jan m. rabaey the devices digital integrated circuits© prentice hall 1995 introduction
TRANSCRIPT
Jan M. Rabaey
The Devices
Digital Integrated Circuits © Prentice Hall 1995IntroductionIntroduction
Goal of this chapter
• Present intuitive understanding of device operation
• Introduction of basic device equations
• Introduction of models for manual analysis
• Introduction of models for SPICE simulation
• Analysis of secondary and deep-sub-microneffects
• Future trends
Digital Integrated Circuits © Prentice Hall 1995IntroductionIntroduction
The Diode
n
p
p
n
B A SiO2Al
A
B
Al
A
B
Cross-section of pn-junction in an IC process
One-dimensionalrepresentation diode symbol
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Depletion Region
hole diffusionelectron diffusion
p n
hole driftelectron drift
ChargeDensity
Distancex+
-
ElectricalxField
x
PotentialV
W2-W1
(a) Current flow.
(b) Charge density.
(c) Electric field.
(d) Electrostaticpotential.
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Diode Current
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Models for Manual Analysis
VD
ID = IS(eVD/T – 1)+
–
VD
+
–
+
–VDon
ID
(a) Ideal diode model (b) First-order diode model
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Junction Capacitance
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Diode Switching Time
Vsrc
t = 0
V1
V2
VD
Rsrc
t = T
ID
Time
VD
ON OFF ON
Space chargeExcess charge
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Secondary Effects
–25.0 –15.0 –5.0 5.0
VD (V)
–0.1
I D (A
)0.1
0
0
Avalanche Breakdown
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Diode Model
ID
RS
CD
+
-
VD
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SPICE Parameters
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The MOS Transistor
n+n+
p-substrate
Field-Oxyde
(SiO2)
p+ stopper
Polysilicon
Gate Oxyde
DrainSource
Gate
Bulk Contact
CROSS-SECTION of NMOS Transistor
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Cross-Section of CMOS Technology
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MOS transistors Types and Symbols
D
S
G
D
S
G
G
S
D D
S
G
NMOS Enhancement NMOS
PMOS
Depletion
Enhancement
B
NMOS withBulk Contact
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n+n+
p-substrate
Field-Oxyde
(SiO2)
p+ stopper
Polysilicon
Gate Oxyde
DrainSource
Gate
Bulk Contact
CROSS-SECTION of NMOS Transistor
Transistor: No Voltages
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Introduction to VLSI Design © Steven P. Levitan 1998IntroductionIntroduction
Transistor “Off” Vgs<Vt
Vgd
Vgs
Ids
Vds
I=V/R
No Channel exists: Enhancement mode transistor
R
n+n+
p-substrate
DSG
B
VGS
+
-
Depletion
Region
n-channel
Vds does not matter
Ids
Threshold Voltage: Concept
n+n+
p-substrate
DSG
B
VGS
+
-
Depletion
Region
n-channel
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The Threshold Voltage
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GND
Out
?A
B
Body Effect
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n+n+
p-substrate
DSG
B
VGS
+
-
Depletion
Region
n-channel
Channel Formation Vgs>Vt
Vgd
Vgs
Ids
Vds
I=V/R
Positive Charge on Gate:Channel exists, but no current
since Vds = 0
R
Ids
Current-Voltage Relations
n+n+
p-substrate
D
SG
B
VGS
xL
V(x) +–
VDS
ID
MOS transistor and its bias conditions
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Linear Region Vgs>Vt & Vgd>Vt
Positive Charge on Gate:Channel exists, Current Flows
since Vds > 0Ids = k’(W/L)((Vgs-Vt)Vds-Vds
2/2)
R
Vgd
Vgs
Ids
Vds
I=V/R
R= 1/(k’(W/L)(Vgs-Vt))
n+n+
p-substrate
DSG
B
VGS
+
-
Depletion
Region
n-channel
Ids
Transistor in Saturation
n+n+
S
G
VGS
D
VDS > VGS - VT
VGS - VT+-
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Saturation: Vgs>Vt & Vgd<Vt
Positive Charge on Gate:Channel exists, Current Flows
since Vds > 0But: channel is “pinched off”
Ids = (k’/2)(W/L)(Vgs-Vt)2
Vgdn+n+
p-substrate
DSG
B
VGS
+
-
Depletion
Region
n-channel
Vgs
Ids
“constant current source”
Ids
Vds
Vgs
Ids
Current-Voltage Relations
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I-V Relation
0.0 1.0 2.0 3.0 4.0 5.0
VDS (V)
1
2
I D (
mA
)
0.0 1.0 2.0 3.0VGS (V)
0.010
0.020
÷ I
D
VT
SubthresholdCurrent
Triode Saturation
VGS = 5V
VGS = 3V
VGS = 4V
VGS = 2V
VGS = 1V
(a) ID as a function of VDS (b) ID as a function of VGS
(for VDS = 5V).
