integrated solutions for the semiconductor industry · xpert know how services • diagnostic and...

4PAGE152

For North American orders shop online: www.bocedwards.com or call: 1-800-848-9800

INTEGRATED SOLUTIONS FOR THE SEMICONDUCTOR INDUSTRY

BOC Edwards has been involved with the semiconductor industry from the beginning of vacuum processes. In partnership with customers, BOC Edwards has developed products and services to meet their specific pro-cess requirements.

This partnership is strengthening continually as BOC Edwards pursues its goal of supplying customers with truly integrated solutions to vacuum needs.

BOC Edwards iQ dry pumps in use at Plessey Roborough in Plymouth UK. (Photograph courtesy of Plessey).

The iQ, iH and iL dry pumpsCustomer-driven improvements have resulted in the development of our iQ, iH and iL pumps. • Proven performance and high reliability in the most demanding

applications• Intelligent monitoring and control• Patented rotor arrangement gives high volumetric efficiency with low

power input• Short, simple gas path maximizes internal conductance and minimizes

dead space• No intercoolers needed• Low operating costs - consumables eliminated• Safer gas handling• Clean vacuum - no backstreaming• Designed for low maintenance• Intrinsically non polluting

These features make Drystar® pumps ideal for:• Semiconductor processing• Sputtering• Clean applications in freeze drying, vacuum deposition and special R & D• Load lock chambers• Vacuum furnaces• Chemical processes

BOC Edwards iL600 dry pump

Networks for intelligent monitoring and control in fabsBOC Edwards has pioneered the supply and use of facility wide networking of pumping systems to allow remote monitoring and system diagnostics. Multiple devices, including pumps and exhaust treatment systems can be monitored from one or more PC workstations, using user friendly Microsoft WindowsTM compatible software. Each network is individually designed to meet the unique fab requirements.

Operator using the FabWorks Plant Monitor software

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4PAGE153


In April 2002, BOC Edwards acquired the turbomolecular pump business of Seiko Instruments, Inc.• Distributed and supported globally by BOC Edwards for nearly twenty

years• Designed by continuous improvement on existing proven reliable

technology• Advanced materials and designs provide:

- Class leading performance- Low vibration- Guaranteed reliability- Low cost of ownership

• The broad product range covers all potential turbo pump applications.• Qualified by all major semiconductor OEM’s• Used in all major semiconductor fabrication plants• Installed base of over 70,000 units, 85% in the semiconductor industry

Key features• Multi-axis magnetic bearing system• High Throughput versions for high flow processes• Low vibration characteristics• Advanced controller technology• Full interfacing capability

Features and benefits• Improved pumping performance

- Optimized for semiconductor process pressures- Maximized gas throughput for each flange size- Applications specific models

• New generation controllers• Compact (1/2 rack) controller

- Auto tune enabling ‘mix and match’ pumps- Integrated TMS control- Improved diagnostics

• High power dc motor drive- Fast ramp-up time- Self regeneration upon power failure, eliminating the need for batteries

Exhaust gas management system design

TPU units on a CVD application exhaust (Photograph courtesy of TI, Dallas, USA)

BOC Edwards are unique in offering the broadest range of exhaust man-agement technologies, demonstrated in a series of products and systems designed to meet all customer requirements, from low-cost facility man-agement to full environmental protection.

The cartridge change cart for the Gas Reactor Column range simplifies theroutine maintenance of these state-of-the-art exhaust management units.

4PAGE154


FABMAX - service for the life of your fab

BOC Edwards is one of the world's largest suppliers of gases, vacuum & exhaust management equipment and chemical management systems to the semiconductor device, flat panel display and process tool manufacturing industries.

Our global network of manufacturing facilities and service support centers is dedicated to the delivery of the highest level of quality, safety and cus-tomer service.

BOC Edwards continues strengthen our substantial infrastructure built over more than two decades of service to the semiconductor industry. We operate in every major semiconductor region in the world - ensuring you have local support wherever you are.

Building on our product and application expertise and our widening base of strategic alliances, we have developed the FABMAX support program.

Equipment and component management

Global network of facilities providing:• Equipment and Systems Repair and Upgrade• BOC Edwards Kachina process tool parts cleaning and management

X Site

Productivity support

On-site management of critical materials and systems including• Bulk and special gases• Chemicals• Vacuum • Exhaust management

Project and design

• Turnkey project management for gas, chemical, vacuum, abatement and other utility systems

• ISinc 3D design• Process tool hook-up services

XPert

Know how services• Diagnostic and Analytical• Training

Web servicesSemiServe.com: EHS (environmental, health & safety) training and technical resources

XpertFabServices.com- Design resources for gas, chemical and vacuum systems

(See section 14 for contact information)

Semiconductor chamber component cleaningBOC Edwards Kachina offers full service semiconductor chamber parts cleaning, surface enhancements and component management services.

Selective chemical stripping capabilities With controlled chemis-tries and over 75 deposition-to-substrate recipes, stock loss is reduced, component life is extended, replacement costs reduced. Dedicated pro-cess lines, segregated copper strip, end-point detection and 300 mm capa-bility.

Carbon dioxide cleaning Combined with aqueous techniques, signifi-cantly reduces mobile ions, outgassing levels, resulting in faster chamber requalification.

Surface enhancement Five-axis, robotically controlled twin wire arc spray optimizes surface roughness, resulting in extended and predictable times between preventive maintenance.

Full critical dimensional inspection and metrology capability

Component management services Assembled pre-conditioned chamber-ready component sets transported in our patented Quick KitTM cleanroom compatible transport container. Increases tool uptime, reduces time to perform preventative maintenance, eliminates need for customer to manage spares inventory.

Global capabilities There are three U.S. full service facilities (Phoenix, Austin, Hillsboro), and the newest full service facility in Corbeil, France. We also offer in-fab operations in Israel, China and the UK.

Arizona

3925 E. Watkins

Phoenix, AZ 85034

+(1) 602 431 1212

Texas

4117 Commercial Center Dr.

Austin, TX 78744

+(1) 512 416 0102

Oregon

6121 W. Cornelius Pass Road

Hillsboro, OR 97124

+(1) 503 533 5848

France

224 Boulevard John Kennedy

91105 Corbeil Essonnes Cedex

+(33) 1 6088 7110

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4PAGE191


iH, iF, iL, L, IPX AND EPX DRY PUMPS AND ACCESSORIES

These are a new range of dry pumps for the semiconductor industry.

iH DRY PUMPS

The iH pumps provide high reliability coupled with low cost of ownership for difficult processes such as etch, PECVD and LPCVD used for silicon wafer and flat panel display manufacturing.

Features and benefits:• Robust, heavy duty pump mechanism optimized for particulate and

by-product• High operating temperature prevents condensation• Compact, efficient design with small footprint and high pumping speed• Low cost of ownership• Comply with CE, SEMI S2, UL and Korean S Mark

iH1800 and iH160

The iH1800 and iH160 have been added to the range of iH Dry Pumps to meet the high flow rate pumping requirements of 300 mm Semiconductor and Flat Panel Display processes, offering peak pumping speeds of 1800 m3h-1 and 160 m3h-1 respectively. As with other iH pumps in the product range, these new additions offer proven high reliability and low cost of ownership for difficult processes such as etch, PECVD and LPCVD where particulate, condensable and corrosive by-products are present.

iF1800 DRY PUMPThe iF1800 is the optimal solution for the demanding load lock pump down requirements of flat panel display process tools.

Building on the proven quality and reliability of BOC Edwards products, the iF1800 delivers improved pumping performance, the capability to achieve shorter load lock cycle times and increased tool throughput.

Features and benefits:• Rapid loadlock pump down – saves vital seconds• High reliability on high frequency cycling applications• Interfaces available for all process tools

iL DRY PUMPSThe iL is specifically designed for clean processes to give very low cost of ownership and exceptional reliability, requiring zero periodic maintenance between rebuilds. With their quiet operation, small footprint and high pump speeds, they are ideally suited to loadlock, transfer chamber, PVD, SEM and similar duties.

