instruction manual · the telemark electron-beam(eb) source power supply with xv sweep with memory...

MODEL TT-6E-BEAM SOURCE POWER SUPPLY &

XV SWEEP with Memory Module

INSTRUCTION MANUAL

Explanation of Symbols

Lethal Voltages Present

Refer to this manual for instructions

Part Number 109-0101-2

Copyright © TELEMARK, 1994-1999 - All rights reserved

December, 1999

www.telemrk.com

Brand and product names are trademarks 0Ir

registered trademarks of their respective companies.

Telemark TT-6 Power Supply

SAFETY WARNING

ii

HIGH (POTENTIALLY LETHAL) VOLTAGES ARE PRESENT WITHIN THESEMODULES. GREAT CARE MUST BE EXERCISED WHEN PERFORMINGMAINTENANCE. HUMAN CONTACT WITH THE VOLTJl~GES CAN BE FATAL.

Make sure that the input power is turned off before removing covers. Short allcapacitors with a grounding hook. Do not test live circuits unless absolutelynecessary.

If it becomes necessary to test live circuits, all test meter connections must bemade with the power OFF. Test leads should be in good repair and havesufficient insulation for a test voltage of at least twice that to be measured. Thetest meters should be securely mounted and should not be touched after power isturned on. Do not work in cramped spaces or cluttered areas.TROUBLESHOOTING OF THIS NATURE SHOULD BE CARRIED OUT ONLYBY QUALIFIED PERSONNEL UTILIZING STANDARD SAFETY PROCEDURES.

I DANGER - HIGH VOLTAGE I


WARRANTY

The n Electron Beam Power Supplies are guaranteed against faulty materials,function, and workmanship for a period of 12 months after shipment from theTelemark factory. This warranty is valid only for normal use when regularmaintenance is performed as instructed. This warranty shall not apply if repairshave been performed or alterations made by anyone other than an authorizedTelemark representative, or if damage occurs through abuse, misuse, negligence,or accident. No charge will be made for repairs made at a Telemark servicefacility during the warranty period. Simply return the malfunctioning module,freight prepaid. Telemark reserves the right to determine the appropriate warrantyadjustment.

USER RESPONSIBILITY

The user is responsible for proper installation, operation and ordinarymaintenance of the equipment, following procedures described in this manual. Ifthe user has a doubt about use or installation of a component, your Telemarkrepresentative or the factory should be called.

It is vitally important that the user properly installs the equipment, with particularattention to correct grounding methods, as described in Chapter 3 (Installation) ofthis manual. The Warranty will be void if the equipment is improperly installedand/or improperly grounded.

Alteration of the design or any function of the equipment voids the warranty and isentirely the responsibility of the user.

iii

Te/emark TT-6 Power Supply

TABLE OF CONTENTS

SAFETY WARNING

WARRANTY

USER RESPONSIBILITY

LIST OF ILLUSTRATIONS

GENERAL DESCRIPTION

iv

Functional Description.

System Components. . .

SPECIFICATIONS

Main Cabinet. . . . . . . . . . . . . .

Source Filament Transformer ..

OptionalXY Sweep with Memory Module.

INSTALLATION

Introduction .

System Grounding Practice .

Vacuum Tank Ground .

Connections . . . . . . . . . . .

Main Cabinet. . . . . . . . . .

Sweep Module - Rear Panel.

Sweep Module - Front Panel. .

1-1

1-2

.. 2-1

· 2-2

· 2-2

... 3-1

· 3-1

· 3-2

· 3-3

· 3-5

· 3-6

· 3-9

CONTROLS ANDINDICATORS

Control Module - Power Supply. . . . . . . . . . . . . . 4-1

Control Module Chassis (Optional) 4-3

XV Sweep Controller (with Memory Module) (Optional) . 4-3

Sweep Select Module (Memory Module) (Optional) . 4-5

Main Cabinet. . . . . . . . . . . . . . . . . . . . . . . . 4-6

OPERATION


Introduction . . . . . . .

Preliminary Precautions .

Power Supply Startup . .

XV Sweep (with Memory Module) Setup

XV Sweep with Memory Module Operation .

Power Supply Shutdown .

5-1

5-1

5-1

5-2

5-3

5-3

v


LIST OF ILLUSTRATIONS

Fig. Title Page

1-A Standard TT-6 1-2

1-B Optional Controls 1-3

1-C Filament Transformers 1-3

3-A Vacuum Tank Grounding Installation 3-2

3-B Typical Mounted Filament Transformer Con 3-3

3-C Main Cabinet Rear View 3-6

3-0 Main Cabinet Connections 3-7

3-E VAC Input Terminal Block 3-8

3-F Sweep Module Rear View 3-8

3-G Sweep Module Connections 3-9

4-A Control Module - Power Supply, Front View 4-2

4-B Control Module Chassis, Front View 4-3

4-C Sweep Module, Front View 4-4

4-0 Sweep Select Module, Front View 4-5

4-E Main Cabinet, Front View 4-7

vi


GENERAL DESCRIPTION

Functional Description

The Telemark Model TT-6 Power supply is a direct current, regulated constanthigh voltage power supply. It is intended for use in the optical coating field as wellas for research applications. The TT-6 is operated from the control module.

