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ZOLIX INSTRUMENTS CO.,LTD.

Motion Control

http://www.zolix.com.cn/en/index_0.html

World-Class Photonics Brand

Service Worldwide

Motorized Linear Stages

Motorized Vertical Stages

Motorized Rotation Stages

Motorized Goniometers

Combinated Stages

Motion Controller

Motorized Linear Stages Motorized Vertical Stages Motorized Rotation Stages Motorized Goniometers Combinated Stages Motion Controller

Zolix was established since 1999 and has been a leading global supplier of opto-mechanics and spectroscopy in China.

Have strong R&D ,Production,Sales,and after service team with many years experience of industry knowledge and expertise

across a broad range of technologies. Our products has been exported to worldwide:Europe,USA,India,Southeast and more

than 50 countries;

World-Class Photonics Brand Service Worldwide

Products:

Spectroscopy

Monochromators and Accessories

Solar Cell System

Light Source

In Addition, Zolix has built a strong history of partnering with OEM customers delivering solutions from sub assemblies to full

solutions including design, testing and manufacturing.

Welcome to agents and distritbutors !

Measurement System

Motorized Stage

Manual Stage

Optical Mirror Mounts

Optical Table

Optic

Certification

Motorized Linear Stages 2

2 MAR series Ultra- Precision Linear Stages

4 uKSA Series Ultra- Precision Linear Stages

6 KSAXXX-11/12-X Stepper Motor ,High-Precision Linear

Stages,Application for Labs

8 KSAXXX-13-X Stepper Motor ,High-Precision Linear

Stages Application for Industry

10 PSAXXX-11-X Stepper Motor,Precision Linear Stages

Application for Labs

12 PSAXXX-113P-X 3 Phase Stepper Motor,Precision

Linear Stages

14 PSAXXX-11AS-X Servo Motor ,Precision Linear Stages

16 PSAXXX-13-X Stepper Motor,Precision Linear Stages

Application for Industry

18 TSAXXX-C Stepper Motor,Ultra-Thin Linear Stages

18 TSA Series Linear Stages

19 TSAX Stepper Motor,Linear Stages

20 TSAXXX-B (F) Stepper Motor,Linear Stages,Large Load

23 TSAW1000X100-XY Integrated Two Dimension Linear

Stages

24 MScope series Motorized Microscope Stage

25 Integration System

ZO

LIX

INS

TR

UM

EN

TS

CO

.,LT

D.

Mot ion Control

Motorized Vertical Stages 26

26 KSAV Series Ultra-High Precision Motorized Vertical

Stages

27 KSAXXX-Z High Precision Motorized Vertical Stages

29 PSAXXX-11-Z Stepper Motor,Precision Linear Stages

Application for Industry

31 PSAV Series High Precision Motorized Vertical Stages

Motorized Rotation Stages 32

32 RAuK Series Ultra-High Precision Motorized Rotation

Stages

34 RAK Series High Precision Motorized Rotation Stages

36 RAP Series Precision Motorized Rotation Stages

38 Integration&Customize System

Motorized Goniometers 39

39 PSAG Series High Precision Motorized Goniometer

40 PSAG Series High Precision Motorized Goniometers

41 TSAG Series Precision Motorized Goniometers

42 Integrated&Customize System

Motion Controller 43

43 MC600 Controller

45 SC300 Controller

45 HC-100 single axis stepper motor controller by hand

2 Tel: +86 10 56370168 http://www.zolix.com.cn



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Motion Control MAR series Ultra- Precision Linear Stages


Related Products:

SC300 TMC-USB

MAR series Ultra- Precision Linear Stages

Specification:

MAR series Ultra- Precision Linear Stages which material is Al has

high resolution and positioning accuracy with cross-roller guide

and small lead ballscrew ! The precision grinding craft ensure

movement precision . MAR has small size and very light weight .

The application is for high precision optical experiment/positioning/

processing and related fields.

Ball Screw

Cross Roller Guide Sensitivity

<1μm

Model Sheet:

Model MAR10-40 MAR20-65 MAR50-90 MAR100-90

Travel (mm) 5 10 25 50

Table size (mm) 40 40 65 65 90 90 90 155

Pitch (mm) 1

Resolution (μm) 0.625

Repeatability (μm) 2

Backlash (μm) 3

Stepper Motor

(Angle)28 (1.8 ) 35 (1.8 ) 42 (1.8 )

Current (A) 0.67 1 1.7

6 14 40

Load (Kg) 3 5 8 10

Weight (Kg) 0.3 0.6 1.4 2.4

R-Grade3D

MAR50-90/100-90MAR10-40/20-65

Diagram:

