lext ols4100 3d measuring laser microscope
DESCRIPTION
LEXT OLS4100 3D Measuring Laser Microscope details: http://bit.ly/16J4CMF The LEXT OLS4100 is a Laser Scanning Microscope to perform non-contact 3D observations and measurements of surface features at 10 nanometer resolutions. It also features a fast image acquisition and a high-resolution image over a wider area. Contact us: http://bit.ly/1rDmq94 Sign up for our Newsletter: http://bit.ly/1j5FOTyTRANSCRIPT
LEXT OLS-4100 Laser Scanning Microscope
Olympus SEG-Industrial
LEXT OLS-4100 Laser Scanning Microscope
LEXT OLS-4100
• Superior Resolution and Accurate
Measurement
• High Measurement Throughput
• Sample Flexibility
• Ease of Use
• How it Works
• Superior Resolution and Accurate
Measurements
• Magnification Range 108x - 17,280x
• Maximum FOV 2.5mm
• Lateral Resolution, 120nm
• Z resolution, 10nm
Superior Resolution and Accurate Measurement
The OLS4100 is the first Laser Confocal Microscope that guarantees
precision and repeatability.
Accuracy Accuracy and repeatability
Accuracy
Degree to which a measured value deviates from the true value
Degree to which repeated measurements under unchanged conditions
show the same resultsRepeatability
Repeatability
Arrows are in the same position, but miss
the center.
Arrows are in the same distance from the
center, but placed separately.Arrow are gathered in the center.
Superior Resolution and Accurate Measurement
Precision
Resolution
Horizontal: XY Height: Z
0.12 m 0.01 m
Repeatability
Horizontal: XY Height: Z
20x : 3σn-1=0.1 m
50x : 3σn-1=0.04 m
100x : 3σn-1=0.02 m
20x : σn-1=0.040 m
50x : σn-1=0.012 m
100x : σn-1=0.012 m
Accuracy
Horizontal: XY Height: Z
Within 2% of a
measured value
0.2 + L/100 m or less
L= measuring length in
m
0.12μm line and space
Superior Resolution and Accurate Measurement
The dedicated 405 nm optical system removes aberration.
NAdesign
wavelength
LEXT-dedicated 20x objective lens
MPlanApoN20xLEXT0.6 405nm
LEXT-dedicated 50x objective lens
MPlanApoN50xLEXT0.95 405nm
LEXT-dedicated 100x objective lens
MPlanApoN100xLEXT0.95 405nm
Superior Resolution and Accurate Measurement
Volume Line Roughness
Particle Analysis Edge Detection
Height Distance
Plane Roughness
Film Thickness
Area
Superior Resolution and Accurate Measurement
Superior Resolution and Accurate Measurement
Laser Intensity Image Color Image 3D Intensity Image
3D Color Image 3D Height Image 3D Wireframe Image
• Roughness Analysis
Superior Resolution and Accurate Measurement
Contact roughness gauge
High frequency roughness can be measured that would be lost by using a Stylus
R:2um
R:0.4um
0
0.2
0.4
-0.2
-0.4
0.2um
0
0.2
0.4
-0.2
-0.4 0.05um
Superior Resolution and Accurate Measurement
Take a roughness measurement on a soft surfaces without damaging the surface
Scanning a soft sample with
contact roughness gauges can
damage the surface.
Superior Resolution and Accurate Measurement
The ability to take a Surface Roughness Measurement on a small area
Superior Resolution and Accurate Measurement
• High Measurement Throughput
Band Scanning Function
Scan a reduced area of the FOV for increased speed
Ultra-fast Scanning Function
• Maximum frame rate is 32 frames per second
• Z Measurement capability is on par with FAST Mode
• Data is acquired every three lines
Fine Fast Ultra-
fast
1024x1024 4fps 8fps 16fps
1024x768 5.3fps 10.6fps 21.2fps
1024x512 8fps 16fps 32fps
1024x256 16fps 32fps -
1024x128 32fps - -
10nm100nm1um10um100um
Mounting Precision molds Photo
detecting
element
Display
Metal
material
Metal parts
Mobile
parts
Package Nanoimprint
Film
Semiconductor
Automobile
parts
Solar cell
Medical
equipment
Sample Flexibility
Dual pinholes allows the OLS4100 to overcome issues with
samples that have both reflective and non-reflective surfaces
Sample Flexibility
Confocal optical path B
Photomultiplier
(set to high sensitivity)
Confocal optical path A
Photomultiplier
(set to standard sensitivity)
Pinhole
Sample Flexibility
Sample: an Electro-deposition tool made of diamond
Surface with different reflectivity levels
Objective lens: MPlanApoN50xLEXT
Height Map of Electro-deposition tool
Objective lens: MPlanApoN50xLEXT
Sample Flexibility
Image and measure vertical walls
or slope angles up to 85 Degree
Sample Flexibility
Objective lens 50x Laser DIC Objective lens 50x DIC
Objective lens 50x No DIC
Differential
Interference
Contrast (DIC)
• Ease of Use
Ease of Use: Smart Scanning Function
Taking an image is simple even for a
new user
• Put the sample on the stage and focus
• Click Auto Scan and then Acquire
• System will do a pre-scan to confirm
top, bottom and the appropriate lighting
level
o Brightness level is determined
across the FOV
o Will automatically retry up to three
times
o Reflectance Characterization of
the sample can be selected in
advanced menu
.......................................................................................