The TT-6 is compatible with EB sources that use electromagnetic deflection orcombinations of electromagnetic deflection and permanent magnet focusing.Emission current regulated filament power is supplied to the EB sources.

A system of safety interlocks with the vacuum system is provided to protect boththe operator and the equipment.

The Telemark electron-beam (EB) source power supply with XV Sweep withMemory Modules is a four mode of operation sweeper. Front panel controlsprovide selection of the mode of operation of the sweeper: position only,triangular, circular, or spiraling.

Two sections of the front panel (can't be sweep control with module and/or sweepselect module) can be used as mounted, or pulled out and used with extention oncables for mobile use.

Do NOT attempt to carry the sweeper by the RemovableModules' handles, as the modules will unplug and

the sweeper could fall.

The sweep is needed for positioning and/or sweeping, i.e. moving the e-beamaround the EB source's crucible pocket in a defined pattern. The beammovement helps heat the crucible pocket's material more evenly. Also, largerpockets can be used to allow more material in the vacuum chamber perevaporation run.

GENERAL DESCRIPTION 1-1

Telemark TT-6 Power Supplies

Beam deflection is accomplished by applying current through magnetic coilslocated next to the crucibe pocket within the source. Changing the magnetic fieldaffects the position/motion of the electron beam. The mode used for a particularapplication is determined by the user, after evaluating the interdependencies onthe EB source, of evaporation rate, flux pattern and material.

System Components

The Tr-G Electron Beam Power Supply consists one each of the following:

1 Main Cabinet (figure 1-A)

2 Control Module/Sweep Module (figure 1-A or 1-8)

3 Filament Transformer (figure 1-C)

Figure 1-AStandardTT-6

DEPTH

_..------ 19.00 [482.6] ------......

5.25 [133.4]

STANDARD SWEEP AND CONTROL

1- 19.00 [482.60]

INCH [mm] BOX WIDTH 17.00 [431.8]DEPTH 22.00 [558.8]