MAR10-40

+24V

GND

LIMIT+

LIMIT-

Net2 Net1

D1ID-20mA

+

E

+

D

U1

PI-GP1S092HCPI-DIP

+

E

+

D

U2

PI-GP1S092HCPI-DIP

1

36

7

4

2

5

8

910

A+

A-

B+ B-

M

MAR50-90/100-90

MAR20-65

+24V

GND

LIMIT+

LIMIT-

QT1IT-8050-SOT23

R1

1M-0805QT2IT-8050-SOT23

R21M-0805

+

E

+

DU1

PI-GP1S092HCPI-DIP

+

E

+

DU2

PI-GP1S092HCPI-DIP

D1ID-20mA

1

36

7

4

2

5

8

910

A+

A-

B+ B-

M

QT1IT-8050-SOT23

R1

1M-0805QT2IT-8050-SOT23

R21M-0805

+

E

+

DU1

PI-GP1S092HCPI-DIP

+

E

+

DU2

PI-GP1S092HCPI-DIP

+

E

+

DU3

PI-GP1S092HCPI-DIP

D1ID-20mA

1

2

3

4

5

6

7

8

9

A+

A-

B+

B-

24V

GND

zero sensor

LIMIT-

LIMIT+

A+

A-

B+ B-

M

Stepper MotorStepper Motor

Stepper Motor



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3Tel: +86 10 56370168 http://www.zolix.com.cn

Motion Control MAR series Ultra- Precision Linear Stages

Drawing:

MAR50-90

MAR10-40

MAR100-90

MAR20-65




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Motion Control uKSA Ultra-Precision Linear Stages

uKSA Series Ultra- Precision Linear Stages

Specification:

uKSA series ultra-high precision motorized translation stage,includes

travels are below: 50,100,150,200mm. Application:ultra-high precision

fileds;for example: ultra-high precision laser marking,laser scanning

measurement.

Specification:

Travel: 50,100,150,200mm

Motor: 3 Phase Motor

Resolution (Closed-Loop): 0.1 um

Straightness&Parallism: <6um

Yaw&Pitch: <15

Model Sheet:

Model uKSA50 uKSA100 uKSA150 uKSA200

Travel (mm) 50 100 150 200

Pitch (mm) 4

Motor Model FHB366-D (3 Phase)

Closed-Loop Resolution

(μm)0.1

Max Speed (mm/s) 40

Repeatability (μm) 2 2

Backlash (μm) 1 1

Straightness (μm) 6 10

Parallism (μm) 6 10

Weight (Kg) 15 18 22 25

Load (Kg) 30

Related Products:

MC600 Controller

Motor Diagram:

Grating Diagram:

1 8

7 6

5

4

3

2

24V

GND

LIMIT-LIMIT+

Zero Sensor

U

V

W

3 Phase Step MotorU

V W

Zero Sensor+ +

E D

1K 1/4W

1

3

42

55V

A+

B+

GND

TMC Controller

SUSU-Grade

Ball Screw

class 3 Cross Roller Guide

Grating Encoder

3DResolution

0.1μm

Application:



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Motion Control uKSA Ultra-Precision Linear Stages

334413.5

45 150

150

4 -Ø6.5 th ru

50100

150

180

75

2 3

100150245

25

150

17-M64-Ø11

150

70 1504-Ø6.5 th ru

384463.5

755010

015

018

0

1 9523

25

100150295

17-M64-Ø11

150

95 150

434513.5

755010

015

018

0

4 -Ø6.5 th ru

24523

25100150345

15-M64-Ø11

135 150 4-Ø6.5 th ru

150

75

250

50100

150

180

400

4-Ø11 17-M6

489566 .5

115125

150125

50

65

23

Drawing:

uKSA50

uKSA150

uKSA100

uKSA200




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Motion Control KSAXXX-11/12-X High Precision Linear Stages

KSAXXX-11/12-X Stepper Motor ,High-Precision Linear Stages,Application for Labs

Model Sheet:

ModelKSA050-

11/12-X

KSA100-

11/12-X

KSA150-

11/12-X

KSA200-

11/12-X

KSA300-

11/12-X

KSA400-

11/12-X

Travel (mm) 50 100 150 200 300 400

Pitch (mm) 4 5

Closed-loop

Resolution (μm)1

Resolution (μm) 2.5 3.125

Max Speed (mm/sec) 40 50


Backlash (μm) 5

Yaw ( ) 15 20 25 30

Pitch ( ) 15 25 30 40

Straightness (μm) 10 12 15 20

Parallism (μm) 10 12 15 20

Stepper Motor (Angle) 42 (1.8 ) 57 (1.8 )

Current (A) 1.7 2.4

Load Capacity (Kg) 30 50

Motor Diagram:Grating Diagram:

Related Products:

MC600 Controller

Application:

Zero sensor1K 1/4W

1

2

3

4

5

6

7

8

9

D Connector 9(Z)

24V

GND

LIMIT-

A+

A-

B+ B-

M

Step Motor

LIMIT+

zero sensor

Opposite side limit sensor(-)

Motor side limit sensor(+)

+ +

E DA+

A-

B+

B-

1

2

3

4

5

6

7

8

9

D Connector 9(Z)

5VGNDA+

B+

A-

B-

Z+Z-

K-GradeSUS

Ball Screw

class 5 Linear slide guide

Grating Encoder Resolution

1μm 3D

TMC Controller



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Motion Control KSAXXX-11/12-X High Precision Linear Stages

