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DynacalDynacal®® Permeation Devices – Permeation Devices – Part Numbering SystemPart Numbering System

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Contents

TopicsWhat is a permeation tube? How does it work?Types of Dynacal® permeation devices

Wafer devicesTubular devicesDiffusion vials

How are part numbers determined?

Part number format

1 Dynacal2 Type of device – page 1 2 3 43 Certification4 Permeation rate determining factor

Determining factor – breakdown for wafer deviceNine most common wafer devices

5 Permeant gas designation – page 1 2 6 Special device designation – page 1 2 7 Certification, special range or accuracy

Part number examples – 1 2 3Special formulas – page 1 2 3Estimate permeation rate at unknown temperatureTolerance chart – page 1 2 Diffusion Vial part number format

Returns to this page

Returns to the main permeation device indexPerm Index

1XX – XXX – XXXX – XXXX – XXXX

1 2 3 4 5 76

Next


What is a permeation tube? How does it work?What is a permeation tube? How does it work?

A permeation tube is a sealed permeable membrane containing solid, liquid or liquefiable gases that permeate through the walls of the membrane at a constant rate.

The device is maintained at a constant temperature to establish constant vapor pressure inside the device. This results in an equilibrium between liquid/solid and the vapor phase of the chemical compound. The vapor escapes through the walls of the permeable membrane at a constant rate as long as the set point temperature is maintained. A measured flow of an inert gas such as nitrogen, helium, argon etc. is passed through the permeation chamber where the device is housed to capture and mix with the vapor resulting in known volumetric concentration in ppm/ppb. By varying the dilution flow rate one is able to generate a wide range of concentrations using a single device.


Types of DynacalTypes of Dynacal®® permeation devices permeation devices

Wafer Tubular

90 F3

F Wafer

60 F3

40 F3

50 F3

30 F3

T Wafer

50 T3

40 T3

30 T4

30 T3

Diffusion Vial

A B C D

STD #10STD NYLONSILICONXLTLE #3LE #2LEHE #2HE

XLT XLT #3XLT #2

STD #19

STD #10

STD LE #2

STD #19

STD #10

STD

LE #3


Wafer devicesWafer devices

A wafer device is a type of permeation device that uses a metal reservoir and a circular TFE or FEP permeable membrane

Wafer devices have an active length of 4.6 cm and an outer diameter of 1.6 cm

Designed to allow very low permeation rates

Available with or without certification

An example of a wafer type

30T4: 30 Wall thickness, in thousandths of

an inchT TFE (Permeable membrane)4 Diameter of cap bore measured in

sixteenths of an inch


Tubular devicesTubular devices

Dynacal tubular devices are primarily made out of different types of PTFE permeable membranes of varying wall thickness. They are available in active lengths of 0.5 to 20 cm long.

Each device is custom sized to generate the required mass per unit time to match the concentration range requirements of a specific application.

Typical permeation rates range from 5 ng/min to 50,000 ng/min for a single device.

Available with or without certification.


Diffusion vialsDiffusion vials

A diffusion vial is a Pyrex reservoir attached to a Pyrex stem having a fixed bore size. The reservoir is filled with the liquid or solid material of interest. When maintained at a constant temperature, the material establishes a two phase equilibrium between the solid/liquid and gas phase where the gas diffuses through the bore of the stem. By varying the stem length and the bore size, one is able to vary the permeation rate at a set point temperature.


How are part numbers determined?How are part numbers determined?

There is a logical progression to each part number, once you understand the basic formula. Each number in the sequence represents a specific aspect of the device: for example, the type of tubing, the active length of the tube, or the chemical being used.


2 3 4 5 6 71


Part number formatPart number format

1. Dynacal

2. Type of device (ref: Tech Note 1002)

3. Certification (ref: Tech Note 1002)

4. Permeable areaTubular: Active Length in mm (range: 0.5 cm to 20.0 cm)

Wafer: Wall thickness (0.030 – 0.090”)

5. Chemical number (ref: Rate Table & Price Sheet)

6. Special device designation (may not apply to all devices)

7. Certification, special range or special accuracy (i.e.: C, U or S)


2 3 4 5 6 71


DynacalDynacal®®

The first digit of all Dynacal devices will be designated as “1”.

