mechanical stability of dlc films on metallic substrates part 1

8/13/2019 Mechanical Stability of DLC Films on Metallic Substrates Part 1

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D e p o s i l i t m m e t h o d S u b ,~ t ra te m a t e r i a l a n d I t l i c k n c s s I ) I . C I il ll + t h i c k n e s , , ( # I I i } Slrc ss (GP a ) t,~, f e r e n c eC 2 H , ~ R F d i s c h a r g e ( ;I ,' ts s . 1 .5 m m < 1 - ( 1 . 6 | o - 7 , 2 [ 1 5 ]C s p u t t e r i n g + b u t : m e R F d i s c h a r g e ( ; l a s s , '? '? + 0 , 0 7 t o - 0 . 7 5 [ t 3 ]C.: I - t a R F d i s c h a , ' g e ( ] l a s , , O . 17 m m ( ) . 5 - I to -5 [ I -1 ]lon [ g ' i lt l l : grap lti te spu tter ing St. ? ? - 0.5 t ,t t, - 3 [ I I ]A r + c H + R F d i s c h a r g e S t , '.' < 0 . 3 5 ( ] to - 7.5 [ 18]C : H 2 R F d i s c h a r g e S t , I ). 2 2 m m < I - 11.5 to - 1.3 [ 1 9 ]C a rc : ion 110;.1111: PE C VD St . ( I .3 - t l .8 m m ( ) .4 + -0 .6 to - - 1 2 .5 [16]( 'FI = : C ,Hf , + He d is c ha rge ( ; la ss . 7 .* /a m O. 12 - 1 .22 to - 4 .67 [201M e t h y l - p r - p a n R F d i s c h a r g e S t . 1 L 38 M I ll ? - 1).5 to - 1.5 [ 17]Al l o f Ihe se da ta w e re ob ta ine d by a pp ly in ,g the Nl t~n} e t t t l a l ion t t~ c t t r , , a lu r c n le ; In ll r et l rlCl l lx ob t a ine d a l r oo m te m pe ra lu rc , w i th rm, a c c o t t n I t a k e n o fs t r e s s e s I ' r o l l l dil'l~'rentiat th ern lal t'C)lllrtlClioll.

using an RF glow discharge technique. In this f i rs t paper,the s t ructure and s t ress s ta te o the f i lms are inves t igated.

2 Experimental proceduresDL C f i lms were depos i t ed us ing the , 3 . 56 MHz RF

pla s ma-as s i s t ed CVD s ys tem s hown in F ig . I . T he s ub-s t ra t e s employed were (a ) a lumin ium of th icknes s 2 ram,(b ) commerc ia l pur i ty t it an ium (CP -T i ) o f th icknes s 125

m and (c ) s i l i con s ing le c rys ta l s ( (100) s u r face ) o f th ick-nes s 0 . 38 mm. Depos i t ion on AI s ubs t ra te s was ca r r i ed ou tto inves t igate the temp erat t , re during the process and ons i l icon to s tudy the s t ructure and thickne, , s of the f i lm, ; .Wo rk wi th the CP-T i s ubs t ra te s was a ime d : t t e s t ab l i s h ing

the s t ress levels in the f ihns . Si tmples depos i ted on Si weresubjected to various heat t rea tn~ents .

The subs tra tes were pol ished to a mirror f inish us ing ig in d iamond pas te , u l t ra s on ica l ly c l eaned fo r 20 ra in in anace tone ba th and b lown dry . Pr io r to depos i t ion o f DL C, o rany interlayer, subs tra tes were c leaned for 10 rnin in s i t t t ,us ing an Ar o r tAr + I(Y, :/ CH 4) RF p lasma a t I Pa and-290 V. T he ch amb er was then pum ped dc, wn to be low10 r, Pa . Dep os i t ion of thin ( -- 81) nm ) AI bon ding layerswits carr ied out us ing a DC magnetron sput ter source a t3 0 - 4 0 W a n d 0 . 5 - 0 . 8 P a . T h c D I , C d e p o s i t i o n p a r a m e t e r sare l is ted in Table 2. The DLC t ' i lms were characterisedus ing FFIR , L as e r Ra rna l l s pec t ros copy , mic ro -ha rdnes sindenta t ion an d curvature rneas t~rements for the determ ina-t ion of s t ress levels .

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Illllll I W in do w ~Subs t ra te

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R o t a ~ v u m pF i g . I . S c h e n t a l i c i l l u s t r a t i o n o t t he R F ~ l l l ~ k , d b , c h ;. |i 'g u ( ' v l ) s y n t c m u , ,t .' d f ~ t ' I ) ] . ( ' d c l m , , i l i o n .


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T a b l e 2E x p c r i i n e n l a l c o n d i l i o l m u s e d f o r a l l D I . C d c f m s i t i tmR F p o w e r ( W ) 5 - 15 1 1C a t h o d e a r e a ( c m 2 ) 2 1)Base p res s t , re ( P a ) < I l l ~P r o - c l e a n i n g g a s A r o r t a r 4 - 1 1) ;~ ( I t 4 )W o r k i n g g a s ( | 14,G a s f l o w ra t e ( s e e n | ) 3--5W o r k i n g p r e s s u r e ( P a ) I - -4 1)D e p o s i t i o n t i m e ( m i l l ) 5 - 2 I i t )

i n to a p o w d e r , , n ix in g i t w i th K Br , p re ss in g t h e m ix tu rein to : l 1 0 m m d ia m e te r d i sk a n d u s in g d i r e c t t r a n sm i t t a n c e ,R a m a n s p e c t ro s c o p y w a s p e r f o r m e d u s i n g a S P E X 1 4 01d o u b l e s p e c t r o m e t e r a t 4 8 8 n m w a v e l e n g t h a n d 1 0 0 m Wo u tp u t p o w e r .

3 M i c r o s t r u c t u r e o f d e p o s i t e d f i l m s3. I . N e ga t i t e s e f - h i a s

T h e b i a s v o l t a g e m a k e s m e a s u r e m e n t o t h e su b s t r a t et e m p e r: t tu r e i m p o s s i b l e u s i n g a c o n v e n t i o n a l t h e r m o c o u p l e[17 ], R e c o rd in g t h e t e m p e ra tu re a f t e r sw i t c h in g o f f t h ep l a sm a [2 4 ] is l i k e ly to b e i n a c c u ra t e , s i n c e t h e su b s t r a t ccoo ls do wn qui ckl y as a rest, I t o1 hea t loss to the ca thod ec o o l i n g s y s t e m . F u r t h e r m o r e , t h e p r e s e n c e o f t h e g l o wd i s c h a r g e m a k e s t h e u s e o f a p y r o m e t e r u n r e l i a b le . I n v ie wo f t h i s , a n i r r e v e r s ib l e c o l o u r c h a n g e s e n s o r s y s t e m w a su s e d . A m i c r o - s t r i p o f t h e r m a x ( s u p p l i e d b y R S ) w a sa t t a c h e d to t h e r e a r f a c e o f a n A I su b s t r a t e . In v i e w o f t h eh ig h t h e rm a l d i f fu s iv i t y o f A I . t h e t e m p e ra tu , ' e a t th i s p o in tc a n b e t a k e n a s r e p re se n t a t i v e o f t h e f i h n t e m p e ra tu red u r i n g g r o w t h . T h i s a l l o w e d t h e p e a k t e m p e r a t u r e d u r i n gD L C d e p o s i t i o n t o b e d e d u c e d f r o m t h e c o l o u r c h a n g e o fth e t h e rm a x s t r i p . Te m p e ra tu re s t a k e n b y t h i s m e th o d w e rea c c u ra t e t o a b o u t +5 C . F i lm th i c k n e ss m e a s t , r e rn e n t sw e r e c a r r ie d o u t u s i n g S E M , b y v i e w i n g c r os s s e c t i o n s .

V a c u u m h e a t t r e a t m e n t s w e r e p e r f o r m e d o n D L C / S is a m p l e s u n d e r a p r e s s u r e o f 5 P a a t t e m p e r a t u re s o f 3 0 0 C .4 0 0 C o r 5 0 0 C. l b r p e r io d s o f 0 .5 h , I h o r 2 h . A f t e r e a c hh e a t t r ea t m e n t , s a m p l e s , a. ': 'e e x a m i n e d b y F T I R . R a m a na n d SEM. A l l t h e F I IR sp e c u ' a w e re o b t a in e d i n r e f l e c t i o na t 6 0 i n c i d e n t a n g le , u s i n g ; P e r k i n - E l m e r 1 75 1} m a c h i n e .F o , ' c o m p a r a t i v e p u r p o s e s . V I ' I R s p e c t r a o f d i a m o n d f i l m sw e r e o b t a i n e d b y g r i n d i n g f r e e - s t a n d i n g d i a m o n d f i l m s