-I

TT-6..@

@ @

@ II»

~~~~~~~~~~~~~~~~~~~~~~~~~~~I~~

I~~~I~~~~~~~

@ @

@@

@@@

0:= 0 0

@ @

13.97 [354.90]

1-2 GENERAL DESCRIPTION

I-- 6.85 [174.0]-1

I·~4.85 [123.2]

J IT-./.....

Optional CONTROLFOR NO SWEEP


Figure 1-COptionalControls

,.. 19.00 [482.6] ..,I: o. l'arrIDml61: :1 1.73 [43.9]0"

7.50 [190.5] DEEP

0 0 r0 I I800

8J(~](E 000 3.50 [88.8]808 -l!J EJEEEJEJ 0~ .. l0

Optional---~ PROGRAMMABLE SWEEP and 19" CONTROL

16.00 [406.4] DEEPINCH [mm]

17.50 [190.5]1

r5.00 [127.0]

-'-----t;4-~~~5.00 [127.0]

7.25 [184.2] TALLTT-6 FILAMENT TRANSFORMER

Figure 1·CFilamentTransformer

4x 1ll.31 [1ll7.9]~

f "6.00 [152.4]f

5.00 [127.0]

j L1.00 [25.4~10.50 [266.7]j.25 [6.4]

11.00 [279.4]

9.00 r228.6] TALLOptional

TT-6 FILAMENT TRANSFORMER COVER

GENERAL DESCRIPTION 1-3


SPECIFICATIONS

Main Cabinet

• Input Power208/240 volts, 3-phase, 60 Hz.380/415 volts, 3-phase, 50 Hz.

• Constant AC Power at full load AC currentTI-6: 21.8A

TI-6E: 10.8A

TI-6J: 20.3

• RegulationLess than 2% of max.

• RippleLess than 100 volts pk-pk

• Factory set current cutback level800 mao @ 7kV

• Current cutback responseLess than 100 microseconds

• Output voltage range6.5 to 7.5 kilovolts DC (negative)

• Output current (maximum)750 mao @7kV

SPECIFICATIONS 2-1


Source Filament Transformer

• Primary voltageoto 220 volts, 1-phase, 50/60 Hz

• Secondary Poweroto 8 volts, 50 amps. max.

OptionalXV Sweep with Memory Module

• Input Powerswitchable ranges of 11 0-120VAC @ 2A, or208-240V @ 1A; single-phase, 50/60Hz.

• Output powerDual Channel (longitudinal and lateral): plus or minus 1.5 amps. (mfg.adjustable) maximum, into a load with impedance of less than 15Q.

• Frequency rangeTriangle Pattern mode: 6 to 50Hz;Circle/Spiral mode: circling at 5Hz, but can collapse into spiral at ratesof 0.5 to 6Hz.

• LED BargraphsLateral and Longitudinal LED bargraphs indicating amplitude/positionchanges

SWEEP SELECT MODULE (Memory Module)

• Four (identical) Output Module pattern-bank selections

• Pattern Banks are selectable manually or remotely

2-2 SPECIFICATIONS


INSTALLATION

IntroductionPlease see Figure 1-A, Main Cabinet

The TT Electron Beam Power Supply Main Cabinet and Sweep are designed to bemounted in a standard 19 inch electronic instrument cabinet. Any suitable placeon a vacuum system that has a standard 19 inch wide opening may be used.There should be minimum 6" (152mm) clearance at the back to allow proper airflow. All modules must be secured in the cabinet before electrical connections aremade. The installation procedures are described below.

THE MAIN CABINET WEIGHS OVER 150 LBS.IT MUST BE SET ON RAILS IN A 19" CABINET.

IT IS VERY HEAVY! HANDLE WITH CARE!

System Grounding PracticeSee Figure 3-A and 3-8, Vacuum Tank Grounding Installation

A good ground is necessary to assure safe and proper operation of the powersupply. The following practices are recommended to assure a good ground.

NOTE - THE POWER SUPPLY MUST BE CONNECTED TO ANISOLATED EARTH GROUND AS SHOWN IN FIG. 3-A, 3-B or3-C, FAILURE TO CONNECT THE POWER SUPPLY TO AN

ISOLATED EARTH GROUND COULD CAUSE SEVEREDAMAGE TO THE POWER SUPPLY AND/OR

AUXILIARY ELECTRONIC CONTROL EQUIPMENT ANDWILL VOID THE WARRANTY.

INSTALLATION 3·1


Figure 3·AVacuumTankGroundingInstallation 6 Gauge Wire

(as short as possible)

3/4"x8'Copper

Rod

FilamentTransformer

Ground

Vacuum Tank GroundSee Fig. 3-A

The vacuum tank and E-gun must be connected to a good earth ground. Undernormal conditions, a good earth ground will consist of two 3/4 inch (19mm)diameter copper clad steel rods driven through the floor and into the earth nearthe tank location.

The ground rods should be connected to the vacuum tank and the filamenttransformer by a #6 AWG or larger gauge copper cable. If the distance from thegrounding rods to the tank is more than 10 feet (3 meters), but less than 20 feet,(6 meters), increase the size of the copper cable to #4 AWG. For distances of 20to 100 feet (6 to 30.5 meters), use 2 to 4 inch (50-1 01.6mm) by .035-.050 inch(.089-1.27mm) copper strap. For distances over 100 feet (30.5 meters), use 4 to 6inch (1 01.6-152.4mm) by .035-.050 inch (.089-1.27mm) copper strap. Do not usebraided wire. Be sure that the connection is made to clean metal. The rods mustbe approximately 6 feet (1.8m) apart and the resistance between the rods (withoutthe cable connection) should be 3 ohms or less. The resistance of the soil can bereduced by adding copper sulfate or salt water around the rods. A drip systemmay be required to insure maintenance of a proper ground.

NOTE - BE SURE THAT THE POWER SUPPLY CANNOT BETURNED ON DURING THE FOLLOWING TEST.

3-2 INSTALLATION


to the base of the transformer. Make sure connections at both ends are to cleanbare metal. This insures that the transformer core does not rise above groundpotential during operation.

Approximately 15 feet (3.81 meters) of high voltage coaxial cable is provided forconnection of the power supply output to the source transformer. One end of thiscable is permanently terminated within the power supply cabinet. The free endpasses through the rear panel and goes to source filament transformer.

Approximately 5 inches (.127mm) of outer covering and shield should beremoved so that the insulated center conductor is exposed. This should beconnected to the center tap. The shield should be connected to the tank groundat the transformer. The same care should be taken in making these connectionsas that taken in connecting earth ground to the tank and transformer.

Cabinet to Control Module - J1 01See Figure 1-A, 3-C, 3-D, and 4-A

There is a 25-pin 0 type connector located on the front panel of the HV module; itis the same as the J101 located on the back panel. The 25 wires carry manysignals both for commands and feedback information in analog form. This cableconnects the power supply to the Control Module. The Control Module isavailable in handheld or rack mounted.

