1

KHUSHI RAM BHARDWAJEE 4TH YEAR

359/07

DAVIET(JALANDHAR)

Introduction Electromechanical Systems MEMS Current Applications NEMS and Nanotechnology Impact of Miniaturization Challenges and Possibilities References

2

MEMS IS SIMPLY KNOWN AS MICRO ELECTRO MECHANICAL SYSTEM.IT IS THE ART OF MINIATURIZING.MINITUARIZING ART WAS VERY OLDLY USED BY WATCH MAKER IN 13TH CENTURY.

3

4

Figure 5.1: Jonathan Swift.

5

.

Introduction, Continued

MST - Microsystems Technology . MEMS - Microelectromechanical

System. Manmade devices created using compatible

microfabrication techniques that are capable of Converting physical stimuli, events and

parameters to electrical, mechanical & optical signals

Performing actuation, sensing and other functions

6

Definition and Terms

7

8

.

Electromechanical SystemsFunctional Block Diagram

Materials Crystallography – Forms of Silicon

Amorphous Polycrystalline Crystalline

“Miller Planes”

9

MEMSMicrostructure Fabrication

Pattern definition Photolithography

Deposition Oxidation, chemical-vapor

deposition, ion implantation Removal

Etching, evaporation

10

-Structural layer-Sacrificial layer

deposit

pattern

etch

Microstructure Fabrication, Continued

11

MEMS Advantages

The advantages of MEMS devices include

• Size

• High sensitivity

• Low noise

• Reduced cost

The applications for MEMS are so far reaching that a multi-billion dollar market is forecast. Key industry applications include transportation, telecommunications and healthcare.

AccelerometersMicro Optical Electro Mechanical Systems

(MOEMS)Digital Mirror Devices (DMD) used in Projection

DevicesDeformable mirrors Optical Switches

Inkjet Print heads (Microfluidics)Pressure Sensors  Seismic Activities - Thermal transfer

12

Current Applications

Micro-arrayed biosensorsVirus detectionNeuron probes (nerve damage/repair)Retina/Cochlear ImplantsMicro NeedlesChemLabMicro Fluidic Pumps

- Insulin Pump (drug delivery)

13

Biomedical

Current Applications, Continued

Hand held detectors – biological & chemical microsensorsChem’s Lab on a Chip (security applications)

Data Storage Systems IBM Millipede storage system – AFM tip writes

data bit by melting a depression into polymer mediaum and reads data by sensing depressions.

14

Detection systems

Current Applications, Continued

Nanotechnology manipulation of

matter at the nanometer scale.

Nanomaterials Started with carbon. Behavior depends

on morphology.

15

carbon and carbon nanotube

NEMS and Nanotechnology

Quantum dots Nanowires Quantum films

16

Quantum Dots.

NEMS and Nanotechnology, Continued

17

• Electrostatic manipulation• Moving one electron or molecule at a time

• Patterning• Dip Pen Lithography • Electron Beam Lithography

Nano Fabrication

NEMS and Nanotechnology, Continued

18

Cantilever Sensors Mass Storage

(IBM) Millipede chipNanochip

Molecular ElectronicsTransistorsMemory cellsNanowires Nanoswitches

Merging of technologies

19

Cantilever sensors are essentially MEMS cantilevers with chemical arrays attached. The cantilevers, acting much like tuning forks, have a natural frequency of vibration which changes as more mass is attached (nano function). The change in frequency is sensed by the MEMS device indicating a measurable presence in the system of particular reacting compound.

Selective chemical layer

Reacting compound

cantilever

Cantilever sensor

Merging of technologies

NEMS and Nanotechnology, Continued

Potential Positive Impacts Reduction of disease. Job opportunities in new fields. Low-cost energy. Cost reductions with improved efficiencies. Improved product and building materials. Transportation improvements

Potential Negative Impacts Material toxicity Non-biodegradable materials. Unanticipated consequences. Job losses due to increased manufacturing efficiencies.

20

Impact of Miniaturization

Fundamental and applied research Engineering and technological

developments Low Cost Fabrication “Molecular manufacturing”

21

Challenges and Possibilities

Gad-el-Hak, M. MEMS, Design and Fabrication, Second Edition. (2005)

Lyshevski, S., MEMS and NEMS, CRC Press LLC. (2002)

Maluf, N. and Williams, K., An Introduction to Micromechanical Systems Engineering, Second Edition, Artechouse, Inc. (2004)

Microsytems, Same-Tec 2005 Preconference Workshop, July 25 &26, 2005.

Taylor and Francis, MEMS Introductory Course, Sandia National Laboratories, June 13-15, 2006.

What is MEMS technology? MEMS and Nanotechnology Clearinghouse. http://www.memsnet.org/mems/what-is.html.

22

23