ken goodson mechanical engineering stanford university · 2019. 10. 24. · ken goodson mechanical...
TRANSCRIPT
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Ken GoodsonMechanical Engineering
Stanford University
15th International Workshop on Computational ElectronicsPhonon School May 21, 2012
Phonons in NanoElectronics
With Wong Group,Stanford EE
With Vuckovic Group,Stanford EE
silicon nanoladders
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Electronics Thermal Challenges
portables
servers
transportation defense
energy efficiency
hotspot mitigation
heterogeneousintegration
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portables
servers
transportation defense
Electronics Thermal Challenges
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IBM-3M Press Release
September 2011
iPad3 iPad2March 2012
October 2012
Electronics Cooling in the News
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Intel (2012)
Finally, commercialfinFETs
Finally, commercialphase change memory
Phonons in the News?
Samsung Cell PhoneMemory, May 2011
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Intel (2012)
Samsung Cell PhoneMemory, May 2011
Phonons in the News?
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- Intel
Gate Length (nm)
Rowlette & GoodsonTrans. Electron Devices (2008)
Phonons in the News?
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Intel (2012)
VOL. 94 (2006)
Phonon
tSi
N(T)
300 K 343 K
Phonon Energy [meV]
1.0 V@25 nm
960 K
Boundary Scattering
Local PhononNonequlibrium
Phonons in the News?
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Boundary Scattering (SOI MOSFET)
(Goodson & Flik 1992;Sverdrup et al. 2001)
Branch Nonequilibrium(BTE Moments)
(Lai and Arun Majumdar 1996)
Hotspot Emission (BTE)(Gang Chen 1996)
Intel (2012)
N(T)
300 K 343 K
Phonon Energy [meV]
1.0 V@25 nm
960 K
Phonons in the News?
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Intel (2012)
IEEE TRANS. ELECTRON DEVICES (55) 2008
Coupled Electron Monte Carlo &Phonon BTE in 20 nm finFET
Effe
ctiv
e Te
mpe
ratu
re (K
)
finFET position (nm)
g-LO
diffusion
phononensembleBTE+MC
diffusionall LO
Phonons in the News?
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VOL. 98 (2010)
WONG, RAOUX, KIM, LIANG, REIFENBERG, RAJENDRAN, ASHEGHI, AND GOODSON
Tem
pera
ture
Phonons in the News?
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VOL. 98 (2010)
WONG, RAOUX, KIM, LIANG, REIFENBERG, RAJENDRAN, ASHEGHI, AND GOODSON
Electrode Interface(Reifenberg et al., 2007 & 2008)
Phase Interfaces & Electrons(Bozorg-Grayeli, 2011)
Thermoelectric Phenomena(Lee et al., 2012)
Phonons in PCRAM
Lee, Asheghi, Goodson,Nanotechnology (2012)
Phonons in the News?