Interlock Connections - J1 02

The external interlocks are connected to the power supply through J1 02, which islocated on the rear of the cabinet. See Figure 3-D, Control Module Connectionsfor details. 22 AWG (0.34mm2) ribbon cable or round cable should be used forthe interlock installation that is described below.

LhWARNING - ALL STATEMENTS REGARDING OPERATOR AND

, EQUIPMENT SAFETY ARE VOID IF THE EXTERNAL• INTERLOCKS ARE NOT INSTALLED AS REQUIRED.

• WATER - Source Water Interlock

Install a water flow switch in the return line of the cooling system for the electronbeam source. This switch should close when there is sufficient water flow to coolthe source and associated shields. Connect the switch to pins 1 and 9 of J1 02.

• DOOR - Tank High Voltage Access

These interlocks are to be connected to pins 2 and 10 of J102. Install seriesconnected, normally open switches on the doors and high voltage panels so thatthey are closed only when the doors of the chamber and all panels are in place.This interlock should be closed only when there is no possible chance of cominginto contact with high voltage.

• VACUUM - High Vacuum Interlock

3-4 INSTALLATION


This interlock insures that there is sufficient vacuum within the tank before thesource can be energized. This level of vacuum normally coincides with thatrequired for the energizing of vacuum gauge filaments and most units haveauxiliary contacts for this purpose. Their connection should be such that pins 3and 11 of J1 02 are shorted when the filaments of the vacuum gauge areenergized.

Remote Emission Adjust - J103

The front panel mode switch must be set to AUTO to use the remotevoltage-control input.

Remote Emission Adjust is a differential input. Install the rate signal (zero to -10volts) pin 3 and ground to pin 4 of J103. The amplitude of this signal shouldincrease when it is desired to increase the evaporation rate.

The power supply can also be turned on and off remotely. This is accomplishedby connecting a normally-closed momentary switch across terminals 5 and 6 ofJ103 and a normally-open switch across terminals 1 and 2. Depressing thenormally-open switch will turn the power supply on and depressing the normallyclosed switch will turn it off. Logic level signals are provided to indicate theoperation of the power supply. A positive signal (12 or 24 volts selected by J1 0 onmother board) at pin 9 of J1 03 indicates that the power supply and filamentcontroller is energized. A signal at pin 7 is present when the power supply is incutback because of an arc. Pin 8 is a hard TIL low signal when HV/Emission isengaged.

If the customer needs to use the remote input, but no external switches areavailable or desired; move the motherboard jumper J11 to the ON BYPASSposition and put an external jumper wire across J1 03 pins 5 and 6. (Note: If youhave Rev.D or later mother board PCB, jumper J14 Off Bypass is provided toeliminate external jumper.) This allows on/off operation from the manualcontroller, while still switched to the AUTO mode, using the remote voltage-controlinput.

Main CabinetSee Figure the system schematic, 3-8

Electrical, interlock and control connections are outlined in the following sections.Installation should only be performed by qualified personnel.

POWER IN - T81

CAUTION - GREEN WIRE MUST BE CONNECTED TO UTILITYGROUND. IT MUST NOT BE DISCONNECTED

OR BE CONNECTED TO ANY OF THE HOT LINES.

When the power supply has been installed as described in the precedingsections, the primary power should be the last connection made, with the power

INSTALLATION 3-5


Figure 3-eMain CabinetRear View 0 0 0 0

00 0

J10I

TT-6 ~ CONTROLLER (25-PIN DSUB)

"OJ-OPTIONAL-

"",,",CON_ REMOTE RATE MONITOR.CJo REMOTE ON/OFF (9-PIN DSUB)

"02........... INTERLOCKSc=P (15-PIN DSUB)

eo, ""0 0 00 0

".. ",.."..,'" ~--0 0 EMISSION OUTPUT TOFILAMENT TRANSFORMER

.., SWEEP POWER. 20BVAC

"""'" w-OPTIONAL-

....". VAC INPUTMETAL STRAIN RELIEF

0 0 0 0

HV OUTPUT (CO-AX CABLEWITH STRAIN-RELiEF)

off. See Figure 3-D, Main Cabinet Connections and 3-E, VAC Input TerminalBlock.

Input power is connected to the terminal board (TB1) mounted on the deck of thepower supply cabinet. Input power should be connected to terminals 1 and 2, andground to terminal 3. See the appropriate schematic for the power requirements.

Sweep Module - Rear PanelSee Figure 3-G

INPUT V.A.C. CONNECTION - Power

The VAC input connector (on the back panel) is a standard 115VAC 3-pin plasticdomestic male computer-style (there is a choice of input cable for either standardoutlet use, or the 208V single-phase jack on the back of a TT-3/6 power supply.The 208VAC cable is provided with systems units).

This Sweep allows you to select the input-voltage range, with a switch (on theback panel) for running on either 105-120 VAC or 208-240VAC. Switched to

the lower range, it can plug into domestic wall outlets, -115VAC.

'" WARNING: Care should be used to set the switch to a rangeLll appropriate for the available line power. Note if the switch isset at 230 but powered by 115, no damage results, but full

power cannot be achieved. Conversely, if the switch is set at115 but powered by 230, damage will likely result.

3-6 INSTALLATION


SWEEP OUTPUT CONNECTION - J3

Connection of the Sweep generator to an EB gun coil is accomplished bybringing the Longitudinal and Lateral coil leads out of the vacuum tank by way ofa feed-through. In the vacuum tank, take care to dress these leads away from theEB gun filament assembly and filament conductors. (This is further discussed inEB gun manuals.)

Outside the tank, still keep the coil leads away from the high-voltagefeed-throughs. These leads are then connected to pins 1, 2, & 3 of the Sweep'sJ3. The Sweep Output connector provided is a round metal 3-pin male Philmore.Pin 1 is the Lateral output, pin 3 the Longitudinal, and pin 2 is the commonground-return; BOTH coils return to pin 2--the common is shared. The cablemust be capable of passing a minimum of two amperes. Note the common returnis not grounded inside the Sweep, but must be grounded at the EB gun tank.

