end 001GHz with impedance analyzer)
bullWithstands -40 to 200 degrees C
bullSurvives corrosive chemicals
bullFlanged design allows measuring flat surfaced solids
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
The measured data from the instrument is not always presented in the most convenient
terminology or format In this case software is required to convert the measured data
to permittivity or permeability Software may also be required to model any interaction
between the fixture and MUT to allow the extraction of the bulk material properties
Materials Measurement System
Software
Frequency of interest
Expected value of er and mr
Required measurement accuracy
Material properties (ie homogeneous isotropic)
Form of material (ie liquid powder solid sheet)
Sample size restrictions
Destructive or non-destructive
Contacting or non-contacting
Temperature
Which Technique is Best
It Dependshellip on
Measurement Techniques vs Frequency and Material Loss
Parallel Plate
Frequency
Loss
Transmission line
Resonant Cavity
Coaxial Probe
Microwave RF Millimeter-wave Low frequency
High
Medium
Low
Free Space
50 MHz 20 GHz 40 GHz 60 GHz 5 GHz 500+ GHz
Coaxial Probe System
Dielectric measurement setup for liquid using the coaxial probe method
Method features
bull Broadband
bull Simple and convenient (non-destructive)
bull Limited r accuracy and tan d low loss resolution
bull Best for liquids or semi-solids
Material assumptions
bull ldquoSemi-infiniterdquo thickness
bull Non-magnetic
bull Isotropic and homogeneous
bull Flat surface
bull No air gaps or bubbles
Coaxial Probe
Three Probe Designs
High Temperature Probe
bull0200 ndash 20GHz (low end 001GHz with impedance analyzer)
bullWithstands -40 to 200 degrees C
bullSurvives corrosive chemicals
bullFlanged design allows measuring flat surfaced solids
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Frequency of interest
Expected value of er and mr
Required measurement accuracy
Material properties (ie homogeneous isotropic)
Form of material (ie liquid powder solid sheet)
Sample size restrictions
Destructive or non-destructive
Contacting or non-contacting
Temperature
Which Technique is Best
It Dependshellip on
Measurement Techniques vs Frequency and Material Loss
Parallel Plate
Frequency
Loss
Transmission line
Resonant Cavity
Coaxial Probe
Microwave RF Millimeter-wave Low frequency
High
Medium
Low
Free Space
50 MHz 20 GHz 40 GHz 60 GHz 5 GHz 500+ GHz
Coaxial Probe System
Dielectric measurement setup for liquid using the coaxial probe method
Method features
bull Broadband
bull Simple and convenient (non-destructive)
bull Limited r accuracy and tan d low loss resolution
bull Best for liquids or semi-solids
Material assumptions
bull ldquoSemi-infiniterdquo thickness
bull Non-magnetic
bull Isotropic and homogeneous
bull Flat surface
bull No air gaps or bubbles
Coaxial Probe
Three Probe Designs
High Temperature Probe
bull0200 ndash 20GHz (low end 001GHz with impedance analyzer)
bullWithstands -40 to 200 degrees C
bullSurvives corrosive chemicals
bullFlanged design allows measuring flat surfaced solids
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Measurement Techniques vs Frequency and Material Loss
Parallel Plate
Frequency
Loss
Transmission line
Resonant Cavity
Coaxial Probe
Microwave RF Millimeter-wave Low frequency
High
Medium
Low
Free Space
50 MHz 20 GHz 40 GHz 60 GHz 5 GHz 500+ GHz
Coaxial Probe System
Dielectric measurement setup for liquid using the coaxial probe method
Method features
bull Broadband
bull Simple and convenient (non-destructive)
bull Limited r accuracy and tan d low loss resolution
bull Best for liquids or semi-solids
Material assumptions
bull ldquoSemi-infiniterdquo thickness
bull Non-magnetic
bull Isotropic and homogeneous
bull Flat surface
bull No air gaps or bubbles
Coaxial Probe
Three Probe Designs
High Temperature Probe
bull0200 ndash 20GHz (low end 001GHz with impedance analyzer)
bullWithstands -40 to 200 degrees C
bullSurvives corrosive chemicals
bullFlanged design allows measuring flat surfaced solids
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Coaxial Probe System
Dielectric measurement setup for liquid using the coaxial probe method
Method features
bull Broadband
bull Simple and convenient (non-destructive)
bull Limited r accuracy and tan d low loss resolution
bull Best for liquids or semi-solids
Material assumptions
bull ldquoSemi-infiniterdquo thickness
bull Non-magnetic
bull Isotropic and homogeneous
bull Flat surface
bull No air gaps or bubbles
Coaxial Probe
Three Probe Designs
High Temperature Probe
bull0200 ndash 20GHz (low end 001GHz with impedance analyzer)
bullWithstands -40 to 200 degrees C
bullSurvives corrosive chemicals
bullFlanged design allows measuring flat surfaced solids