I n t h e s y s t e m u s e d . t h e h i g h a s y m m e t r y o f t h e p o w e r e dc a th o d e ( sm a l l a r e a ) a n d e a r th e d a n o d e ( l a rg e a re a ) g e n e r -a t e s a h ig h n e g a t iv e se l l -b i a s v o l t a g e o n t h e c a th o d e( sp e c im e n ) r e l a t i v e t o t h e a n o d e [4 ] . Th i s b i a s a r i se s [2 5 ]f r o m t h e l a r g e d i f f e r e n c e b e t w e e n ' h e m o b i l i t i e s o f e l e c -t ro n s a n d i o n s . Be c a u se t h e p o w . . 'r e d e l e c t ro d e i s c a p a c i -t i v e ly c o u p le d , t h e s t e a d y - s t a t e d r c u r re n t m u s t b e z e ro , Asu rp lu s o f e l e c t ro n s a c c u m u la t e s o n t h e e l e c t ro d e , u n t i l asu f f i c i e n t n e g a t iv e p o t e n t i a l d e v e lo p s t o e n su re t h a t t h e n e tc u r re n t f l o w o v e, a t u l l c y c l e i s z ero . Th e re fo re , i o nb o m b a r d m e n t o c c u r s o n a s n m l l c a t h o d e a r e a. T h i s s e l f b i a sw i l l d e p e n d o n b o t h t h e s y s t e m g e o m e t r y a n d t h e d e p o s i -t i o n p a ra m e te r s (p o w e r a n d p re ssu re ) . D a t a o n t h e m e a -s u r e d s e l f - b i a s a s a f u n c t i o n o f p o w e r d e n s i t y a n d g a sp re ssu re a re p re se n t e d i n Ta b le 3 a n d F ig . 2 . C le a r ly . t h eb i a s w d ta g e i s p ro p o r t i o n a l t o t h e sq u a re ro o t o f t h e p o w e rd e n s i t y . Th i s i s c o n s i s t e n t w i th p re v io u s o b se rv a t i o n s [6 ] .I t c a n a l so b e : e n f ro m F ig . 2 t h a t i n c re a s in g t h e m e th a n ep re ssu re l e a d s t o a sm a l l b u t p ro g re ss iv e d e c re a se i n t h eb i a s v o l t a g e , p a r t i c u l a r ly a t h ig h e r p o w e r d e n s i t i e s . Th i s i sc a u s e d b y t h e e x p a n s i o n o f t h e p l a s m a a t l o w e r p r e s s u r e .w h ic h r e su l t s [2 6 1 in a n i n c re a se o f t h e c o n t a c t a re ab e t w e e n p l a s m a a n d c h a m b e r w a l l ( a n o d e ) . S i n c e t h en o m in a l RF in p u t p ow c , i s p a r t i a l l y d i s s ip a t e d w i th in t h eim p e d a n c e m a tc h in g c i r c u i t , i t i s m o re r e l i a b l e to u se t h e

Ti ,b l 3E x p e r i m c n l a l d a t a f r o m I ) I . C I ] l m s u e p t ~ s i te d o n t o A I x u b s t r a t e s u n d e t d i l ' f c r c n c o n d i t i o n sR u n c o d e P o w e r d e n s i t y M e t h a n e N e g a t i v e b i a s l. ,i , p ( i ,k , ) 2( p ) l - ( i m , a I h r a t e ,

( r o W i n t o 2 ) p r e s s u r e V t, ( k V ) ( k V P a ) ( k V 2 P ;.I~ ": ) /{1 #.til l h I )/ ( i ' u )

S u b s ~ r a t t e m p .( C I

W I 2 . 5 I O ( L 0 4 0 . 4 l u l l o - 2 5W 2 I I ) 1 ( I O . 1 0 5 1 .1 1 5 0 . 0 3 5 0 . 6 8 4 1 )W 3 2 5 I 0 O . I q 5 1 , 9 5 O . 1 2 I I . 9 2 7 1W 4 411 I11 11.245 2 , 4 5 O. I q 1.112 -W 5 511 111 0 .2 85 2 .85 I ) , 257 1 .83 118W 6 65 10 O, 3115 3 .05 0 .2 94 I ,"14 -W 7 75 I ) 0, 34 5 3.4 5 11.371"~ 1.93 182P I 511 I 11.2 ) O. 29 O . 0 8 4 l , 2 9 31 '2 50 5 1) 29 1 .45 O, 188 1 .8 I t 0P 3 5 i II) 0 . 2 8 5 2 . 8 5 0,2 57 1 ,83 I t ," II N 5 0 15 11.27 4.115 0 2 8 2 - 1 2 II15 50 211 11.205 5,3 11.314 2.f~4 -P6 511 25 0 .2 45 6,125 O,325 - 1271 '7 50 30 11,225 h .75 0 .2 77 4 . I (~ -I18 50 411 11,215 8.(~ 11.292 5_39 15 7] ; o r ~ l ~ | | I ' u l I . 1 t1 p0 ' , '1 I | 1 1 ~ L I n p r c s x l | l ' t 2 w e r e . ,, t' lu , q Cd a l l d I t 1 ~ b i a .~ v o l l a g u , , g r o ~ , l h t a l C a | | t l n t | b . , ,I r a t e k ' 1 1 1 1 ~r ~d ~ ., ~ ~ ,~ t 2r C t h e 1 1 mc a . ~u n . ' d .


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2 I 0 X . L . P , ' n g , 7 ~ W . C l y w ' / 1 7 f i n S o l i d I il n t s 3 1 2 t I , 1 9 , ) 2 0 7 - 2 1 85 0 0

o p C H ) = 5 Pa- - - : . -P ICI-14~= I5 Pa,--, 400> - - - - P CH4}= I 0 Pa- - A , P C H 4) = 5 P a . . , ~.,='~ ~- - ~ c H ) = r . . . , , ~ / . 7 ;

. . . . . . . . . . .

ZtOO

0 2 4 6 8 IOS q u a r e r o o t o f p o w e r d e n s i t y ( ( r o W m r f f '- ) t / ' )F i g . 2 , V a r i a t i o n o f t h e n e g a t i v e s e l f - b i a s a s a f u n c l i o n o f t h e s q u a r e r o o to f t h e p o w e r d e n s i t y .

t [I

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r / ?0 ~ - - - . . . . . , ,- . _t .. _ ~ _. .. i x - - . . . . 3 , ._ . . . . . . . . . . . L . . . . . . . . . I

0 O . l 0 . 2 0 . 3 0 . 4 0 5V b .~ p t n ( k V : P a t n DFig . 4 . Var i a t ion o f suhs t ra t e l en lpcr ; t l u re ; i s ; t func t ion o f I l l C s q u a r e o fn e g a t i v e s e l f - b i a s t i m e s t h e s q u a r e r o o t o f p r e s s u r e .

measured se l f-bias vol tage and gas pressure t o de te rminethe ion energy (see Sect ion 3.3) .3 . 2 , D e p o s i t i o n r a t e s

Theoret ica l ly. the growth ra te , R. can be predic ted fromthe f lux of the growth species. J i sinceR ~ C , J i ( )where C, i : ; the st icking coeff ic ient for the growth species( ions and /or neu t ra l s ) . Assuming C, has no s ign i f i can tvaria t ion wi th temperature in the range of interest here(< 180C). the growth ra te i s proport ional to the growthspecies f luxRc t J~ (2 )Measured g rowth ra t e s fo r d i f fe ren t p re ssure and powerdensi t ies (bias vol tages ) are l i s ted ir~ l 'ab le 3 and presentedin Fig. 3. The data in Fig. 3 ind icate th.~t the gro wth rate isapprox ima te ly p ropor t iona l t o t he p roduc t o f b i a s vo l t ageand gas pressure , implying thatJi ~ Vh P ( 3 )

For an ideal gas, the f lux of gas molecules i s propor-6 L . . . . . . . . . . ~ ~ ~ : . . . . . . . . . . . . . . . . . . . . . . . . i

_ 5 / '

= : 1L ::' '/"

~ - - _ _ L ~ x . . - ~ - - - - . ~ = + . . . . ~ - . L - . ~ t _ x . _ . J0 ~ O 2 4 6 8 I OV b P (kV Pa)

Fig . 3 . Measu red g rowth ra t e , ' , p lo t t ed ag . ' f i n s t t h e pr t ,duc l o f h im, vo l l aga n d g a s p r e s s u r e ,

t ional to the gas pressure [27] . During DLC deposi t ion, thesel f-bias wi ll accelera te p osi t ive ions tow ards the subs t ra te ,ra ising the net f lux. Bubenzer e t a l . [28] obta ined the samedependence us ing benzene a s t he hydroca rbon gas .3.3. E n e r g e t i c s o . f b o u d ~ a r c h n e n t

The temperature of the subst ra te i s ra ised as a resul t ofbomb ardment by ene rge t i c i on o r neutra ls and the impinge-ment of UV radia t ion fronl the glow discharge . I t i s ,however , mounted ol l a water-cooled ca thode, so thistemperature increase i s expected to be re la t ively smal l .Temperature data are given in Table 3 and are a lso pre-sented in Fig. 4 . This plot shows that the temperatureincrease during deposi t ion is approximate ly proport ional tothe product o l the square o r the bias vol tage and the squareroot of the gas pressure .