The iLN variants include shaft seal nitrogen purging and are designed for light duty applications such as dielectric etch.

Features and benefits:• Low cost of ownership, with no nitrogen (iL), low power and low

consumption of cooling water• Compact, efficient design, with small footprint and high pumping speeds• High reliability, so low service costs• Comply with CE, SEMI S2, UL and Korean S Mark

•

4PAGE192


L70 DRY PUMPThe L70 is a simple low cost dry pump specifically designed for clean load-locks and similar applications.

Features and benefits:• Low cost of ownership, with no nitrogen, low power and low

consumption of cooling water• Simple control

iH AND iL PUMPS: APPLICATIONS INFORMATION

The above shows the Zenith integrated pump and abatement system featuringtwo iH pumps.

The new range of BOC Edwards iH dry pumps are specifically designed for the harshest of semiconductor processes. For these applications, pumps like the iH that operate at high temperature are an advantage. In addition, the iH pumps have specially enhanced particulate handling capability.

iH pumps are designed for long service life and highly efficient use of utili-ties like cooling water, nitrogen and power. With very small footprint and pumping speeds enhanced for the latest processes, they form the optimum choice for low cost of ownership in demanding service.

Complementary to the iH range of pumps is the new iL range of pumps specifically engineered for lowest cost of ownership on clean, light duties. The iL pumps share many of the design features of the iH range (specifically long service life) coupled with a design which optimizes clean performance with minimized utility consumption. A novel seal and shaft design allows operation without nitrogen for these duties.

Refer to the information in this table to select either the iH or the iL pumps for your application. The table also shows recommendations for the exhaust management options to use.

First choice Second choice

TMS = Temperature Management SystemGRC = Gas Reactor ColumnTPU = Thermal Processing Unit

PROCESS iH iLN iL EXHAUSTMANAGEMENT

LPCVD nitride Water Cooled Trap and TMS and GRC

LPCVD others GRC or TPU

PECVD nitride TMS, and GRC or TPU

PECVD Others TMS, and GRC or TPU

Etchers

Metal TMS and GRC

Other GRC

Ion implant

Strippers and ashers

Transfer chambers (dirty)

Transfer chambers (clean)

Load lock

PVD

Sputtering

SEM

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iH80 AND iH600 DRY PUMPS

TECHNICAL DATA

1 With shaft-seal purge only

2 At 15 psi pressure drop

1 60 Hz iH600 2 50 Hz iH600

1 60 Hz iH600 2 50 Hz iH600

1 60 Hz iH80 2 50 Hz iH80

1 60 Hz iH80 2 50 Hz iH80

iH80 iH600

50 Hz 60 Hz 50 Hz 60 Hz

Peak speed m3h-1

ft3min-18651

10361

518305

600353

Ultimate vacuum1

mbarTorr

3 x 10-2

2.3 x 10-21 x 10-2

7.5 x 10-32 x 10-3

1.5 x 10-37 x 10-4

5.3 x 10-4

Typical shaft-seal nitrogen flow (slm)

4 4

Typical cooling-water flow2

l h-1

l min-11202

2404

Power input at vacuum (kW)

2.4 2.7 3.1 3.4

Rated motor power (kW) 2.9 3.5 5.1 6.1Oil capacity (l) 0.85 1.65Inlet connection ISO63 ISO100Outlet connection NW40 NW40Weight (kg) 240 405

12

-41010 0

10 1

-1-2-310 10 10

mh

-13

10 2

10 3

210 1010 10 310

10 -2 10 -1 10 0 110 10 2 10 3 410 10 5

iH600

mbar

Pa

1010 -4 -310 10 -2 10 -1 1010 0 1 310 210 0

10 1

10 2

10 3

ftm

in3

-1

iH600

12

Torr

1010 -4 -310 10 -2 10 -1 1010 0 1 310 210 0

10 1

10 2

10 3

h m

-13 1

2

10 -2 10 -1 010 10 1 10 2 10 3 10 4 510

mbar

Pa

iH80

1010 -4 -310 10 -2 10 -1 1010 0 1 310 210 0

10 1

10 2

10 3

ftm

in3

-1

iH80

1

2

Torr

4PAGE194


iH600

1 Inlet 2 Outlet 3 Air-extraction port

iH80


For information about iH accessories, see page 201.

ORDERING INFORMATIONThe iH dry pumps consist of: fully enclosed 5 stage dry pump with water-cooled motor, electrics and sensor control, gas system, facility for communication and control links for accessories and process tools, and pump display terminal. In addition, the iH600 has a direct-drive mechanical booster pump.

PRODUCT DESCRIPTION ORDERING NUMBER

iH80 dry pump200/208 V 50/60 Hz A533-50-945230 V 60 Hz A533-50-957380/415 V 50 Hz A533-50-946460 V 60 Hz A533-50-908

390

(15.

35)

195

(7.6

8)

1

(2.6

8)

68

93

(3.66)

314 (12.36)

48(1

.89)

792 (31.18)

3

925 (36.42)

661 (26.02)

231

0 (1

2.21

)

210

(8.27)

820

(32.

28)

631 (24.84)

1

663 (26.10)

2

839

(33.

03)

31

2

(3.7

4)95

(5.28)134

19539

0 (1

5.35

)

(7.6

8)

2

1

723 (28.47)141

68 (

2.68

)

529

(20.

83)

84 661 (26.02)

310

(12.

21)

526

(20.

71)

781 (30.75)

(5.55)

916 (36.06)

(3.31)


ORDERING INFORMATION

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iH1000 DRY PUMP

TECHNICAL DATA

Typical shaft-seal nitrogen flow 4 slmInlet connection ISO100Outlet connection NW40Typical cooling-water flow2

l h-1 240l min-1 4

Oil capacity 1.65 lWeight 420 kg



1 60 Hz 2 50 Hz

1 60 Hz 2 50 Hz

1 Inlet 2 Outlet 3 Air-extraction port 4 Inverter

For information about iH accessories, see page 201.

50 Hz 60 Hz

Peak speedm3h-1

ft3min-1950560

1000589

Ultimate vacuum1mbarTorr

1.3 x 10-3

1.5 x 10-36 x 10-4

7.5 x 10-4

Power input at vacuum (kW) 3.5 3.8Rated motor power (kW) 5.1 6.1

1

-41010 0

10 1

-1-2-310 10 10

h m

-13

10 2

10 3

210 1010 10 310

2

10-210 -1 10 0 10110 2 10 3 10410 5

mbar

Pa

iH1000

ORDERING INFORMATIONThe iH1000 dry pump consists of: fully enclosed 5 stage dry pump with water-cooled motor, direct-drive mechanical booster pump, electrics and sensor control, gas system, facility for communication and control links for accessories and process tools, and pump display terminal.



01010 -4

10

3ft

-1m

in

1

10 2

10 3

10-310 -2 -110 110 0 10 10 2

12

iH1000

310 Torr

19539

0 (1

5.35

)

(7.6

8)

314 (12.36)48

(1.8

9)

2

431

93 661 (26.02)

792 (31.18)

925 (36.42)

(3.66)

310

(12.

21)

992

(39.

06)

839

(33.

03)

820

(32.

28)

68

(2.6

8)

663 (26.10)

631 (24.84)

599 (23.58)

215

210

(8.47)

(8.27)

2

1 4

4PAGE196


iH1800 AND iH160 DRY PUMP

The iH1800 has been designed specifically for high throughput applications in the 300 mm and flat panel display markets. This pump combines quality and reliability based on 20 years dry pumping experience.

The iH1800 provides low power consumption minimizing environmental impact and running costs.

