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Laser Direct Writing of Photonic Structures in X-cut Lithium Niobate using Femtosecond Pulses S. Venugopal Rao a *, T. Shuvan Prashant, a K.L.N. Deepak, b Surya P. Tewari, a G. Manoj Kumar, a and D. Narayana Rao b a Advanced Center for Research in High Energy Materials, b School of Physics University of Hyderabad, Hyderabad 500046, India * Author for Correspondence: [email protected] OR [email protected] ABSTRACT We have fabricated straight line structures and Y-couplers in X-cut lithium niobate crystals using femtosecond laser pulses. A systematic characterization study was performed initially to determine the effects of pulse energy on feature size. The optimal parameters were determined from experiments and simulations obtained using a two dimensional split step beam propagation method. Later the waveguides and couplers were fabricated using these optimized parameters. We present our results on the physical and optical characterization of these structures. Keywords: lithium niobate, femtosecond, laser direct writing, photonic devices, beam propagation 2. INTRODUCTION Lithium Niobate (LNB) has emerged as promising material for fabricating integrated optoelectronic circuits because of its favorable physical properties such as large anisotropy, high electro-optic coefficients and large second order nonlinearity. LNB crystals are positively birefringent and, hence, the extraordinary refractive index n e for z-plane polarized light is higher than the ordinary refractive index n o along the x and y direction. We refer to the crystal as X-cut or Z-cut depending on which crystal axis is perpendicular to the top surface. Many approaches have been implemented to fabricate waveguides on LNB crystals including ion implantation, liquid phase epitaxy and laser direct writing (LDW) [1-4]. However, the LDW technique stands apart from others because of the relative ease of realization of the microstructures and possibility of 3D photonic devices and integration. Incident intensity of the focused ultrashort pulses determines the type of modification in LNB: (a) an increase in refractive index n e (type I) (b) a decrease of both n o and n e (type II) and (c) formation of micro voids [1, 2]. Thomas et al. have recently achieved a hybrid fs laser written chip in lithium niobate that comprised a rare-earth-doped laser section, a frequency doubling unit, Bragg reflectors, waveguide splitters, and an amplitude modulator [2]. However, detailed studies with different pulse durations and writing conditions are essential and enable us to identify the optimal conditions for achieving low loss (insertion, propagation etc.) photonic structures in lithium niobate [10-14]. 3. EXPERIMENTAL DETAILS The schematic and the experimental set up are illustrated in figure 1. The femtosecond oscillator amplifier system is capable of generating ultrashort pulses of ~100 fs duration at a repetition rate of 1 kHz and wavelength of 800 nm. A vertical microscope configuration is employed using a dry 40X (0.65 NA) microscopic objective (Olympus) to focus the laser beam on to the sample and 3D XYZ stages were employed to translate the sample [5]. A Brewster polarizer-half wave plate combination was used to control the intensity of the pulses. M1 to M5 are the mirrors. The crystals were X- cut and were polished and cleaned/sonicated in distilled water before laser direct writing. The modified regions of the crystal were examined using confocal and micro-Raman spectroscopy. Initially, the energy dependence of feature size was characterized. The parameters namely, the stage scan speed, the number of writes and the energy of the pulse were varied and optimized for realizing the photonic devices. Photonics 2010: Tenth International Conference on Fiber Optics and Photonics, edited by Sunil K. Khijwania, Banshi D. Gupta, Bishnu P. Pal, Anurag Sharma, Proc. of SPIE Vol. 8173, 81730G © 2011 SPIE CCC code: 0277-786X/11/$18 · doi: 10.1117/12.899559 Proc. of SPIE Vol. 8173 81730G-1 Downloaded from SPIE Digital Library on 24 Aug 2011 to 14.139.69.1. Terms of Use: http://spiedl.org/terms

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Laser Direct Writing of Photonic Structures in X-cut Lithium Niobate using Femtosecond Pulses

