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Laser Direct Writing of Photonic Structures in X-cut Lithium Niobate using Femtosecond Pulses
S. Venugopal Raoa*, T. Shuvan Prashant,a K.L.N. Deepak,b Surya P. Tewari,a G. Manoj
Kumar,a and D. Narayana Raob
a Advanced Center for Research in High Energy Materials, bSchool of Physics University of Hyderabad, Hyderabad 500046, India
* Author for Correspondence: [email protected] OR [email protected]
ABSTRACT
We have fabricated straight line structures and Y-couplers in X-cut lithium niobate crystals using femtosecond laser pulses. A systematic characterization study was performed initially to determine the effects of pulse energy on feature size. The optimal parameters were determined from experiments and simulations obtained using a two dimensional split step beam propagation method. Later the waveguides and couplers were fabricated using these optimized parameters. We present our results on the physical and optical characterization of these structures. Keywords: lithium niobate, femtosecond, laser direct writing, photonic devices, beam propagation
2. INTRODUCTION Lithium Niobate (LNB) has emerged as promising material for fabricating integrated optoelectronic circuits because of its favorable physical properties such as large anisotropy, high electro-optic coefficients and large second order nonlinearity. LNB crystals are positively birefringent and, hence, the extraordinary refractive index ne for z-plane polarized light is higher than the ordinary refractive index no along the x and y direction. We refer to the crystal as X-cut or Z-cut depending on which crystal axis is perpendicular to the top surface. Many approaches have been implemented to fabricate waveguides on LNB crystals including ion implantation, liquid phase epitaxy and laser direct writing (LDW) [1-4]. However, the LDW technique stands apart from others because of the relative ease of realization of the microstructures and possibility of 3D photonic devices and integration. Incident intensity of the focused ultrashort pulses determines the type of modification in LNB: (a) an increase in refractive index ne (type I) (b) a decrease of both no and ne (type II) and (c) formation of micro voids [1, 2]. Thomas et al. have recently achieved a hybrid fs laser written chip in lithium niobate that comprised a rare-earth-doped laser section, a frequency doubling unit, Bragg reflectors, waveguide splitters, and an amplitude modulator [2]. However, detailed studies with different pulse durations and writing conditions are essential and enable us to identify the optimal conditions for achieving low loss (insertion, propagation etc.) photonic structures in lithium niobate [10-14].
3. EXPERIMENTAL DETAILS
The schematic and the experimental set up are illustrated in figure 1. The femtosecond oscillator amplifier system is capable of generating ultrashort pulses of ~100 fs duration at a repetition rate of 1 kHz and wavelength of 800 nm. A vertical microscope configuration is employed using a dry 40X (0.65 NA) microscopic objective (Olympus) to focus the laser beam on to the sample and 3D XYZ stages were employed to translate the sample [5]. A Brewster polarizer-half wave plate combination was used to control the intensity of the pulses. M1 to M5 are the mirrors. The crystals were X-cut and were polished and cleaned/sonicated in distilled water before laser direct writing. The modified regions of the crystal were examined using confocal and micro-Raman spectroscopy. Initially, the energy dependence of feature size was characterized. The parameters namely, the stage scan speed, the number of writes and the energy of the pulse were varied and optimized for realizing the photonic devices.
Photonics 2010: Tenth International Conference on Fiber Optics and Photonics, edited by Sunil K. Khijwania,Banshi D. Gupta, Bishnu P. Pal, Anurag Sharma, Proc. of SPIE Vol. 8173, 81730G © 2011 SPIE
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The band ganonlinear optintensity at thn is the refrainput energieKeldysh para
The refractivmicrons and B = 0.099916
Figure 1 A
ap of lithium ntical mechanismhe focus, m andactive index ofes ranging froameter was esti
ve index of LNA = 4.9048, B69, C =-0.0444
Fig
A schematic of th
niobate is 3.75m, is defined ad e are the reduf the material, om 300 nJ to imated to be <
NB can be desB = 0.11768, C 432 & D = -0.0
gure 2 Dependen
he experimental 4. S
eV. The Keldas μ = (ω/e)(m×uced mass andEg is the band100 μJ, we ob0.5.
scribed by the =-0.0475 & D
02195 for extra
nce of refractive
set up (left) and SIMULATIO
dysh parameter×c×n×Eg× ε0/I
d charge of the d gap of the mbserved tunnel
Sellmeier equ
D = -0.027169 faordinary refrac
index on wavele
the actual experONS
r, which proviI) where ω is thelectron, respe
material and ε0
ling ionization
uation n = (A for ordinary refctive index ne .