WARNING: Leaving the common ungrounded at the tankcould damage the Sweep.

TT-6 POWER SUPPLY CONNECTION - J1

The interface between the Controller and the supply is the female25-pin D-sub. The Controller connector allows Electron-Beam Power Supplyoperation via the Sweeper's special Controller/Joystick Module.

REMOTE EMISSION ON {MOMENTARY

SIGNALREMOTE EMISSION ADJ. {

o TO -10V RETURN

REMOTE EMISSION orr {N.C.

CUTBACK ON

HV/EMISSION ON

12V/204V PWR

Figure 3-DMain CabinetConnections

,- -=t.d

9

I _ 2

10

1-3

~6 11

15-

r--------------------, r-------------IITBl I: CONTROL :

MAIN POWER {fJ i:, MODULE :1s.. schematic II I I

I Jl01 I I I

IJ102 CHJ IFront or I

Back :I

I I II I II I I

MAIN CABINET:: :I I II I I

I ~-------------~I Jl03 I I I

1 I I II I I

2 I I I3 '" I, I

~ I I I4 ~ : I I

5 ~ :: XY SWEEP:6 ~ I OPTIONAL : :7 J1[A]o4I SWEEP I8 ~ POWER :9 I

I Jl05 I:

TR~~~~5~~ER{==D i L --'

PRIMARY I--------------------~

WATER {

DOOR{

VACUUM {

INSTALLATION 3-7


Figure 3-EVAC InputTerminalBlock

Figure 3-FSweepModuleRear View

TT-60. TT-6J(200V)

3_ 208/240V {

GND

3. 380/415V {

N~~P_

GND

TT-6EH

3_ 415/440V{~~~.....

N*GND

* NEUTRAL SCREW AVAILABLE FORCABLE. BUT NOT USED ELECTRICALLY

0

J2 JlJ3

OUTPUTRE:UOTE CONTROL 00HT1l0I.

0C}~ fVOLTAGE

0 co. CO2 POWER

D 00 D 00

o

o

REMOTE PATTERN-SELECTION CONNECTION - J2

You may control the external selection of the Sweep Select Module's patternbanks. This is accomplished through this male 9-pin D-sub. An indexer orcomputer may be used in conjunction with the Sweep Select Module to choosewhich of its four pattern-banks is active. Connect the indexer or computerinterface to J2 such that the appropriate pins of are shorted for selection of thedesired bank.

3-8 INSTALLATION

(~f'! ~ }POWER

-+?~J3

+~ LATERAL COIL SIGNAL }~~ SWEEP RETURN EG~~AM+>-P-_/3 LONGITUDINAL COIL SIGNAL

SWEEP -MODULE J2

(~f':: ~~~vI 14~~ REMOTE 4 - SELECT~~+15V-r--7~ REMOTE 3 - SELECT SWEEP REMOTE

+>-¥-+15V?>--tf- REMOTE 2 - SELECT~~+15V

~~ REMOTE 1 - SELECT' __ I

J1

+~}I I TT CABINET--4~

'------,~_/


Figure 3-GSweepModuleConnections

Sweep Module - Front Panel

Hand-held remotes (Removable Modules) which control beam Position; andSweep Amplitude, Frequency, and Pattern can be plugged into the 37-pin D-subconnectors on the inner-front of the Sweep.

Connection of the Sweep to its Removable Modules is shown in Fig 4-8, SweepChassis.

CONTROLLER/ JOYSTICK CONTROL - J4 &J5

The left module bay on the front of the chassis has 37-pin female D-subs for theController/Joystick Module. The bottom connector allows the Module to plugstraight in; the top allows optional cable attachment to use the Module remotely.The connectors are electrically identical, but have different mounting hardwareUack-bolts on the upper connector).

SWEEP SELECT CONTROL - J6 & J7

The right module bay on the front of the chassis has 37-pin male D-subs for theSweep Select Module. The bottom connector allows the Module to plug straightin; the top allows optional cable attachment to use the Module remotely. Theconnectors are electrically identical, but have different mounting hardwareUack-bolts on the upper connector).

INSTALLATION 3-9


CONTROLS ANDINDICATORS

Control Module· Power SupplyPlease refer to Fig. 4-A, Control Module Front View.

This section provides a description of the functions of the controls and indicatorslocated on the handheld control module.

1 HIGH VOLTAGE/EMISSION, OFF - The on/off function isprovided by a pair of push-buttons on the panel at the lowerleft. The off button lights when the High Voltage and theEmission are off.

2 HIGH VOLTAGE/EMISSION, ON - The on button lights whenHigh Voltage and the Emission are on.

The interlocks are sequential. That is, the first open interlock in the string isindicated and when it is closed, the next open interlock is indicated. When allinterlocks are closed, all of the LEOs will be energized. If Zero Start is notengaged, no interlocks can light.

.t1' Note: There is a jumper on the motherboard for REMOTE· ON~ BYPASS that also requires a jumper at J3 pins 5-6.

This 2nd jumper may be applied at J1 03 on the back panel.

3 ZERO - This interlock insures that the emission control is at itsminimum position before high voltage and filament voltage canbe applied to the source. The LED will light when the emissioncontrol knob is fUlly counterclockwise. For "AUTO" mode, theinput would need to be near 0 VDC.

CONTROLS AND INDICATORS 4·1


4 WATER - A water flow switch in the water return line from thesource assures that there is sufficient water flow to cool thesource. The LED will energize when the interlock is closed.

5 DOORS - When interlocks on all doors and panels that permithigh voltage access are closed, the interlock is closed.

6 VACUUM - With a high vacuum gauge utilized in the system, theminimum vacuum level set on the gauge must be presentbefore high voltage can be energized.

7 READY - When all of the interlocks are closed, this indicator willbe energized. The OFF push-button LED will also energize atthis time.

S VOLTAGE/CURRENT METER - A digital bar graph displays theoutput voltage and a digital display shows the emission current.The voltage range of indication is 0 to -10 kVand the current isoto .999 ampere.

9 EMISSION CURRENT - Clockwise adjustment of this controlincreases the emission level of the electron beam source.

10 REMOTE/LOCAL - (Rackmount model) Switch to toggle controlbetween panel and optional handheld control.

o

o

o

o

RACK

2 9 8CONTROL MODULE

8

o @ TT-3~

Figure 4-AControlModule PowerSupply, FrontView

4-2 CONTROLS AND INDICATORS


11 REMOTE CONNECTOR (Rack mount only) - A remoteconnection can be made from either this connector or the oneon the back.

2 Figure 4-83 4 Control

Moduleo 0 o 0 Chassis,