S. Venugopal Raoa*, T. Shuvan Prashant,a K.L.N. Deepak,b Surya P. Tewari,a G. Manoj

Kumar,a and D. Narayana Raob

a Advanced Center for Research in High Energy Materials, bSchool of Physics University of Hyderabad, Hyderabad 500046, India

* Author for Correspondence: [email protected] OR [email protected]

ABSTRACT

We have fabricated straight line structures and Y-couplers in X-cut lithium niobate crystals using femtosecond laser pulses. A systematic characterization study was performed initially to determine the effects of pulse energy on feature size. The optimal parameters were determined from experiments and simulations obtained using a two dimensional split step beam propagation method. Later the waveguides and couplers were fabricated using these optimized parameters. We present our results on the physical and optical characterization of these structures. Keywords: lithium niobate, femtosecond, laser direct writing, photonic devices, beam propagation

2. INTRODUCTION Lithium Niobate (LNB) has emerged as promising material for fabricating integrated optoelectronic circuits because of its favorable physical properties such as large anisotropy, high electro-optic coefficients and large second order nonlinearity. LNB crystals are positively birefringent and, hence, the extraordinary refractive index ne for z-plane polarized light is higher than the ordinary refractive index no along the x and y direction. We refer to the crystal as X-cut or Z-cut depending on which crystal axis is perpendicular to the top surface. Many approaches have been implemented to fabricate waveguides on LNB crystals including ion implantation, liquid phase epitaxy and laser direct writing (LDW) [1-4]. However, the LDW technique stands apart from others because of the relative ease of realization of the microstructures and possibility of 3D photonic devices and integration. Incident intensity of the focused ultrashort pulses determines the type of modification in LNB: (a) an increase in refractive index ne (type I) (b) a decrease of both no and ne (type II) and (c) formation of micro voids [1, 2]. Thomas et al. have recently achieved a hybrid fs laser written chip in lithium niobate that comprised a rare-earth-doped laser section, a frequency doubling unit, Bragg reflectors, waveguide splitters, and an amplitude modulator [2]. However, detailed studies with different pulse durations and writing conditions are essential and enable us to identify the optimal conditions for achieving low loss (insertion, propagation etc.) photonic structures in lithium niobate [10-14].

3. EXPERIMENTAL DETAILS

The schematic and the experimental set up are illustrated in figure 1. The femtosecond oscillator amplifier system is capable of generating ultrashort pulses of ~100 fs duration at a repetition rate of 1 kHz and wavelength of 800 nm. A vertical microscope configuration is employed using a dry 40X (0.65 NA) microscopic objective (Olympus) to focus the laser beam on to the sample and 3D XYZ stages were employed to translate the sample [5]. A Brewster polarizer-half wave plate combination was used to control the intensity of the pulses. M1 to M5 are the mirrors. The crystals were X-cut and were polished and cleaned/sonicated in distilled water before laser direct writing. The modified regions of the crystal were examined using confocal and micro-Raman spectroscopy. Initially, the energy dependence of feature size was characterized. The parameters namely, the stage scan speed, the number of writes and the energy of the pulse were varied and optimized for realizing the photonic devices.

Photonics 2010: Tenth International Conference on Fiber Optics and Photonics, edited by Sunil K. Khijwania,Banshi D. Gupta, Bishnu P. Pal, Anurag Sharma, Proc. of SPIE Vol. 8173, 81730G © 2011 SPIE

CCC code: 0277-786X/11/$18 · doi: 10.1117/12.899559

Proc. of SPIE Vol. 8173 81730G-1

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The band ganonlinear optintensity at thn is the refrainput energieKeldysh para

The refractivmicrons and B = 0.099916

Figure 1 A

ap of lithium ntical mechanismhe focus, m andactive index ofes ranging froameter was esti

ve index of LNA = 4.9048, B69, C =-0.0444

Fig

A schematic of th

niobate is 3.75m, is defined ad e are the reduf the material, om 300 nJ to imated to be <

NB can be desB = 0.11768, C 432 & D = -0.0

gure 2 Dependen

he experimental 4. S

eV. The Keldas μ = (ω/e)(m×uced mass andEg is the band100 μJ, we ob0.5.