In addi t ion to the heat ing effec t f rom ions accelera ted tothe subst ra te , high energy neutra ls , tbrmed by chargeexchange in the ca thode sheath region [25] . rnay a lsocontr ibute . Assuming the heat f lux carr ied away by thecool ing water to be constant , the ternpera ture increase wi l lbe proport ional to the energy t lux injec ted by the bombard-ing part ic les. This can be expressed [28] asT 7~ c t J , E 4 )where Ji i s the llux of energet ic ions (or neutra ls) and E isthei r average energy. Since this temperature r i se has beenshown to be approx ima te ly p ropor tiona l t o V ~ P ~ / ~

'1JiT~ g V h - P i ' / 2 ( 5 )S u b s t i t u t i n g f o r J , f r o m E q , (3 ) , t h e a v e r a g e i o n e n e r g yc a n b e e x p re s s e d i n t h e f o r mT ' g c t V h P , / 2 ( 6 )

Since the plasma vol tage , ~ , , i s usual ly much smal ler[29] t han the se t fb i a s vo l t age, and j l eg l ec t ing the e ffec t o fany col l i si ' ,ms in the ion sheath. E is approximate ly pro-port ional to v, .r ' : a , , ( V , , 4 . V , , ) = , ,V , , ( 7 )As the gas pressure i s increased, however , the mean freepath of ions i s great ly reduced and the ion energy is l ike ly


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X.L. P c.g , 7. W, Clym / 7 hi . Solid F ilms 312 11998) 21)7-2 I/ 2 1 1

[8 ] t o b e s ig n i f i c a n t ly l e s s t h a n eVt , ; i s a re su l t o1 co l l is ionsin th e io n s h e a th . A t a p a r t i c u la r p re s s u re , t h e re fo re , ar e l a t io n s h ip o f t h e t ' o rmE c x ne V , ( 8 )i s e x p e c t e d , w h e r e n i s a d i m e n s i o n l e s s c o n s t a n t w i t h av a lu e r a n g in g f ro m I a t v e ry lo w p re s s u re to O a t v e ry h ig r~p re s s u re . F o r e x a m p le , K o id l e t a l . [8 ] f i )u n d th e v a lu e o f nt o b e a b o u t 0 4

T h e r e t b r e . b y c o n t r o l l i n g t h e s e l f - b i a s a n d t h e p r e s s u r e .t h e e n e r g y o f in d i v i d u a l b o m b a r d i n g i o n s , w h i c h i s o n e o ft h e m o s t i m p o r t a n t p a r a m e t e r s f o r D L C l 'i lm d e p o s i t i o n ,c a n b e a d j u s t e d . M o s t D L C f i l m s a r e p r e p a r e d w i t h b o n a -b a r d m e n t e n e r g i e s [ 7 ] i n t h e r a n g e I - 1 0 0 e V . i t s h o u l d b en o t e d h e r e t h a t Vh i s s e n s i t i v e t o t h e g e o m e t r y o f t h ed e p o s i t i o n c h a m b e r [ 4 ] .3.4. Alomic bomting cl tart tcterist i ( ' .~3 .4 . I . FT IR spe 't roscol~yt t y d r o g e n a t e d a m o r p h o u s c a r b o n d i s p l a y s a w i d e F T I Ra b s o r p t i o n b a n d c e n t r e d a t 2 9 0 0 c m ~ , w h i c h c a n b ed e c o n v o l u t e d i n l o d i f f e r e n t i n d i v i d u a l p e a k s c o r r e s p o n d i n gt o v a r i o u s t y p e s o f C - H s t r e t c h i n g v i b r a t i o n s . T h o s e a t2 8 5 0 a n d 2 9 2 0 c m ~ c o r r e s p o n d t o s p L C H , , t h e re i s ap e a k a t 2 9 2 0 c m ~ c o r r e s p o n d i n g t o sp - L C H , t h o s e a t3 0{ )0 a n d 3 0 6 0 c m - ~ c o r r e s p o n d t o s p - '- C H a n d t h a t a t3 3 0 0 c m - ~ c o r r e s p o n d s t o s p L C H s t r et c h i n g v ib r a t io n s[30 ,311 .F i g . 5a s h o w s F T I R s p e c t r a o f D L C f i l m s d e p o s i t e dw i t h d i f f e r en t n e g a t i v e s e l f b i a s v o l t ag e s . F o r c o m p a r a t i v ep u r p o s e s , a s p e c t r u m i s a l s o s h o w n ( F i g . 5 b ) f r o m ad i a m o n d f i il n d e p o s i t e d b y H F C V D u s i n g a H , - i . 5t )~ C H .~g a s m i x t u r e a t 8 , 5 C . B a s i c a l l y . t h e 2 9 0 0 c m i a b -s o r b a n c e b a n d i s c o m p o s e d o f p e a k s c e n t r e d a t 3 0 0 0 c m 1( s p -' -C H ) , 2 9 7 0 c m 1 ( s p L C H ~ ) . 2 9 2 0 c m i { s p L C H ,s p L C I t a ) , 2 8 7 5 c m - I ( s pL C H . ~ ) a n d 2 8 5 0 c m - i ( s p LC H . ~ ) . P a l s h i n e t a l . [ 3 2 ] o b t a i n e d s i m i l a r F T I R s p e c t r a l b ri o n - b e a m - d e p o s i t e d D L C . T h e C t l , a b s o r b a n c e p e a k s a r es h a r p e r a n d b e t t e r r e s o l v e d i n d i a m o n d f i l m s t h a n i n D L Cf i lm s . F ig . 5 a s h o w s th a t n e g a t iv e s e l f -b i a s h a s l i t t l ein l lu e n c e o n th e s h a p e o f t h e F ' T IR s p e c t ru m , b u t t r t er e l a t i v e i n t e n s i t y o f C H , ( t .>_ a > 3 ) a b s o r b a n c e p e a k sd o e s s h o w s o m e v a r i a t i o n a s a r e s u l t o f c h n g e s i ll t h eb o n d i n g p r e f e r e n c e o f h y d r o g e n l b r s p ~ a n d s p a c a r b o nn e t w o r k s . ( Q u a n t i t a t iv e a n a l y s is o f t h e s p / s p - r a t io w a sn o t c a r r i e d o u t , i n v i e w o f v a r i o u s d i f f i c u l t i e s a s s o c i a t e dw i t h a c c u r a t e l y d e c o n v o l u l i n g t h e F ' I ' I R s p e c t r a . )3 . 4 . 2 . R a m a , , w e c t r o s ( ' o p y

D L C l ' i h n s d e p o s i t e d a t 10 P l t p re s s u re and d i f f e r e n tn e g a t i v e b i a s v o l t a g e s f r o m 4 0 V t o 3 4 5 V w e r e c x a n l i n c db y R a m a n s p e c t r o s c o p y . A l l t h e f i l m s d i s p l a y c d a B r o a dR a m a n p e a k c c n t r c d a l a r o u n d 1 5 4 0 c m ~ a n d a s h o u l d e ra t lo w e r f r e q u e n c y o f a b o u t 1 3 50 cm t , w h i c h c o r r e s p o n dt o G a n d D p e a k s r e s p e c t i v e l y . R a i s i n g t h e b i a s v o l t a g es h i f t s t h e G p e a k p o s i t i o n t o h i g h e r f r e q u e n c y a n d a l s o

I v = 4 5 v v 1 9 5 v l { 1 {r" [ " v t~ =2 85 V vt, =1 (15 v I It

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F i g , 5 . l : ' l' l R s p e c l r a f r o m ( a } D L C f i l m s d e p o s i t e d a t I O P a , w i t hd i f f e re n t s e l f - bi a n v o l t a g e s a n d t b} a d i a m o n d f i lm d e p o s i t e d b y H F C V Da t $ 2 5 " C . w i t h a g a s o l n p o s i l i o l l o f H , - I .S t; ~ C H 4 ,

m a k e s t h e D p e a k m o r e p r o m i n e n t . T h e r a t i o o f t h ei n t e g r a t e d a r e a s u n d e r t h e D a n d G p e a k s ( I D / i ~ ; ) in -c re a s e s s ig n i f i c a n t ly a s V ~ , i n c re a s e s . T h i s e f f e c t , w h ic h i si l l u s t r a t e d b y th e d a ta in F ig . 6 , i s c a u s e d b y a n in c re a s e int h e s i z e a n d i n c i d e n c e o f g r a p h i t e m i c r o c r y s t a i s [ 3 3 , 3 4 ] o nr a i s i n g t h e n e g a t i v e b i a s a n d h e n c e t h e b o t n b a r d i n g i o ne n e r g y . T h i s e f f e c t i s p r o b a b l y a s s o c i a t e d w i t h t h e h i g h e r

.5

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0 i ~ tl) .115 O. I O. 15 O.2 O.Z'5 0.3 0.3 5N e g a m , ' e b i a s v o l t a g e . V ~, t k V )

l : i ~ . ( ~ . R a t i o o f t t l , , : i n t e g r a w d a r e a , r a i d e r t i le D a , d ( ; r ,e a k , , i n R a m a ns p e c t r a , p h ~ l l e d ; is a f u n c t i o l l o 1 ' t l t i l c g a t i x c b i a s , , l d t a ~ e . F u r D I . C f i i l l t sd e p o s i t e d a t O P a ,


6/12

212 X . L Peng . 7: W. ('lyr e,/7 7fio Solid Fih,s 312 199fi; 2117- 218s u b s t r a t e t e m p e r a t u r e , w h i c h m a y e n c o u r a g e t h e g r o w t h o fsu ch c ry s t a l s . Th i s ce r t a in ly o ccu r s d u r i r~g an n ea l in g ;.Itr e l a t i v e ly h ig h t em p era tu res ( see Sec t i o n 3 .4 .4 ) .3 . 4 . 3 . M i c r o h a r d n e s s