~~~~~ ~~~~~ Front View:%:%:%:%:% :%:%:%:%:%0 0

6

o

Control Module Chassis (Optional)See figure 4-8

1 ON/OFF SWITCH--Provides Sweeper power, not TT-3/6Controller power.

2 MODE (CONTROL / SWEEP SELECT) SWITCH--selectsbetween Control on the left and Sweep Select on the right.Note: when no Memory Module is connected, operationdefaults to the Controller (Joystick) Module.

3 & 4 POSITION L.E.D.s-show the relative position of thebeam (in two axis-Lateral [left & right] and Longitudinal [near& far]) in the pocket.

S & 6 CONTROL CONNECTORS-used to attach theController Module: the bottom one allows the module to plugon, the top is for attaching a remote cable. Note: the twoconnectors are electrically identical, with different hardware.

7 & 8 SWEEP SELECT CONNECTORS--used similarly to theControl Connectors.

xv Sweep Controller (with Memory Module) (Optional)See figure 4-C

The Removable Module may be used plugged into the chassis, or as a HandheldRemote on an extension cable.

CONTROLS AND INDICATORS 4-3


Figure 4-CSweepModule, FronView TT-3/6 CONTROL:

I~I

SWEEP

2

-7

6

4

1 PATTERN MODE SWITCH - The three-position MODE switch isused to select between SPIRAL, MANUAL beam position, andTRIANGLE pattern.

With the MODE switch in the SPIRAL condition, the Longitudinal/ModulationFrequency knob controls the spiral-collapse frequency, while both Lateral andLongitudinal Amplitude knobs control the overall size (in two axis). The Joystick isused to position the beam. The Modulation Amp knob controls the depth ofspiraling collapse (how close the beam moves towards the center of the pattern).

With the MODE switch in the MANUAL beam position setting, the Joystick is usedto position the beam; there is no sweeping.

With the MODE switch in the TRIANGLE setting, the Lateral and LongitudinalAmplitudes and Frequencies of the beam are set with the corresponding knobs.The Joystick is used to position the beam. The resulting beam movement is in adiamond(s) pattern.

2 JOYSTICK - Moves the beam size (in two axis -Lateral [left &right] and Longitudinal [near & far]), or the center position ofpatterns.

3 & 4 AMPLITUDE - Adjusts the overall pattern size (in twoaxis).

5 & 6 FREQUENCY - Adjusts the sweeping speed(s). When inTriangle mode, the Lateral and Longitudinal Frequency knobsoperate independently (in two axis). When in Spiral mode, only



the Longitudinal/Mod.Freq. pot (6) controls the spiral-collapsefrequency.

7 MOD AMP - The modulation amplifier knob adjusts the depth ofthe spiral's collapse.

Sweep Select Module (Memory Module) (Optional)See figure 4-0

3

9748-

Figure 4·0Sweep SelectModule, FrontView

The Removable Module may be used plugged into the chassis, or as a HandheldRemote on an extension cable. Each Channel (1--4) operates similarly to theController (Joystick) Module.

1 MANUAL/AUTO SWITCH - Changes the control of the SweepSelect module from the knob on the front panel (2) to theremote input from J2 on the back panel. Note: in AUTO mode,if J2 has no input, operation defaults to Sweep Select Channel1.

2 SELECT PATTERN - Rotates to select the active pattern formanual mode.

3 ACTIVE PATTERN L.E.D. -Indicates which one of the fourpatterns is active.

4 PATTERN MODE SWITCH - The three-position MODE switch isused to select between SPIRAL, MANUAL beam position, and



TRIANGLE pattern. Note: Triangle is not silkscreened on thepanel, but it is the middle position, similar to the JoystickController Module.