scribed by the =-0.0475 & D

02195 for extra

nce of refractive

set up (left) and SIMULATIO

dysh parameter×c×n×Eg× ε0/I

d charge of the d gap of the mbserved tunnel

Sellmeier equ

D = -0.027169 faordinary refrac

index on wavele

the actual experONS

r, which proviI) where ω is thelectron, respe

material and ε0

ling ionization

uation n = (A for ordinary refctive index ne .

ength from Sellm

rimental set up (

ides informatiohe laser frequeectively, and c is the permitti

n as the domin

+ B/(λ2+C) +fractive index n [6,7]

meier equation

right).

on about the dency, I is the lais the velocity vity of free spnant process s

+ Dλ2)1/2 whereno; whereas A

dominant aser peak

of light, pace. For since the

e λ is in = 4.582,

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Figure 2 illustrates the dependence of refractive index on wavelength. The typical He-Ne wavelength (λ=0.633 μm) was chosen as the input beam wavelength for the beam propagation simulations for which the indices no = 2.287 and ne = 2.204. Figure 3 illustrates the refractive index profile of a double line structure along with the parameters and also the input beam profile assumed for propagation studies. The dimensions for the waveguides and Y couplers are optimized using the 2D Fast Fourier transform beam propagation method (FFT-BPM) [8].

Figure 3 Above curve shows the refractive index profile of a double line structure and the various parameters line width (LW),

waveguide width (WW) and RIC (∆n). Below curve depicts the input Gaussian mode used in all the simulations.

For the type I waveguides, written structures or the adjacent regions act as the waveguiding regions. However, type I structures are susceptible to thermal degradation leading to reduction of light confinement. The following parameters have been varied to simulate type I structures: line width and the refractive index change (RIC=∆n) induced in the modification.

Figure 4 Double line y-branch used for simulations with three regions: linear waveguide (z1), taper region (z2) and split waveguides

(z3) and other parameters are waveguide width (x1) and branch angle (θ).

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In case of typpristine regiochange in linconsidered bbranch, split

Typical confdifferent valuthe energy duand 1 mm/s. the speeds.

.

Figure 5aener

For a particuresults are deFor structureeffect to the also observedresult from dexperiments The micromaand integrate

pe II modificaton of the crystane width, wav

both types (I anwaveguide wid

focal images oues of energiesumped on the Typical width

a Structures writrgies and line wi

ular energy of 4epicted in the

es written with reduction of nud even though damage in the were performeachining contr

ed optical comp

tions where chal within two wveguide width nd II) of modidth and the spa

5

of the linear sts and writing smaterial. Figu

hs of 6-8 μm ar

tten with differedths b Dependen

40 µJ, the writfigure 6b. Thehigher speeds,umber of incida single beam central portion

ed indeed confrol over these ponents.

hange in refractwritten lines. T

and RIC (∆nifications. Theacing between

5. RESULT

tructures writtespeeds. We ob

ure 5b illustratere essential for

ent energies withnce of structure

ting speeds werere is monoton, we have obsedent pulses on t

was used for wn of the microfirmed damagemicrostructure

tive index is neThe simulation

n). For simulate additional pathe split waveg

TS AND DI

en with ~100 bserve that the es the depender guiding light

h a speed of 0.5 mwidth on energy

re changed as nous decrease

erved the formathe material atwriting purpososcope objective. Further invees has promisi

egative, the wans for type II sting Y branch

arameters whicguides.

ISCUSSION

fs pulses are istructure widt

ence of structurand could be a

mm/s. Numbers y for two speeds

0.1, 0.2, 0.5, 0in structure w

ation of ‘pearl t higher writingses. We strongve. A careful estigations are ng application

aveguides are rtructures inves

h structures (sech can be varie

N

illustrated in fth in LNB is dre width on enachieved with f

below the figureviz. 0.5 mm/s an

0.8, 1, 2, 4, 6, 8width with incr

like’ modificatg speeds. Doubgly believe that

inspection of pending to ide

ns in fabricatio

realized by encstigate the effeee figure 4), wed are the angl

figures 5a anddirectly propornergy for speedfew tens of μJ

e are correspondnd 1 mm/s.