ength from Sellm
rimental set up (
ides informatiohe laser frequeectively, and c is the permitti
n as the domin
+ B/(λ2+C) +fractive index n [6,7]
meier equation
right).
on about the dency, I is the lais the velocity vity of free spnant process s
+ Dλ2)1/2 whereno; whereas A
dominant aser peak
of light, pace. For since the
e λ is in = 4.582,
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Figure 2 illustrates the dependence of refractive index on wavelength. The typical He-Ne wavelength (λ=0.633 μm) was chosen as the input beam wavelength for the beam propagation simulations for which the indices no = 2.287 and ne = 2.204. Figure 3 illustrates the refractive index profile of a double line structure along with the parameters and also the input beam profile assumed for propagation studies. The dimensions for the waveguides and Y couplers are optimized using the 2D Fast Fourier transform beam propagation method (FFT-BPM) [8].
Figure 3 Above curve shows the refractive index profile of a double line structure and the various parameters line width (LW),
waveguide width (WW) and RIC (∆n). Below curve depicts the input Gaussian mode used in all the simulations.
For the type I waveguides, written structures or the adjacent regions act as the waveguiding regions. However, type I structures are susceptible to thermal degradation leading to reduction of light confinement. The following parameters have been varied to simulate type I structures: line width and the refractive index change (RIC=∆n) induced in the modification.
Figure 4 Double line y-branch used for simulations with three regions: linear waveguide (z1), taper region (z2) and split waveguides
(z3) and other parameters are waveguide width (x1) and branch angle (θ).
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In case of typpristine regiochange in linconsidered bbranch, split
Typical confdifferent valuthe energy duand 1 mm/s. the speeds.
.
Figure 5aener
For a particuresults are deFor structureeffect to the also observedresult from dexperiments The micromaand integrate
pe II modificaton of the crystane width, wav
both types (I anwaveguide wid
focal images oues of energiesumped on the Typical width
a Structures writrgies and line wi
ular energy of 4epicted in the
es written with reduction of nud even though damage in the were performeachining contr
ed optical comp
tions where chal within two wveguide width nd II) of modidth and the spa
5
of the linear sts and writing smaterial. Figu
hs of 6-8 μm ar
tten with differedths b Dependen
40 µJ, the writfigure 6b. Thehigher speeds,umber of incida single beam central portion
ed indeed confrol over these ponents.
hange in refractwritten lines. T
and RIC (∆nifications. Theacing between
5. RESULT
tructures writtespeeds. We ob
ure 5b illustratere essential for
ent energies withnce of structure
ting speeds werere is monoton, we have obsedent pulses on t
was used for wn of the microfirmed damagemicrostructure
tive index is neThe simulation
n). For simulate additional pathe split waveg
TS AND DI
en with ~100 bserve that the es the depender guiding light
h a speed of 0.5 mwidth on energy
re changed as nous decrease
erved the formathe material atwriting purpososcope objective. Further invees has promisi
egative, the wans for type II sting Y branch
arameters whicguides.
ISCUSSION
fs pulses are istructure widt
ence of structurand could be a
mm/s. Numbers y for two speeds
0.1, 0.2, 0.5, 0in structure w
ation of ‘pearl t higher writingses. We strongve. A careful estigations are ng application
aveguides are rtructures inves
h structures (sech can be varie
N
illustrated in fth in LNB is dre width on enachieved with f
below the figureviz. 0.5 mm/s an
0.8, 1, 2, 4, 6, 8width with incr
like’ modificatg speeds. Doubgly believe that
inspection of pending to ide
ns in fabricatio
realized by encstigate the effeee figure 4), wed are the angl
figures 5a anddirectly propornergy for speedfew tens of μJ
e are correspondnd 1 mm/s.