With the MODE switch in the SPIRAL condition, the Longitudinal/ModulationFrequency knob controls the spiral-collapse frequency, while both Lateral andLongitudinal Amplitude and Position knobs control the overall size and placement(in two axis). The Modulation Amp knob controls the depth of spiraling collapse(how close the beam moves towards the center of the pattern).

With the MODE switch in the MANUAL beam position setting, the Lateral andLongitudinal Position knobs are used to position the beam; there is no sweeping.

With the MODE switch in the TRIANGLE setting, the Lateral and LongitudinalPositions, Amplitudes, and Frequencies of the beam are set with thecorresponding knobs. The resulting beam movement is in a diamond(s) pattern.

5 & 6 POSITION - Moves the beam (in two axis-Lateral [left &right] and Longitudinal [near & far]), or the center position ofpatterns.

7 & 8 AMPLITUDE - Adjusts the overall pattern size (in twoaxis).

9 & 10 FREQUENCY - Adjusts the sweeping speed(s). When inTriangle mode, the Lateral and Longitudinal Frequency knobsoperate independently (in two axis). When in Spiral mode, onlythe Longitudinal/Mod.Freq. pot (10) controls the spiral-collapsefrequency.

11 MOD AMP - The modulation amplifier knob adjusts the depth ofthe spiral's collapse.

Main CabinetSee Fig. 4-E

1 MAIN CIRCUIT BREAKER - This provides primary circuitprotection. When it is ON, AC power is applied to the powersupply. (2-pole single phase, TT-3; and 3-pole three phase,TT-6)

2 CONTROL POWER - These (1 amp, TT-3; and 2 amp, TT-6)thermo breakers provide protection for the control circuits. Ifthey should TRIP, their actuators must be pushed in to resumenormal operation.

3 MAIN POWER INDICATOR - This LED lights when power isapplied to the control circuits.

4 HIGH VOLTAGE INDICATOR - This LED lights when the highvoltage is turned on.



Figure 4-EMain Cabinet

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5 CUTBACK INDICATOR - This LED energizes when the powersupply is in a cutback condition.

6 MANUAL/AUTO MODE SWITCH - This switch selects the modeof operation of the power supply. When in the MANUALposition, the ON push-button and EMISSION potentiometer onthe handheld control module are active. When in the AUTOposition, the control functions of J103 are active. The OFFswitch on the control module is active at all times.

7 BIAS - The Bias adjustment is located under the LEOs. The Biastrim pot is recessed and is used to adjust the "bias" set point(the minimum source current). Turning clockwise with a smallflat head screwdriver increases the filament current. With thesource current on and the emission current set at "0" the biasshould be adjusted to the point that the beam just begins toappear. Line voltage changes may affect this set point.

8 VOLTAGE ADJUST - Clockwise adjustment of the pot increasesthe output voltage level. On EB sources without sweep coils thebeam can be centered in the pocket longitudinally with thevoltage adjust.



OPERATION

Introduction

This section describes the normal operating procedures for the Telemark TTPower Supplies.

Preliminary Precautions

Before turning on the system for the first time, it is essential that the followingconditions are observed:

1 The ground system is correctly installed as described in detailin Chapter 3 (Installation), System Grounding Practice.

2 The external interlocks are correctly installed as described indetail in Chapter 3, Interlock Connections, page 3-5.

3 The vacuum tank is operational.

4 The filament assembly is assembled to specifications and notshorted to ground, and the E-beam gun has material in itscrucible.

Power Supply Startup

1 Turn on primary AC POWER circuit breaker.

Note: Allow two minutes for the unit to warm up beforeproceeding.

2 Observe the interlock lights. All should be on. If any ofthese lights are not illuminated, Source Emission Adjust must

OPERATION 5-1


be to zero, the corresponding open interlock must be locatedand the condition causing the open interlock corrected. Thehigh voltage and source filament are then ready to be turnedon.

3 With the front panel switch in MANUAL turn on the high voltageand emission by depressing the Controller's ON push-button.

4 High voltage will now be applied to the electron beam sourceand HV level will be indicated by the High Voltage digital bargraph.

5 Adjust high voltage to the operating level.

6 SlOWly increase the BIAS ADJUST trimmer until you see a smallamount of emission current. Check the E-beam gun source fora beam. Decrease this setting to slightly below the point atwhich emission occurs. Leave the potentiometer at this setting.

7 Increase the Controller's SOURCE EMISSION ADJUSTpotentiometer to the required operating level indicated by thedigital display of current.

xv Sweep (with Memory Module) Setup

The following is the procedure to set the Sweep Module Controller/JoystickModule for initializing operating levels. (This may be done with the Moduleplugged into the front panel or extended by cable.)