8 and 10 mm/sreasing writingtions. We attribble line structut these structurthe objective

entify the exacton of photonic

closing a ect of the we have le of the

6a with rtional to ds of 0.5 for both

ding

s and the g speeds. bute this

ures were res could after the t reason. crystals

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Figure 6a Lin

Figure 7 showa confocal Rcharacterizatoxygen sub-(A1(TO2)) anwritten strucrecorded forhighlights the

Figure 7 Msample and la

near Structures w

ws the micro-RRaman microsction revealed tlattice with stnd due to distotures indicatin

r both pristinee drop in Rama

Micro-Raman speabeled with the t

written with diffe

Raman charactcope with Arghree main acctatic Li ions (ortions in oxygng the induced e and modifiedan intensity du

ectra recorded frthree main phono

erent speeds withsca

terization of thgon ion laser cessible transve(A1(TO1)), dugen lattice (A1(

modification od regions. The

ue to lattice def

rom a) pristine von modes access

view of the R

h incident energanning speeds

he femtosecond(λ = 514.5 nmerse optical (T

ue to Li and N(TO4)) [9]. Weor lattice defore three main formity induced

volume, b) Strucsible for the x(zzRaman peaks ob

gy of 40 μJ. b De

d modified lithm) as the exciTO) phonon mNb ions movine observe a decrmities. Figuremodes are ided by the fs lase

ture written withz)x Raman confibserved.

ependence of stru

hium niobate saitation source.

modes due to mng across z-axcrease in Ramae 8 shows the entified in theer irradiation.

h 500 µm/s c) 1iguration. Inset p

ucture width on

amples was do The confocal

moving Nb ionxis with statican intensity in typical Raman

e figure and t

000 μm/s on thepicture gives an

different

ne using l Raman ns across c O ions

all laser n spectra the inset

e LNB enlarged

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Figure 8 (a) and 635 nJ r

Figure 8 presIn the FFT-Bothers constaand LW = 1transmitted oindex contrasthe plots. Ou

We charactesuggest that acquisition upropagation l

Figure 9 F

and (b) are confespectively. The

sents images oBPM simulationant. Figure 9 de0 μm and inde

output of doubst such as 1e-2ur simulations

erized these strlight guiding

using a CCD closses within th

Figure on the leftcontrast o

focal images of de confocal image

f typical 2-mmns, the differenepicts a typicalex contrast of le line wavegu

2, FFT-BPM mshow that for s

ructures opticag occurred in camera and fuhe structures an

t shows the propf 1e-3. Figure on

double line struces (c), (d) are Y b

m long double lnt parameters fl propagation o1e-3 and Type

uides due to pamethod is not ssmall index con

ally using a Hboth the stru

urther analysisnd optimize th

pagation of a Gaun the right show

ctures written witbranch structure

line structures for the double of a Gaussian me I Y branch warameter variatsuitable and hentrast of 1e-4 t

He-Ne laser touctures (single s is in progreshem with differ

ussian beam thros the Type I Y b

th LW = 10 μm es written with en

and Y branch line waveguid

mode in a doubwith an index tions are preseence we observthe transmittan

o ascertain theline and dou

ss. Our future rent writing con

ough a double linbranch with an in

and WW = 50 μnergies of 1 μJ a

structures fabrdes were variedble line wavegucontrast of 1e-

ented in the figve transmittanc

nce is poor.

e guiding propuble line). H

studies will fnditions (using

ne waveguide ofndex contrast of

μm with energiesand 635 nJ respe

ricated in LNBd one at a time uide with WW-2. The changegure 10 plots. Fces greater tha

perties. InitialHowever, detaifocus on obtaing 100 fs and 40

f length 10 mm, 1e-2.

s of 5 μJ ectively.