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Method features
bull Broadband
bull Simple and convenient (non-destructive)
bull Limited r accuracy and tan d low loss resolution
bull Best for liquids or semi-solids
Material assumptions
bull ldquoSemi-infiniterdquo thickness
bull Non-magnetic
bull Isotropic and homogeneous
bull Flat surface
bull No air gaps or bubbles
Coaxial Probe
Three Probe Designs
High Temperature Probe
bull0200 ndash 20GHz (low end 001GHz with impedance analyzer)
bullWithstands -40 to 200 degrees C
bullSurvives corrosive chemicals
bullFlanged design allows measuring flat surfaced solids
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Three Probe Designs
High Temperature Probe
bull0200 ndash 20GHz (low end 001GHz with impedance analyzer)
bullWithstands -40 to 200 degrees C
bullSurvives corrosive chemicals
bullFlanged design allows measuring flat surfaced solids
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Three Probe Designs
Slim Form Probe
bull0500 ndash 50GHz
bullLow cost consumable design
bullFits in tight spaces smaller sample sizes
bullFor liquids and soft semi-solids only
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Three Probe Designs
Performance Probe
Combines rugged high temperature performance with high
frequency performance all in one slim design
bull0500 ndash 50GHz
bullWithstands -40 to 200 degrees C
bullHermetically sealed on both ends OK for autoclave
bullFood grade stainless steel
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Coaxial Probe System
Calibration is required
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Coaxial Probe System
Three standards
Air Short Water
Air Short Load
User Defined Debye Cole
Cole Cole-Davidson
Permittivity Data
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Coaxial Probe Example Data
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Coaxial Probe Example Data
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
the Perfect Martini Every Time
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
USDA Fruit Ripeness Research
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Sugar Characterization
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
CPAC Carbon Nano Tube Research
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Coaxial Probe Best Practices
bull Keep probe tip clean
bull Avoid bending cable
bull Watch for bubbles
bull Measure temperature
bull Use Calibration Refresh
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Parallel plate capacitor method
Dielectric measurement setup for solid
using the parallel plate capacitor method
Dielectric measurement setup for liquid
using the parallel plate capacitor method
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Parallel plate capacitor method
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Parallel plate capacitor method
Frequency response of a circuit board Cole-Cole plot of a ceramic material
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Transmission Line System
Network Analyzer
Sample holder
connected between coax cables
Calibration is required
Coaxial
Waveguide
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Transmission Line
Material assumptions
bull Sample fills fixture cross section
bull No air gaps at fixture walls
bull Smooth flat faces perpendicular to long axis
bull Homogeneous
Method features
bull Broadband ndash low end limited by practical sample length
bull Limited low loss resolution (depends on sample length)
bull Measures magnetic materials
bull Anisotropic materials can be measured in waveguide
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Transmission Algorithms
(85071E also has three reflection algorithms)
Algorithm Measured S-parameters Output
Nicolson-Ross S11S21S12S22 r and r
Precision (NIST) S11S21S12S22 r
Fast S21S12 r
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Free space System
Dielectric measurement setup for free space measurement
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Material assumptions
bull Flat parallel faced samples
bull Sample in non-reactive region
bull Beam spot is contained in sample
bull Known thickness gt 20360
Method features
bull Non-contacting non-destructive
bull High frequency ndash low end limited by practical sample size
bull Useful for high temperature
bull Antenna polarization may be varied for anisotropic materials
bull Measures magnetic materials
l
Reflection
(S11 )
Transmission
(S21 )
Free space System
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Free Space High-Temperature
bull No tolerance requirements on sample
bull Sample is easily thermally isolated
bull Fibrous insulation virtually transparent to microwaves
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Free space System