#1 in part number format 1XX – XXX – XXXX – XXXX – XXXX

1 2 3 4 5 6 7


Type of DeviceType of Device

0 Tubular Device High Emission

1 Tubular Device Standard Emission

2 Tubular Device Low Emission

3 Tubular Device Special

4 Wafer Device

5 Wafer Device Special

7 XLT Device Standard Emission

8 XLT Device Special

#2 in part number format – general 1XX – XXX – XXXX – XXXX – XXXX

1 2 3 4 5 6 7


Type of Device Type of Device (cont’d 1)(cont’d 1)

#2 in part number format - specific

Tube Numerical representation in P/N Tube designation

STD 1 N/A

STD #10 1 10

STD #19 1 T33

HE 0 N/A

HE #2 0 T56

LE 2 N/A

LE #2 2 F56

LE #3 2 F59


1 2 3 4 5 6 7




Tube Numerical representation in P/N Tube designation

Silicon 3 S56

Nylon 3 N43

XLT 7 10, T33

XLT #2 8 F56

XLT #3 8 F33, 10, T33, F59

Reference Technical Note 1002, page 5


1 2 3 4 5 6 7




Wafer Device numerical representation

Valco 4 N/A

Valco high capacity 5 VH

Valco old style 5 OS

Monitor Labs 5 ML

CSI-MELOY 5 ME

Philips 9700 5 P

Threaded cap (Beckman) 5 TH (BK)


1 2 3 4 5 6 7


CertificationCertification

#3 in part number format

0 Uncertified

1 Tubular high range (>500 ng/min)

2 Tubular mid range (101-500 ng/min)

3 Tubular low range (20-100 ng/min)

4 Wafer high range (>100 ng/min)

5 Wafer low range (20-100 ng/min)

6 Tubular or Wafer ultra low range (5-19 ng/min)

7 Special temperatures, ranges, or accuracies

Note1: 1-6 represent certification at 30°C only.

Note2: Third digit remains 7 for all temperatures above 30°C for all rates..


1 2 3 4 5 6 7


Permeation Rate Determining FactorPermeation Rate Determining Factor

001 to 200 Active tube length in mm (Formula: required rate/per cm rate)

5 - - Wafer device with “T” wafer

6 - - Wafer device with “F” wafer

7 - - Waver device with special wafer

- y - Wafer thickness (.0y”)

- - z Wafer diameter (z/16”)


1 2 3 4 5 6 7


Determining Factor – Breakdown for Wafer DeviceDetermining Factor – Breakdown for Wafer Device

Each device is then represented in the part number by a three digit code.


X X Xa b c

a Represents the type of tubing. 5 – TFE , 6- FEP

b Represents the wall thickness of the tube (range of 3-9)

c Represents the diameter of the cap bore in 16th of an inch. (range of 3 or 4)

4


1 2 3 4 5 6 7


Nine Most Common Wafer DevicesNine Most Common Wafer Devices

Part Number Wafer Device TypePerm Rate

Ratio

14X-534-XXXX 30T4 (.03” thick x 4/16” dia T wafer) 1.0

533 30T3 (.03” thick x 3/16” dia T wafer) 0.60



633 30F3 (.03” thick x 3/16” dia F wafer) 0.14





Reference Technical Note 1002, Table 2


Permeant Gas DesignationPermeant Gas Designation

0001-0199 Inorganic compounds

0200-0499 Organo-metallic compounds

0500-1999 Hydrocarbons

2000-3999 Hydrocarbons containing oxygen

4000-4999 Hydrocarbons containing halogen

5000-5999 Hydrocarbons containing nitrogen

6000-6999 Hydrocarbons containing sulfur

7000-9999 Other organic compounds


1 2 3 4 5 6 7


Permeant Gas Designation Permeant Gas Designation (cont’d)(cont’d)

#5 in part number format - Examples

Chemical or Gas Grouping Designation Chemical or Gas

Inorganic compounds 0110 Hydrogen Sulfide

Organo-metallic compounds 0330 Dimethyl Mercury

Hydrocarbons 0505 Pentane-N

Hydrocarbons containing oxygen 2300 Formaldehyde

Hydrocarbons containing halogen 4201 Dichloromethane

Hydrocarbons containing nitrogen 5000 Methyl Amine

Hydrocarbons containing sulfur 6301 Dimethyl Disulfide

Other organic compounds 7600 Carbonyl Sulfide


1 2 3 4 5 6 7


Special Device DesignationSpecial Device Designation


Tube Type Tube Designation

STD #10 10

STD #19 T33

HE #2 T56

LE #2 F56

LE #3 F59

CSI-MELOY ME

Silicon S56

Nylon N43

XLT 10, T33

XLT #2 F56

XLT #3 F33, 10, T33, F59


1 2 3 4 5 6 7


Special Device Designation Special Device Designation (cont’d)(cont’d)


Wafer Device Special Designation

Valco High Capacity VH

Monitor Lab 8500 ML

Monitor Labs 8850 MLRA

Philips 9700 P

Threaded Cap (Beckman) TH (BK)

Specials OS, VH, LW


1 2 3 4 5 6 7


Certification, Special Range or AccuracyCertification, Special Range or Accuracy

C Certified followed by temperature in °C. (i.e.: C30 or C45)

U Uncertified followed by temperature in °C. (i.e.: U30 or U50)

S Special certification, special range or special accuracy


1 2 3 4 5 6 7


Part Number Example #1Part Number Example #1

Sulfur Dioxide standard permeation tube, with the rate of 5000 ng/min, certified at 35°C.