Features & benefits• Low power consumption• Small footprint• Proven reliability from years of experience• Conforms to international standards

TECHNICAL DATA

Typical shaft-seal nitrogen flow 4 slmInlet connection ISO160Outlet connection NW40Typical cooling-water flow

l h-1 240l min-1 4

Oil capacity 1.6 lWeight 500 kgPeak speed

m3h-1 1800ft3min-1 1060l min-1 30,000

Ultimate vacuum1mbar 1 x 10-3

Torr 7.5 x 10-4

Pa 1.0 x 10-1

Power input at vacuum (kW) 4.1Rated motor power (kW) 7.0


1 Inlet 2 Outlet 3 Alternative outlet

4 Air-extraction port 5 Inverter

For details of iH160 please contact BOC Edwards.

iH1800, 50Hz

-210

-41010 0

10 1

-110 10 0 10 1

-210 -3 10 10 -1

-13

mh

10 2

10 3

10 4

10 2 10 3 410

10 0 10 1 10 2

510 Pa

310 mbar



iH1800 dry pump200/208 V, 50/60 Hz A533-18-945230 V, 60 Hz A533-18-957380/415, 50/60 Hz A533-18-946460 V, 60 Hz A533-18-908

-13

min

ft

1010 0

-4

10 1

-210 -3 10 10 -1

10 2

10 3

iH1800, 60Hz

1010 0 1 10 2 10 3

10 4

Torr

470

(18.

50)

235

(9.2

5)

113

150

3

51

2

4

1

2

5

661 (26.02)

1067 (42.01)

334

(13.

15)

885

(34.

84)

204

385 (15.16)

641 (25.24)

674 (26.54)

340 (13.39)

654 (25.75)

878

(34.

57)

(4.45)

(5.9

1)

(8.0

3)

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iF1800 DRY PUMP

The iF1800 is the optimal solution for the demanding load lock pump down requirements of flat panel display process tools.

Building on the proven quality and reliability of BOC Edwards products, the iF1800 delivers improved pumping performance, the capability to achieve shorter load lock cycle times and increased tool throughput.

Features & benefits• Rapid loadlock pump down saves vital seconds• High reliability on high frequency cycling applications• Interfaces available for all process tools

TECHNICAL DATA

Typical gas ballast flow 59 slmInlet connection ISO160Outlet connection NW40Typical cooling-water flow2 360 l h-1 / 6 l min-1

Weight 585 kg



1 60 Hz 2 50 Hz

1 60 Hz 2 50 Hz

1 Inlet 2 Outlet

3 Alternative outlet 4 Air-extraction port

50 Hz 60 Hz

Peak speedm3h-1

ft3 min-1

l min-1

1720101028600

1800106030000

Ultimate vacuum1mbarTorrPa

8 x 10-4

6 x 10-4

0.08

5 x 10-4

3.75 x 10-4

0.05Power input at ultimate (kW) 6.1 6.8



iF1800 dry pump200/208 V 50/60 Hz A533-23-945440 V 60 Hz A533-23-975

1

2

10 0

10 1

10 2

310

10 4

-2-3-4

-210

10

10 -1 10 0

10 10 3210-1 10

1010 1

10

10 2

10

3 10 4

10

10 Pa5

10 mbar

iF1800

3m

h -1

ftm

in3

-1iF1800

1

2

-41010 0

10 1

-3 -2 -110 10 10

210

10 3

10 4

0 1 21010 10 310 Torr

470

(18.

50)

(9.2

5)

235

3 1 4

878

(34.

57)

903

(35.

55)

(4.17)

106

(13.

15)

334

1307 (51.46)

932 (36.69)

3

340 1

288

9 (3

5.00

)

334

(13.

15)

2

487 (19.17)

1173 (46.18)

911 (35.87)

NEW

4PAGE198


L70 DRY PUMP

TECHNICAL DATA

1 60 Hz 2 50 Hz

1 60 Hz 2 50 Hz

1 Inlet 2 Outlet 3 Extractor Fan Port

50 Hz 60 Hz

Peak speedm3h-1

ft3min-1

l min-1

7041

1166

8449

1400Ultimate vacuum

mbarTorrPa

5 x 10-2

3.8 x 10-2

5

3 x 10-2

2.3 x 10-2

3Typical shaft-seal nitrogen flow

slm 0 0Inlet connection ISO63 ISO63Outlet connection NW40 NW40Typical cooling water flow at 30 psi pressure drop

l min-1

l h-11.590

1.590

Power input at ultimate (kW) 1.3 1.5Rated motor power (kW) 1.8 2.2Oil capacity (l) 0.75 0.75Weight (kg) 210 210

10

210

10

10

mh-1

3

10 1010

0

-4

1

-3

10 3

1010-2 -1 0 1010 1 2 3

1 2

10 -2 10 -1 010 1010 1 2 10 3 1010 4 5

L70

mbar

Pa

ORDERING INFORMATIONThe L70 system includes as standard: optimally designed 5 stage dry pump for clean applications with enclosed, water cooled motors.


L70 dry pump200/230V, 50/60 Hz A533-77-958

-1

010

10 1

10 -2 10

ftm

in3

-1

10 2

12

10 0 10 1 1010 2 3

L70

Torr

1

2

1 3 2165 (6.50)

377

(14.

84)

189

(7.4

4)671 (26.42)

629 (24.76)21

450

(17.

72)

551

(21.

69)

47 723 (28.47)

236

(9.2

9)

(0.83)

(1.85)

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iL70, iL70N, iL600, iL600N DRY PUMPS

TECHNICAL DATA



1 60 Hz iL70/iL70N 2 50 Hz iL70/iL70N

1 60 Hz iL70/iL70N 2 50 Hz iL70/iL70N

1 60 Hz iL600/iL600N 2 50 Hz iL600/iL600N

1 60 Hz iL600/iL600N 2 50 Hz iL600/iL600N

iL70/70N


iL70/iL70N iL600/iL600N

50 Hz 60 Hz 50 Hz 60 Hz

Peak speed m3h-1

ft3min-17041

8449

518305

600353

Ultimate vacuum1

mbarTorr

5 x 10-2

3.8 x 10-23 x 10-2

2.3 x 10-23 x 10-3

2.3 x 10-32 x 10-3

1.5 x 10-3

Typical shaft seal nitrogen flow (slm) 0 / 4 0 / 4Typical cooling-water flow2

l h-1

l min-1901.5

1502.5

Power input at vacuum (kW)

1.3 1.5 1.8 2.0

Rated motor power (kW) 1.8 2.2 3.6 4.4Oil capacity (l) 0.75 1.5Inlet connection ISO63 ISO100Outlet connection NW40 NW40Weight (kg) 230 405

1010 0

-4

10 1

-210 -3 10 10 -1

10 2

10 3

1010 0 1 10 2 10 3

h m

3-1

12

-110 -2 10 10 0 10110 10 2 10 3 4 10 5

iL70/iL70N

mbar

Pa

iL70/iL70N10

-410

0

10 1

10

-13

min

ft

2

10 3

10 -3 10 -2 10 -1 10 0 110 10 102 3

1

2

Torr

1

2

-41010 0

10 1

-1-2-310 10 10

mh

-13

10 2

10 3

210 1010 10 310

10 -2 10 -1 10 0 210 1 10 10 3 1010 4 5

mbar

Pa

iL600/iL600N

1010 -4 -310 10 -2 10 -1 1010 0 1 310 210 0

10 1

10 2

10 3

min

ft3

-1

iL600/iL600N

1

2

Torr

31

2

(3.7

4)95

(5.28)134

19539

0 (1

5.35

)

(7.6

8)

2

1

723 (28.47)141

68 (

2.68

)

529

(20.

83)

84 661 (26.02)

310

(12.

21)

526

(20.

71)

781 (30.75)

(5.55)

916 (36.06)

(3.31)

4PAGE200


iL600/600N


For information about iL accessories, see page 201.