8 and 10 mm/sreasing writingtions. We attribble line structut these structurthe objective
entify the exacton of photonic
closing a ect of the we have le of the
6a with rtional to ds of 0.5 for both
ding
s and the g speeds. bute this
ures were res could after the t reason. crystals
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Figure 6a Lin
Figure 7 showa confocal Rcharacterizatoxygen sub-(A1(TO2)) anwritten strucrecorded forhighlights the
Figure 7 Msample and la
near Structures w
ws the micro-RRaman microsction revealed tlattice with stnd due to distotures indicatin
r both pristinee drop in Rama
Micro-Raman speabeled with the t
written with diffe
Raman charactcope with Arghree main acctatic Li ions (ortions in oxygng the induced e and modifiedan intensity du
ectra recorded frthree main phono
erent speeds withsca
terization of thgon ion laser cessible transve(A1(TO1)), dugen lattice (A1(
modification od regions. The
ue to lattice def
rom a) pristine von modes access
view of the R
h incident energanning speeds
he femtosecond(λ = 514.5 nmerse optical (T
ue to Li and N(TO4)) [9]. Weor lattice defore three main formity induced
volume, b) Strucsible for the x(zzRaman peaks ob
gy of 40 μJ. b De
d modified lithm) as the exciTO) phonon mNb ions movine observe a decrmities. Figuremodes are ided by the fs lase
ture written withz)x Raman confibserved.
ependence of stru
hium niobate saitation source.
modes due to mng across z-axcrease in Ramae 8 shows the entified in theer irradiation.
h 500 µm/s c) 1iguration. Inset p
ucture width on
amples was do The confocal
moving Nb ionxis with statican intensity in typical Raman
e figure and t
000 μm/s on thepicture gives an
different
ne using l Raman ns across c O ions
all laser n spectra the inset
e LNB enlarged
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Figure 8 (a) and 635 nJ r
Figure 8 presIn the FFT-Bothers constaand LW = 1transmitted oindex contrasthe plots. Ou
We charactesuggest that acquisition upropagation l
Figure 9 F
and (b) are confespectively. The
sents images oBPM simulationant. Figure 9 de0 μm and inde
output of doubst such as 1e-2ur simulations
erized these strlight guiding
using a CCD closses within th
Figure on the leftcontrast o
focal images of de confocal image
f typical 2-mmns, the differenepicts a typicalex contrast of le line wavegu
2, FFT-BPM mshow that for s
ructures opticag occurred in camera and fuhe structures an
t shows the propf 1e-3. Figure on
double line struces (c), (d) are Y b
m long double lnt parameters fl propagation o1e-3 and Type
uides due to pamethod is not ssmall index con
ally using a Hboth the stru
urther analysisnd optimize th
pagation of a Gaun the right show
ctures written witbranch structure
line structures for the double of a Gaussian me I Y branch warameter variatsuitable and hentrast of 1e-4 t
He-Ne laser touctures (single s is in progreshem with differ
ussian beam thros the Type I Y b
th LW = 10 μm es written with en
and Y branch line waveguid
mode in a doubwith an index tions are preseence we observthe transmittan
o ascertain theline and dou
ss. Our future rent writing con
ough a double linbranch with an in
and WW = 50 μnergies of 1 μJ a
structures fabrdes were variedble line wavegucontrast of 1e-
ented in the figve transmittanc
nce is poor.
e guiding propuble line). H
studies will fnditions (using
ne waveguide ofndex contrast of
μm with energiesand 635 nJ respe
ricated in LNBd one at a time uide with WW-2. The changegure 10 plots. Fces greater tha
perties. InitialHowever, detaifocus on obtaing 100 fs and 40
f length 10 mm, 1e-2.
s of 5 μJ ectively.
B wafers. keeping
W = 5 μm es in the For high
an one in
l studies led data ning the
0 fs).
index
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6. CONCLUSIONS
In conclusion, we have fabricated and simulated simple photonic structures in LNB wafers. Confocal and micro-Raman characterization has been done to understand the structural and lattice deformations. Varying the different writing parameters allowed us to fabricate structures of desired dimensions. Optimization of photonic device dimensions is achieved by undertaking simulation studies using FFT-BPM technique. Our future studies will be to understand the differences in structures written with ~100 fs and ~40 fs.
Figure 10 Dependence of transmittance on waveguide width (a) for different line widths, for different index contrasts (b) Dependence of transmittance on line width w0 stands for input Gaussian mode’s spot size (c) (LW = 10 μm and w0 = 4 μm) (d) (LW = 10 μm and
w0 = waveguide width)
7. REFERENCES
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[3] Thomson, R. R., Campbell, S., Blewett, I. J., Kar, A. K. & Reid, D. T., "Optical waveguide fabrication in z-cut lithium niobate (LiNbO3) using femtosecond pulses in the low repetition rate regime," Appl Phys Lett 88, 111109 (2006).
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