Drawing:

KSA050-11/12-X

KSA150-11/12-X

KSA300-11/12-X

KSA100-11/12-X

KSA200-11/12-X

KSA400-11/12-X




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Motion Control KSAXXX-13-X High Precision Linear Stages

KSAXXX-13-X Stepper Motor ,High-Precision Linear Stages Application for Industry

Model Sheet:

ModelKSA050-

13-X

KSA100-

13-X

KSA200-

13-X

KSA300-

13-X

KSA400-

13-X

Travel (mm) 50 100 200 300 400

Pitch (mm) 4 5

Closed-loop

Resolution (μm)1


Max Speed (mm/

sec)40 50


Backlash (μm) 5

Yaw ( ) 15 20 25 30

Pitch ( ) 15 25 30 40

Straightness (μm) 10 12 15 20

Parallism (μm) 10 12 15 20

Stepper Motor

(Angle)57 (1.8 )

Current (A) 2.4

Related Products:

MC600 Controller

Motor Diagram:

Grating Diagram:

1

2

3

4

5

6

7

8

9

D Connector 9(Z)

GND

LIMIT-

A+

A-

B+ B-

M

Step Motor

LIMIT+Opposite side limit sensor(-)


A+

A-

B+

B-

1

2

3

4

5

6

7

8

9

D Connector 9(Z)

5VGNDA+

B+

A-

B-

Z+Z-

K-Grade

Ball Screw


Grating Encoder Resolution

1μm 3D

TMC Controller



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Motion Control KSAXXX-13-X High Precision Linear Stages

Drawing:

150

u

150

u

150

u

150

u

150

u

KSA050-13-X KSA100-13-X

KSA200-13-X KSA300-13-X

KSA400-13-X




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Motion Control PSAXXX-11-X Precision Linear Stages

PSAXXX-11-X Stepper Motor,Precision Linear Stages Application for Labs

Model Sheet:

ModelPSA050-

11-X

PSA100-

11-X

PSA150-

11-X

PSA200-

11-X

PSA300-

11-X

PSA400-

11-X

Travel (mm) 50 100 150 200 300 400

Pitch (mm) 4 5

Resolution (8 sub-

division) (μm)2.5 3.125

Max Speed (mm/

sec)40 50


Backlash (μm) 5

Straightness 10μm 10μm/100mm

Parallism 15μm 15μm/100mm

Stepper Motor

(Angle)42 (1.8 ) 57 (1.8 )

Current (A) 1.7 2.4

Max. Center Load

(Kg)30 50

Diagram:

Related Products:

SC300

Application:

Zero sensor1K 1/4W

1

2

3

4

5

6

7

8

9

D Connector 9(Z)

24V

GND

LIMIT-

A+

A-

B+ B-

M

Step Motor

LIMIT+

zero sensor



+ +

E DA+

A-

B+

B-

P-Grade

Ball Screw


3D

MC600



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Drawing:

PSA050-11-X

PSA150-11-X

PSA300-11-X

PSA100-11-X

PSA200-11-X

PSA400-11-X




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Motion Control PSAXXX-113P-X Precision Linear Stages

PSAXXX-113P-X 3 Phase Stepper Motor,Precision Linear Stages

Model Sheet:

Model PSA050-

113P-X

PSA100-

113P-X

PSA150-

113P-X

PSA200-

113P-X

PSA300-

113P-X

PSA400-

113P-X

Travel (mm) 50 100 150 200 300 400

Pitch (mm) 4 5


Max Speed (mm/

sec)40 50


Backlash (μm) 5



Stepper Motor

(Angle)57 (1.2 )

Current (A) 5.8

Load Capacity

(Kg)50

* Note: 1600pulse/rev

Diagram:

Zero sensor1K 1/4W

1

2

3

4

5

6

7

8

9

D Connector 9(Z)

24V

GND

LIMIT-

LIMIT+

zero sensor



+ +

E DU

V

W

3 Phase Step Motor

P-Grade

Ball Screw


3D

Related Products:

SC300 MC600



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Motion Control PSAXXX-113P-X Precision Linear Stages

Drawing:

PSA050-113P-X

PSA150-113P-X

PSA300-113P-X

PSA100-113P-X

PSA200-113P-X

PSA400-113P-X




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Motion Control PSAXXX-11AS-X Precision Linear Stages

PSAXXX-11AS-X Servo Motor ,Precision Linear Stages

Model Sheet:

Model PSA050-

11AS-X

PSA100-

11AS-X

PSA150-

11AS-X

PSA200-

11AS-X

PSA300-

11AS-X

PSA400-

11AS-X

Travel (mm) 50 100 150 200 300 400

Pitch (mm) 4 5

Resolution

(μm)0.4 0.5

Max Speed

(mm/sec)200 250

Repeatability

(μm)3

Backlash

(μm)5



Servo Motor

Power (W)100 200

Load

Capacity (Kg)20 30

*Note: 1000pulse/rev

Diagram:

Related Products:

MC600ASP Controller

Zero sensor1K 1/4W

1

2

3

4

5

6

7

8

9

D Connector 9(Z)