ORDERING INFORMATIONThe iL dry pumps consist of: fully enclosed 5 stage dry pump with water-cooled motor, electrics and sensor control, gas system, facility for communication and control links for accessories and process tools. In addition, the iL600 has a direct-drive mechanical booster pump.


iL70 dry pump200/208 V 50/60 Hz A533-53-945230 V 60 Hz A533-53-957380/415 V 50 Hz A533-53-946460 V 60 Hz A533-53-908

iL70N dry pump200/208 V 50/60 Hz A533-55-945230 V 60 Hz A533-55-957380/415 V 50 Hz A533-55-946460 V 60 Hz A533-55-908

iL600 dry pump200/208 V 50/60 Hz A533-54-945230 V 60 Hz A533-54-957380/415 V 50 Hz A533-54-946460 V 60 Hz A533-54-908

iL600N dry pump200/208 V 50/60 Hz A533-56-945230 V 60 Hz A533-56-957380/415 V 50 Hz A533-56-946460 V 60 Hz A533-56-908

1

2

195

(7.6

8)390

(15.

35)

2

1 3

839

(33.

03)

820

(32.

38)

93(3.66)

661 (26.02)

792 (31.18)

310

(12.

21)

631 (24.84)

663 (26.10)

925 (36.41)

210 (8.26)

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4PAGE201


iH AND iL ACCESSORIES

iH ACTIVE GAUGE KIT

Allows the iH system to monitor the pump inlet pressure with a BOC Edwards Active gauge. Active gauge and cables not included, see page 375.

iH/iL COMMUNICATIONS MODULE

Allows your process tool or PC-based software to control and monitor the iH or iL system through a serial or parallel port.

TOOL INTERFACE MODULE

The Tool Interface Module allows enhanced control of the iH or iL system through your OEM process tool.

FABWORKS

Allows you to network together all the intelligent dry pumps and exhaust gas management systems in your installation.

iL PUMP DISPLAY TERMINAL

Use the Pump Display Terminal to operate the iL system manually and to display the status of the iL system



iH Active gauge kit D372-41-000



iH/iL communications moduleSerial communication only D372-32-000Serial and parallel communications/control D372-35-000Parallel control only D372-36-000



We have a range of tool interface modules available. Please contact BOC Edwards for more information.Extension cable

1 m D372-07-6023 m D372-07-5915 m D372-07-592

EMO3 m D372-07-5985 m D372-07-59310 m D372-07-59915 m D372-07-60025 m D372-07-601


Each FabWorks central monitoring system is specified and built for your particular installation. Please contact BOC Edwards for more information.



Pump Display Terminal D372-72-800

4PAGE202


IPX DRYPUMPS

The IPX series of drypumps were specifically designed to meet the demanding requirements placed on advanced semiconductor process tool vacuum systems.

In times when space is at a premium the IPX range of drypumps replaces conventional multiple pump systems with a single pump that can be mounted on the tool to minimize footprint.

Features and benefits• Unique pumping mechanism - the IPX can pump down from atmosphere

to TMP base pressure and can operate continuously at all inlet pressures.

• Clean bearing system - conventional high vacuum bearings use grease lubrication which can be a source of contamination in process tools. IPX pumps have no high vacuum bearings and present no other source of contamination.

• Extremely reliable - field proven reliability with MTBFp = 13 years (SEMI E10) with service periods of around 5 years.

• Flexible mounting options - the IPX range can be integrated into the tool which saves space or they can be installed remotely wherever is most convenient.

• Network compatible - all IPX pumps can be ordered with Cnet which enables them to be connected to a Fab-Wide network.

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4PAGE203


IPX100 DRY PUMP

IPX100 is an innovative concept in next generation pumping. As the first point of use pump to be integrated onto process tool platforms, it has established a proven track record for extremely high performance and reliability. It is in widespread use for pumping Load Locks on the advanced 300 mm process tools offering rapid pump down from atmosphere to less than 4 x 10-3 Torr.

Features and benefitsInnovative pumping mechanism• Robust design• Extremely clean vacuum• No high vacuum bearings• Low noise and vibration

Compact construction• Cleanroom compatible• Lightweight• Small footprint

Low cost of ownership• Sub-fab space saving• No vacuum foreline• No nitrogen• Low power and cooling water

High reliability• MTBFp = 13 years (SEMI E10)• Zero periodic maintenance• Low service costs

TECHNICAL DATA

1 Gas module available on request

1 Pump inlet 2 Cooling water outlet 3 Cooling water inlet

4 Pump outlet 5 Fixing hole: Ø 10.2

IPX100

Peak speed m3h-1

ft3min-1

l min-1

10059

1667

Ultimate vacuummbarTorrPa

<5 x 10-3

<4 x 10-3

<0.5Typical shaft seal nitrogen flow (slm) 01

Inlet connection NW40Outlet connection NW25Noise dB(A) 56

Typical cooling-waterl h-1 120

Power at ultimate (kW) <2.1Rated motor power (kW) 3.8Oil capacity (l) 0.3Weight (kg) 55



IPX100200/208 V, 50/60 Hz A409-02-977400 V, 50/60 Hz A409-02-973

10

h

10

3

010

-110

-210

m

10-2-3

310

210

110

-1

10 010 -1 110 10 32

11010 -1 0 10 10 2 10 3 1010 4 5

IPX100

mbar

Pa

284 (11.18)

8 x Ø10.2 (0.40)

220

(8.6

6)

64

110

142 (5.59)

200

(7.8

7)

3

4

1

2

361.

5 (1

4.23

)

175

(6.8

9)

308 (12.13)

347

(13.

66)

522

(20.

55)

173 (6.81)216 (8.50)

4

(2.52)

(4.3

3)

4PAGE204


IPX100A DRY PUMP

IPX100A is an innovative concept in next generation pumping. Integrated onto process tool platforms it has established a proven track record for extremely high performance and reliability. It is in widespread use for pumping Load Locks on the advanced 300 mm process tools offering rapid pump down from atmosphere to less than 4 x 10-3 Torr. IPX100A differs from IPX100 in the orientation of the electrical boxes.





TECHNICAL DATA



4 Pump outlet 5 Fixing hole: Ø 10.2IPX100A

Peak speed m3h-1

ft3min-1

l min-1

10059

1667


<5 x 10-3

<4 x 10-3

<0.5Typical shaft seal nitrogen flow (slm) 01

Inlet connection NW40Outlet connection NW25Noise dB(A) 56





IPX100A200/208 V, 50/60 Hz A409-04-977400 V, 50/60 Hz A409-04-973

10

h

10

3

010

-110

-210

m

10-2-3

310

210

110

-1

10 010 -1 110 10 32

11010 -1 0 10 10 2 10 3 1010 4 5

IPX100A

mbar

Pa

1

123.26

142 (5.59)

110

110

54

284 (11.18)

4

50

3

308 (12.13)

4

214 (8.43)

54

8 x Ø10.2 (0.40)

214

4 (5

.67)

200

(7.8

7)

175

(6.8

9)

347

(13.

66)

361.

5 (1

4.23

)

2

522

(20.

55)

(2.13)(2.13)

(4.3

3)(4

.33)

(4.85)

(1.9

7)

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4PAGE205


IPX180A DRY PUMP

IPX180A is a new vacuum pump designed for use on low pressure load lock and transfer chamber applications. Its innovative pumping mechanism is unique in pumping from atmospheric pressure and achieve inlet pres-sures of less than 7 x 10-5 Torr. The pump can operate continuously at any inlet pressure and exhausts to atmospheric pressure. Cleanroom compat-ibility means the pump can be located close to the process tool.





TECHNICAL DATA



4 Pump outlet 5 Fixing hole: Ø 10.2IPX180A

Peak speed m3h-1

ft3min-1

l min-1

1801063000


<1 x 10-4

<7 x 10-5

<1 x 10-3

Typical shaft seal nitrogen flow (slm) 01

Inlet connection ISO63Outlet connection NW25Noise dB(A) 56





IPX180A200/208 V, 50/60 Hz A409-24-977400 V, 50/60 Hz A409-24-973

0

20

180

10 -4 10 -3 10 10-2 -1 010 10 1 10 2 10 3-510

40

60

80

100

120

140

160

-13

mh

-310 10 -2 -110 10 0 10 1 10 102 3 410 10 5

IPX180A

mbar

Pa

1

123.26

142 (5.59)

110

110

54

284 (11.18)

4

50

3

308 (12.13)

4

214 (8.43)

54

8 x Ø10.2 (0.40)

2

144

(5.6

7)

200

(7.8

7)

175

(6.8

9)

347

(13.