.......................................................................................
.......
.......................................................................................
.......................................................................................
.......................................................................................
.......................................................................................
..............................................................................................................................................................................
.......
.......
.......
OLS4000 OLS4100
Conventional operation:
Brightness adjustment is performed
using several pixels from the center of
the image.
• Pre-Scanning
Current
Z-Position
Pre-scan
Z Range
Initial Search Area
Calculated
Z Range
Initial Search Area [ m] Z Range of the pre-scan [ m] Pre-scan Time [sec]
5x 1000um (100um) 1940um (1040um) 8
10x 500um (80um) 1200um (780um) 16
20x 100um (30um) 490um (420um) 13
50x 50um (10um) 185um (145um) 25
100x 50um (10um) 98um (58um) 15
Ease of Use: Smart Scanning Function
Ease of Use: Brightness Adjustment
Manual Mode
• Set Top and Bottom
• Click the Brightness Adjustment
Button
• System will do a pre-scan within
the top / bottom range you have
set to optimize the brightness
Ease of Use: Stitching Function
The OLS4100 will quickly create a wide field map at low
magnification. This map can be used to:• Track where you are on your sample at higher magnifications
• Define an area for image stitching
Ease of Use: Stitching Function
• Circle Mode
Ease of Use: Stitching Function
• Unnecessary areas can be excluded.
• Stitch up to 625 images together
• Rectangles can be specified for stitching
Rectangles can be specified Unnecessary areas can be excluded
Ease of Use: ID Login
Calling up the Wizard or settings
Restrictions on operations
Communication between users
User information is reflected in data and reports
• Wizards guides the user through the operation of the microscope.
• Allows even first time users to obtain accurate measurement results.
Ease of Use: Wizard
Ease of Use: Macro Map
• Know where you are on your sample
• Drive to other locations using the Macro Map
Ease of Use: Report Generation
• How it works
スキャナ
Uses a semiconductor laser with a short 405 nm wavelength
400nm 800nm700nm600nm500nm
対物レンズ
LED
CCD
ピンホール
LD
Light source of OLS4000
How it works: Laser Light Source for High Resolution
LD
Contains Olympus’s own scanner-on-scanner type of two-dimensional scanner
An electromagnetic MEMS scanner is set in the X direction.
Scanning with world’s highest 4096 x 4096 resolution
対物レンズ
LED
CCD
ピンホールScanner
How it works: Fast Scanning without Distortion
The revolving nosepiece moves in the Z direction along an 0.8 linear scale. Movement is dependent on depth of field of objective
How it works: Z Direction Scanning
How it works: Confocal Height Sensor
LED
CCD
スキャナ
LD
対物レンズ
A circular pinhole is used to remove out of focus data.
Only in focus light is acquired.
Circular confocal pinhole
Telan lens
Non-confocal Confocal
Photomultiplier
Pinhole
Variation in intensity is measured at each image pixel.
Multiple of points located in the proximity of the point with the highest intensity are extracted.
The curve of an ideal I-Z curve is calculated.
Based on the calculated I-Z curve, a maximum intensity value and its Z data are calculated.
These values are defined as the intensity and height values of the image pixel.
Calculated height
Calculated Reflection
intensity
CFO: Calculated Focus Operation
How it works: CFO Search
How it works: Color Imaging
LED
スキャナ
LD
対物レンズ
ピンホール
CCD
Even the toner of a laser beam printer is
clearly visible.
A CCD with two million image pixels superimposes color images to create a 3D image.