Sq
ua
re D
ep
end
en
ce
VDS = VGS-VT
NMOS Enhancement Transistor: W = 100 m, L = 20 m
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A model for manual analysis
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Introduction to VLSI Design © Steven P. Levitan 1998IntroductionIntroduction
Saturation Effects
Which is the resistor?
Discharge of 1pf capacitor, with Vgs of 3,4,5 volts. Also, 12k resistor.
Introduction to VLSI Design © Steven P. Levitan 1998IntroductionIntroduction
Regions of Operation Summary
REGION NMOSVtn = .7vk’ = 80A/V2
PMOSVtp = -.7vk’ = 27mA/V2
Off Vgs<Vtn
Ids=0Vgs>Vtp
Ids=0
Linear Vgs>Vtn & Vgd>Vtn Vgs<Vt & Vgd<Vtp
Ids= k’(W/L)(Vgs-Vt)Vds-Vds2/2)
Saturation Vgs>Vtn & Vgd<Vtn Vgs<Vtp & Vgd>Vtp
Ids= (k’/2)(W/L)(Vgs-Vt)2(1+Vds)
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Computed Curves
Vgs = 5v
Vgs = 4.5v
Vgs = 4.0v
Linear Resistor
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Spice Curves
Vgs = 5v
Vgs = 4v
Vgs = 3v
Vgs = 2v
Vgs = 1v
Fitting level-1 model for manual analysis
VGS = 5 V
VDS = 5 V VDS
ID
Long-channel
approximation
Short-channelI-V curve
Region of
matching
Select k’ and such that best matching is obtained @ Vgs= Vds = VDD
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Introduction to VLSI Design © Steven P. Levitan 1998IntroductionIntroduction
Retrofitted Level 1 Parameters1.2um CMOS
NMOS» VTO = 0.743 V
» K’ = 19.6 A/V2 (20 vs 80) = 0.06 V-1
PMOS» VTO = -0.739 V
» K’ = 5.4 A/V2 (5 vs 27) = 0.19 V-1
Dynamic Behavior of MOS Transistor
DS
G
B
CGDCGS
CSB CDBCGB
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The Gate Capacitance
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Average Gate Capacitance
Most important regions in digital design: saturation and cut-off
Different distributions of gate capacitance for varying
operating conditions
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Diffusion Capacitance
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The Sub-Micron MOS Transistor
• Threshold Variations
• Parasitic Resistances
• Velocity Sauturation and Mobility Degradation
• Subthreshold Conduction
• Latchup
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Parasitic Resistances
W
LD
Drain
Draincontact
Polysilicon gate
DS
G
RS RD
VGS,eff
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Velocity Saturation (2)
VDS (V)
I D (
mA
)
Lin
ea
r D
ep
en
de
nc
e
VGS = 5
VGS = 4
VGS = 3
VGS = 2
VGS = 1
0.0 1.0 2.0 3.0 4.0 5.0
0.5
1.0
1.5
(a) ID as a function of VDS (b) ID as a function of VGS(for VDS = 5 V).
0.0 1.0 2.0 3.0VGS (V)
0
0.5
I D (
mA
)
Linear Dependence on VGSDigital Integrated Circuits © Prentice Hall 1995IntroductionIntroduction
Sub-Threshold Conduction
0.0 1.0 2.0 3.0VGS (V)
10 12
10 10
10 8
10 6
10 4
10 2
ln(I
D)
(A)
Subthreshold exponential region
Linear region
VT
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Latchup
(a) Origin of latchup (b) Equivalent circuit
VDD
Rpsubs
Rnwell p-source
n-source
n+ n+p+ p+ p+ n+
p-substrateRpsubs
Rnwell
VDD
n-well
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SPICE MODELS
Level 1: Long Channel Equations - Very Simple
Level 2: Physical Model - Includes VelocitySaturation and Threshold Variations
Level 3: Semi-Emperical - Based on curve fittingto measured devices
Level 4 (BSIM): Emperical - Simple and Popular
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MAIN MOS SPICE PARAMETERS
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SPICE Parameters for Parasitics
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SPICE Transistors Parameters
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Technology Evolution
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Spice Parameters for Parasitics
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Process Variations
Devices parameters vary between runs and even on the same die!
Variations in the process parameters, such as impurity concentration den-sities, oxide thicknesses, and diffusion depths. These are caused by non-uniform conditions during the deposition and/or the diffusion of theimpurities. This introduces variations in the sheet resistances and transis-tor parameters such as the threshold voltage.
Variations in the dimensions of the devices, mainly resulting from thelimited resolution of the photolithographic process. This causes (W/L)variations in MOS transistors and mismatches in the emitter areas ofbipolar devices.
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Impact of Device Variations
1.10 1.20 1.30 1.40 1.50 1.60
Leff (in mm)
1.50
1.70
1.90
2.10
De
lay
(nse
c)
–0.90 –0.80 –0.70 –0.60 –0.50
VTp (V)
1.50
1.70
1.90
2.10
De
lay
(nse
c)
Delay of Adder circuit as a function of variations in L and VT
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