66)

361.

5 (1

4.23

)

2

522

(20.

55)

(2.13)(2.13)

(4.3

3)(4

.33)

(4.85)

(1.9

7)

4PAGE206


IPX500A DRY PUMP

IPX500A is a new vacuum pump designed for use on low pressure load lock, transfer and light process chamber applications. IPX500A provides the same performance as a small turbomolecular and backing pump com-bination in a single package. Its innovative pumping mechanism is unique in pumping from atmospheric pressure and achieve inlet pressures of less than 7 x 10-7 Torr. The pump can operate continuously at any inlet pres-sure and exhausts to atmospheric pressure. Cleanroom compatibility means the pump can be located close to the process tool.

Features & benefitsInnovative pumping mechanism• Robust design• Extremely clean vacuum• No high vacuum bearings• Low noise and vibration


Low cost of ownership• Eliminates secondary pumps• Sub-fab space saving• No vacuum foreline• No nitrogen• Low power and cooling water


TECHNICAL DATA



4 Pump outlet 5 Fixing hole: Ø 10.2

IPX500A

Peak speed m3h-1

ft3min-1

l min-1

5002958335


<1 x 10-6

<7 x 10-7

<1 x 10-4







IPX500A200/208 V, 50/60 Hz A409-14-977400 V, 50/60 Hz A409-14-973

-5-6 -4-710 10 10 10

50

032-2 -1 0 1-310 10 10 10 10 10 10

550

100

150

200

250

300

350

400

500

450

-13

mh

-41010 -5 10101010 -2-3 -1 4101010100 1 32 10

IPX500A

mbar

Pa5

1

123.26

142 (5.59)

110

110

54

284 (11.18)

4

503

308 (12.13)

4

214 (8.43)

54

8 x Ø10.2 (0.40)

2

144

(5.6

7)

200

(7.8

7)

175

(6.8

9)

347

(13.

66)

361.

5 (1

4.23

)

2

522

(20.

55)

(2.13)(2.13)

(4.3

3)(4

.33)

(4.85)

(1.9

7)

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4PAGE207


EPX HIGH VACUUM DRYPUMPS

The new compact EPX180 High Vacuum Drypump offers enhanced per-formance with reduced cost of ownership. Using a unique patent pro-tected mechanism the EPX180 is capable of pumping from atmosphere to ultimate pressures of <7 x 10-5 Torr.

Based on the successful award winning IPX range, the modular EPX180 offers outstanding performance in a package that is 20% lighter, 30% smaller and requires 40% less power than the IPX.

Features & benefits:• Compact footprint - as one of the smallest on-tool pumps available the

EPX offers outstanding savings in footprint. EPX can be mounted directly onto the tool saving foreline and installations costs or remotely if preferred.

• Low cost of ownership - EPX requires only 1.4 kW of power and incorporating idle mode to maximize power efficiency.

• Unique patent protected pumping mechanism - the EPX can pump down from atmosphere to turbomolecular base pressure and can operate continuously at all inlet pressures.

• Ultra clean mechanism - conventional high vacuum bearings use grease lubrication which can be a source of contamination in process tools. EPX pumps have no high vacuum bearings and present no other source of potential contamination.

• Extremely reliable - based on field proven IPX technology the EPX has a MTBFp = 13 years (SEMI E10) with service periods of around every 5 years to maximize the life of the pump.

• Network compatible - available with End User Control the EPX series can be connected to a Fab-Wide network for diagnostic monitoring and control.

EPX APPLICATIONS SUMMARY

The EPX series covers a broad range of applications from wafer handling through to medium duty processes.

The EPX ‘L’ Series has been designed for use in clean applications in which a non-corrosive and non-particulate forming environment is used.

The EPX ‘N’ Series include a gas module that provides Nitrogen purge extending the application range to medium processes in which low levels of corrosive vapors and particulates are expected.

A summary of the recommended process range of EPX is shown below. IPX is also shown for reference.

If the process you are interested in is not shown on the above summary please contact your nearest BOC Edwards sales office for further informa-tion.

NEW

4PAGE208


EPX180L HIGH VACUUM DRYPUMP

The EPX180L is designed for clean duty load lock and transfer applications.

Features and benefitsPatent protected mechanism• Low ultimate pressure• Low vibration

High reliability• Low service costs• Zero periodic maintenance

Choice of ‘L’ and ‘N’ versions• EPX180L for clean duty• EPX180N for light duty

Low cost of ownership• Low power only 1.4 kW• Sub fab space savings• Idle mode

Compact unit• Point of use or remote installation• Lightweight• Small footprint

TECHNICAL DATA

1 For EPX180L - Use EPX500N for light to medium duty applications. See Page 209 for summary.

EPX500L HIGH VACUUM DRYPUMP

The EPX500L is designed for clean duty load lock and transfer applications.

Features and benefitsPatent protected mechanism• Low ultimate pressure• Low vibration

High reliability• Low service costs• Zero periodic maintenance

Choice of ‘L’ and ‘N’ versions• EPX500L for clean duty• EPX500N for light duty

Low cost of ownership• Low power only 1.4 kW• Sub fab space savings• Idle mode

Compact unit• Point of use or remote installation• Lightweight• Small footprint

TECHNICAL DATA

1 For EPX500L - Use EPX N series for light to medium duty applications. See page 209 for summary.

IPX180L

Peak speed m3h-1

ft3min-1

l min-1

1801002835


<1 x 10-4

<7.5 x 10-5

<1 x 10-2




Power at ultimate (kW) 1.4Rated motor power (kW) 3.0Weight (kg) 43.5



For information about how to order a EPX180L High Vacuum Drypump, see page 209.

EPX500L

Peak speed m3h-1

ft3min-1

l min-1

5002958338


<1 x 10-6

<7.5 x 10-7

<1 x 10-4


Inlet connection ISOOutlet connection NW25Noise dB(A) 55


Power at ultimate (kW) 1.4Rated motor power (kW) 3.0Weight (kg) 43.5



For information about how to order a EPX500L High Vacuum Drypump, see page 209.

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4PAGE209


EPX HIGH VACUUM DRYPUMPS ORDER MATRIX

EPX is a configured product. Use the matrix below to choose the correct part number for the configuration you require.

ORDERING INFORMATIONSpeed4 1805 500

Application1 L2 N3 LE

TIM0 None1 C32 SPI3 E734 TEL5 LAM6 Hitachi7 MCM

Water0 None1 3/8" Quick2 1/4" Quick3 9/16" JIC

Voltage2 208 V4 400 V

If you are unsure of the correct configuration of EPX you require for your application, please contact your nearest BOC Edwards sales office for help.

A419 ––

NEW

4PAGE210


iQDP40 AND iQDP80 DRY PUMPS

TECHNICAL DATA

Maximum continuous inlet pressure 1 x 103 mbarTypical shaft-seal nitrogen flow 7 slmWarm-up time 15 minOutlet connection NW40Oil capacity 0.4 l


2 For lower exhaust gas temperatures, increased flow is required.

3 Exhaust gas temperature 125 ºC

4 Exhaust gas temperature 145 ºC

Pump speed with shaft-seal purge only.