(Kuzum, Wong, et al, 2011/2012)
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Phase Change NanoCells
with Bosch(NSF/DOE Partnership)
OpticalNanocrystals
AlGaN
Diamond
with Brongersma group, Stanford MSE
GaN-DiamondComposites
with Intel TMG, IBM (SRC)and Wong Group, Stanford EE
NanoFETs
with KLA Tencor with Vuckovic group, Stanford EE
QuantumCavity Lasers
Extreme UVOptics
with Raytheon, Boeing, Boeing, BAE (DARPA NJTT)
Group4 Labs
with Intel ATD (SRC)
Nanostructured Packaging
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Selected AlumniProf. Dan Fletcher UC Berkeley Dr. Jeremy Rowlette Daylight SolnsProf. Evelyn Wang MIT Dr. Patricia Gharagozloo Sandia LabsProf. Katsuo Kurabayashi U. Michigan Dr. Per Sverdrup IntelProf. Sungtaek Ju UCLA Dr. Chen Fang Exxon-MobileProf. Mehdi Asheghi Stanford Dr. Milnes David IBMProf. Bill King UIUC Dr. Max Touzelbaev AMDProf. Eric Pop UIUC (EE) Dr. Roger Flynn IntelProf. Sanjiv Sinha UIUC Dr. Julie Steinbrenner Xerox ParcProf. Xeujiao Hu Wuhan Univ. Dr. John Reifenberg IntelProf. Carlos Hidrovo UT Austin Dr. David Fogg CreareProf. Kaustav Banerjee UCSB (EE) Dr. Matthew Panzer KLA-TencorProf. Ankur Jain UT ArlingtonProf. Sarah Parikh Foothill College
Current Group Ken GoodsonJosef Miler Elah Bozorg-Grayeli Lewis HomMichael Barako Amy Marconnet Aditja Sood (MSE)Jaeho Lee Shilpi Roy (EE) Woosung ParcSri Lingamneni Yuan Gao Saniya Leblanc Yiyang Li (MSE) Dr. Takashi KodamaJungwan Cho Zijian Li Dr. Yoonjin Won
Prof. Mehdi Asheghi
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Restrict the conduction lengthscale using nanofabrication
Restrict the conduction lengthscale using high speed optics
Nano Thermal Metrology
Sample Complexity
Rig
Com
plex
ity
How can we “see”thermal phonons?
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Sample Complexity
Rig
Com
plex
ityNano Thermal Metrology
SiC / Diamond
GaN
12 ps pumpdelayed probe
Students: Cho, Bozorg-GrayeliElectron Device Letters (2012)
Students: Li, Lee, KodamaNano Letters (2012)
CNT Forest
Metal
Catalyst
Substrate
10 ns pumpcw probe
Students: Panzer, GaoNano Letters (2010)
Students: Yoneoka, Li, KodamaNano Letters (2012 in press)
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Phonons in Nanowires & NanoTubesAppearing this month from Li Shi, UT Austin
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SiO2
Si3N4
nanotube Pt
Pt gate
2 μmnanotube on substrate suspended
over trench
Pop, Goodson, Dai et al., Nano Letters (2006), Pop, Goodson, Dai et al., Physical Review Letters (2005)
ExternalHeating
InternalHeating
Shi and Li, JHT (2003)Yu, Shi et al., Nanoletters (2005)
McConnell, Goodson et al. (2004)
Li, Majumdar, Yang, et al.Applied Physics Letters (2003)
Phonons in Nanowires & NanoTubes
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Asheghi, Goodson, et al., Applied Physics Letters 71 (1997)
single-crystal Siburied oxide, ~2 microns thick
heater / thermometers
thick Si substrate
Measurement Structure
ThermalConductivity(W m-1 K-1)
Temperature (K)
10
100
1000
104
10 100
Bulk
1.60 m0.83 m0.42 m
3505
Phonon-Boundary Scattering
Films(SpectralFuchs/Sondheimer)
predictions
data
single-crystalsilicon
filmthickness
doping
Asheghi, Goodson, et al., J. Heat Transfer 120 (1998)
SOI-Enabled Phonon Studies 1994-
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SOI-Enabled Phonon Studies 1994-
single-crystal Siburied oxide, ~2 microns thick
heater / thermometers
thick Si substrate
Measurement Structure
doping
10 0
10 1
10 2
10 3
20 40 60 80 100
Ther
mal
con
duct
ivity
(Wm
-1K
-1)
300
ds=1.6 m
100 nm
20 nm
0.42 m
0.8 m
Bulk
ThermalConductivity(W m-1 K-1)
Temperature (K)