Setup
Pneumatic + Ground
measurement
Pneumatic
measurement
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Free space System
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Sample in holder
between two antennae Agilent Materials Measurement
Software
with Free Space Calibration
Virginia Diodes Inc
Transmit and Receive
(TR) Frequency
Extenders
Sub Millimeter Wave System
Agilent PNA-X dual
source network
analyzer
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Sub Millimeter Wave System Block Diagram
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Quasi-Optical VNA Measurements
RF LO amp IF
Signal
Cables
50 GHz
VNA VDI WR-22
Extenders
Quasi-optical
Dielectric
Measurement
Setup
325-500
GHz
bull Quasi-optical dielectric measurements performed at Agilent
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
VDI offers frequency
extenders from 75GHz
through 1050 THz with
outstanding dynamic
range
VDI Frequency Extenders amp Horns
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
THz Waveguide Calibration
frac14-Wave
Calibration Shim
bull Typical VDI Waveguide Calibration Kit at WR-34
and lower
bull 2 Waveguide Loads
bull 2 Waveguide Shorts
bull 3 eighth-wave shims
bull 2 quarter-wave shims
bull To allow TRL calibration
bull 1 Precision Waveguide Straight Section
bull Calibrations TRL SOLT Offset Short Offset
Load hellip
bull VDI Calibration Kit at WR-22 and above
bull Quarter-wave shim is thin and fragile Move
to SOLT using precision load
bull 2 Waveguide Loads
bull Precision Loads 50 dB RL typical
bull 2 Waveguide Shorts
bull 2 Waveguide Quarter-wave Delayed Shorts
bull 1 Precision Waveguide Straight Section
bull Calibration SOLT
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Calibration is Required
Before a measurement can be made a calibration must be
performed to remove systematic errors
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
TRL Calibration
Thru
Reflect
Line
Move the antenna away
to compensate for the
thickness of the short
Move it back for the next
step
Move the antenna away
on a quarter-wavelength
and then back in the
original position
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Gated Reflect Line (GRL) Calibration
Two port calibration at waveguide or coax input into antennas
removes errors associated with network analyzer and cables
ECal SOLT or TRL
Cal done here
Two Tiered Calibration
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Gated Reflect Line (GRL) Calibration
Two additional free space calibration standards remove errors
from antennas and fixture
Reflect
(metal plate of
known thickness)
Line
(empty fixture)
Two Tiered Calibration
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
GRL Cal Error Model
forward only
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
bullCoax or Waveguide 2-port Cal corrects errors from end of cable back into
the instrument
bullErrors from Antennas and Fixture can be thought of as being lumped into
a GRL error adapter
bullThe GRL error adapter is quantified by measurements of reflect and line
standards
2-port Cal Terms 2-port Cal Terms
D
MUT
Ms
Tr
Tt
Ml
1
S11 S22
S21
S12
GRL Error
Adapter
GRL Error
Adapter
forward only
GRL Cal Error Model
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
MUT
S11 S22
S21
S12
T22 T11
T12
T21
O11 O22
O21
O12
Six Unknowns
O21 = O12
O11
O22
T21 = T12
T11
T22
Need Three
Standards
GRL Cal Error Model
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
-10000
-9000
-8000
-7000
-6000
-5000
-4000
-3000
-2000
-1000
000
-200 000 200 400 600 800 1000
Mag
(S)
(dB
)
Time (ns)
S11 Time Domain - Empty Fixture
S11 (dB) Linear (S11 (dB))
Transmitting
Antenna Receiving
Antenna
time domain gate
includes only
reflections before
sample
Gated ldquoStandardrdquo
3201 points used to avoid aliasing
Min Points = 1 + Alias Free Range (s) Frequency Span (Hz)
sample
holder
Measure O11 amp T11
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
MUT
S11 S22
S21
S12
T22
T12
T21
O22
O21
O12
Four Unknowns
O21 = O12
O22
T21 = T12
T22
GRL Cal Error Model
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Resonant Cavity Method
Agilent Split Cylinder Resonator IPC TM-650-
255513
Split Post Dielectric Resonators from QWED
ASTM 2520 Waveguide Resonators
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
f f c
Q c
empty cavity
fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
00313011
4
23032
1
css
cr
ss
sccr
QQV
V
fV
ffV
Resonant Cavity Technique
Q
f s f f c
s Q c
empty cavity
sample inserted fc = Resonant Frequency of Empty Cavity
fs = Resonant Frequency of Filled Cavity
Qc = Q of Empty Cavity
Qs = Q of Filled Cavity
Vs = Volume of Empty Cavity
Vc = Volume of Sample
ASTM 2520
S21
