mas.961 special topics: how to make something that makes (almost) anything nanofabrication j....
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MAS.961 Special Topics:How To Make Something That Makes
(almost) Anything
NanoFabrication
J. Jacobson – MIT – 02/17/[email protected]
Outline
• Optical Fabrication Technologies
• Probe/MEMS Fabrication Technologies
• Imprint Fabrication Technologies
• Particle Beam Fabrication Technologies
Immersion Lithography
22-nm immersion interference lithographyT. M. Bloomstein, M. F. Marchant, S. Deneault, D. E. Hardy, and M. Rothschild10 July 2006 / Vol. 14, No. 14 / OPTICS EXPRESS 6434Received 11 May 2006; revised 23 June 2006; accepted 23 June 2006
Immersion Lithography
(Air)
(Liq)
Stereolithography
Speed Resolution – Two Photon
Laser CVD
http://www.me.gatech.edu/Lackey/nsfgranteesjan02.pdf
Mechanism: Pyrolitic (Heating in absense of O2) Chemical Vapor Deposition (500 to 2000°C local temperature).Rates: Fiber growth rates > 2 mm/s,metals and ceramics.Linear growth rate of 200 mm/s Carbonvolumetric deposition rate of 50 mm3/s carbon.Materials: Cu, Au, Si, Al, W, C, WC, B, TiC, TiN, SiC, and Si3N4.
www.optomec.com
LENS (Laser Engineered Net Shaping)
Outline
• Optical Fabrication Technologies
• Probe/MEMS Fabrication Technologies
• Imprint Fabrication Technologies
• Particle Beam Fabrication Technologies
Dip-Pen Nanolithography
Mirkin et. al.
Massively Parallel Dip-Pen Nanolithography with 55 000-Pen Two-Dimensional Arrays
Chad A. Mirkin, et. al. 1 *Angewandte Chemie Volume 45, Issue 43, Pages 7220-7223
Massively Parallel Dip-Pen Nanolithography with 55 000-Pen Two-Dimensional Arrays
http://mass.micro.uiuc.edu/research/current/nanolithography/2006-focus-intro/slide12.html
http://www.microfab.com/research_areas/electronics/electronics.htm#anchor250555
Solder Jet
25 micron resolution
Outline
• Optical Fabrication Technologies
• Probe/MEMS Fabrication Technologies
• Imprint Fabrication Technologies
• Particle Beam Fabrication Technologies
…Can we use this map as a guide towards future
directions in fabrication?
Semi-conductor Chip
High Speed Offset Web TFT DVD-6
Liquid Embossing
Design Rule Smallest Dimension (microns) 0.1 10 2 0.25 0.2Number of Types of Elements 8 6 8 2 4Area of SOA Artifact (Sq. Microns) 7.E+10 2.E+12 1.E+12 1.E+10 8.E+09Volume of SOA Artifact (Cubic Microns) 7.E+09 2.E+12 1.E+11 7.E+12 8.E+08Number of Elements in SOA Artifact 7.E+12 2.E+10 3.E+11 2.E+11 2.E+11Volume Per Element(Cubic Microns) 1.E-03 1.E+02 4.E-01 4.E+01 4.E-03Fabrication Time(seconds) 9.E+04 1.E-01 7.E+02 3 6.E+01Time Per Element (Seconds) 1.E-08 7.E-12 2.E-09 2.E-11 3.E-10Fabrication Cost for SOA Artifact($) 1.E+02 1.E-01 2.E+03 3.E-02 2.E-01Cost Per Element 2.E-11 6.E-12 6.E-09 2.E-13 1.E-12Complexity 2.E+13 4.E+10 6.E+11 1.E+11 3.E+11Complexity Per Unit Volume of SOA(um 3̂) 2.E+03 2.E-02 5.E+00 2.E-02 3.E+02Complexity Per Unit Time 2.E+08 3.E+11 9.E+08 4.E+10 5.E+09Yielded Res. Elements Per $ 1.E+11 3.E+11 3.E+08 4.E+12 1.E+12Cost Per Area 2.E-09 6.E-14 2.E-09 3.E-12 3.E-11
Cost Per Resolution ElementThe Case for Printed Electronics
http://www.molecularimprints.com/Technology/technology2.html
Step & Flash Lithography
Emerging Lithographic Technologies X, edited by Michael J. Lercel,Proc. of SPIE Vol. 6151, 61510J, (2006) · 0277-786X/06/$15 · doi: 10.1117/12.655604Proc. of SPIE Vol. 6151 61510J-1
MultiLayer Step and Flash Lithography
Offset Liquid Embossing (OLE)
Bulthaup et. Al. APL 79(10): 1525 (2001)
Nanoparticle Inks
2 m 200 nm
Nanomoulding with Amorphous MetalsGolden Kumar, Hong X. Tang & Jan Schroers
Vol 457| 12 February 2009| doi:10.1038/nature07718
Outline
• Optical Fabrication Technologies
• Probe/MEMS Fabrication Technologies
• Imprint Fabrication Technologies
• Particle Beam Fabrication Technologies
Focused Ion Beam - Milling
Toshiaki Fujii, and Takashi Kaitohttp://www.siint.com/en/technology/ion_beam_applications_e.html
NanoLatheFIB
FabricatedStamps
FIB Fabricated MOSFET
FIB CVD Pt(gate electrode)
0 1 2 3 4 5
0.0
1.0x10-7
2.0x10-7
3.0x10-7
4.0x10-7
5.0x10-7
6.0x10-7
Id
Vd
-2Vg 0 Vg 2 Vg
Au contact pad
nanowirePt
Pt
Pt
SiO2
Focused Ion Beam - Writing
FIB Pt CVD
http://www.che.vt.edu/Wilkes/electrospinning/electrspinning.html
Electrospinning
https://www.uni-marburg.de/fb15/ag-wendorff/research/Electrospinning/fiber-hair
http://en.wikipedia.org/wiki/Electrospinning
1D and 2D Composites
Notes
http://www.2objet.com
Objet: Ink Jet + UV Cure
16 micron layers