1 50 Hz iQDP80 2 50 Hz iQDP40

iQDP40 iQDP80

50 Hz 60 Hz 50 Hz 60 Hz

Peak speed m3h-1

ft3min-14426

5532

8047

9656.4

Displacement m3h-1

ft3min-152

30.662.436.7

91.553.9

109.864.7

Ultimate vacuum1

mbarTorr

5 x 10-2

3.8 x 10-23 x 10-2

2.3 x 10-23 x 10-2

2.3 x 10-21 x 10-2

7.5 x 10-3

Inlet connection ISO40bolted

ISO63bolted


l h-1

US gal min-1 1353

0.6 1254

0.55Power input at vacuum (kW) 1.1 1.3 2.6 3.1Rated motor power (kW) 2.2 4.0Weight (kg) 186 216

010

-210

-110

010

110

210

310

110

210

m3

h-1

2

1

100

101

10 10102 3

104 5

mbar

Pa

iQDP, 50Hz

010

-210

-110

010

110

210

310

110

210

ft3

min

-1

iQDP, 60Hz

iQDP40

iQDP80

Torr

A B C D E F

iQDP40 581 - 695 371 199 554iQDP80 723 337 830 283 188 528

ORDERING INFORMATIONThe pumps listed below are standard configurations, recommended for the types of applications listed. To order other pump configurations, use the iQ ordering matrix: see page 219.


iQ 80H for semiconductor processes208 V 60 Hz iQ21-11-004415 V 50 Hz iQ21-11-007

iQ 40C for clean processes208 V 60 Hz iQ13-11-004415 V 50 Hz iQ13-11-007


iQ 80H is recommended for semiconductor processes like CVD and etch. The configuration consists of: iQDP80, 3-ph, harsh duty gas module and pump display module.iQ 40C and iQ80C are recommended for clean processes like load lock, transfer chambers and PVD. The configuration consists of: iQDP40 or iQDP80 pump, 3-ph, clean duty gas module and pump display module.

597

(23.

50)

309

(12.

17)

527

(20.

75)

390 (15.35)

195 9

F

D

C

E

A B

(7.68) (0.35)

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4PAGE211


iQDP40/iQMB250F AND iQDP80/iQMB250F DRY PUMP SYSTEMS

TECHNICAL DATA

Maximum continuous inlet pressure 20 mbarTypical shaft-seal nitrogen flow 7 slmWarm-up time 15 minInlet connection ISO63 boltedOutlet connection NW40Oil capacity

iQDP pump 0.4 liQMB250F, coupling cover 1.5 liQMB250F, shaft-seal reservoir 0.13 l


2 Exhaust gas temperature 145 °C. For lower exhaust gas temperatures, increased flow is required.


1 50 Hz iQDP80/iQMB250 2 50 Hz iQDP40/iQMB250

Direct mounted

1 Electrics module mounted horizontally. With the electrics module mounted vertically, this height is

784 mm.

Frame mounted

iQDP40/iQMB250F iQDP80/iQMB250F

50 Hz 60 Hz 50 Hz 60 Hz

Peak speed m3h-1

ft3min-1235139

290171

260153

305180

Displacement m3h-1

ft3min-1310180

375221

310183

375221

Ultimate vacuum1

mbarTorr

2.5 x 10-3

1.9 x 10-32 x 10-3

1.5 x 10-32 x 10-3

1.5 x 10-37 x 10-4

5.3 x 10-3


l h-1

US gal min-12250.99

2160.96

Power input at vacuum (kW)iQDP pumpiQMB250F

1.10.7

1.31.0

2.60.7

3.11.0

Rated motor power (kW)iQDP pumpiQMB250F

2.22.2

4.02.2

Weight (kg)Direct mountedFrame mounted

256313

286346

10-3

010

-210

-110

010

110

210

310

110

210

310

2

m3

h-1

1

10-1

10 100 1

102

103

104

105

mbar

Pa

iQMB250, 50Hz

A B C D E

iQDP40/iQMB250F 798 116 679 860.51 36iQDP80/iQMB250F - 258 821.5 842 46

A B C D E F

iQDP40/iQMB250F 164.5 760 108.5 83.5 679 179iQDP80/iQMB250F 140.5 890 98.5 71.5 821 204

10-3

010

-210

-110

010

110

210

310

110

210

310

iQDP40/iQMB250

ft3

min

-1

iQDP80/iQMB250

iQMB250, 60Hz

Torr

195 (7.68)

A

D

8.5

B

C 137

E

(0.34) (5.39)

260 260

268.5 251.5

990

(38.

98)

AE

CBD

314

(12.

36)

F

967

(38.

07)

(10.57) (9.90)

(10.24) (10.24)

4PAGE212


.

ORDERING INFORMATIONThe systems listed below are standard configurations, recommended for the types of applications listed. To order other systems, use the iQ ordering matrix: see page 219.




iQ 250H is recommended for semiconductor processes like CVD and etch. The system consists of: iQDP80 and iQMB250F pumps, 3-ph, fully enclosed, harsh duty gas module and pump display module.iQ 250C is recommended for clean processes like load lock, transfer chambers and PVD. The system consists of: iQDP80 and iQMB250F pumps, 3-ph, fully enclosed, clean duty gas module and pump display module.

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4PAGE213


iQDP40/iQMB500F AND iQDP80/iQMB500F DRY PUMP SYSTEMS

TECHNICAL DATA


iQDP pump 0.4 liQMB500F, coupling cover 1.5 liQMB500F, shaft-seal reservoir 0.13 l


2 Exhaust gas temperature 145 ºC. For lower exhaust gas temperatures, increased flow is required.


1 50 Hz iQDP80/iQMB500f 2 50 Hz iQDP40/iQMB500

Direct mounted

1For this pump combination, the center of the check-valve extends 117 mm beyond the end of the iQMB pump-motor.

Frame mounted

1For this pump combination, the center of the check-valve extends 46.5 mm beyond the end of theiQMB pump-motor.

iQDP40/iQMB500F iQDP80/iQMB500F

50 Hz 60 Hz 50 Hz 60 HzPeak speed

m3h-1

ft3min-1350207

425251

390231

460272

Displacement m3h-1

ft3min-1505299

605358

505299

605358

Ultimate vacuum1

mbarTorr

2.5 x 10-3

1.9 x 10-32 x 10-3

1.5 x 10-32 x 10-3

1.5 x 10-37 x 10-4

5.3 x 10-3


l h-1

US gal min-12250.99

2160.96


1.10.7

1.31.0

2.60.7

3.11.0

Rated motor power (kW)iQDP pumpiQMB500F

2.22.2

4.02.2

Weight (kg)Direct mountedFrame mounted

269329

299359

10-3

010

-210

-110

010

110

210

310

110

210

310

m3

h-1

1

2

-110

010

110 10

210

310

410

5

iQMB500F, 50Hz

mbar

Pa

A B C D

iQDP40/iQMB500F 25 581.5 20 844iQDP80/iQMB500F -1171 723 9 819.5

A B C D E

iQDP40/iQMB500F 262.5 108.5 -46.5* 581 179iQDP80/iQMB500F 238.5 98.5 71.5 723 204

10-3

010

-210

-110

010

110

210

310

110

210

310

ftm

in

iQMB500F, 60Hz

iQDP80/iQMB500F

iQDP40/iQMB500F

Tor

8.5

195 (7.68)

D 179 C

A

B

(0.34) (7.05)

260 260

268.5 251.5

990

(38.

98)

AD

B890 (35.04)C

314

(12.

36)

E

948

(37.

32)

(9.90)(10.57)

(10.24)(10.24)

4PAGE214






iQ 500H is recommended for semiconductor processes like CVD and etch. The system consists of: iQDP80 and iQMB500F pumps, 3-ph, fully enclosed, harsh duty gas module and pump display module.iQ 500C is recommended for clean processes like load lock, transfer chambers and PVD. The system consists of: iQDP80 and iQMB500F pumps, 3-ph, fully enclosed, clean duty gas module and pump display module.