M i c m h a r d n c s s t e s t s o n 2 - / . tm l t h i c k D L C f i l m s d e -p o s i t ed o n S i w i th 2 8 5 V b i as an d a p ressu re o f 1 0 P l ts h o w e d t h a t th e h a r d n e s s w a s t y p i c a l ly a r o u n d 3 0 - 4 0 G P a(H , ) a t 2 5 g l o ad . (Th e h ard n e ss o f S i i s ab o u t 1 2 G Pa . ) i tsh o u ld b e n o t ed t h a t p ro n o t, n ced e l as t i c r eco v ery o f t h eD L C f i l m s c a n l e a d to o v e r e s ti m a t e s o f H , m e a s u r e d i nt h i s w a y a n d d y n a m i c m e a s u r e m e n t h a s b e e n r e c o m -m en d ed [3 5 ] . N ev er th e l ess . t h ese r esu l t s co n f i r rn t h a t t h eD LC f ih n s b e in g s tu d i ed co n t a in a r eh l t i v e ly h ig h p ro p o r -t ion o f s p ~ b o n d s .3 . 4 . 4 . H y d r o g e n r e l e a s e a m l gr q ~ h it i: at i m o n a n n e a l i n g

T h e s p 3 n e tw o r k i n D L C f i l m s i s e x p e c t e d t o t r a n s tb r mto t h e m o re s t ab l e sp 2 n e tw o rk (g rap h i t i za t i o n ) o n a n n ea l -i n g a t h ig h t em p e ra tu re . Fo r h y d ro g cn : l t ed D LC f i i rn s , ith as b een sh o w n [3 0 .3 1 ] t h a t, o n a lm e a l in g ab o v e 4 0 0 C ,t h e h y d r o g e n c o n c e n t r a t i o n d e c r e a s e s a n d t h e s p ~ c a r b o nn e tw o rk i s t r an s fo rm ed to an sp 2 n e tw o rk . FTIR an a ly s i sc a n b e u s e d t o m o n i t o r t h e d e h y d r o g e n a t i o n p r o c e s s a n dth e asso c i a t ed ch an g es o f ca rb o n b o n d in g s t a t e [3 0 .3 6 .3 7 ] .In t h e cu r ren t s t u d y , o n ly t h e h ig h f r eq u en cy FTIR sp ec-t rt , m ran g e (2 7 0 0 to 3 1 0 0 c ln ) ) an d l o w f r e q u en cy r an g e( 7 0 0 to 1 3 00 c m 1 ). w h i c h r e s p e c t i v e l y c o n t a i n t h e m a j o rC - H a n d C - C a b s o r b a n c e p e a ks , w e re i n v e st ig a te d .

F i g . 7 a s h o w s F T I R s p e c t r a f r o m D L C f i l m s p r e p a r e d a ta b i as v o l t ag e o f 1 0 5 V an d a m eth an e p ressu re o f I0 Pa .a l t e r an n ea l in g fo r h a l f an h o u r o r 2 h a t t h ree d i f l 'e r en tt em p e ra tu res , w h i l e F ig . 7 b r e fe r s to f i lm s p ro d u ced w i thd i f f e ren t b i as v o l t ag es , a l t e r an n ea l in g a t 4 0 0 C. i t is c l ea rf ro m F ig . 7 a t h a t. o n r a i s i n g t h e an n ea l in g t em p era tu re , ap r o g r e s s i v e t r a n s f o r m a t i o n o c c u r s f r o m a p r e d o r n i n a n t l ysp 3 s t ru c tu re i n t h e as -d ep o s i t ed s t a te t o o n e w h ich l a rg e lyex h ib i t s sp 2 b o n d in g . I t w o u ld ap p ear t h a t t h e t r an s fo rm a-t i o n acce l e ra t es sh arp ly ab o v e ab o u t 4 0 0 C. i t w as a l son o ted t h a t t h e h ea t t r ea tm en t s a t 4 0 0 C an d 5 0 0 C p ro -d u c e d a m a r k e d c h a n g e i n th e c o l o u r o f th e v e r y t h i n f i l m s( f ro m y e l lo w -b ro w n to d eep b lu e) . Th e d a t a i n F ig . 7 bsh o w th a t th e t em p era tu re sen s i t i v i t y o f t h is t r an s fo rn m t io ni s n o t s t ro n g ly d ep en d en t o n t h e b i as v o l t ag e d u r in g d ep o -s i t i o n . Sp ec t r a a re p resen t ed i n F ig . 8 f ro m th e l o w f r e -q u en cy r eg im e , t o r f i lm s d ep o s i t ed a t 2 8 5 V n eg a t iv e b i as .T h e s e c o n f i r m t h e p r o g r e s s i v e d i s a p p e a r a n c e o f s p ~ b o n d -in g ; i n d t h e Io rm at io n o f sp 2 b o n d s as t h e an n ea l in gt em p era tu re i s r a i sed .

T h e s e s p e c t r a c o n f i r m t h a t b o n d e d h y d r o g e n ( o n l y h y -d ro l , . en w h ich i s b o n d ed to ca rb o n c :m b e d e t ec t ed b y.-v IR) w i l l b e r e l eased o n an n ca l in g ab o v e ab o u t 4 0 () C .

H y d ro g en l i b e ra t i o n i s as so c i a t ed w i th t h e t r an s fo rm at io nf r o m an sp3 C C n e t w o r k t o a n s p 2 - C = C n e t w o r k a n d t h easso c i a t ed r e rn o v a l o f d an g l in g sp L C b o n d s . I t sh o u ld b ep o in t ed o u t t h a t t i n y u n b o n d cd h y d ro g en p resen t w o u ld b c

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u n d e t e c t a b l e b y F T I R . L i b e r a t i o n o f s uc h u n b o n d e d h y d r o -g en co u ld o ccu r a t l o w er t e rn p era tu res t h an 4 0 0 C,

R a m a n s p e c t r o s c o p y a l s o c o n l i r m e d t h e s e c o n c l u s i o n s .Th e t r an s fo rm at io n t o a g rap h i l i c s tru c tu re can b e c l ea r lyseen i n t h e Ram an sp ec t r a sh o w n in F ig . 9 . A s-d ep o s i t edD L C f i lm s sh o w a b ro ad p eak cen t r ed t it a ro u n d 1 5 4 0c m +, w h i c h c o r r e s p o n d s t o a n a n m r p h o u s c a r b o n s t r u t -

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F i g , 8 . V I ' I R s p e d r a i n t h e l o w h c q u e n c y r w l g c , f r u m I ) I+ C I ] h u sI : . repa r cd vd t h a sd l ' - bJa : , o f 285 V and a ~ . :r ' , I rr c . , S t tle o f I O P~ . ,. a f t e ra m u . ' u l i , g f o r 3 ( ) m m ( ) r 2 h a t d i l l c r c t l l | c m p c r u t u r e , . . .


7/12

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,. ~ As-dept~siled l / ~ ' - - - :mnealcd 2 t t a t 4 0 0 C I.. . . . . . . a n n e a l e t l 0 .5 h at 5 ( '~ ) C t , .i t .: I

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F i g , 9 . r m n a n '~ s p e c l r a o f I ) I , C f i l m s d e p o s i t e d a t l O 5 V a n d 1 0 P a , h e t o r ca l l d ; I f l c r ~ . l l l l l C ; . l l i l t g .

lu r e [ 38- 40] . Th is b r oad peak can be f i t t ed us ing twoGauss ian peaks cen t r ed at 1336 cm ~ ( D peak) and 1541cm ~ ( G peak) . A f te r hea t t r ea tment a t 400C, the G peaksh i f t s to h ighe r i ' r cquency and two we l l - r e so lved peaksappea r a t 1 6 0 0 crn I and 1 3 6 0 crn '. The r a t io ( / l~ / l~ ; )typ ica l ly inc r eased f r om about 0 . 64 I o r a s - depos i ted DLCt o abou t 2.8 af ter anne al ing a t 4110C and 3. I at 5 0 0 C , O1|rais ing the heat t reatme nt te mpe rature , graph ite crys ta l l isa-t ion i s acce le r a ted and these c r ys ta l l i t e s con t r ibu te s t r ong lyto the D peak . Af te r r each ing a ce r ta in s ize , momentumconse r va t ion beg ins tn dona ina te and ( 1 ~ > / ~ ; ) s tar ts todecl ine . At this s tage [33] , the crys ta l l i tc s ize is inverselypmpcw tiotlal to ( I D / I ~ ; .

