mks vacuum measurement brochure

7/27/2019 MKS Vacuum Measurement Brochure

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EnablingSTAINLESS STEEL FITTINGS AND VACUUM VALVESVACUUM TRANSDUCERS AND GAUGE CONTROLLER SYSTEMS

EFFLUENT MANAGEMENT SUBSYSTEMS

Innovative Process Solutions


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MKS The worlds broadest source of control productsfor todays advanced processes

MKS Instruments is a global provider of instruments, subsystems and process control solutions that measure, control,

power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance

and productivity. Our products are derived from our core competencies in pressure measurement and control, materials

delivery, gas composition analysis, electrostatic charge management, yield management, control and information

technology, power and reactive gas generation, and vacuum technology. Our primary served markets are manufacturers

of capital equipment for semiconductor devices, and for other thin film applications including flat panel displays, solar

cells, data storage media, and other advanced coatings.We also leverage our technology in other markets with advanced

manufacturing applications including medical equipment, pharmaceutical manufacturing, and energy generation and

environmental monitoring.

EnablingInnovative Process Solutions


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Stainless Steel Fittings and Vacuum Valves

MKS HPS Products manufactures a complete line of stainless steel components and vacuum

valves in ISO-KF, ISO Universal, metal-sealed CF and ButtWeld versions, as well as process

piping specifically designed for biopharmaceutical applications.This product line also includes

safety shut-off valves, soft-start valves, and angle and in-line vacuum valves in heated or

unheated configurations. All MKS process components and valves are manufactured to the

highest industry cleanliness standards. In addition to its broad offering of standard components,MKS can provide custom-designed chambers and manifolds.

Stainless Steel Fittings

Series 23, 31, 76, and 88

MKS offers a wide variety of fittings and components

such as tees, crosses, elbows, tubes, flanges, end

caps, reducers, and seals in standard sizes and

configurations. These fittings are offered in theSeries 23 ButtWeld, the Series 31 ISO-KF, the

Series 76 ISO-Universal, and the Series 88 CF

components.

Heated Valves

Heated valves are designed

for use in systems where

materials can solidify on cold

surfaces and cause cloggingin the process exhaust lines.

Ranging in size from NW25

to NW100, MKS' heated

valves are available in single

or multiple stage, angle or

inline, and standard or low

profile bodies.

Single and

Multiple Stage Valves

The MKS line of single and two-

stage valves includes standard,

low profile, and metal-sealed

styles in angle and in-line

configurations. In port sizesranging from NW16 to NW160

for single stage, and NW25 to

NW100 for multiple stage,

these valves reduce particle

contamination and damage due

to sudden pressure changes.

Gauge Isolation,

Leak Check, and Specialty Valves

MKS has developed compact vacuum valves for gauge isolation

and leak checking. The Cv valve is ideal for isolating sensors or

closing off leak check ports.The IDA valve enables in situ cali-

bration of MKS Baratron manometers on a vacuum system.

MKS also offers specialty safety valves.The patented VACUUM

SENTRYvalve protects the system in the event of power failure

to the pump. The AUTO-SOFT

valve protects the vacuum systemfrom particle contamination and prevents product damage in the

event of a sudden change in the system.


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Vacuum Transducers and Gauge Controller Systems

For vacuum measurement from 10-11 to 10,000 Torr, MKS offers

a broad range of gauges, controllers and transducers, including

Pirani, convection Pirani, piezo, hot cathode, cold cathode and

new MEMS-based multi-sensor technology. The MKS line of

vacuum gauges includes the Series 900 transducers that contain

sensors and electronics combined into a single device, as well asthe traditional, easy-to-operate gauge controller/sensor combinations.

Multi-Gauge Controllers

The MKS line of multi-gauge controllers operates a combination

of sensor technologies including hot cathode, cold cathode,

Pirani, convection-enhanced Pirani, piezo, and capacitance

manometer for a very wide pressure

measurement range of 10-11 to 10,000 Torr.

Series 900

Vacuum/Pressure Transducers

MKS comprehensive line of vacuum/pressure transducers collectively

measure from 10-10 to 1500 Torr and includes MEMS-based Micro-

Pirani and piezo sensors. Their compact size, low cost, expanded

pressure measurement range and direct atmospheric pressurereadings make the Series 900 transducers an ideal solution to any

vacuum system design. Digital output and communication in a

variety of formats, in addition to analog output, make these gauges

easy to implement.

Single Gauge ControllersThe MKS line of single gauge controller sys-

tems includes Pirani, convection-enhanced

Pirani and cold cathode sensor technologies.

The controller/sensor systems can measure

from 10-10 to 1,000 Torr.


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Effluent Management Subsystems

Minimizing the buildup of residue in vacuum pumping lines pays back in improved process yield and

system uptime. MKS' HPS heaters keep reaction by-products in the vapor phase until they can be

safely collected in an appropriate trap. Detailed process understanding by our engineers, along with

a choice of heater temperatures and trap designs, allows MKS to provide the optimum Effluent

Management Subsystem solution for many corrosive processes including: LPCVD-Silicon Nitride,

LPCVD-TEOS, WCVD, SABPSG, and Metal Etch.

Traps

MKS' patented line of traps are highly-efficient and compact. Each

trap is designed for specific processes in semiconductor manufacturing.

By-products are trapped insideaway from the process, pumps,

gauging, or anything else that can be damaged or clogged by hardened

by-products. When used in conjunction with an Effluent Management

Subsystem, the results can include increased uptime, longer pump life,

safer cleaning and by-product disposal, and higher yields.

Heaters

MKS heater jackets are designed for use on

stainless steel tubing, components, and valves.

The cleanroom-compatible jackets have a unique

molded design for proper fit and easy installation.

They are manufactured from materials that heatthe piping inside, but keep the outside of the

jackets cool to the touch. Snap-on flange

insulators keep the flanges hot, eliminating cold

spots. Digital control, display and communication

of each heater temperature and set point is an

option.

Virtual Wall

The unique Virtual Wall is a patented device that provides a

nitrogen boundary layer inside vacuum lines. Vacuum foreline

and exhaust line models are available for increased uptime,

reduced particles, reduced maintenance, and improvedthroughput.


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Vacuum Technology Line Card - 3/08

HPS, Baratron, AUTO-SOFT, and VACUUM SENTRY are registered trademarks, and Cv, IDA, MicroPirani,

Effluent Management Subsystems

, and Virtual Wall

are trademarks of MKS Instruments, Inc. 2008 MKS Instruments, Inc. All rights reserved.

MKS Vacuum Technology

HPS Products

5330 Sterling Drive

Boulder, CO 80301

Tel: 303.449.9861

800.345.1967 (in USA)

Global Headquarters

2 Tech Drive, Suite 201

Andover, MA 01810

Tel: 978.645.5500

800.227.8766 (in USA)

Web: www.mksinst.com

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