Asheghi, Goodson, et al., Applied Physics Letters 71 (1997) Asheghi, Goodson, et al., J. Heat Transfer 120 (1998) Liu and AsheghiJ. Heat Transfer 120 (2006)
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single-crystal Siburied oxide, ~2 microns thick
heater / thermometers (varying width)
thick Si substrate
Measurement Structure
Y. Sungtaek Junow with UCLA MAE
SOI-Enabled Phonon Studies 1994-
Ju, GoodsonApplied Physics Letters 74 (1999)
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single-crystal Sithinned oxide support from SOI
heater / thermometersMeasurement Structure
doped
Vacuum(suspended structure)
ThermalResistance
Ratio(SILICON / loss)
McConnell, Srinivasan, Goodson,et al., JMEMS 10 (2001)
metallization
Temperature (K) 0.0001
0.001
0.01
0.1
1
10 100Temperature (K)
SOI-Enabled Phonon Studies 1994-
Sverdrup, Sinha, Goodson et al., Applied Physics Letters 78 (2001)
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Sverdrup, Sinha, Goodson et al., Applied Physics Letters 78 (2001)
Model: Sinha, Pop, Dutton, Goodson,J. Heat Transfer (2006)
single-crystal Sithinned oxide support from SOI
heater / thermometersMeasurement Structure
doped
Vacuum(suspended structure)
SOI-Enabled Phonon Studies 1994-
Temperature (K)
ExperimentalData
Rdiffusion
RBTE
Rboundaries
Rdiffusion+BTE
ThermalResistance
(K W-1)
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SOI-Enabled Phonon Studies2010- (boundaries & nanoholes)
Input Power (μW)
Quantum Cavity Lasers and WaveguidesGong, Vuckovic, et al., Stanford EE
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1. Silicon-On-Insulator Wafer
2. Deposit & Pattern (E-Beam Lithography) Photoresist
3. DRIE Etch Silicon Device Layer
4. Remove Oxide Layer To Suspend Device
5. Deposit Palladium Film
Nanoladder Device Fabrication
Dr. Taka Kodama
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MetalSilicon
Electron Phonon
Substrate
Current
T0 T0
Heat Path
Current
Ʌbulk
Ʌbulk
SOI-Enabled Phonon Studies2010- (boundaries & nanoholes)
V V
I ILiu and AsheghiApplied Physics Letters (2004)
Marconnet, Kodama, Asheghi, Goodson, et al. Nano & Microscale Thermophys. Eng. (2012)
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MetalSilicon
Electron Phonon
Current
T0 T0
Heat Path
Current
Ʌbulk
Ʌbulk
SOI-Enabled Phonon Studies2010- (boundaries & nanoholes)
Intrinsic
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Probing the WFL at 7 nmYoneoka, Lee, Goodson, Kenny, et al., Nano Letters (2012)
ALD Pt
SiO2
Si
10 nm
Free-standing
Atomic Layer Deposition
Thermal conductivity (W/mK)
WFL using electrical conductivity
Metallization Thickness (nm)
phonon limit (MD)
Bulk Thermal Conductivity (W/mK)
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5 nm
a-Si (2.2 nm)
Poly-Mo (2.6 nm)a-MoSi2 (0.7 nm)
a-MoSi2 (1.3 nm)
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Extreme UV Optics
Carl Zeiss AG
MoSi
EUV13.5 nm
θ
d
EUV reflection ~70%
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6.9 nm Mo/Si
40 bilayers total
Si Substrate
25 nm Al2O3Ti/Au
5umTi/Au
50nm
Ti/Au
ComparativeSample
Electrons & Phonons in Metal NanoLayers
0 5 10 15 200.6
0.7
0.8
0.9
1
Anisotropy Ratio
Nor
mal
ized
Tem
pera
ture
Ris
e
50nm100nm200nm500nm1m5m
Analytical solutions
Experimental data
25 nm Al2O3
Li, Goodson, et al., Nano Letters (2012), accepted and in pressBozorg-Grayeli, Li, Goodson, et al., Applied Physics Letters (2011)
dMo = 2.8nm, dSi = 4.1nm, kMo ~ 14 W/mK (WFL)
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Anisotropy caused by:
- Series vs parallel film resistances = 2-3
- Discrete interface resistances and ballistic electrons, = 4-9
- Disorder and material interdiffusion at interfaces (smudging)
- Weak electron-phonon coupling and ballistic phonons?