4 . R e s i d u a l s t r e s s e s4 , l . l ) e d m ' l i o n o 1 ' , 1 1 " ( ' s . ~ 'e . . [ l ' o l H ( ' l l t ' l 'L l l l l l ' e I t t [ , a . 1 t l ' , m e t t L ~ '

Ti le S toney equa t ion6 tr h/ ( - - - - ' - - - - ' Wt - , H - ( 9 )

wher e H and h are the thicknesses o f subs t r a te and depos i tand 1:'~ ( = E , / ( I - t , ) ) i s the b iax ia l mo dulus o f thesubstrate, is comnlonly used to calculate a f ilm stress. r~f r o m a nncasurcd curw.lttlrc. K , Tile equat ion is accurateonly in the l imit where t i le f i lm thickness . I t , lends to zero.Un for tun ately, in this limit the curvature . ~c. must a lsotend to zero. I t I las been pointed out by Brenner ; , r idS end er of f [41] that the expe r imenta l e r r o r a r is ing f r om thecur va tur e be ing t o o smal l to measur e accur a te ly t ends toexceed t i l e e r r o r in t r oduced v ia the appr ox ima t ion incor po-r a ted in to the S toney equa t ion when the r a t io o f theth icknes s o f the coat ing to that o f the stlbstrate, I t / t l isless than about 5~,4. in pract ice , the deta i ls are dep ende nton tile Young's nlodtdi and or1 tile absolute II ' iicklless ofthe substra tc . This is i l lus tra ted by the plots in F ig. 10.These wer e p r oduced us ing the cxac l expr es s ions [ 42]

w h i c h r e l a t e c u r v a t u r e s a n d s t r e s s d i s t r i b u t i o n s t o t h et h i c k n e s s e s a n d p h y s i c a l p r o p e r t i e s o f s u b s tr a t e a n d c o a t -i n g .

( ~ l " , 'n E ' , ( h + i t ) h A t := E [ t '- h " + 4 1 " ~ , l : ~ h ' H + 6 1 i ~ , E : h ' H " + 4 i - ~ , l - : l d / ' + E ' ,~ - H "~ ( 1 0 )

l . . t t e :, r ~ l , . ~ , = - ~ , , h E ~ , + H I : . ~ + l : , ,a: h - ~ ) l l a )

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, )a di .{ r , ~ ] , ~ . = 3 , ~ ," h l f ~ . + H E ~ - E '.Kgi (12 b)h G - H E ~( 5 = ( 1 3 )2 ( ~ 'l : . ,~ + H I . : , )

wh ere ~ ix the dis tance o f t h e neti t ra l axis f rom theinter face.

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| ' i t , I l L P r e d M c d d e l ~ e m l e u c e n f ~ a l , , l ' ,c c i m c n c u r ~ a l u r . . a u d ( b ) .' ,l re ,, ~,k ' v e l n o l l t h e r a t i o t + l t h e t h i c k l l u ' , , n t + l I h e k 'O . ~ .t li l| ~ , h . t o t h a t o 1 t h estlb'.. l t-,~| lu ', t , T h e I ' qo p , v , e r e o b l a i t i e d t l, , ,i l| ~ t h e e \ ; i c t r e l a t i o lt ~ , h i P nI ' P | 'k , . ,~ . 'l |l e d b ,~ I ' k l , , . ( 1 1 i ) , ( I l a ) , ( I I b ) , { 1 2 a ) , ( 1 2 b } a n d ( 1 3 1 a n d | l n i l l ~ t h eN h m e . ~ e q u a t i o n ( l i q . ( q ) ) ,

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8/12

214 X . L , Peng , 7 : IV . ~ ' l ym , Th i n S~ l i d ' 71o s . i ' / 2 ~ ' 1 9 9 b ; ~ 2 0 7 . 2 1 8

Th e s e e q u a t i o n s r e f e r to a n e l a s t i c s y s t e n i e x h i b i t i n g a nequa l h iax ia l s t ress s la te , re .~u l i i i l g f rom the in t i 'oduc t io l~ o fa t i n i f o r n l i n - r ll i ln i r l i s f il s l r a i n , ~ , , : . b e t w e e n t h e t w oc o n s l i t u e n t s . N o t e l l l a l , f o r r e l a l i v e l y t l l i c k c o a t i n g s , t h ea d o p t i o n o f c u r v a t u r e l ie d r i l y c h a n g e s lh e c o a l i n g s ti 'e s s ,hu t a lso in l l 'oduce .~ d i f fe rences be tween the leve l a l thef ree s t lr lace and ih l i l i l l l he in le r face . Th is i s one reasonw h y i l is i l lore r igorou.~ 1o de f ine i l n l is f i t Sl l 'a in 111.1 il ; ic o a t i n g s t r e s s , a l t h o u g h i t s h o u l d b e me n t i o n e d t h a it h r o u g h - t h i c k n e s s v a r i a ti o n s w i t h i n t h e c o a l i n g w o u l d n o tl le s ig n i f i c a n t f o r m o s t D L C f i lm s .

Th e p l o t s i n F i g . I 0 c o n f i r n l i h a l ll l e S l o n e y e q u a t i o n i sexpec ted to be qu i t e accura te fo r th icknes s ra t ios be low afew pe rcen t o r s o , depend ing on the s t i f fnes s e s . T heexper ime nta l s tu dies inc luded in Table t al l sa l is fy Ihi: ;condi t ion, s ince a lypical vl l luc for h is I / . z m and Hr a n ge s tr o m a b o u t 1 0 0 # m t o o v e r I m i l l, l t o w e v e r , t heplots in Fig. IOa highl ight the problcnl ident i f ied by Bren-ner and Senderoff [41] for ca . , , cs where the h/H ratio is solow: to t a mis f i t s tra in o f 10 ~ , many o f the combina t ionsI f i H and 1 i n Ta b l e I w o u l d c o r r e s p o n d t o c u r v a tu r e sb e l o w 0 . 1 m ~ , o r e v e n b e l o w 0 .0 1 m ~ ( 1 0 1 ) m r a d iu s o fc u r v a t t l r e ) , Su c h t ' u r v a t u r e s a r e e x l r e n l e y d i f f i c t l l l If< ) n l e a -s u r e w i t h a n y p r e c i s i o n . O f c o u r s e , ti le p r e s e n c e o f m u c hh i g h e r m i s f i t s t r a in s w i l l p i i s h t h e c u r v a l i t r e L ip I O n l o r ereadi ly measurable levels . Nevertheless , i t should herec~lgnised that . in these regimes of small h/H and re la-l ive ly l a rge H, minor e r ro rs in meas ured curva tu re l ead toma jor changes in deduced s t re s s l eve l . T h i s may accoun tfor some o f thc very high repo rted v alues z ind a lso for thewide scat ter in the data in Table I .T he approach adop ted in the p re s en t work was togene ra te re l a t ive ly l a rgc curva tu re s by us ing h igh h/Hra t ios and to apply E qs . (10), ( I la ) , ( I ib ) . ( 12a). (12b ) and( 1 3 ) t o deduce the misfi t s t ra ins and hence the ~tl es.,,l eve ls . Curva tu re s w ere typ ica l ly in the range i - I l l m ~,and were hence read i ly meas ured wi th h igh p rec i s ion . T h i scan bring problems of adhes iorl t ' a i lure as the coal ingth icknes s i s inc reas ed and the cor re s pond ing s t ra in ene rgyre tca se ra t e becomes h igh ( s ee Pa r t 1 ) , How eve r , hy us ingth in ( - -80 nm) AI in te r l ayc rs , adequa te adhes ion wasma in ta ined be tween DL C f i lms o f s eve ra l , am th icknes sand the Ti subs tra tes . The effec t of the intertayers on thes tress dis t r ibut ion was assurned to he ncgl igible , The useof thin ( < 200 / . tin) subs tra tes presen ts dang ers o f frac turefoi bri t t le materia ls such as glass and Si , :a ) a meta lsuhs tr : l te was emFIoyed. The use of meta l subs tra tes ix a lsoo f interest in its own r i g h t , hut they introduce the l ike l i -hood o f d i f fe ren t i a l the rma l con t rac t ion s t re s se s be ings igni l ' icani . I t ix a lso important tha i plas t ic deformation beavo ided .

E xpc r imcn la l da ta a rc p re s en ted in T ab le 4 . T hes einclude measured curvatures , corrcsf~ondi i~g misfi t s t ra insa n d , a f t e r s u b t r a c t i o n o f t i l e I h c r ma l c o n l p o n c l ~ t , t h e i n t r i n -s i c S il'C Ss e s w h i c h w o u l d b t: p r o d u c e d h y d e r l o s i iJ o n o n a nin f in i l c l y i l l ) ok sub , t ra i t . I t ., it~ou ld b l : )1d ied tha i , in ob ta in -

i n g t h e s e w i l u e s , t h e I h e r mo r l h y s i c a l p r o p e r t i e s h a v e b e e nlakcn as con s lan l . Ne g lec t o f t iny dep enden ce e l l le l lt ll e i' ,' l-l u r e i s p r o b a h l y r e l i a h l e i n v i e w o f t h e l i m i t e d i e n l p e r a l u r er a ll gC . H o w e v e r , i t is n lo l ' d i f f i c u h l o j u s t i f y t he a s s u n l p -l i o n t h a i a l l th e D I , ( " f i l m s h a d a Yo L i i l g 'S i n o d u l u s e q u a ltO th a i r e p o r t e d b y B l e c h a n d W o o d [ 2 2 1 . Th e r e i s a s e v e r eshor lage o f ex l~e r imen la l da ta in th i~ a rea . bu l i l seemsl ike ly tha t the va lue is sens i t i ve to the sp ~ O l l len t andh e n c e to th e g r o w t h c o n d i t i o n s . I n lh c t , h e d e d u c e d s tr es slevel i s no t ve r b ' sens i t i ve Io E,' ( and ix indep cnd en l o f I:'~ iw h e n l h e S t o n e y e q u a t io n i s e m p l o y e d , ) H o w e v e r , t h es t r a i n e n e i ' g y r e l e a s e r a t e . a n d h e n c e t h e l i k e l i h o o d o fdo i~ond ing , i s sens i t i ve to ih is p :u 'am ete r ( see Par l I I ) .