B wafers. keeping

W = 5 μm es in the For high

an one in

l studies led data ning the

0 fs).

index

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6. CONCLUSIONS

In conclusion, we have fabricated and simulated simple photonic structures in LNB wafers. Confocal and micro-Raman characterization has been done to understand the structural and lattice deformations. Varying the different writing parameters allowed us to fabricate structures of desired dimensions. Optimization of photonic device dimensions is achieved by undertaking simulation studies using FFT-BPM technique. Our future studies will be to understand the differences in structures written with ~100 fs and ~40 fs.

Figure 10 Dependence of transmittance on waveguide width (a) for different line widths, for different index contrasts (b) Dependence of transmittance on line width w0 stands for input Gaussian mode’s spot size (c) (LW = 10 μm and w0 = 4 μm) (d) (LW = 10 μm and

w0 = waveguide width)

7. REFERENCES

[1] Gattass, R. R. & Mazur, E., "Femtosecond laser micromachining in transparent materials," Nat Photonics 2, 219-225, (2008).

[2] Thomas, J., Heinrich, M., Zeil, P., Hilbert, V., Rademaker, K., Riedel, R., Ringleb, S., Dubs, C., Ruske, J.-P., Nolte, S., and Tu¨nnermann, T., "Laser direct writing: Enabling monolithic and hybrid integrated solutions on the lithium niobate platform," Phys Status Solidi A 208, 276-283, (2011).

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[3] Thomson, R. R., Campbell, S., Blewett, I. J., Kar, A. K. & Reid, D. T., "Optical waveguide fabrication in z-cut lithium niobate (LiNbO3) using femtosecond pulses in the low repetition rate regime," Appl Phys Lett 88, 111109 (2006).

[4] Nejadmalayeri, A.H., Herman, P.R., “Ultrafast laser waveguide writing: lithium niobate and the role of circular polarization and picosecond pulse width,” Opt. Lett. 31, 2987-2989 (2006).

[5] Kallepalli, D. L. N., Desai, N. R. & Soma, V. R., "Fabrication and optical characterization of microstructures in poly(methylmethacrylate) and poly(dimethylsiloxane) using femtosecond pulses for photonic and microfluidic applications," Appl. Opt. 49, 2475-2489 (2010).

[6] Smith, D. S., Riccius, H. D. & Edwin, R. P. "Errata" Opt. Commun. 20, 188-188, (1977). [7] Smith, D. S., Riccius, H. D. & Edwin, R. P., "Refractive-Indexes of Lithium-Niobate," Opt. Commun. 17, 332-

335 (1976). [8] Banerjee, P. P. & Jarem, J. M. [Computational Methods for Electromagnetic and Optical Systems] Optical

Science and Engineering, CRC Press, 2000. [9] Rodenas, A., Nejadmalayeri, A. H., Jaque, D. & Herman, P., "Confocal Raman imaging of optical waveguides in

LiNbO3 fabricated by ultrafast high-repetition rate laser-writing," Opt Express 16, 13979-13989 (2008). [10] Gui, L., Xu, B., Chong, T.C., "Microstructure in Lithium Niobate by Use of Focused Femtosecond Laser Pulses,"

IEEE Photonics Technol. Lett. 16, 1337-1339 (2004). [11] Burghoff J, Hartung H, Nolte S, A. Tunnermann, “Structural properties of femtosecond laser-induced

modifications in LiNbO3,” Appl. Phys. A. 86, 165-167 (2007). [12] Amir H. Nejadmalayeri and Peter R. Herman, "Rapid thermal annealing in high repetition rate ultrafast laser

waveguide writing in lithium niobate," Opt. Express 15, 10842-10854 (2007) [13] Burghoff, J., Grebing, C., Nolte, S., and Tunnermann, A., "Efficient frequency doubling in femtosecond laser

written waveguides in lithium niobate," Appl. Phys. Lett. 89, 081108 (2006). [14] Nejadmalayeri, A.H., Herman, P.R., "Rapid thermal annealing in high repetition rate ultrafast laser waveguide

writing in lithium niobate," Opt. Express 15, 10842-10854 (2007)

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