Electrons & Phonons in Metal NanoLayers
Mo 2.8 nm
Si 4.1 nm
Si 4.1 nm
p
e-
p
p
e-
Li, Goodson, et al., Nano Letters (2012), accepted and in pressBozorg-Grayeli, Li, Goodson, et al., Applied Physics Letters (2011)
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Electrons & Phonons in Metal NanoLayers
Mo 2.8 nm
Si 4.1 nm
Si 4.1 nm
p
e-
p
p
e-
Li, Goodson, et al., Nano Letters (2012), accepted and in pressBozorg-Grayeli, Li, Goodson, et al., Applied Physics Letters (2011)
100 101 102 10310-1
100
101
102
Film Thickness [nm]
Ther
mal
Res
ista
nce
[m2 K
/GW
]
Rp, approx. resistor model
Re, approx. resistor model
Rp, BTE
Re, BTE
Dominant Carrier Transition Thickness
2 /trans p e p e pd k k Gk k k
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Future Phase Change Nanodevices
Field-Programmable Gate Arrays
RF-FPGA
SyNAPSE
Synapses for Brain-Inspired ComputingKuzum, Jeyasingh, Lee, Wong,Nano Letters (2011)
Lee, Asheghi, Wong, Goodson, et al. Electron Device Letters (2011)
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in-plane modelin-plane data
out-of-planedatamodel
Conductivity anisotropy modeled using JMAK phase transition and Maxwell-Eucken EMT
Phase Transition Complexity in Ge2Sb2Te5Lee, Li, Sinclair, Goodson, et al., Journal of Applied Physics (2011)
Li, Lee, Wong, Goodson et al., Electron Device Letters (2011)
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amorphous remnant at hcpgrain boundary
Phase Transition Complexity in Ge2Sb2Te5Lee, Li, Sinclair, Goodson, et al., Journal of Applied Physics (2011)
Li, Lee, Wong, Goodson et al., Electron Device Letters (2011)
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Sample Complexity
Rig
Com
plex
ityNano Thermal Metrology
SiC / Diamond
GaN
12 ps pumpdelayed probe
Students: Cho, Bozorg-GrayeliElectron Device Letters (2012)
Students: Li, Lee, KodamaNano Letters (2012)
CNT Forest
Metal
Catalyst
Substrate
10 ns pumpcw probe
Students: Panzer, GaoNano Letters (2010)
Students: Yoneoka, Li, KodamaNano Letters (2012 in press)
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100 nm
CNT Forest
Metal
Metal CNT Catalyst
TransparentSubstrate
CNT ForestsStudents: Panzer, Gao, Marconnet
ACS Nano (2011)Nanoletters (2010)
J. Heat Transfer (2008)J. Electronic Materials (2009)
TDTR/TTR Sample Design
KLATencor
Students: Bozorg-Grayeli, Li, Reifenberg
Applied Physics Letters (2007)Electron Device Letters (2008, 2010, 2011)
Phase Change Interfaces
AlTaN
Mo/Si x 40
Si
44 +/- 4 nmwithIntel TMG
Extreme UVNanoOptics
Students: Bozorg-Grayeli, LiApplied Physics Letters (2012)
Nano Letters (2012)
NanoPhotonicCrystals (SRO/SRN)
Students:Rowlette, Kekatpure,
Marconnet
Physical Review B (2009)Applied Physics Lett. (2012)
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Thermal Conductivity, k [W/m-K]
Required Measurement Timescales
AlCu
100
10
1
0.1
0.01
100 ns
1 ns
10 ps
OrganicPackagingTIMS,
Underfill
SiO2 , Si3N4 , HfO2, GST
amorphous passivation
Si, SiGe,GaAsGaN
33~* LdMat
eria
l Thi
ckne
ss, d
*[m
icro
ns]
10 s
Interconnect, vias, and transition layers
Semi‐conductors
metallic packageinterfaces
1 ps
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Razeghi et al., N. J. Phys. (2009)