T l l c q u o t e d o r, v a l u e s s h o u l d h e s u i t a b l e f o r c o m p a r i -s o n w i t h d a t a f r o m o t h e r w o r k i n w h i c h t h e r ma l s t r e s s e swere noe l )g i l l i e (g luss o r S i s i lbs l ra les ) and the subs t l 'a lesc l o s e t o b e i n g i n t ' i n i te l y t h i c k , h C a l l h e ~ e e n t h a i t h ev a l l l c s o b t a i n e d i n t h e p r e s e n t w o r k r i l n ~ e Lip tO a b o t i l 2G P a ( c o m p r e s s i v e ) . T h i s i s i n b r o a d a g r c e m e n l w i t h p r e y ) -o t i s w o r k , a l t h o u g h t he v e r y h i g h v a l u e s ( > 3 G Pa ) o l~ -ra ined in son ic s tud ies have l lO l been reco rded . The t rendso b s e r v e d a r e c o n s i d e r e d i n d e t a i l b e l o w ( Se c t i o n 4 . 3 ) .

4.2. 77u >rm al slre vse.~

A l t h o u g h t h e p o s t - d e p o s i t i o n d r o p i n l e n l p e r a l u r e i sr e l a t i v e l y s n l a l l f o r mo s t D L C c o a t i n g s , d i f f e r e n t i a l t h e r -m a l c 'on l rac l io i l S i lCS.~s ca l l he sJgn i f Jean l , pa r l i cu la r lyw i lh m e ta l l i c ~ubs l i'a tes . Fo r l l~e p l 'esen l w ork , th is C ~ l ll beseen h ) ' COl l lp ; . i r J i l~ d ie ra l l ies o f the lh0 r ina l n l i s f i l s t ra inin Table 4, d is ta ined ushiL.z

I t , ~ ; l l I - - -- , - ~ 7 ( ( t ' , - - { l ' l l l / . ) 1 4 )w h e r e A7 " i s t h e tC l l lpe l ' ; . l l t l r change , w i th the co r r .~ l~ond-in 7 ne t m i~ t ' i i s li 'ah is ob ta in ed f rom C l l rVa l i t re n leasure -men ls . I l l genera l , sub l rac l ion o f the ihc r l l l a l n l i s l ' i i s l i 'a i l li m i k e s a r e l a t i v e l y s m a l l h u l s i g n i f i c a n t d i f f e r e n c e t o t h ed e d u c e d v a l u e f ( i r t h e i n t r i n s i c s t r e s s . Th i s w o u l d i l o l ,ho we ver , bc the case fo r suhs t t'a les o f g lass t l l " s i l i con ,w h i c h h a v e e x p a n s i v i l y v a lu e s n l u c h c l o s e r to t h a i o f I ) I , Cand IlaVe co r les po nd i l ig ly S l l ia l ie r mis l ' i i S t la i llS .

4.3. hm in,~ic ,~tru,~ se,~The in t r ins ic s t ress ra l l ies reco rded in Tab le 4 ~ l l 'C

p lo t ted in F i~ . I I a .~ a fun c t ion o f (a ) ncea t ive h ia .~ vo l la geand (h ) n le lhane l )ressu i12 . Th e t rends o hserve d in th isf ig t i r e ) . i r e read i l y ep la ine t l . In i t ia l l y , the s ire .~s rap id lybeco l l leS s l ron ~ ly con l l~ ress ive as V l> ri ses . Th i .~ i s II~eresu l t o f p ro nou l l ced i i t l r J lan la l ion i ) l " I~o lnbar tl il l~Z ca rbonio i l s , once they have e l lO t . lgh energy Io pene t ra te the s l rL ic -lu re . l :L I l lhe r i llC l'ea .~os in bO l l lha rdn lcn l energ ies lead toin te ns ive loca l he al in g ( ih ern ia l sp ik e) , a l l i ilc l 'e l . is 111 Ihc.~t lb .Mral Ic l l lpe ra lu l 'e and C Ol l .~t lt len l rcdt l~:l iOl l in theCo l l lpro~ sjve St l 'e~s as the st r t l l tn ' t l i ld l2rgoes Ih l ' lna l re-


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10/12

2 1 6 X.L . t ' e ,g , 7 ~ t t ( ' h m ' / Th in S a l id I . 'ih n .s . 1 2 1 99 ,~ ) 2 0 7 - 2 h~ ' 2 5 . . . . . . . : . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

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N e g a t i v e b ia s v o h a g c , V ( k V )- 1 . 2 . . . . . . . . . . . r . . . . . . . . . . . . r - - - - ~ - - ~ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . , . . . .

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F i g . I I , l n l r i n s i c s l re , ,. , , l e v e l , , a , , a f u t l C l i o n o r ( a ) n e g a | i v c s c l l ' - b i a ~ , ; . t l 1 1 1P: I I l l ~ ? l h a . l l ~ 2 pr t " ,. , q ll ' t_ ' . i Ul d ( h) l l l t ' t h i t l l t . ' p r c , , , , u r c , a t 51t I 11~ I l l l l l 2 p t ~ , 0 .t . 'rd c n s i l , , .

laxat ion. The data in F ig. l ib show that the s t ress levelprogress ively reduces as the methane pressure in increased.lncrcas ing this prcssure leads to a sharp decrease in the[lte; .in free path of ions bo mb arding the specime n. T histends to inhibi t implanta t ion by i ' educing the energy ofions reach ing the s pec imen and hence tO reduce the s t resslevels . These resul ts arc s imilar to those reported by Zou e lal. [14] (sec also Table 5).

Davis [12] has developed a s imple model to describe thevaria t ion of com press iv e s t ress in bom bard ed t tl in f i lms ,

l ' ; t h l e 5T h c r m o p h . ~ s i c a l p r ~ p c r l ~ d a ta I__.431 t p, c d m s l r c s s ~ m d c u r ~ : d u r c a l c u -l u l i o , st ' r ~ p c r l ? I ) 1 . ( " ( ' l ' - T iT h e r m a l c x p a n , , i ~ i l ~ . ~ ( . .: I [) " K I 2 . 3 ~ . 5Y O t l t l ~ ' s m o d | l h l . ' , . / : ( ( ; P a ) t 3 t .l .2 1 (1 6I M i s s o n ' s r a t i o 0 , 2 0 , 3 6

rhc Y o t l n ~ ' , , I l l o th l h l , , 4~1 D I . ( " u , a s o b l a J l W d f r o t l l B i t c h a m l W < u + d ' , ,x a l u c [2 2 ] I '< ~ r t h e l q a x i a l Y o t l n f , , i l l l + d u h l s t ~ l 1 7 4 ( il > a . b x t : , ,~ t t l l li l l ~ aI h f i , , , , o n r a l i ~ o f f t . 2 .

- 2 . ~ " . . . . . .. . . . ' . . . . . . . . . . ~- ~ " ~ . . . . . . . . . . . . ' " ~ ' . . . . . . . ' . . . . * . .. .. .. . ] : " E x p e r i n l e n t a t d,,ta I .

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0 ; . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .s o . . I . ~ .Io n ener g y , E = 0 .5 e Vt, ( eV )

F i g . 1 2 . ( ' o l n p a r i s o n b e l w c e n I h e in l r i n s i c , ,t re s s l e v e l s r n e ; t s u r e d e x p e r i -i l l c n l a l l y , f o r fi l m s d c l m s i t c d a l i 1 1 P a i " q ' c S s t l r e w i l h v u r i o u s n e ~ 2 " , l i v c h i a ., ,p r e s s u r e s , a n d f i le p r c d k l c d c u r v e o b t a i n e d w , i n g f il e I ) a v i s m o d e l i n l h f o r m i f f F . t 1 , ( 1 5 1 . T h e s t re s . ,, l e v e l i s p l o l l e d a g a i n . s l i o ~ l e n e r g y , l a k e n : l' .h a v i n g .'l v a l u e o f 0 . 5 c V , . T h e ' a h , c s c n p h L v c d f o r t h e p a r a m c l c r s i n E t t.( 1 5 ) w e r e : ( ' ~ . . . . 2 ( i P a c V l _' R / . I = 1 . I - ~ ;' - 1 . 7 5 e V a n d I ' : = 1 9 . 8t , V .

based on the , :onlpet ing effcls of implanta l iorl and re lax-;.xtic,n. q he fo rm of his cqtlati,on use d h ere is

C . ( E - I - , ) ~~ r = ( 1 5 )R ( t:" )~ '