1 With the HV/Emission off, place the front-panel switch"control/sweep select" in the "control" position.

2 Turn on the "power" switch.

3 Set the joystick to its midpoint, and switch the module's modeswitch to "manual."

4 Note the LED bargraph displays are approximately mid-scale.Slight adjustment of the joystick may be necessary.

5 Turn on the E-beam Power Supply's high-voltage

Perform steps 3 through 6 above. Increase the Emission outputadjustment slowly until there is a barely discernible beam in theEB gun's crucible pocket. The beam should have enoughhigh-voltage to strike near the center of the crucible. Keep theemission low, around 30 milliamperes.

6 Slowly move the joystick and observe movement of the beam inthe crucible. This ensures connection of the deflection coilsand Sweep output. With the beam in the center of the pocket,turn Emission down.

5-2 OPERATION


7 Place the front-panel switch "control/sweep select" in the"sweep select" position.

S Switch the Sweep Select Module's control-select toggle-switch(labeled "manual/auto') to 'manual.' Turn the rotary switchlabeled "select" to pattern-bank channel 1.

9 Switch the channel's mode switch to "man" (manual).

10 Bring the E-beam Power Supply's Emission up slowly and usethe Sweep Select's channel 1 position knobs to center thebeam in the crucible pocket. Turn the Emission down.

11 Repeat the last three steps for each of the other pattern-bankchannels.

121f more than one Sweep Select Module is to be used (foradditional pattern storage), it is advisable to center thechannels at this time.

xv Sweep with Memory Module Operation

The system is now operational. The position of the E-beam in the crucible can bemoved or swept by adjustment of the Sweeper removable module controls.

Patterns are determined using the Controller/Joystick Module while watching theE-beam in the vacuum tank's EB gun crucible. Once setup and positioned, theycan be copied to Sweep Select Module pattern-bank channels even with Emissionoff: visually match front-panel LED bargraph-display motions controlled by thejoystick system with those controlled by the Sweep Select channels. Oncepatterns are complete, it is best to check them with low Emission into the tank.

Note The E-beam shape may be affected somewhat as Emission output is laterincreased to high levels. If the E-beam spreads, the pattern may end upsweeping wider areas than previously calibrated.

~ [CAUTION: always keep the E-beam in the crucible pocket.

Power Supply Shutdown

1 Reduce the EMISSION ADJUST potentiometer to zero. Theindicated emission current should go to zero. If it does not, thebias setting is too high and should be reduced.

2 Turn off the high voltage and emission by depressing the OFFpush-button. The indicated voltage level will go to zero.

Note: Allow two minutes for the unit to cool down beforeproceeding.

OPERATION 5-3


{This may be accomplished with the optional TT-3/6 Controllersection of the Controller/Joystick Module. Note also the PowerSupply high-v will be deactivated if the Controller/JoystickModule is unplugged.}

3 Turn off the main circuit breaker.

4 Turn off the Sweep's POWER switch. The sweep outputs aredeactivated.

5 Turn off the primary source of (208/240) VAC power to thesystem.

6 The system is now totally de-energized.

5-4 OPERATION

CO NFI DE NTIAL This clocuMent conto.lns proprleto.ry clo. to. of TF! TELEMARK o.ncl is not to be copieclor clistributecl without the prior written consent of o.n officer of TFI TELEMARK, The receipt orpossession of this clocuMent cloes not convey o.ny rights to reprocluce it, clisclose its contents, orto Mo.nufo.cture, use or sell o.nything incorporo.ting the concepts o.ncl cleto.ils clisclosecl by it, Suchconcepts o.ncl cleto.lls o.re not to be used other tho.n for the benefit of TFI TELEMARK o.ncl o.re notto be cllsclosecl to others without the prior written consent of o.n officer of TF! TELEMARK,

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TT-6 MAIN CHASSIS SCHEMATIC

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/REVGIDATE 12/23/99

CONFIDENTIAL This dOCUMent contains proprietary data of TFI TELEMARK and is not to be copiedor distributed without the prior written consent of an officer of TFI TELEMARK, The receipt orpossession of this docUMent does not convey any rights to reproduce It, disclose its contents, orto Mo.nufacture, use or sell anything incorporo. ting the concepts and details disclosed by it. Suchconcepts and deto.lls are not to be used other tho.n for the benefit of TFI TELEMARK o.nd o.re notto be disclosed to others without the prior written consent of an officer of TFI TELEMARK.

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SIZE A SHEET 10F1 DWG BYPWF DATE 8-19 -96

CONFIDENTIAL This docur"lent contQins proprletQry dQtQ of TFI TELEMARK Qnd is not to be copiedor distributed without the prior written consent of Qn officer of TFI TELEMARK. The receipt orpossession of this docur"lent does not convey Qny rights to reproduce it, disclose Its contents, orto rlQnufQcture, use or sell Qnythlng Incorporo.ting the concepts o.nd deto.ils disclosed by it. Suchconcepts o.nd deto.ils o.re not to be used other tho.n for the benefit of TFI TELEMARK o.nd o.re notto be disclosed to others without the prior written consent of o.n officer of TFI TELEMARK.

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SIZE A SHEET 10F1 DWG BYPWF DATE 09/20/00

instruction manual · the telemark electron-beam(eb) source power supply with xv sweep with memory...

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