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    Lecture 7 ECE 425

    Lecture 7 -- Capacitance and Resistance in

    VLSI Structures

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    Lecture 7 ECE 425

    Outline

    Overview of next few lectures

    Determining capacitance and resistance of CMOS

    structures

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    Lecture 7 ECE 425

    Upcoming Lectures

    Three-lecture sequence on circuit speed

    Determining resistances and capacitances

    Calculating gate speed

    Logical effort -- a method for estimating the speed of

    multi-gate structures.

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    Lecture 7 ECE 425

    Delay Estimation

    Computing delay exactly requires knowing L, R, C, anddoing painful calculus

    Therefore, we make approximations that are close

    enough for design work

    Always keep in mind the inaccuracy of fabrication Typically use either capacitance-only or RC delay models

    depending on physical distance between structures

    Today, were going to focus on how to determine the

    capacitance and resistance of VLSI structures

    Next time, we talk about how to use that to estimate delay

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    Lecture 7 ECE 425

    Transistors

    Capacitance

    Care about three capacitances: source, drain, gate

    Resistance

    Approximate resistance of gate terminal as infinite

    (current only flows into gate to charge/discharge gatecap)

    Resistance from source-drain is complex function of

    Vds, Vgs and depends on what region the device

    operates in

    Often approximate as Reff, based on the time

    required to charge/discharge a unit capacitance

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    Lecture 7 ECE 425

    Transistor Capacitance

    Source, drain capacitances are between diffusion and bulk

    Gate capacitance is sum of Cgs (gate-source

    capacitance), Cgd (gate-drain capacitance), Cgb (gate-bulk

    capacitance)

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    Lecture 7 ECE 425

    Source and Drain Capacitances

    Also called Diffusion capacitance (Cd)

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    Lecture 7 ECE 425

    Source, Drain Capacitance

    Caused by the depletion region at the diffusion-substratejunction

    Also occurs if you use diffusion as a wire, can use

    same methods to calculate.

    Exact value depends on the potential across the junctionVj and the area of the depletion region

    For simplicity, we conservatively assume Vj = 0, and thus Cd= Cd0

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    Lecture 7 ECE 425

    Source, Drain Capacitance

    Under this model, two components to diffusioncapacitance

    Area: Cja * a * b

    Perimeter Cjp * (2a + 2b)

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    MOSFET Capacitances: Diffusion

    Bottom

    Side wa

    Side wall

    Source

    Channel-stop

    Subst

    W

    xj

    LS

    AMI 1.5um Model

    +CJ = 2.73 E-4 [F/ m^2] PB = 0.979 MJ = 0.54 CJ max=0.27fF/

    +CJSW = 1.42 E-10 [F/ m] PBSW = 0.99 MJSW = 0.1 CJsw max=0.142

    CJSWG 6 41E 11 [F/ ] PBSWG 0 99 MJSWG 0 1 CJ 0 06

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    Lecture 7 ECE 425

    Gate Capacitance is a Bit More Complex

    Start with idealized MOS capacitor

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    Lecture 7 ECE 425

    Ideal MOS Capacitor

    In accumulation, gate oxide acts as a parallel-platecapacitor

    In depletion, the depletion layer (non-conductive) acts as

    a dielectric, creating a second capacitor in series with the

    gate oxide

    D = depth of depletion layer

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    Lecture 7 ECE 425

    MOS Capacitor in Inversion

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    MOS Capacitor in Inversion

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    Combined Behavior

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    Back to the Transistor

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    Lecture 7 ECE 425

    Transistor

    In a transistor, the inversion layer is replentished by thesource/drain, so transistors should always follow the

    slow capacitance curve, regardless of switching speed

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    Lecture 7 ECE 425

    Regions of Operation

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    Linear Region Continued

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    Saturation

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    Summary

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    More Summary

    Gate capacitance is approximately equal to C0, the gate-oxide capacitance for most regions of operation

    Exception is when Vgs is close to Vt

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    Lecture 7 ECE 425

    Well assume that the circuit switches quickly through thisregion and approximate (conservatively)

    Simpler way to express this is

    Cox (gate capacitance per unit area) is one of the

    parameters of a fab process

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    Example

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    MOSFET Capacitances: Over Overlap capacitances are

    Cgso and Cgdo

    Values are given by unit

    width:

    WxCC

    WxCC

    doxGDO

    doxGSO

    =

    =

    xd xd

    Ld

    Polysilicon gate

    Top view

    Source

    n+

    doxGDOgdo

    doxGSOgso

    xCWCC

    xCWCC

    ==

    ==

    /

    /

    WxCC

    WxCC

    doxGDO

    doxGSO

    =

    =

    SPICE Model TSMC 0.35um

    +CGDO = 2.69E-10 CGSO = 2.69E-10 CGBO = 1E-

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    Lecture 7 ECE 425

    Part 2: Wires

    Whenever two conducting layers overlap, they create acapacitor

    Well approximate this using parallel-plate model for the

    most part

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    Typical Parameters from CMOSN Process

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    Example 1

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    Example 1

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    Example 2

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    Example 2

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    Complications

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    Resistance

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    Example

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    Sheet Resistivities

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    Non-Rectangular Regions

    General approach is to maintain a lookup table ofcommon shapes and their equivalent resistance in

    squares

    Parameterize by the ratio of important dimensions

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    Example Resistances

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    Finding Resistances of Wires

    1. Break wires up into regions that you know how to find theresistance in squares of

    2. Sum resistance in squares along appropriate paths

    3. Multiply by sheet resistance

    For wires that split, treat each portion as a segment and do

    series/parallel combinations to get total resistance

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    Example

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    Example 2

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    Wrapping Up

    Reading Section 2.6

    Section 4.5

    Next time: Gate-level delay estimation