- - + 0 . 0 1 6

which in the same as Ih ;I t proposed original ly , except that ac r i t i ca l t luvs ho ld ene rgy , E , has been introduced to ac-c o t i n t f o r the need to implant into the DLC s tructure inorder to generate any compress ive s t ress . In this equut ion,('1 in a fitting coe ffici ent , R is the grow th rate, , / is thebom bard ing ion f lux. I ; . in t ile : tc l ivat ion energy forrelaxation and E in the incident ion energy. Exl~erimentaldala for a gas pressure of I0 Pa are presented in F ig. 12.together with a bes t f i t p lot of Eq. (15). This plot corre-s ponds to the fo l lowing va lues : C , = -2 GP a eV t /2 ,E = 0 . 5 e V b, R / J = I , E = 1 9 . 8 e V a nd / ' . = 1 . 7 5 e V .These values are plaus ible , s ince the depos i t ion ra te andbom bard ing s pec ie s f lux t end to ve ry s imi la r ( R / . I ~- I int he RF p la s ma p roces s , the th re s ho ld ene rgy fo r ca rbon ionpenetra t ion into DLC has been reported [44] as about 20eV and t i le average ion e t lergy has been reported [8] to bearound 0.4 eV, . I t can be seen that excel lent agreement inobs e rved be tween the p red ic t ions o f th i s mode l and themeasured s t ress levels . S i lni lar levels o l agreement a reobserved for dat : , ebla ined a t other gas pressures . I t I l l ; . l ybe concluded dial the fll; . l in I ;.ICIOI S olllrollhlg tile stresslev e l s i n D I .C hav e been iden t i f i ed and the i r e f fec t s hav ebeen successful ly quant i f ied, a l leas t to a f i rs t appmxima-lion.

5 . C o n c l u s i o n sTile fo llo w ing co ncll.zSiolr,, can he d,'~wn I'r,,~ln this

w o r k .


11/12

X, L, Pc,J , ' , 7 W . C/vm ' / Th /n S o l i d b V h+ ts . 1 2 f 1 9 9 8 2 0 7 - 2 1 8 2 t 7

1) DLC f i l m s wi t h a h i gh pr opor ti on o f s p ~ bondi nghave be e n pr e pare d us i ng t he RF g l ow d i s c har ge m e t hod .wi th methane as the precursor gas .

2) The se l f -bias vol tage i s proport ional to the squareroot e l the imp osed p ow cr dens i ty , bt , t i s only very we aklyde pe nde nt o n g a s pressure , a t l eas l in the r a n g e o f i - 4 0Pa.

3 ) The ave r age e ne r gy o f i nd i v i dua l bom bar d i ng i ons i sappr o x i m ai e l y pr opor t iona l t o t he s e l f - b i a s w ) l t age d i v i de dby the square root of the gas pressure .

4 ) O n anne a l i ng above abot, t 400C , hydr oge n i s r e -leased from the f i lm and the p , 'cdominantty sp j carbonnetw ork transforms to an sp -~ carbon nclw ork. T he inc i -den ce of graph i t ic rnicrocrystal l i tes in the DLC f i lmsi nc r e as e s wi t h anne a l i ng l e m pe r a t ur c or wi th bom bar d i ngi on e ne r gy f l ux dur i ng de pos i t i on .

5 ) The i n l r i ns i c s t r e s s a s s oc i a t e d wi t h f i l m de pos i t i onv a r ie s f r om a b o u t - 0 , 3 G P a to - 2 . 0 G P a . d e p e n d i n g o nthe growth condi t ions . The intr ins ic s tress increases ini -l ia l ly wi th average ion bombardnaent energy, as implanta-t i on be c om e s pr onounc e d , and l i ~ en de c r e as e s a s a r e s uh o fl o c a l h e a l i n g a n d t J~ te l l ll ai r e l a x a l i o n o f t h e S t l U e t u re . E x c e l -l e n t agr e e m e nt has be e n obt a i ne d bc Lw e e n c xpc r i m e nt : ds lress data and pre dict ions fron~ the mod el of D avis .

A c k n o w l e d g e m e n t sW e a r e g r a t e t i l l t o G e o r g e s A d o m o p o u l o s a n d Dr. Kai

G i l ke s a t Uni ve r s i t y o f Eas l Ange l i a . Nor wi c h f or c ons i d -erable ass i s tance wi th the R a n l a n ana l ys i s . O ne o f t heau thor s ( X L P ) w o u l d l i k e t o t h a n k C a m b r i d g e O v e r s e a sTr us t ( CO T) and O RS f or f inar ic ,: ,l suppor t .

,.

eferences .[ i ] S . A i s e n b e i ' g , R . ( 'h a h o t . h m - l ~ u 'a l ll d c p u s f l i t u t o f t h i n f i l m s u f

d i a l n o n d l i k e c v r h o n , J . A p p l . P h y s . 4 2 ( I t ) V l ) 2 0 5 3 - 2 0 5 ~ .[ 2 ] I ) . S . W h i t m e l ] . R . W i i l i a m . , ,o n . T h e d e p o . , , i li o l l o f h a r d s u r fa c e l a } e r s

ILv h y d r t~carb tm c r a c k i n g in a g h + v , di. , ,chm'ge. rh i l i Solid Film. ' , 3 5( l q 7 f i ) 2 5 5 - 2 6 1 .

[ 3 ] I . . l l o l l a m l . S . M . ( ) .i lt ~ , I X ' l~ u s i l i o n o f h a r d a n d i n , , u l a l in ~ c a r l~ o n a -ccotus I ' ihns on a n RF t;.ll '~et ill a b Ula l t e I ' , lanl t ta. Th in S ,+IM I : i l lu s 3 S

1 9 7 b ) 1 . 1 7 - 1 . 1 0 ,[ 4 ] . I , ( ', A , ~ u u .~ , P , K o i d l . S , I ) o l n i t / , ( ' i , r h o n T h i n l : i h t t s , i n : J . M o r t . t ' .

J a l l . ' , c i l ( l ' d s . ) . i ; l a . ' , m a l ) c p o s i t e d T h i n F i l m s . C R ( " P r e , , s . l h ~ c , ,R a l o n , l ' i ~ v l in a , 1 9 8 ( ~ . p p . g 9 - - 1 2 7 .

[ 5 ] Y . l. i f. , ,h i l z , l l ) d i ' o g e n - l r c e a m u r p h o u ' , c a rl ~ o n f i l m s : ( ' o r r e l a l i o nI~e lX V ec 'i ; l ~ l ' oV l l l ~ , ' ond i ti on l s an d p ro l~er l i .~ , I ) i i l d . R e k i t . M ate r . 5( I q q 6 ) 3 8 8 - - I l i ( I ,

i < i v . ( ' a l h e r h i e , I h 'c l ~ a l 'a l h v l " [ 'e c h n i q u e .~ I t u l ) k i n i o l i d - l , i k c ( ' a r lx + n , h i :R . E . (: l : l u s i n g , I , . I , . l h l i h l n , , I . ( ', A l l, U S + P . K o i d t ( I k l s . ) . T h e N A T ( )A d x . i l l l c e t l , N l u d ), h i M i l t l i e l l i t I ) i a l l l O l i d a n d I ' i i a l i l o n t l - I , i k e I , i l n l ~ a l i d( ' i ll i l il l g S , P l e n u n l , N e w Y o r k , l I ) 9 I , p p . 1 0 3 - 2 2 7 .

I7 . , \. A . V o e v o d i l l , M . S . I ) o n l c ) , P l e p l i r a l i o n ~ 1 a l ii O r lq t O u x d i a p . lo n d -l i k e c a r b o n b ) p h i ~ c d l a ~ c ' r d e p t t s i l i o n : A c i 'i l i c a l i t i e v , , , N I II 'I .( ' t l a l i i l ~ n T e c h n t t l . 1 42 I q 0 { l ) l l i t ) - 2 1 3 ,

i . i i ' . K o i d i , ( ' . W i l d , R . l, o ch i. + I t . l . S ; ih , A i i l o r p h o i u . . l i ) d r o E e l i a l e dC a l l~ O l i f i l n i s a l t d r e l a l e d l l l a l e r i a l ~ : P l a .~ i ll li i l c p o n i i i o u i l l id i i h u

p e O p c r li .' ,, i n : R . F + , ( ' h m . ' , i n g , I . . L . H o r l o n , J . C . A n g u n , P . K u i d l( l . d ~ . l ) , D i a m u n d a n d D i a n u m d - l i k e F i h l ts a n d C o a t if l g s . P h ,, u, m +N e ~ Y o r k , 1 0 9 1 .

[ 9 ] J . A . ( ; r c e r . M , D . T ; , h a t . I + = ,r ~ c- a r = , p l u s c d l a s e r d c p o . , , it i o n : T c h -n i q u e n a n d a p p l ic ; , li o n . ,, . J. V a c . S c i . T e c h , l o l . A 1 3 ( 1 9 q 5 ) 1 1 7 5 -1 1 8 1 .

[ i i i ] J . J . ( i , ,] o m o , D , I . . P a p p a ~ ,. J . B r u l e y , L P . D o y l e , K . I , . l ) a c n g e r .V a p o u r d e p o s i t i o n p r (w e s ~ ,e , , f o r v m o r l l h o u s c a r b o n i ' i] n ; s w i t h . ~ p~t 'i 'a c t k , :s a p p r o a c h i q g d i a m o n d . J . A p p l . P h y s . 7 0 ( I 0 0 1 1 1 7 0 6 - 1 7 1 I .