24V

GND

LIMIT-

LIMIT+

zero sensor



+ +

E D

V U

W

-PS PS

5VFG GND

TMC Controller

P-Grade

Ball Screw


3D



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Motion Control PSAXXX-11AS-X Precision Linear Stages

65 100 50 50 50 50 100607

7532-M6

50160

717512

516

0

125

715016

0

65 100 100 100 100 100707

75125

160

32 -M6 75125

14- 6 .5 th ru 12 - 6 .5 th ru

79708

79808

11 counterbore 11 counterbore

25-M6

50120

65 50 50 50 50 50449

595010

012

5

50100125

25-M6

65 50 50 50 50399

50120

595010

012

5

5 0100125

10- 6 .5 thru 12- 6 .5 thru

92513

92563


Drawing:

PSA050-11AS-X

PSA150-11AS-X

PSA300-11AS-X

PSA100-11AS-X

PSA200-11AS-X

PSA400-11AS-X

65

120

50100

125

100125

25-M6

59

299

50

50

65

120

5910025-M6

50100

125

50

505050349

50125

8- 6 .5 thru

100

4- 6 .5 th ru

92413

92463





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PSAXXX-13-X Stepper Motor,Precision Linear Stages Application for Industry

Diagram:

Related Products:

SC300 Controller

Application:

Model Sheet:

ModelPSA050-

13-X

PSA100-

13-X

PSA200-

13-X

PSA300-

13-X

PSA400-

13-X

Travel (mm) 50 100 200 300 400

Pitch (mm) 4 5

8 Sub

-Resolution

(μm)

2.5 3.125

Max Speed

(mm/sec.)40 50

Repeatability

(μm)3

Backlash (μm) 5


Parrallism 15μm 15μm/100mm

Stepper Motor 57 (1.8 )

Current (A) 2.4

Max. Center

Load (Kg)50 70

We can customize if you have any special requirement!

1

2

3

4

5

6

7

8

9

D Connector 9(Z)

GND

LIMIT-

A+

A-

B+ B-

M

Step Motor

LIMIT+Opposite side limit sensor(-)


A+

A-

B+

B-

TMC Controller

P-Grade

Ball Screw


3D



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Drawing:

363 55 423 55

633 55

523 55

763 55

PSA050-13-X

PSA200-13-X

PSA400-13-X

PSA100-13-X

PSA300-13-X




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Motion Control TSAxx-C Ultra-Thin Linear Stages

TSAXXX-C Stepper Motor,Ultra-Thin Linear Stages

TSA Series Linear Stages

Model Sheet:

Model TSA30-C TSA50-C

Travel (mm) 30 50

Pitch (mm) 1

Resolution (8 subdivision) (μm) 0.625

Max speed (mm/sec.) 10



Working Current (A) 1.7

Max. Center Load (Kg) 10

Weight (Kg) 1.25 1.4

Please add BP-20 when you integrate TSA50-C

Diagram:Related Products:

SC300 Controller

Application:

9

counterborecounterbore

TSA30-C TSA50-C

Drawing:

Zero sensor1K 1/4W

1

2

3

4

5

6

7

8

9

D Connector 9(Z)

24V

GND

LIMIT-

A+

A-

B+ B-

M

Step Motor

LIMIT+

zero sensor



+ +

E DA+

A-

B+

B-

T-Grade

HC-100 Controller



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Motion Control TSAX Linear Stages

TSAX Stepper Motor,Linear Stages

Model Sheet:

Diagram: Related

Products:

Application:

Zero sensor1K 1/4W

1

2

3

4

5

6

7

8

9

D Connector 9(Z)

24V

GND

LIMIT-

A+

A-

B+ B-

M

Step Motor

LIMIT+

zero sensor



+ +

E DA+

A-

B+

B-

T-Grade

5511

210

0

32

7

63

120

34 8-M425-M6

50 50 50 50 50 50 50

401 55

120

Drawing:

TSA50

TSA150

TSA100

TSA200

Model TSA50 TSA100 TSA150 TSA200

Travel (mm) 50 100 150 200

Pitch (mm) 4


Max Speed (mm/sec.) 20 40


Stepper Motor 42 (0.9 ) 42 (1.8 )


Max. Center Load (Kg) 15 10 7

Weight (Kg) 2.75 3 3.3 3.8

SC300 Controller HC-100 Controller




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Motion Control TSAxx-B (F) Linear Stages

TSAXXX-B (F) Stepper Motor,Linear Stages,Large Load

Related Products:

SC300 Controller

Model Sheet:

Model TSA

50-B

TSA

100-

B

TSA

150-

B

TSA

200-B

(F)

TSA

300-B

(F)

TSA

400-B

(F)

TSA

500-

B

TSA

600-

B

TSA

800-

B

TSA

1000-B

Travel (mm) 50 100 150 200 300 400 500 600 800 1000

Pitch (mm) 4 5

Resolution

(μm)1.25 2.5 3.125

Max Speed

(mm/s)20 40 50

Repeatablity

(μm)5

Stepper

Motor 42 (0.9 ) 42 (1.8 ) 57 (1.8 )