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4PAGE215


iQDP80/iQMB1200F DRY PUMP SYSTEM

TECHNICAL DATA


iQDP pump 0.4 liQMB1200F, coupling cover 2.4 liQMB1200F, shaft-seal reservoir 0.13 liQMB1200F, gear case 1.25 l

Typical cooling-water flow2 204 l h-1, 0.92 US gal min-1

Rated motor poweriQDP pump 4.0 kWiQMB1200F 4.0 kW

Weight 450 kg


2 Exhaust gas temperature 145 °C. For lower exhaust gas temperatures, increased flow is required.


1 50 Hz IQDP80/IQMB1200F

1 The center of the check valve is 69.5mm inside the end of the iQMB booster frame.

50 Hz 60 Hz

Peak speed m3h-1

ft3min-1815480

940554

Displacement m3h-1

ft3min-11195704

1435845

Ultimate vacuum1

mbarTorr

2 x 10-3

1.5 x 10-37 x 10-4

5.3 x 10-3


2.61.1

3.11.7

10-3

010

-210

-110

010

110

210

310

110

210

310

m3

h-1

-110 10

010

110

2 310 10

4 510

mbar

Pa

iQMB1200F, 50Hz

10-3

010

-210

-110

010

110

210

310

110

210

310

ft3

min

-1

iQMB1200F, 60Hz

iQDP80/iQMB1200F

Torr




iQ 1200H is recommended for semiconductor processes like CVD and etch. The system consists of iQDP80 and iQMB1200F pumps, 3-ph, fully enclosed, harsh duty gas module and pump display module.

260 260

268.5 251.5

1050

(41

.34)

318.5811 (31.93)

-69.5*1050 (41.34)79.5

314

(12.

36)

218

1018

(40

.08)

(10.57) (9.90) (12.54)

(8.5

8)

(3.13) (2.74)(10.24)(10.24)

4PAGE216


QMB250F MECHANICAL BOOSTER PUMP

TECHNICAL DATA

Displacement (swept volume) 50 Hz supply 310 m3h-1, 185 ft3min-1

60 Hz supply 375 m3h-1, 220 ft3min-1

Effective pumping speed at 50 Hz1

iQDP40 235 m3h-1, 138 ft3min-1

iQDP80 260 m3h-1, 153 ft3min-1

Rotational speed2

50 Hz supply 0 - 2900 rpm60 Hz supply 0 - 3500 rpm

Ultimate pressure with iQDP backing pump and shaft seals purge only 7 x 10-4 mbar

Continuous inlet pressure range (with suitable backing pump) 0 - 20 mbar

Maximum outlet pressure 1000 mbarPressure differential across pump3 0 - 180 mbarRecommended backing pumps iQDP40, iQDP80Inlet connection ISO63Outlet connection ISO40Electrical supply voltage, 3-phase

50Hz 200 - 208 V, 380 - 415 V60 Hz 200 - 230 V, 460 V

Motor power 2.2 kWAmbient temperature range 5 - 40 ºCMaximum operating humidity 90% RHMinimum cooling water flow (with inlet

pressure 1 mbar and 30 ºC)4 75 l h-1

Cooling water connectionsInlet Hansen quick connect £/8

inch BSP maleOutlet Hansen quick connect £/8

inch BSP maleRecommended oil Fomblin YVAC !^/6 or

Krytox 1514Oil capacity

Coupling cover 1.5 lShaft seal reservoir 0.13 l

Weight 65 kg

1 Effective pumping speed for air at 0.3 mbar with 50 Hz supply. Effective pumping speed with 60 Hz

1 supply will be at least 20% higher than operation with 50 Hz supply.

2 Depends on pressure.

3 Determined by the hydrokinetic drive.

4 Exact cooling water requirements depend on required gas temperature, TCV setting and

4 inlet pressure.

1 50 Hz iQDP80/iQMB250 2 iQDP40/iQMB250

Pump is shown with inlet and outlet blanking flanges fitted. Dimensions are to the top

surface of the pump flange.



QMB250F50 Hz A301-85-90560 Hz A301-86-905

Supplied with one Co-Seal and one trapped ‘ O’ ring.

ACCESSORIES ORDERING NUMBER

iQMB250 and 500 motor ancillaries kit A532-25-033Use this kit to convert a QMB250 to an iQMB250.

SPARES ORDERING NUMBER

Clean and overhaul kit A301-51-815Module kit A301-51-820Shim kit A301-51-825

10-3

010

-210

-110

010

110

210

310

110

210

310

2

m3

h-1

1

10-1

10 100 1

102

103

104

105

mbar

Pa

iQMB250, 50Hz

ISO63

187.5 (7.38)

3 x M10 x 15 (0.59)

700 (27.56)

98 (3.86)

ISO40

231

(9.1

0)

125

(4.9

2)

270

(10.

63)

138 (5.43)

292

(11.

50)

140

(5.5

1)

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TECHNICAL DATA

Displacement (swept volume) 50 Hz supply 505 m3h-1, 300 ft3min-1


Effective pumping speed at 50 Hz1 QDP40 350 m3h-1, 206 ft3min-1

QDP80 390 m3h-1, 230 ft3min-1

Rotational speed2




Maximum outlet pressure 1000 mbarPressure differential across pump3 0 - 110 mbarRecommended backing pumps QDP40 / iQDP40

QDP80 / iQDP80Inlet connection ISO100Outlet connection ISO63Electrical supply voltage, 3-phase

50 Hz 200 - 208 V, 380 - 415 V60 Hz 200 - 230 V, 460 V

Motor power 2.2 kWAmbient temperature range 5 - 40 ºCMaximum operating humidity 90% RHMinimum cooling water flow (with inlet


Cooling water connectionsInlet Hansen quick connect £/8

inch BSP maleOutlet Hansen quick connect £/8

inch BSP maleRecommended oil Fomblin YVAC 16/6 or


Coupling cover 1.5 lShaft seal reservoir 0.13 l

Weight 78 kg






4 inlet pressure.

1 50 Hz iQDP80/iQMB500F 2 50 Hz iQDP40/iQMB500



10-3

010

-210

-110

010

110

210

310

110

210

310

m3

h-1

1

2

-110

010

110 10

210

310

410

5

iQMB500F, 50Hz

mbar

Pa



QMB500F50 Hz A302-85-90560 Hz A302-86-905

Supplied with two trapped ‘ O’ rings.


iQMB250 and 500 motor ancillaries kit A532-25-033Use this kit to convert a QMB500 to an iQMB500.



788 (31.02)

115

292

(11.

50)

179 (7.05)

ISO100

(4.1

7) 212

(8.3

5)

251

(9.8

8)

196 (7.72)

98

222 (8.74)

M10 x 15 (0.59) ISO634 x M8 x 16

(3.86)

106

(4.5

3)

4PAGE218



TECHNICAL DATA

Displacement (swept volume)50 Hz supply 1195 m3h-1, 715 ft3min-1


Effective pumping speed (iQDP80) at 50 Hz1 815 m3h-1, 980 ft3min-1

Rotational speed2




Maximum outlet pressure 1000 mbarPressure differential across pump3 0 - 90 mbarRecommended backing pumps QDP80 / iQDP80Inlet connection ISO160Outlet connection ISO100Electrical supply voltage, 3-phase

50Hz 200 - 208 V / 380 - 415 V60 Hz 200 - 230 V / 460 V

Motor power 4 kWAmbient temperature range 5 - 40 ºCMaximum operating humidity 90% RHMinimum cooling water flow (with inlet


Cooling water connectionsInlet Hansen quick connect £/8 inch

BSP maleOutlet Hansen quick connect £/8 inch

BSP femaleRecommended oil Fomblin YVAC 16/6 or


Gear capacity 1.25 lCoupling cover 2.4 lShaft seal reservoir 0.13 l

Weight 157 kg






4 inlet pressure.



10-3

010

-210

-110

010

110

210

310

110

210

310

m3

h-1

-110 10

010

110

2 310 10

4 510

mbar

Pa

iQMB1200F, 50Hz



QMB1200F50 Hz A305-85-90560 Hz A305-86-905

Supplied with one Co-Seal and one trapped ‘ O’ ring.


iQMB1200 motor ancillaries kit A532-12-033Use this kit to convert a QMB1200 to an iQMB1200.