[ I I ] D . N i r , I n l r i n n i c n tr ~ ,. ,, i n d i a , n o n d - l i k e c a r b o n + f i l m s a n d i t s d e p e n -d e n c e o n d e p i ~ s i lk m p a r a n le l e r, ,, r h i n S o l i d F i l m s 1 4 6 ( 1 0 9 7 ) 2 7 - 4 3 .

[ I 2 1 C . . \ . l ) a x i s , A , , i m p l e l u o d u ' l f o r l h e l o r l n a l i o n o f c o l n p re . ~ ,, ,i v c . ,, Ir e., ,. ,,i n l h i n l - t im l ~ y i o n b o m b a r d n ~ e l i l . T h i n S o l i d F i l, n ., , 2 2 6 ( 1 9 9 3 )3 O - 3 4 .

[ 1 3 ] J . Z e h : L l + o w - ., ,I r cs s d i a m u n d l i k e c a r b o n - f i r m s , J . V ~ , . S e t . T e c h , u , l .A l 1 9 1 4 3 ) 3 1 ) 5 - 3 1 7 .

[ 1 4 ] J . W . Z o u . K . S c h m i d t , K . R e i c h e h . B . l ) i. ~ c h l e r , T h e p r o p e r t i e s o fa - ( ' : H t ' il m s d e p o s i l e d l ~ y l~ h l, s ll la d c u ' o n l p o ~ i t i o n o f ( - '2 H , , J . A p p l .P h y s . 6 7 ( 1 9 t J ( I ) 4 8 7 - 4 0 4 .

[ l 5 ] I - . E n ke , .~ I ) l l" l e t ie% % res u l t s o r l t l t e I ' ah r i ca l i on I . 'l l ; . l a d t h e m e c h a n i c a l .e l e c t ri c a l a n d o p t i c a l p r o p e r l i e s o f l - c a r h o n l a y e r s . T h i n S t d i d F i l m s81 1 ( 1 9 8 1 ) 2 2 7 - 2 3 4 .

[ l h ] I ] . K . ( i u p l a . B . B h u s h a n . M i c , o n t c c h a t f i c a l p r o p e r t i e s o f a m o r p h o t , sc ~ , rb o n c u a l i n ~ s I Lv d i l l ~ :r e u t d e p o s i t e d l e c h l fi q u , ,, . T h i n S o l i d F i hn . ,,2 7 0 { 1 9 0 5 ) 3 9 t - 3 t ) 8 ,

[ i 7 ] I I . Y a m a d a . ( ) . T s t , j i , P . W o o d . S t re s s , r e d t , c t i o n I b r h a r d a m o r p h o t , .ni i ) d r o g e n a t c d c a r b o n l h i n f i ln l ., , d e p t ~ , i l e d b , , l h e x e I i- b i a x m e l h u d ." r h i , i S o l i d l . il m , ,, 2 7 0 ( 1 0 9 5 ) 2 2 0 - 2 2 5 .

l l ~ [ ( i r A . J . A m ~ I r a tl ll 1 ~ a + S . R . S i l x a . I n ll tu . .1 | c e o f d c b i a s ' v O l la g C t il t t h er e f r a c t i v e i n d e x a n d . ,, Ir e s. ', o f c a r b o n - d i : t m o n d f i lm , , d e p o s i t e d f r o m a( ' I I . ~ / A t R F p la ., ,, ua . J . A p p l . P h y. ', . 7 0 ( 1 9 0 1 ) 5 3 7 4 - 5 3 7 9 .

[ l i l t D . Y i n . N . X u . Z . l . i u . Y . l I v n , X . Z h e n g , l :" ll 'u 'c t o f a p p l i e d b i a so l l a ~ e o n t h e p r o p e r l ic , , o f a - ( ' : H f i l m s . S u r L ( ' o a l i n g s T e c h n o l . 7 8

(1 9 0 0 ) 3 1 --3 ~+.[ 2 0 ] P , C u t i d i ' c . Y . ( ' a l h c r m c . g l r t L c tt l r a n d p h y n i c a l p r o r ~ r l i e n o f

p l M . I m ~ . | - ~ l l O p , ll a ,n orp h


12/12

218 X.L. Peng. 1: W. Clym / T/fin So lM i. ihns ,12 ( 1996'1 207 - 2 h~[31] A. (;rill. B.S. Mcyer., ,on. Development =,t,d s i t | I r is of d iamondlikc

carb on, in: K,E. Spear, J .P. Dism uke s (Ed s.k Sy llthelic Di;.ltnolltl:Em ergin g C VD Scie nce :ro d Techm~logy, % ilcy. New York, Itit~.-l.p p . t ) l - 1 4 1 .

[32] V. Palshin. E.I. Meletis . S. Ves. S. Logolhetidis. Charactcrizalion ofinn-heam-dcpt~sited diam ond -like carb on I ' ilrtls , Thin So lid Films27(I ( 1 9 9 5 ) 1 6 5 - 1 7 2 .

[331 M.A. Capano, N.T, Mci)evi t t . R.K. S ingh, i Q i a n . Clmractcri~atiemo f amt~rptlOUS carb on thin fihns, J. Vac. Sci, Tcc hllol, A 14 (It)t;6)4 3 1 - 4 3 5 .

134] H , Tsai . D , B , Bogy, Cri t ic i tl revie w--c harac ter iza t ion of d iamortd-l ike carbon I i tm~ and their appl ical ion as overcoa ts nn |h in-F i l lnmedia for magnet ic recording, J . Vac. Sci . Technot , A5 (1987)3 2 8 7 - 3 3 1 2 .

[35] J . UIIman, H. M artin, G.K. Wo lf, hm-a,, ,si,, , ted mo difiea lion of thecondellS;.itiOlt of therm al ca rbo n 11|o111~.. ~tlrf. Co;.|lings T ech nol . 59( I ,~ t ;3) 2 5 5 - 2 6 0 .

[36] Y. Bounouh. M, L Theye , A. Dehbi-Alant .i , A . Mattews . J .P . S lo-quer t , Inf luenc e of anneat i~lg on hydrog en bo nding : ro d the mi-cros tructure o f d i a m o n d f i k e and pntymerl ike hydmgenaled :mlnr-p h o u s ca r b o n f i lms . P h y s . R ev . B 5 1 ( I t ) t ) 5 ) 9 5 9 7 - 9 6 0 5 .

[371 A. ( | rill, V. Pttlel. B.S, Me.vernon. Optic;d and trihological properties

~d he~ . - t r ea ted d ia mo nd- l i k e ca rbo n . J , M~ , le r . Re .~ , 5 ( I~ )L ) () ) 25 31 -2537.

( 381 M. Murakaw, : .u Su r face coaUng , , , o f supe r ha rd rna te ri ; ,Is fo r too lap rd ic~ l t itm . , ,, Ma te r . Sc i , Fo rum 246 ( I t )~7 ) 1 -28 .

[ 3 9 ] E . M o u n i e r , F . B e n i n , M . A d : u n i k , Y . I h u t e a u , P , P ,. B a r n a , E f fe c t o fthe suhs l r, :L le te rnpe l '~ | lu re on Ihe phy,~ ica l c lmracter i ,~ t ics o f an lo fp h o u s c a r h t m l i l m s d e p o s i t e d i ~y D C m:ffznelmn M~t. ler ing, I) i~ l-mond Related Mater . 5 (]~;t)(~) 15()L)_1515,I4 ( ) ] M.J . Pa te r ., ,on , I :mer~ :y depc nden l ~ l ruc tu re hange~ in ion bemud e p o s i te d a - C : H , D i a m o n d R e l a te d M a l e r . 5 ( 1 9 9 6 ) 1 4 0 7 - 1 4 t 3 .

[41 ] A . Brenner . S . Sendem| ' f , Ca lcu la t ion o f s l r ess in e tec l rodepn .~ i ts1 r a m t h e c u r v a l u r e o f a p l a t e d s t r i p . J . Re s . Na t l . B u r e a u S t a n d a r d s4 2 ( I t ; 4 9 ) 1 0 5 - 1 2 3 .

[ 4 2 ] T. W, C ly ,e , Re sidu al .~ lren.~es in . '~url ':LCe u 'oal ing~ a nd the ir e f l 'ect.~o n i n l er f a c ia l d e h o n d in g , K e y E ng . M a l , t t 6 ( 7 ) ( l I J q 6 ) 3 0 7 - 3 3 0 .

[ 4 3 ] S I n i t h e l l , S m i d l c l l ' s M e t a l ~ Re t 'e r en c I ] ~ o k . 7 t h e d n . . B t l l l e r wo r l h ,[ 4 4 ] P . J . t : a l h m , V . S . V c e r a s a m y . C . A . Da v i s . J . Ro h e r l s o n . G . A . J .

A l l l : | ri | l u i| g a . W . I . M i h l e , P r o p er li e. ~ o f f i l t e r e d - io n - b e a l u - d e p o s i t e dd i a m o n d l i k e c i i r h o n a s a f u n c t i o n o f i o n e n e r g y , P h y s. Re v . I ] 4 ~1993) 4 7 7 7 - 4 7 8 2 ,

mechanical stability of dlc films on metallic substrates part 1

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