Current (A) 1.7 2.4

Load

Capacity (Kg)30 50

Diagram:

Zero sensor1K 1/4W

1

2

3

4

5

6

7

8

9

D Connector 9(Z)

24V

GND

LIMIT-

A+

A-

B+ B-

M

Step Motor

LIMIT+

zero sensor



+ +

E DA+

A-

B+

B-

T-Grade



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50100

120

43 .5 507X50(=350)

435

50100120

25-M616-Ø11 coun terbo re

16-Ø6.5

55

55

Drawing:

TSA50-B

TSA150-B

TSA300-B

TSA500-B

TSA100-B

TSA200-B

TSA400-B

TSA600-B

50100120

51.5

50

100251 55

Ø11 counterbore4-Ø6.5 25-M6

120

100

55

50100120

25-M6Ø11 counterbore

50120

100

51 .5

55

50

3X50(=150)301

8-Ø6.5

55

50100

120

50100120

51.5 50

3514X50(=200)

10-Ø6.5Ø11 counterbore

55

25 -M6

55

64 .5 50

686

50100

110

144

160

5 0

10X50(=500)

100110144160

61

22 -Ø11 counte rbore22-Ø6.5 27-M6

71

50

535

50100

120

4 3 .5

16-Ø6 .5

7X50(=350)

16-Ø11 counterbore

55

50100120

25-M6

55





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TSA800-B

TSA1000-B

TSA200-BF

TSA300-BF

TSA400-BF




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Motion Control TSAW100 100-XY Integrated Linear Stages

TSAW1000X100-XY Integrated Two Dimension Linear Stages

Model Sheet:

Model TSAW100 100-XY

Travel (X*Y) (mm) 100 100

Pitch (mm) 4


8 sub -Resolution (μm) 1.25




Diagram:

Related Products:

SC300 Controller

Application:

TSA100×100-XY

Drawing:

T-Grade

1

34

2

1

34

2

5

A+

A-

B+ B-

M

8.2k 1/4WGND

LIMIT-

LIMIT+



Stepper Motor




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Motion Control MScope series Motorized Microscope Stage

MScope series Motorized Microscope Stage P-Grade

Ball Screw


3D

Specification:

Microscope Stage can be fixed to the top or the bottom of Microscope

according to lens positions; The applications for Mirco-Raman, Micro-PL and

related fields . The adapters can be different according to different microscope

suppliers .

MScopeR-5050

Drawing:

Application:

Model Sheet:

Model MScopeR-5050

Travel (mm) 50 50

Pitch (mm) 1

Resolution (μm) 1

Max Speed (mm/s) 10


Backlash (μm) 3

Step Motor (Angle) 5 Phase Step Motor (0.72 )

Current (A) 0.75

Load (Kg) 5



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Motion Control Integration System

Integration System

KSA XY Stage PSA-13 XY Stage

XY Ultra-thin Stage Scanning System

Integrated 18 Axis Stage

Large Travel Integrated Stage

Robert Stage

12 Inches Wafer Cutting System

Fiber Alignment Stage ( travel 10-25mm)

Fiber System

Large Travel Stage (travel 2000mm)

3D Scanning System (scanning area: 500x500mm)

Customize Stages

Tel: +86 10 56370168 http://www.zolix.com.cn26

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otorized Goniometers

Combinated Stages

CotrollersM

otorized Linear Stages

Motion Control KSAV Series Ultra-High Precision Motorized Vertical Stages

Model Sheet:

Model KSAV1010-ZF KSAV2030-ZF

Travel (mm) 10 30

Pitch (mm) 1 1

Resolution of 8 sub-division (μm) 0.23 0.4

Max Speed (mm/sec) 6 6.5

Repeatability (μm) <5 <5


Current (A) 1.7 2.4


Drawing:

Diagram: Related Products:

SC300 Controller

1

2

3

4

5

6

7

8

9GND

LIMIT-

A+

A-

B+ B-

M

LIMIT+

A+

A-

B+

B-

25

25 7X25(=175)220

25 75 125

175

200

1 25 44.5

147.5

~177

.5

6 4 -M6

71 252.5Ø11 coun te rbore

4 -Ø6.5

KSAV1010-ZF KSAV2030-ZF

K-Grade Cross Roller Guide

3DLinear slide guide


KSAV Series Ultra-High Precision Motorized Vertical Stages



Stepper Motor

Tel: +86 10 56370168 http://www.zolix.com.cn

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27

Motion Control KSAXXX-Z High Precision Motorized Vertical Stages

KSAXXX-Z High Precision Motorized Vertical Stages

K-GradeGrating Encoder

3DLinear slide guide Resolution

1μmBall Screw

class 5

Drawing:

A View 4-Ø6.5 thru

100

1 00

120

1 20

121.5

94

56.5

400365

50100120

50100

125151.5

A

25-M6 4-M4

A View 4-Ø6.5 thru

100

1 00

120

1 20

415445

56.5

94121.5 A

50100

125151.5

50100120

25-M6 4-M4

A View 4-Ø6.5 thru

100

1 00

120

1 20

467497

56.5

94121.5 A

50100

125151.5

50100120

25-M6 4-M4

A View 4-Ø6.5 thru

100

1 00

150

1 50

155 A

111.5

541518

73.5

50100110

50100

120

15016

9

29 -M6

KSA050-12-Z KSA100-11/12-Z

KSA100-11AS-Z KSA100-13-Z

Specification:

KSAXXX-Z is designed on the basis of KSAXXX-11/12-X and

used in vertical direction. All the specification are the same with

KSAXXX-11/12/13-X except load capacity and moving direction.