117-083-0082-C351. 1 Dynacal2. 1 Tubular Device – Standard Emission tube3. 7 Special temperatures, ranges, or accuracies

(customer request unit to be certified at a temperature other than 30°C)

4. 083 Active tube length in mm (8.3 cm). Active length

is calculated using active length formula5. 0082 Chemical compound designation for Sulfur

dioxide6. N/A for this part number7. C35 Certified at 35°C


1 2 3 4 5 6 7



Sulfur dioxide, low emission permeation tube, with the rate of 450 ng/min , certified at 30°C.

122-013-0082-F56-C301. 1 Dynacal

2. 2 Tubular Device – Low Emission

3. 2 Tubular mid range (101-500 ng/min)

4. 013 Active tube length in mm (1.3 cm)

5. 0082 Sulfur dioxide numeric representation

6. F56 LE #2, Low Emission Tube

7. C30 Certified at 30°C


1 2 3 4 5 6 7



Nitrogen oxide wafer device, Valco Style, certified at 40°C

147-553-0081-C401. 1 Dynacal

2. 4 Wafer device

3. 7 Special temperatures, ranges, or accuracies

4. 553 50T3 (.05” thick x 3/16” dia T wafer)

5. 0081 Nitrogen dioxide numeric representation

6. N/A for this part

7. C40 Certified at 40°C


1 2 3 4 5 6 7


Special FormulasSpecial Formulas

Active Length (mm) = Required Rate (ng/min) /Per cm Rate (answer will be in cm)

Total Rate (ng/min) = Active Length x Per cm Rate

Tubular Devices

For rates:

>500 ng/min Accuracy = +/- 2%

101-500 ng/min Accuracy = +/- 2% or +/- 5 ng/min

Whichever is greater

20-100 ng/min Accuracy = Rate x 5% or +/- 2 ng/min


5-19 ng/min Accuracy = +/- 10%


Special Formulas Special Formulas (cont’d)(cont’d)

Wafer Devices

For rates:

>100 ng/min Accuracy = Rate x 5%

20-100 ng/min Accuracy = Rate x 5% or +/- 2 ng/min


5-19 ng/min Accuracy = Rate x 10%


Special Formulas to find the following:Special Formulas to find the following:

P Permeation rate (ng/min)

F Flow rate (cc/min or 1pm)

C Concentration (ppm or ppb)

K Molar constant = 24.46/molecular wt. of compound

P = (F x C) / K

F = (P x K) / C

C = (P x K) / F


Estimate permeation rate at unknown temperatureEstimate permeation rate at unknown temperature

log P1 = log P0 + α(T1-T0)

Log = Base 10

P1 = Perm rate (ng/min) at new temperature (ºC)

P0 = Perm rate (ng/min) at known temperature (ºC)

T1 = New temperature (ºC)

T0 = Known temperature (ºC)

α = Temperature coefficient

Note: Before exposing device to higher temperatures, end user must consult VICI Metronics to obtain information on maximum temperature settings.


Tolerance ChartTolerance Chart

Device OD Rate Range Act Length (cm) (+/-) (cm)

HE 0.98 >100 +/- 15% 0.5 to 2020 to 100 +/- 25%5 to 19 +/- 50%

STD/STD #10 0.64 >100 +/- 10% 0.5 to 2020 to 100 +/- 25%5 to 19 +/- 50%

STD #19 0.64 >100 +/- 15% 0.5 to 2020 to 100 +/- 25%5 to 19 +/- 50%

LE (Capsule) 0.98 >100 +/- 25% 1 or 2 5 to 100 +/- 50%

LE #2 0.98 >100 +/- 10% 0.5 to 20 20 to 100 +/- 20%

5 to 19 +/- 50%


Tolerance Chart Tolerance Chart (cont’d)(cont’d)

Device OD Rate Range Act Length (cm) (+/-) (cm)

LE #3 0.98 >100 +/- 15% 0.5 to 2020 to 100 +/- 20%5 to 19 +/- 50%

Silicon 0.98 >100 +/- 15% 0.5 to 10 20 to 100 +/- 25%5 to 19 +/- 50%

Nylon 0.98 >100 +/- 15% 0.5 to 20 20 to 100 +/- 25%5 to 19 +/- 50%

All Wafer 1.6 20 to 100 +/- 25% 4.6Devices 5 to 19 +/- 50%


Diffusion Vial Part Number FormatDiffusion Vial Part Number Format

1. 19 = Diffusion Vial

2. Bore size

3. Chemical number

4. Certification designation

5. Special designation

19X - XXXX – XXX/X - S1 432 5

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