110

ISO160

M12 x 15

230 (9.06)

958 (37.72)

277 (10.91)

220 (8.66)

4 x Ø18

ISO100

48

316

(12.

44)

180

(7.0

9)

368

(14.

49)

260

(10.

24)

380

(14.

96)

(1.8

9)

(0.71) (4.33)

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iQ PUMPING SYSTEM ORDER MATRIX

Refer to the table below for information about which gas module to select for your application. For more information, contact BOC Edwards or your local supplier.

1 For beam line and target only.

2 LTO, HTO, TEOS, Nitrox.

iQ GAS MODULE

APPLICATION LIGHT DUTY MEDIUM DUTY HARSH DUTY

Load lock ✓

Ashers, strippers ✓

Sputterers, evaporators ✓

Ion implanters1 ✓

Plasma etchMetalPoly/ oxideOthers

✓

✓

✓

PECVD ✓

MOCVD ✓

LPCVDOxide2

NitridePSG, BPSG Tungsten, silicidesOthers

✓

✓

✓

✓

✓

ORDERING INFORMATIONTo order your iQ dry pumping system, choose from the options listed below:

Pumps1 iQDP402 iQDP803 iQDP40 and iQMB250F (vertical mount electrics box)4 iQDP40 and iQMB500F5 iQDP80 and iQMB250F6 iQDP80 and iQMB500F7 iQDP80 and iQMB1200F8 iQDP40/iQMB250F (horizontal mount electrics box)

Gas module1 Harsh process2 Medium process3 Clean process

iQMB booster mounting and enclosures0 iQDP with no enclosures1 iQDP with enclosure2 iQMB direct mounted to iQDP, no enclosures

(not available for iQMB1200)3 iQMB direct mounted to iQDP, iQDP

enclosure (not available for iQMB1200)4 iQMB frame mounted to iQDP, no enclosures5 iQMB frame mounted to iQDP, iQDP and

iQMB enclosedControl0 No Pump Display Module1 Pump Display Module

Optional sensorsNone 0Oil level monitor(s) 1Water flow switch 2Exhaust gas temperature 3sensor1 + 2 41 + 3 52 + 3 61 + 2 + 3 7

Electrical supply200V 50Hz 3 phase 1200V 60Hz 3 phase 2208V 50Hz 3 phase 3208V 60Hz 3 phase 4230V 60Hz 3 phase 5380V 50Hz 3 phase 6415V 60Hz 3 phase 7460V 60Hz 3 phase 8

Example: iQ5251306 is an enclosed iQDP80 with a frame mounted iQMB2550F (380V, 50Hz, 3-phase), a medium process gas module, a pump display module and an exhaust gas temperature sensor.

iQ 0––

4PAGE220


INTERFACES AND NETWORKS

BOC Edwards can provide a range of interface and network options for its semiconductor dry pump and exhaust management products.

Communication with individual pump systems is achieved through parallel and serial interfaces or through a PC interface and our special software.

Systems of more than one item of vacuum equipment can be connected into a network and monitored with the BOC Edwards FabWorks software.

Interfaces and networks are tailored to suit each application and are manufactured to order. Contact BOC Edwards or your local supplier to discuss your specific requirements.

INTERFACES AND COMMUNICATIONS

OEM interfacesWorking closely with OEMs, BOC Edwards has developed the Tool Inter-face Module to connect semiconductor dry pump systems to all existing and new semiconductor tools.

Advantages of the Tool Interface Module (TIM) include:• Application specific configuration checks. When a pump system is

switched on or changed, a configuration check is made to ensure that the pump(s), gas module and sensors are connected, as specified for the process.

• Record of pump change and service history. This facility can be used to analyze how pumps operate on particular processes, and allows electronic tracking of pumps throughout a semiconductor fab.

• Automatic download of settings. The sensor settings for each process tool are automatically downloaded to the pump when it is switched on. This allows easy pump change, without reconfiguration or the need for manual set-up.

• Interfacing to other vacuum components. An auxiliary circuit card can be added to operate other vacuum system equipment, such as a gate valve in the foreline.

Communications interfacesMultiple communications interfaces can be added to BOC Edwards semi-conductor dry pump systems, allowing them to communicate through RS232, RS485 and optical fiber communication systems. In addition, vari-ous Sensorbus interfaces are also available.

PC interface kitA single pump system can be connected and controlled by a PC, through the PC Interface Kit. The kit includes a communication module, cables and the BOC Edwards Single Pumpset Monitor software. Used with a portable PC, it is an invaluable tool for service staff to configure and trouble-shoot the pump system.

The software allows the user to:• Display specific pump parameters on graphs• Log data to disc• Modify parameter set-points• Start and stop the pump

The data stored with the pump system (including events, measurements, serial number, and user pump identification) can be uploaded to a PC. The data can then be used by BOC Edwards service and applications staff for continuous product improvement.

ORDERING INFORMATIONContact BOC Edwards or your supplier for information about ordering Interface Kits.


PC Interface KitDesktop configuration D372-18-100Laptop configuration (UK) D372-18-400Laptop configuration (Europe) D372-18-200Laptop configuration (USA) D372-18-500Laptop configuration (Japan) D372-18-300

Extension Cables1 m D372-07-6023 m D372-07-5915 m D372-07-592

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FABWORKS32 VACUUM AND ABATEMENT NETWORKING

The FabWorks32 system allows multiple vacuum and abatement systems to be viewed remotely via a PC screen.

The key features and benefits include:• Real time monitoring of pump and abatement systems, increasing

efficiency of servicing and maintenance activities• Alert notification and alert status monitoring, for rapid response• Serial number tracking• Down loading of process parameter set-ups to equipment• Comprehensive data logging and historical trend production, for

equipment optimization• Multilingual platform allowing the same network to be viewed in

different languages• Remote alert notification via pager, mobile phone or e-mail, again

optimizing response time to issues• Flexible viewing via server, Local Area Network (LAN) or Internet

Network designThe BOC Edwards network uses the reliable LON Works protocol and communicates through special isolated screen twisted pair cable, which provides excellent noise immunity over long distances at high communica-tion rates.

The core database now uses a SQL server database for improved data manipulation and handling.

The network is made up of segments that are 'daisy chained' together. Network segments of up to 1000 m long can be linked together through simple routers to form a single large network of equipment. Up to 1000 devices per network can be monitored and several networks can be linked into one server, providing opportunities for 3000+ device networks!

Viewing the networkThe FabWorks32 system is a true web server. The network server links to the LON network and to the LAN as shown.

1 Browser

2 Lan/Dedicated Ethernet

3 Server

4 LON

5 Interface Module

Any client terminal connected to the LAN using Microsoft Internet Explorer 5.5 browser or better can therefore view the network.

In addition, FabWorks32 has the capability to be viewed securely across the Internet, in provision for true E-Diagnostic remote monitoring.

Network softwareThe core software comprises of several modules;• Fab Explorer - equipment monitoring mechanism, the core of

FabWorks32• User Manager - which configures user security and defines user access

privileges• Equipment Manager - which maps the network blue print, providing

clear indication of equipment / tool relationships• Data Logger/Viewer - sets up parameter logging and provides viewing

mechanism• Service - serial number tracking• Configuration Manager - Editing, uploading and downloading equipment

recipe's• Autopager - Remote alert utility for configuration of pager, mobile

phone SMS texting and e-mail notification.

Network monitoringThere are two different ways of monitoring the network.

The first mimics the previous FabWork16 viewing system, showing Plant View (over view of all equipment), Group View (showing specific details about a group) or Single Equipment View (showing detail on a single piece of equipment).

The second uses the look and feel of a windows explorer to view the equipment. Icons represent, processes, tools, chambers and equipment. These icons change color with a change of state.

integrated solutions for the semiconductor industry · xpert know how services • diagnostic and...

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