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Resonant Cavity Example Data
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Resonant vs Broadband Transmission Techniques
Resonant Broadband
Low Loss materials Yes
errdquo resolution le10-4
No
errdquo resolution ge10-2-10-3
Thin Films and Sheets
Yes
10GHz sample thickness lt1mm
No
10GHz optimum thickness ~ 5-10mm
Calibration Required No Yes
Measurement Frequency Coverage
Discrete Frequencies Broadband or Banded
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Summary Technique and Strengths
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Page 67
The first graphene samples formed were produced by
pulling atom thick layers from a sample of graphite using
sticky taperdquo
What is Graphene
This research was awarded of the Nobel prize in Physic in 2010 by
Andrei Geim and Kostya Novoselov at the University of Manchester
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
What is Graphene
Page 68
Graphene is an atomic-scale honeycomb lattice made of carbon
atoms
A graphene sheet is only one atom thick so it takes 3 million sheets
on top of each other to be the thickness of one millimeter
Graphene is the strongest material ever measured
ldquoIt would take an elephant balanced on a pencil to break through a
sheet of graphene the thickness of cling filmrdquo
copy Scientific AmericanMatt Collins
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
What are the applications of Graphene
Page 69
Bendable Graphene Battery Credit KAIST university Korea
Flexible electronic (Displays)
Andhellip
bull Supercapacitors
bull Absorbing materials
bull Solar panels
bull Avionic components
bull Prosthetic
bull Flash memory
bull Tennis racquet
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Agilent Role in GrapheneNano technology Science
Graphene
Page 70
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Agilent Role in GrapheneNano technology Science
Graphene
Page 71
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Graphene Material Validation amp Measurement
Instruments
Parametric Analyzer
Networkimpedance
Analyzer
SourceMeasure Unit
Measurements
Sheet Resistance
S-parameters
Dielectric
characteristics
Frequency
Response
Time Response
Pulse Stimulus
DC power
Applications
Speciific feature ( ie
absorption loss heat transfer)
Mw amp THz Graphene
Characterization
DC Characterization of Graphene
structure
I Wave
T Wave
A Wave
R Wave
Software
Instruments control
Material
characteristics
S-parameters
Curve fitting
Optimization
Page 72
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Graphene characterization
Single post-dielectric resonators operating on their quasi TE011
modes were used for the measurement of the surface resistance
and conductivity of graphene films grown on semi-insulating
SiC
Measurement details
THz source
THz receiver
Paper details
Measurements of the sheet resistance and conductivity of thin
epitaxial
graphene and SiC films
J Krupka1 and W Strupinski2a
1Institute of Microelectronics and Optoelectronics Warsaw University of
Technology Koszykowa 75
00-662 Warsaw Poland
2Institute of Electronic Materials TechnologyWolczynska 133 01-919
Warsaw Poland
copy 2010 American Institute of Physics doi10106313327334 For more info wwwqwedeu
Page 73
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
THz Graphene characterization
Frequency domain measurements of the absolute value of
multilayer graphene (MLG) and single-layer graphene
(SLG) sheet conductivity and transparency from DC to 1 THz
Measurement details
THz source
THz receiver
Paper details
Terahertz Graphene Optics
Nima Rouhi1 Santiago Capdevila2 Dheeraj Jain1 Katayoun Zand1 Yung
Yu Wang1 Elliott Brown3 Lluis Jofre2
and Peter Burke1 (1048589)
1 Integrated Nanosystems Research Facility Department of Electrical
Engineering and Computer Science University of California
Irvine CA 92697 USA
2 Universitat Politegravecnica de Catalunya Barcelona Spain
3 Wright State University Dayton OH 45435 USA
Received 13 June 2012 Revised 7 August 2012 Accepted 9 August
2012
copy Tsinghua University Press and Springer-Verlag Berlin Heidelberg 2012
Frequency extenders allow
measurements to 11 THz
Page 74
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Graphene-based Devices
Devices Measurements
DC Characterization
bull IV measurement
bull CV measurement
bull Transconductance
RF amp Mw Characterization
bull S-parameters
bull Ft
bull Impedance
measurement
bull Frequency response
Software
ICCAP MBP MQA
bull IV measurement
bull CV measurement
bull Spice model card
creation
bull Spice model card
validation
Instruments
Parametric Analyzer
Network Analyzer
SourceMeasure Unit
Page 75
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Page 76
State-of-the-Art Graphene High-Frequency Electronics