Diamond SubMountHEMT Composite Substrates
POWER FET Passivation
Quantum Cascade Laser SubMounts
Daimler
Diamond Composite SubstratesDARPA NJTT Programs
Proc. ITHERM 2012, with Group4 Labs
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0 2 4 6 8 10x 10-9
0
5
10
15
Time (s)
Nor
mal
ized
Ref
lect
ance
ExperimentTBR: 4 m2K/GW(Best Fit)TBR: 10 m2K/GW
SiC
GaN Buffer
50 nm Al Transducer
Probe
30 nm AlN Nucleation Layer
Stanford with Raytheon: Cho, Altman, Asheghi, Goodson, Electron Device Letters (2012)
TDTR Boundary Resistance Extraction
1/kGaN = 0.0055RGaN-SiC = 3.6
Sample kGaNW/m/K
RGaN-SiCm2K/GW
AlN thickness
nmRaytheon HEMT ps TDTR simul-fit
157 ±11
4.2 ± 0.6 27
Raytheon HEMT extrapolation
182 ±33
3.6 ± 1.6 27
12 ps pump
GaN Composite Substrates
1270 nm GaN
880 nm GaN
1562 nmGaN
Pump
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Discrete carrier scattering at interfaces
Scattering on imperfections, stoichiometric impurities, and disorder in transition film
Near-interfacial disorder in primary composite substrate materials (GaN & Diamond)
Thermal Resistance Mechanisms
Active Region
Transition Layer
Diamond
P
P
P
Impurity scattering
Grain boundary scattering
Interface Scattering
Roughness
Defect scattering
Near-interfacial disorder
nanoheat.stanford.edu 42
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Discrete carrier scattering at interfaces
Scattering on imperfections, stoichiometric impurities, and disorder in transition film
Near-interfacial disorder in primary composite substrate materials (GaN & Diamond)
Active Region
Transition Layer
Substrate
P
P
P
Impurity scattering
Grain boundary scattering
Interface Scattering
Roughness
Defect scattering
Near-interfacial disorder
Thermal Resistance Mechanisms
nanoheat.stanford.edu 43
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CVD diamond layer
Si Substrate
Metal coating
Heating pulsesfrom Nd:YAG
ToDetector
CW Radiationfor
Thermometry
Mean free path
Grain-boundary scattering strength2
1111 Gphononboundarygrainphonon
d
typesdefect
znz
x
dL
dG(z)
SINGLE-CRYSTAL SILICON SUBSTRATE
POLY- CRYSTAL DIAMOND
LAYER
OVERLAYER
Substrate
Film thickness, d (µm)
(10-8 m2 K W -1)
Ther
mal
Res
ista
nce
dG = 0.02 + 0.2z
dG = 0.1 + 0.5z
Goodson, ASME J. Heat Transfer (1996)Goodson et al., Journal of Applied Physics (1995)
Near-Interfacial DiamondTouzelbaev & Goodson, Diamond & Related Materials (1998)Touzelbaev & Goodson, J. Thermophysics & Heat Transfer (1998)
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Metal
Si
0 0.2 0.4 0.6 0.8 1x 10-5
0
0.2
0.4
0.6
0.8
1
Seconds
T/Tm
ax
h1=3.4e5 W/m2Kh1=2.4e5 W/m2Kh1=4.4e5 W/m2K
0 0.2 0.4 0.6 0.8 1x 10-5
0
0.2
0.4
0.6
0.8
1
Seconds
T/Tm
ax
h2=1.0e5 W/m2Kh2=2.0e5 W/m2Kh2=1.5e5 W/m2K
time (s)
time (s)
Photothe
rmal Signal
Photothe
rmal Signal
Rapid optical heating and thermometry allows vertical resistance contributions to be extracted independently
Panzer, Goodson, et al., J. Heat Transfer (2008), NanoLetters (2010)Kaeding, Goodson, et al., Applied Physics Letters (1993)
Decreasing R1R1
R2
Decreasing R2
λ = 532nm, 6ns pulses at 10Hz
λ = 658nm
Nanosecond Thermoreflectance
