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TRANSCRIPT
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Global Excellence in Metrologya division of
fghijk
1Global Excellence in Metrology
fghijk
a division of
Production Metrology for SteepProduction Metrology for Steep--sided sided Aspheric OpticsAspheric Optics
Presented by Mark Middleton
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Surface and FormMeasurement
resolution (0.2nm)
Introduction To Taylor Hobson
$80M turnover$6M R&D
320 employees
RoundnessMeasurement
resolution (1.2nm)
Non-contact 3D Profilingresolution (0.01nm)
• Manufacturers of world-leading surface measurement solutions
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Innovative metrologyfor demanding applications
Talysurf PGI 1250Form and Surface
Roughness
Talysurf CCI ‘shop floor’Ruggedised Non-Contact 3D
Flatness & Roughness
Talyrond 395Automatic Roundness and Cylindricity
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Chicago Leicester Sao Paulo Barcelona Paris Milan Wiesbaden Vienna Singapore Hong KongShanghaiBeijingXiang
Seoul Tokyo
Represented by Taylor Hobson Agents and Distributors
Local support from a global company
100+ years of innovationFounded 1886 in Leicester, England
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Metrology for OpticsMetrology for Optics
• Vast amount of markets and applications– Sub-mm wafer-optics large area military IR lenses
• Focus on high growth production applications such as:– Cellphone and Digital Camera lenses– CD / DVD / Blu-ray lenses– LED lenses (for domestic / automotive applications)– High power laser optics
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Production Optics Production Optics –– Design TrendDesign Trend
• Strong migration from Spherical to Aspheric designs– Improvement in Performance (minimises aberrations)– Reduction in size and weight (fewer components)– Potential to reduce cost– Enhancement in design flexibility
• Exotic designs can produce 2 or more focal spots (eg DVD lenses)
• Aspheric designs are becoming more extreme– Higher spherical departure– Steeper sloping edges (NA > 0.85)
• More difficult to accurately measure
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AsphereAsphere ManufactureManufacture
• Methods of Production Include– Diamond Turning– Moulding– Grinding– Polishing - Pad polish / MRF (Magnetorheological Fluid)
• Diamond Turning (making mould)– Sub 10 minute cycle time– Form accuracy around +/-100nm (Pt)– Primary error causes include
• Tool radius and form errors• X and Y offset error
• Injection Moulding (making lens)– Primary error causes
• Differential cooling• Material shrinkage
• Need metrology that can measure mould AND lens
Preferred Method for Bulk Production
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• Measurement Capability– High aspheric departures and steep slopes
• Slope angles > 80 degrees– Accuracy and Repeatability
• Form measurement better than λ/10 (Pt < 50nm)• Accuracy maintained even at high NA
– 3D measurement for surface astigmatism
• Key Production Demands– Reliable and robust operation
• Downtime is expensive– Ease of use
• Programming and operation– Automation
• Single click operation is needed• Automatic corrective feedback to machine tool
– High throughput• Complete cycle times better than 5 minutes
Essential Metrology RequirementsEssential Metrology Requirements
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PGI PGI BluBlu -- Instrument for Production (New)Instrument for Production (New)
• Key Features
– Measurement Capability• Form measurement Pt < 50nm (λs = 25μm)• No loss of accuracy at high NA (slopes > 80o)• High gauge resolution (0.2nm)
– Indication of surface texture
– Measurement Options• 2D or 3D (astigmatic) analysis• Diffractive analysis• Full suite of TH aspherics analysis, including
– SAG table generation– Derived coefficients– Base radius optimisation– etc
– Fully automated (with new Production Interface)
• Seamless measurement and analysis• Transparent profile fusion and 3D interpolation
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Instrument ConfigurationInstrument Configuration
• Combination of Talyrond & PGI Technologies– Precision PGI Gauge and Traverse Unit– Specialized Air-bearing Spindle with Centre & Levelling table– Inclined traverse angle for high NA measurement
• Able to measure slopes > 80 degrees• Traverse can be set horizontal for ‘standard’ measurements
– Active Anti-vibration
• Automatic centre and level along component’s axis – No need to y-crest on component
• Automatic calibration routines
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Operating Procedure Operating Procedure –– Production InterfaceProduction Interface
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CalibrationCalibration
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Calibration SetCalibration Set--upup
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Calibration ResultCalibration Result
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Main ScreenMain Screen
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Measurement Result (1)Measurement Result (1)
Raw Profiles Error Maps
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Measurement Result (2)Measurement Result (2)
Average Error Map (for TPG) Surface Astigmatism
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Custom Output TemplatesCustom Output Templates
• Easily created in Talymap – for example:
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Measurement RoutineMeasurement Routine
• Traverse is set to incline
• Stylus is automatically positioned at position (1)
• Profile taken to aid fusion (later)
• Using automatic lift / lower, stylus is positioned near mould’s centre (2)
• Profile taken through mould and along remaining flat
• Spindle rotates to next position (30, 45, 90 or 180o)
• New profile is takenComponent is automatically
centred & levelled to its optic axis
(1)
(2)
Traverse Direction
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Automatic Data StitchingAutomatic Data Stitching
• Radially opposing profiles are fused– Automatic (production user does not see this)
Initial ‘Land’ is Imported and used as Reference
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Automatic Data StitchingAutomatic Data Stitching
• Radially opposing profiles are fused– Automatic (production user does not see this)
‘Land’ is set as Reference – neighbouring trace is Imported
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Automatic Data StitchingAutomatic Data Stitching
• Radially opposing profiles are fused– Automatic (production user does not see this)
Profiles are Aligned (profile looks re-entrant due to scale)
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Automatic Data StitchingAutomatic Data Stitching
• Radially opposing profiles are fused– Automatic (production user does not see this)
Opposing Profile (Measurement 1) is Imported
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Automatic Data StitchingAutomatic Data Stitching
• Radially opposing profiles are fused– Automatic (production user does not see this)
Profiles are aligned using central overlap
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Automatic Data StitchingAutomatic Data Stitching
• Radially opposing profiles are fused– Automatic (production user does not see this)
Finally - Fused trace is rotated to account for traverse angle
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Accuracy & Repeatability Test Accuracy & Repeatability Test (example)(example)
• Arc-fit to 1.2mm (nominal radius) hemispherical standard– Repeat tests (25x) shows zero change in best fit radius (within 0.1μm)– Pt (λs = 25μm) varies by +/-15nm
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PGI PGI BluBlu OverviewOverview
• Premium Configuration– Precision PGI Gauge and Traverse Unit
– Specialized Air-bearing Spindle with Centre & Levelling table
– Active Anti-vibration
– Dedicated User-interface with Automated Control
• Unrivalled Performance– Form Measurement Capability < 50nm
– Ability to Measure Steep Angles (> 80 deg)
– Flexible Configuration for Small or Large Components (up to 50mm)
– Specialized Optical Analysis Package
– Seamless Operation for Production Use
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SummarySummary
• Metrology for Production Facilities has many Challenges– Manufacturing capabilities are continuously improving
• Higher precision metrology is required– Production facilities are operating 24/7
• Reliable, automated and easy to use instruments are essential
• Taylor Hobson Metrology– Responding to these needs
• Building upon existing reputation and customer base
– Developing solutions together with key industrial partners
• Complete range of contact / non-contact instruments to suit most application needs
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Global Excellence in Metrologya division of
fghijk
29the best in form and surface measurement
fghijk
a division of
Production Metrology for SteepProduction Metrology for Steep--sided sided Aspheric OpticsAspheric Optics
Thank you for ListeningThank you for Listening
Presented by Mark Middleton