Yanqing Wu Keith A Jenkins Alberto Valdes-Garcia Damon B
Farmer Yu Zhu Ageeth A Bol
Christos Dimitrakopoulos Wenjuan Zhu Fengnian Xia Phaedon
Avouris and Yu-Ming Lin
IBM Thomas J Watson Research Center Yorktown Heights New York 10598
United States copy 2012 American Chemical Society Nano Lett 2012 12
Evaluation of devices based on CVD grown Graphene and epitaxial Graphene on SIc
High Frequency S parameters up to 30 GHz were
measured on a PNA with standard GSG probes
showing a theoretical Ft of 300GHz
DC Characterization is performed using a B1500A
parametric analyzer
Measurement details
High Frequency Graphene Transistor
Semiconductor Analyzer Network Analyzer
Paper details
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Shielding box
Source Drain
Side Gate
Si Sub
SiO 2
Carbon Nanotube
Back Gate
Guard
Co-axial Cable
SMU 1
SMU 2
S
SMU 3
SMU 4
Chuck
Chuck Guard
Back Gate
connection Circuit common
Guard
Guard
Guard
Force
Force
Force
Force
Triaxial Cable Triaxial connector
Page 77 Page 77
Carbon NanotubeGraphene FET SET
Semiconductor
Device Analyzer
Measurement details Paper details
Agilent B1500A Semiconductor Device Analyzer
Developed I-V curves using the built-in application
software for CNT FET characterization
Measuring CNT FETrsquos and CNT SETrsquos using the
Agilent B1500A
Web site wwwagilentcomfindnano
Application Note 5989-2842EN
Complete characterization of CNT FETrsquos or SETrsquos
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Page 78
Graphene FET modeling
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Agilent Role in GrapheneNano technology Science
Graphene
Page 79
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Page 80
Atomic Force Microscopy (AFM)
bull Enables scientists to image and manipulate atoms and molecules under normal lsquoroomrsquo conditions
bull Is the only technique to allow imaging of molecules in liquids
bull Allows almost an unlimited number of variations for measuring properties or interactions at the molecular level
bull Provides the ability to directly measure single molecule affinities by attaching to a drug antibody or even a virus
What is AFM
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Page 81
Images obtained with AFM equipment ndash diverse
applications
Electronic Materials Material Science Life Sciences
Image showing the
aggressiveness of CHO
cancerogenous cells Scan
size 40 um
SMM dCdV image of doped
SiGe device Scan size
10nm
Image of Polydiacetylene
Crystal showing molecular
structure Scan size 25nm
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Page 82
Scanning Microwave Microscopy System (SMM)
Coaxial cable
Agilent PNA
Scanning AFM in X and Y
and Z (closed loop)
Agilent 5400
AFMSPM
Instrument
Agilent Precision
Machining and Process
Technologies to deliver
RFMW to the conductive tip
Page 82
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Page 83
Complementing SMM with Agilent EMPro 3DEM simulations
Measurement details Paper details
Agilent 5400 AFMSPM
Agilent PNA
Electromagnetic Simulations at the Nanoscale
EMPro Modeling and Comparison to SMM
Experiments
Web site wwwagilentcomfindafm
Application Note 5991-2907EN
EMPro software efficiently complements SMM in
- Understanding of the underlying electromagnetic field
- Physical properties (complex impedance permittivity
permeability)
- 3D sample geometry AFM tip diameter and shaft angle and
measurement frequency
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
References
R N Clarke (Ed) ldquoA Guide to the Characterisation of DielectricMaterials at RF and Microwave Frequenciesrdquo Published by The
Institute of Measurement amp Control (UK) amp NPL 2003
J Baker-Jarvis MD Janezic RF Riddle RT Johnk P Kabos C Holloway RG Geyer CA Grosvenor ldquoMeasuring the
Permittivity and Permeability of Lossy Materials Solids Liquids Metals Building Materials and Negative-Index Materialsrdquo NIST
Technical Note 15362005
ldquoTest methods for complex permittivity (Dielectric Constant) of solid electrical insulating materials at microwave frequencies and
temperatures to 1650deg rdquo ASTM Standard D2520 American Society for Testing and Materials
Janezic M and Baker-Jarvis J ldquoFull-wave Analysis of a Split-Cylinder Resonator for Nondestructive Permittivity Measurementsrdquo IEEE
Transactions on Microwave Theory and Techniques vol 47 no 10 Oct 1999 pg 2014-2020
J Krupka AP Gregory OC Rochard RN Clarke B Riddle J Baker-Jarvis ldquoUncertainty of Complex Permittivity Measurement by
Split-Post Dielectric Resonator Techniquesrdquo Journal of the European Ceramic Society
No 10 2001 pg 2673-2676
ldquoBasics of Measureing the Dielectric Properties of Materialsrdquo Agilent application note 5989-2589EN April 28 2005
Thank You
Thank You