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Conduction Physics in CNT Films
SubstrateSubstrateSubstrateSubstrate
Individual CNT conductance
Inter-tube contact
Nanoscale metal-CNT interface resistance (phonons)
Partial nanotubeengagement
Spatially varying aligment
Growth interface resistance
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10-3 10-2 10-1 10010-1
100
101
102
103
104
Volume Fraction
Ther
mal
Con
duct
ivity
[W m
-1 K
-1]
(Wang et al., 2007a,b)(Yu et al., 2005)(Pop et al., 2006)(Li et al., 2009)(Choi et al., 2006)(Pettes et al., 2009)(Kim et al., 2001)(Fujii et al., 2005)(Li et al., 2009)(Choi et al., 2005)(Panzer et al., 2008)(Akoshima et al., 2009)(Hu et al., 2006)(Yang et al., 2002,2004)(Tong et al., 2007)(Tong et al., 2006)(Pal et al., 2008)(Borca-Tasciuc et al., 2005)(Ivanov et al., 2006)(Xie et al., 2007)(Okamoto et al., 2011)(Jakubinek et al., 2010)(Y. Xu et al., 2006)(Cola et al., 2007)(Zhang et al., 2005)(Zhang et al., 2007)(Pettes et al., 2009)ki = 3000 W/m/K
ki = 30 W/m/K
Marconnet, Panzer, Goodson, Reviews of Modern Physics (invited & submitted 2012)
Thermal Conductivities of Individual CNTs and Aligned Arrays
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Data and Modeling for Individual SWNT-metal Interface Resistance
Hu et al.,2008 Diao et al. 2008;
MD simulationsSWNT-Si contact
geometry
010203040506070
0.005 0.006 0.007 0.008 0.009
Rindividual=Rmeas*φ
TiPt
Pd
Al
Ni
2D-AMM Prediction
φ = Ceff/Cv,individual
MD simulationsSWNT-Si contact
Hu et al.,2008Diao et al.,2008
Ther
mal
Res
ista
nce
(m2 K
/GW
)Panzer, Maruyama, Wardle, Goodson et al.,Nanoletters (2010)
Ceff
Thermal Sink
CNT
Metal
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Sample Complexity
Rig
Com
plex
ityNano Thermal Metrology
SiC / Diamond
GaN
12 ps pumpdelayed probe
Students: Cho, Bozorg-GrayeliElectron Device Letters (2012)
Students: Li, Lee, KodamaNano Letters (2012)
CNT Forest
Metal
Catalyst
Substrate
10 ns pumpcw probe
Students: Panzer, GaoNano Letters (2010)
Students: Yoneoka, Li, KodamaNano Letters (2012 in press)
Optics &Nanostructures
Multi-property
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Rowlette, Kekatpure, Brongersma, Goodson, et al., Physical Review B (2009)Marconnet, Yerci, Dal Negro, Goodson, et al., Applied Physics Letters (2012)
Förster-Auger
∆E
R
iDiA
fA
fD
phonon
Superlattice (SL)
3D
2D 1D
Thermal & Optical Properties of Silicon-Enriched Oxides & Nitrides
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Superlattice (SL)
3D
2D 1D
Pump Intensity(532 nm)
20 nm multilayers
200 nm film~ Φ1/3
~ ΦFree-Carrier Absorption from Probe
(1064 nm)
Förster-Auger
∆E
R
iDiA
fA
fD
phonon
Rowlette, Kekatpure, Brongersma, Goodson, et al., Physical Review B (2009)Marconnet, Yerci, Dal Negro, Goodson, et al., Applied Physics Letters (2012)
Thermal & Optical Properties of Silicon-Enriched Oxides & Nitrides
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Mechanical & Thermal Properties of Aligned CNT Films
750 µm
50 µm
Thermal MechanicalPump Laser Doppler
Vibrometer (LDV)
Piezoelectric Shaker
Probe
Si substratePolysiliconOxideAl2O3FeCNT
Yoonjin Won, Matt Panzer, Amy Marconnet, et al.Carbon (2012)
MEMS Resonator
nanoheat.stanford.edu 52
