national nanofabrication centre clean room committee meeting tums murthy 26 july 2011
TRANSCRIPT
NATIONAL NANOFABRICATION CENTRE
CLEAN ROOM COMMITTEE MEETING
TUMS Murthy26 July 2011
CentralEquip & Process
Support
UtilitiesMaintenance
Building and Infrastructure
Shared with Nano Labs
AdministrationShared with Nano Labs
Engrs – 3
Arun KumarAnand,Prakash,ThyagananandEngr- 1Operators- 8
Vacancies: :Supervisor – 1Operators - 4
CENManagement
Electronics & Hardware Maint
Software Systems Maint
Vacuum Systems Maint
:
Bldg, and common utilities
Safety & Security
House-keeping
Purchasing, Stores & Inventory Control
BudgetControl
HR & Secretarial assistance
Electrical Systems
Gases & Chem. Mgmt
Mech. Systems
BMS (FMCS)
NanoFabManagement (See next slide)
Organization
Dr.Savitha
Thermal Processing
Dry & Plasma processing
Thin filmsLitho and metrology
Characterization
ALD
RTP
Raith e-Line
Laser Writer
EVG Aligner & Bonder
RadhaSumanVedaSiva
Vacancies: 1
Sangeeth Vijay Montero PavandeepSrinivas- Evening shift
Vacancy- 1
2 RF sputter
e-Beam evaporator
PECVD
Sabiha VamsiSmitha NairSomyaPavithra
Vacancy- 1
1 DRIE
2 ICP RIE
Metrology Equipments
Coat & develop
CPD
Wet Chemistry
Dr.Hegde
Dr.Raghavan
Dr.Mishra
Wet Chemistry &Plating
Atmospheric and LPCVD
SantoshManikantSuman
Vacancy –1
Material Characterization
Electrical Characterization
Chemical MgmtETP
DI Water, Safety
Gas managementExhaust
Scrubbers
HVAC + PCWCDA+ Vacuum
Raw Water, Fire serv.
Electrical
BMS
TUMS Murthy Cleanroom Committee Meeting 26 July 2011
Policies and Procedures
Procedure to gain access to the Cleanroom in place Procedure to become an independent user in place Cleanroom protocol and Dos and Don’ts published Safety Manual and Emergency Response protocols
under preparation Equipment
Operating procedures ( done for existing equipment ) Logbook for each equipment Preventive Maintenance procedures Stock Critical Spares and PM kits Consumables stocking plans
TUMS Murthy Cleanroom Committee Meeting 26 July 2011
Procedure to become an independent user
Training by equipment owners
Certification by equipment owners
Frequency of use > 4 times/week
Retraining and certification by equipment owners
Request by User or Nominated by Faculty
NoYes
The training will be for a period of
1 to 2 weeks
User clears the test
Becomes an independent user
Yes
No
Yes No
TUMS Murthy Cleanroom Committee Meeting 26 July 2011
Understand the Cleanroom protocol by going through the links provided
in the webpage
Download the equipment usage authorization form from the link
given in the page
Fill the form and submit to CEN office
Take the clean room protocol test
User clears the test
User is authorized to use Cleanroom equipments
Reserve the equipments through the Reserve
Equipment link in the CEN homepage
User is not authorized to use Cleanroom equipments
Open the CEN website http://www.nano.iisc.ernet.in/ and select User Information
from the left menu
Yes No
Gaining Access to the Cleanroom
TUMS Murthy Cleanroom Committee Meeting 26 July 2011
Policies and procedures
Facilities Checklist for each system (daily, weekly,
monthly etc.) Log of all significant events Daily report Preventive maintenance plans under
preparation
TUMS Murthy Cleanroom Committee Meeting 26 July 2011
Daily ReportDATE 20-07-2011
INITIAL FINAL KWHCUMULATIVE FROM 1-7-11 KWH
INITIAL STOCK
FINAL STOCK
CONSUMED LTRS
CUMULATIVE
INITIAL FINAL KWH INITIAL FINAL KWHDG-1
500KVA414 414 0 190 840 840 0 680
162381.4 167300.5 4919.1 329802.6 330984.5 1181.9 6101 135305.6DG-2
500KVA148 148 0 12 790 790 0 50
0 202 TOTAL 1630
REMARKS
No Power failure. UPS tripped at 12:01 HRs (Pls refer incident report for details)
Total 4 4Fire technician 0
Fitter 0Plumber 0
BMS Operator 0HVAC Technician 0
Electrician 0Facility Technologist 3 3
Facility manager 1 1
Man power details-Engg
Name General First shift Second shift Third shift Total Remarks
WW SYSTEM PROJECT WORK UNDER PROGRESSFPS SYTEM PROJECT WORK UNDER PROGRESS
FAS SYSTEM PROJECT WORK UNDER PROGRESS
CHILLER-2 260TR OK ( PROJECT WORK UNDER PROGRESS)CHILLER-3 260TR OK ( PROJECT WORK UNDER PROGRESS)
DA SYSTEM PROJECT WORK UNDER PROGRESS
UPS-2 250 KVA OKUPS-1 500 KVA OK
MECHANICALCHILLER-1 260TR OK ( PROJECT WORK UNDER PROGRESS)
ELECTRICALDG -1 500 KVA OKDG -2 500 KVA OKUPS-1 250 KVA OK
MSB-2 (Utility) MSB-7 (Clean room)TOTAL KWH
CUMULATIVE FROM 1-7-11
KWH
730
CRITICAL EQUIPMENT HEALTH REPORT
IISC DAILY REPORTBANGALORE CENTER FOR NANO SCIENCE AND ENGINEERING
EB CONSUMPTION DG CONSUMPTION DIESEL CONSUMPTION
TUMS Murthy Cleanroom Committee Meeting 26 July 2011
Facilities Checklist
Chiller No: 1 2 3
Temp 0C Pressure Temp 0C Pressure Temp 0C Pressure Temp 0C Pressure Temp 0C Pressure Temp 0C Pressure
LWPEWP CondenserValve
position
Circuit-1
EvaperatorDate Time
Doc. No: FM/CL/HVAC-01:05
IISC Chiller Reading Log BANGALORE CENTER FOR NANO SCIENCE AND ENGINEERING
SignCool:Stage
LWTEWT
Circuit-1 Circuit-1
Evaperator Condenser Valve positio
n
Evaperator CondenserValve
position
TUMS Murthy Cleanroom Committee Meeting 26 July 2011
Major remaining works
Cleanroom qualification and handover Finishing of Facilities and
Infrastructure( BMS, Vesda, Fire fighting, Access control, Security) and handover
Hook-up of equipments Equipments already in clean room Equipment yet to be received Equipment to be moved from old clean
room and other departments
TUMS Murthy Cleanroom Committee Meeting 26 July 2011
Proposed Hook up scheduleBangalore 560 012, India
Subject :Proposed Installation Schedule
SL_NO EQUIPMENT
Tool Set NoticeNo of days
Installation to SL-2
(Final Location)1 2 3 4 5 6 7 1 2 3 4 5 6 7 1 2 3 4 5 6 7 1 2 3 4 5 6 7 1 2 3 4 5 6 7 1 2 3 4 5 6 7 1 2 3 4 5 6 7 1 2 3 4 5 6 7 1 2 3 4 5 6 7 1 2 3 4 5 6 7 1 2 3 4 5 6 7 1 2 3 4 5 6 7
1 LPCVD Already in Clean room 20 days
2 OXIDATION & DOPING Already in Clean room 20 days
3 SINTERING Already in Clean room 14 days
4 A L D Already in Clean room 20 days
5 PECVD Already in Clean room 20 days
6 RIE-(CL ) Already in Clean room 15 days
7 RIE-(F ) Already in Clean room 20 days
8 DRIE Already in Clean room 15 days
9 SCRUBBER - 1 In position 7 days
10 SCRUBBER - 2 In position 7 days
11 WET BENCH - Litho 8/30/2011 10 days
12 WET BENCH - Litho 8/30/2011 10 days1313 WET BENCH - RCA Clean 8/30/2011 10 days1414 WET BENCH - Piranha 8/30/2011 10 days1516 WET BENCH - MEMS 8/30/2011 10 days
17 WET BENCH - Metal 8/30/2011 10 days
18 WET BENCH - CMOS 8/30/2011 10 days
19 WET BENCH - Plating 8/30/2011 10 days
20 WET BENCH - Tube wash 8/30/2011 10 days
21 WET BENCH - Parts wash 8/30/2011 10 days
22 Tecport Ebeam EVAPORATOR 8/30/2011 10 days
23 Tecport SPUTTERING 1 8/30/2011 10 days
24 Tecport SPUTTERING 2 8/30/2011 10 days2525 MASK ALIGNER EVG620 D-day + 1 ( see note below) 7 days
26 EVG BONDER D-day + 1 ( see note below) 7 days
27 RAITH E LINE D-day + 1 ( see note below) 7 days
28 OVEN D-day + 1 ( see note below) 5 days
29 LEICCA D-day + 1 ( see note below) 2 days
30 LASER WRITER D-day + 1 ( see note below) 2 days
31 C P D D-day + 1 ( see note below) 5 days
32 R I E (OLD) D-day + 1 ( see note below) 10 days
33 RF SPUTTER (OLD) D-day + 1 ( see note below) 5 days
34 FURNACE (OLD) D-day + 1 ( see note below) 7 days
35 M B E (Anil) D-day + 1 ( see note below) 10 days
36 ION BEAM ETCH (Anil) D-day + 1 ( see note below) 10 days
37 SPUTTERING SYSTEM (Anil) D-day + 1 ( see note below) 10 days
38 UHV-P L D (Vasu) D-day + 1 ( see note below) 10 days38
NOTE : Equipment already working elsewhere in the institute will be moved only after all hook-up materials are on site and the hook-up should be completed in maximum 1 week's time
4 5
76th Day fr 15.08.11. All Systems
projected completion
8 9 10 11 12
53rd day from 15 August 2011. Completion of Hook-
up for tools from old cleanroom
7
28 days. Tools already positioned inside the
cleanroom completion
15 August 2011 Projected Start of Hook-
up
62 31
14th Sept 11th Oct 28th Oct
TUMS Murthy Cleanroom Committee Meeting 26 July 2011
Warehousing and Inventory Control Coding process initiated and completed
for currently used materials Simple Inventory control software
installed Tasks remaining
Secure and safe store location Appoint dedicated stores administrator Set-up a process for total business process
from Planning, Purchasing, Receiving to withdrawal by the user
Inflow Inventory monitoring System
Inflow Inventory monitoring System
TUMS Murthy Cleanroom Committee Meeting 26 July 2011
Inflow Inventory monitoring System
Inflow Inventory monitoring System
TUMS Murthy Cleanroom Committee Meeting 26 July 2011
Shopping List
Miscellaneous tools for Facilities maintenance
Additional Clean room Furniture Fab Management Software RTP System Asher Dektak profiler Plating Bench Stand alone Spin, Coat and develop systems
for Litho area
TUMS Murthy Cleanroom Committee Meeting 26 July 2011