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Fabrication Process
CNT growthPolysilicon deposition
Resonator outline etching
200 Å Al2O3 deposition
10 Å Fe catalyst deposition
Resonator etching
Oxide layer removal
CNT growth process• A mixture of C2H4 and Ar gas flows through a tube furnace at 825°C • The carbon atoms from C2H4 dissolve into the catalyst nanoparticles• The carbons crystallize into stacks of flat sheets of hexagonally patterned carbon, which extrude as nanotubes
Catalyst nanoparticleAl2O3
CNTC2H4 + Ar
Si substratePolysiliconOxide
Al2O3FeCNT
53
Yoonjin Won, Matt Panzer, Amy Marconnet, et al., CARBON (2012)
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Three‐layer Analysis
• Interweaving of a thin layer of entangled and randomly oriented nanotubes• Vertical‐aligned growth• Density decay
Growth Stages
crust
middle
DimensionlessEffective Modulus
SWCNTs (U. of Tokyo)
MWCNTs (Monano)
MWCNTs (MIT)
Two‐layer analysis Three‐layer analysis
Stage 1 Stage 2
Self‐organization Vertical‐growth
crust middle
SWCNT films
Theoretical curve for MWCNT films
wn
wn,Si,0
ESiISi,1 EMiddleIMiddle ETopITop
SiASi Middle AMiddle Top ATop
SiASi
ESiISi,0
1
: Moduli are scaled by reference sample and volume fraction
Won, Carbon (2011)
Modulus of Nonhomogeneous CNT Films
nanoheat.stanford.edu 54
Yoonjin Won, Matt Panzer, Amy Marconnet, Goodson, et al. CARBON (2012a)Yuan Gao, Takashi Kodama, Goodson, et al., CARBON (2012b)
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Carbon 2012
LogicMemoryMemory
Chip Carrier
Primary ThermalInterface
2010
3D NanoPackaging
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LogicMemoryMemory
Chip Carrier
3D Stacking Interfaces
2011
CNT Composites
3D NanoPackaging
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LogicMemoryMemory
Chip Carrier
IBM-3M Press Release
September 2011
Materials Needs
IBM-Micron 3D press release, December 2011
3D NanoPackaging
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portables
servers
transportation defense
Thanks to our Sponsors
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portables
servers
transportation defense
Thanks to our Sponsors
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Selected AlumniProf. Dan Fletcher UC Berkeley Dr. Jeremy Rowlette Daylight SolnsProf. Evelyn Wang MIT Dr. Patricia Gharagozloo Sandia LabsProf. Katsuo Kurabayashi U. Michigan Dr. Per Sverdrup IntelProf. Sungtaek Ju UCLA Dr. Chen Fang Exxon-MobileProf. Mehdi Asheghi Stanford Dr. Milnes David IBMProf. Bill King UIUC Dr. Max Touzelbaev AMDProf. Eric Pop UIUC (EE) Dr. Roger Flynn IntelProf. Sanjiv Sinha UIUC Dr. Julie Steinbrenner Xerox ParcProf. Xeujiao Hu Wuhan Univ. Dr. John Reifenberg IntelProf. Carlos Hidrovo UT Austin Dr. David Fogg CreareProf. Kaustav Banerjee UCSB (EE) Dr. Matthew Panzer KLA-TencorProf. Ankur Jain UT ArlingtonProf. Sarah Parikh Foothill College
Current Group Ken GoodsonJosef Miler Elah Bozorg-Grayeli Lewis HomMichael Barako Amy Marconnet Aditja Sood (MSE)Jaeho Lee Shilpi Roy (EE) Woosung ParcSri Lingamneni Yuan Gao Saniya Leblanc Yiyang Li (MSE) Dr. Takashi KodamaJungwan Cho Zijian Li Dr. Yoonjin Won
Prof. Mehdi Asheghi