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Motion Control KSAXXX-Z High Precision Motorized Vertical Stages

94121.5 A

56.5

515545

50100120

25-M6 4-M4

50100

125

A V iew

100

100

120

120

4 -Ø6.5 thru

151.6

A V iew 4-Ø6.5 th ru

100

100

120

120

25-M6

50151.5

125

100

10050

120

4-M4

99129.5

A

793816

KSA200-11-Z

KSA400-13-Z

KSA400-12-Z

A View 4-Ø6.5 thru

100

1 00

150

1 50

155

111.5

A

858881

73.5

50100110

50100

120

15016

9

2 9 -M6


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29

Motion Control PSAXXX-11-Z Precision Linear Stages

PSAXXX-11-Z Stepper Motor,Precision Linear Stages Application for Industry

Model Sheet:

ModelPSA050-

11-Z

PSA100-

11-Z

PSA150-

11-Z

PSA200-

11-Z

PSA300-

11-Z

PSA400-

11-Z

Load

(Kg)5 10

Max

Speed

(mm/s)

40 50

other specification is the same with PSAXXX-11-X

Diagram:

Drawing:

P-Grade3DLinear slide

guide

Ball Screw

class 5

Zero sensor1K 1/4W

1

2

3

4

5

6

7

8

9

D Connector 9(Z)

24V

GND

LIMIT-

A+

A-

B+ B-

M

Step Motor

LIMIT+

zero sensor



+ +

E DA+

A-

B+

B-12

Power-off brake

120

100

12525-M6

A View

100

120

50

100

125

A124

94.5

100

50

366

396

59

120

100

100

120

25-M6 125

124

94.5

100

125

50

A

50

100

59

416

446

A View

PSA050-11-Z PSA100-11-Z


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Motion Control PSAXXX-11-Z Precision Linear Stages

PSA150-11-Z

PSA300-11-Z

PSA200-11-Z

PSA400-11-Z

125

10

0

12

0

120

100

25-M6

50

10

0

12

5

A94

.5

12

4

50

100

59

466

496

A view

10

0

12

0

120

100

125

50

10

0

12

5

50

100

25-M6

A94

.5

12

4

59

516

546

A view


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31

Motion Control PSAV High Precision Motorized Vertical Stages

Related Products:

P-Grade

Model Sheet:

ModelPSAV50-

240ZF

PSAV100-

240ZF

PSAV200-

240ZF

PSAV300-

240ZF

PSAV400-

240ZF

TravelL (mm) 50 100 200 300 400

Max Speed (mm/s) 12.5

Pitch (mm) 5

Ratio 4:1

Resolution (μm) 0.78

Load (kg) 200

Table size (mm) 240 240

Step Motor (Angle) 57 (1.8 )

Current (A) 2.4

Repeatability (μm) <5 <10 <20

Backlash (μm) <20 <30 <50

PSAV Series High Precision Motorized Vertical Stages

Diagram:

3DBall Screw

SC300 Controller

Drawing:

PSAVxx-240ZF

1

2

3

4

5

6

7

8

9GND

LIMIT-

A+

A-

B+ B-

M

LIMIT+

A+

A-

B+

B-



Stepper Motor



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Motion Control Motorized Rotation Stages


Selection Guide

Series Table Size (mm) Resolution Max Speed (Deg./seg)Load Capacity

(Kg)Motor

RAuK Series Ultra-High Precision Motorized Rotation

Stages100/200 1.2-1.8" 25 30/50

Stepper

Motor

RAK Series High Precision Motorized Rotation

Stages100/200/350 0.00125 25 30/50/100

RAP Series Precision Motorized Rotation Stages 100/125/200/220 0.00125 25 30-50

RSA Series Motorized Rotation Stages 60/100/200/300/400 0.0025 50 30/50/60/80

TMC Controller

RAuK Series Ultra-High Precision Motorized Rotation Stages

U-GradeCircular

grating encoderCross Roller Ring Bearing

Model Sheet:

Model RAuK100 RAuK200

Resolution of 8 sub-division

( )0.00125 0.00125

Closed-loop Resolution ( ) 1.8 1.2

Drive Ratio 180:1 180:1

Max Speed (deg./sec.) 25 25

Repeatability ( ) 0.005 0.005

Radial Runout (μm) 15 10

Axial Runout (μm) 15 10


Current (A) 1.7 2.4


Diagram: It will stop when it comes across zero switch (unclockwise)Related Products:

MC600 Controller

Application:

RAuK100

RAuK200

1

2

3

4

5

6

7

8

9

D Connector 9(Z)

24V

GND

LIMIT-

A+

A-

B+ B-

M

Step Motor

A+

A-

B+

B- 8.2k 1/8W

1

2

3

4

5

6

7

8

9

D Connector 9(Z)

24V

GND

LIMIT-

A+

A-

B+ B-

M

Step Motor

A+

A-

B+

B-

6817W

8.2K 1/4W

24V GND LIMIT-



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33

Motion Control Motorized Rotation Stages

Drawing:

Grating Diagram:

1

2

3

4

5

6

7

8

9

D Connector 9(Z)

5VGNDA+

B+

A-

B-

Z+Z-

RAuK100 RAuK200



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Motion Control RAK High Precision Motorized Rotation Stages

RAK Series High Precision Motorized Rotation Stages

Model Sheet:

Model RAK100 RAK200 RAK350

Worm Gear Ratio 180: 1

Material AL

Stepper Motor 42 (1.8 ) 57 (1.8 ) 57 (1.8 )

Max. Center Load (Kg) 30 50 100

Resolution ( ) 0.00125 0.00125 0.0007

Repeatability ( ) 0.005 0.005 0.003

Radial Runout (um) <15 <10 <20

Axial Runout (um) <15 <10 <20

Max. Speed ( /Sec.) 25 25 14

Current (A) 1.7 2.4 100

Load Capacity (Kg) 30 50 100

Diagram: It will stop when it come across zero switch (unclockwise)

Combinated Products

SC300 Controller

Application:

Satellite Tracking System

TMC Controller

K-Grade3DCross Roller

Ring Bearing

RAK100

RAK200/350

1

2

3

4

5

6

7

8

9

D Connector 9(Z)

24V

GND

LIMIT-

A+

A-

B+ B-

M

Step Motor

A+

A-

B+

B- 8.2k 1/8W

1

2

3

4

5

6

7

8

9

D Connector 9(Z)

24V

GND

LIMIT-

A+

A-

B+ B-

M

Step Motor

A+

A-

B+

B-

6817W

8.2K 1/4W

24V GND LIMIT-



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35

Motion Control RAK High Precision Motorized Rotation Stages

Drawing:

RAK100

RAK350

RAK200

250

16-M6

372.5

50 150

250

350 39

030

2 5

150

250

50150250300350

Ø196

4-Ø6 .5 thruØ11 coun te rbo re 8

27.5

73.5



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Motion Control RAP Precision Motorized Rotation Stages

RAP Series Precision Motorized Rotation Stages

RAP100/125

RAP200/220

Model Sheet:

Model RAP100 RAP125 RAP200 RAP220

Base Material Al

Worm and Gear Ratio 180:1

Resolution ( ) 0.00125

Max Speed ( /sec) 25

Repeatability ( ) 0.005

Radial Runout (um) 20 25

Axial Runout (um) 20 25


Current (A) 1.7 2.4


Weight (Kg) 2 2.4 7.5 7.5

Diagram: It will stop when it comes across zero switch (unclockwise)

Related Products:

SC300 Controller

P-Grade3DCross Roller

Ring Bearing

1

2

3

4

5

6

7

8

9

D Connector 9(Z)

24V

GND

LIMIT-

A+

A-

B+ B-

M

Step Motor

A+

A-

B+

B- 8.2k 1/8W

1

2

3

4

5

6

7

8

9

D Connector 9(Z)

24V

GND

LIMIT-

A+

A-

B+ B-

M

Step Motor

A+

A-

B+

B-

6817W

8.2K 1/4W

24V GND LIMIT-



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37

Motion Control RAP Precision Motorized Rotation Stages

Drawing:

RAP100

RAP200

RAP125

RAP220

5045

1 82

4-Ø6 .5 th ruØ11coun te rbore

14 -M6

50

7510

0

43 9100

Ø28

1112

2

1 25

66

Ø6

100

1 00

272.5

4-Ø6.5 th ruØ11counte rbore

150

225

1525

0

1 50175200

66

283 .5

50 100

150

200

175

22 -M6

50100150200

4-Ø6 .5 th ruØ11counterbore

220

238

5 0100125

50 100

132.5

1 4 -M6

75

190

45

3 -Ø6.5 th ruØ11counterbore



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Motion Control Integration&Customize System

6 Axes System

Scanning System Motorized Mount Si Scanning System

Satellite Tracking System Motorized Gimbal System (Large Size Mirror)

Integration&Customize System




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Motion Control PSAG High Precision Motorized Goniomters

Motorized Goniometers

PSAG Series High Precision Motorized Goniometer

Model Sheet:

Model PSAG15-130 PSAG15-195

Angle ( ) 15

Table Dimension (mm) 120 130 120 180

Height of Axis (mm) 130 195

Worm Gear Ratio 320: 1 450: 1

Resolution (8 subdivision) ( ) 0.0007 0.0005



Max Center Load (Kg) 20

1

2

3

4

5

6

7

8

9GND

LIMIT-

A+

A-

B+ B-

M

LIMIT+

A+

A-

B+

B-

Diagram:

Drawing:

PSAG15-130 PSAG15-195

3DP-Grade



Stepper Motor




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Motion Control PSAG High Precision Motorized Goniomters

PSAG Series High Precision Motorized Goniometers

Model Sheet:

Model PSAG15-250 PSAG15-370

Angle ( ) 15 15

Table Dimension (mm) 250 250 340 250

Height of Axis (mm) 250 370

Guide Arc

Worm Gear Ratio 610:1 870:1

Resolution (8 subdivision)

( )0.00037 0.00026

Stepper Motor 57 (1.8)


Max Center Load (Kg) 50

Drawing:

Related Products:

SC300 Controller

P-Grade3D

TMC Controller

PSAG15-250 PSAG15-370

n

n




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Motion Control TSAG Precision Motorized Goniometers

TSAG Series Precision Motorized GoniometersT-Grade

3D

TSAG15-W TSAG10-W

Model Sheet:

Model TSAG10-W TSAG15-W

Travel (mm) 10 15

Table Size 65 x 65

Guides Arc Guide

Transmission Ratio 352:1 252:1

Resolution (8 sub-division)

(μm)0.00032 0.00045

Repeatability (μm) 0.0043 0.0047




Height of axis (mm) 75 70

Weight (Kg) 0.75

Drawing:

Related Products:

SC300 Controller




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Motion Control Integrated&Customize System

Integrated&Customize System

Three Way Laser Welding System Laser Alignment System (motorized 8 axis and manual 4 axis)

Multi-axis High Load System Translation,Rotation,Goniometer of X Axes,High Load (80Kg) Very Flexible

and Z axes. Application for : Multi-axis adjustment, high load, high accuracy.

Multi-axis High Load System Application: High load, Large Travel,Multi-axes adjustment.

Visual Analogue System uKSA/KSA/PSA/TSA+RAuK/RAK/RSA+SC300/MC600 Application:Scanning/Tracking

Interference Microscope System High Load System (3 axis) High Load System (5 axis)




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43

Motion Control MC600 Controller

Motion Controller

MC600 Controller

Many years of precision mechanical design, fabrication and motion control experience and expertise, Zolix has developed an

extensive catalog of motorized positioning and motion control products. From integrated OEM motion systems used by leading

semiconductor equipment manufacturers for wafer inspection,

MC600 includes 3 sub-division :

2 phase stepper motor :MC600-2B/4B

3 phase stepper motor :MC6003P-2B/4B

panasonic AC servo-motor controller :

servo-motor high cost, large size,we divde

into control cabinet MC600ASP and drive

cabinet ASP-XXXX.

control cabinet is universal product,

drive cabinet includes from 1 to 4 axis

product,different servo-motor 100W or

200W,divide below models

Nubers of axis Model Specification

1 axis ASP-1000 100W

ASP-2000 200W

2 axes

ASP-1100 100W

ASP-1200 One Axis:100W,another is 200W

ASP-2200 200W

3 axes

ASP-1110 100W

ASP-1120 One Axis: 200w,others is 100W

ASP-1220 One Axis:100w,others is 200W

ASP-2220 200W

4 axes

ASP-1111 100W


ASP-1122 Two axes :200W,two axes is 100W


ASP-2222 200W

MC series is a multi-functions product,used to measuring and position controling ,excellent quality and high cost perfomance.

MC 600 achieve point to point (control 4 axis or 2 axis) of translation and rotation and goinometers stages.equipped with stepping

motor drive or swap-actuaor driver .Aboundant parameters,flexible online communication commands ,make the system easier and

more effectiveness, can achieve the linear interporlation of 3 axis and the circle interporlation of 2 axis.

Characteristic:

This system adopted 32 bits DSP processors,achieved high

precision control of high arithmetics,the closed-loop control

of digital PID ensure deceleration or acceleration of accuracy

and position control ;stepping motor drive achieve 128 sub-

division,ensure stable ability of low speed stepping positional

repeatability

The use of servomotor meet the indication of high speed motion.

Two models :inching and increment

Inching:quickly locate to target ,accelerate process of

experiment

Increment:suitable for postional locating applications

Meet to the combination control of many motoried stages and

rotation stages

Angle value:display of angle displacement

Mm unit:display of linear displacement (motorized linear

displacement stages

Four axises have closed-loop control function (achieve by

grating ruler/rotation encoder external

Make the adjustment of positon and position accuration

The accuracy of position system is depend on accuracy of

grating ruler and encoder

Decided the speed of return original,initial speed constant

speed and accelerate speed and software position limit ,

suitable for different control;For example:the system need

limit response time,set up larger original or accelerate speed ;

system need stable motion,light force,set up small original or

accelerate speed ;system need constant speed can choose

constant motion model

Set up any postion as the working origion

The design of zero simple operation ,composited photonic

sensor combine with posiiton arimethic,increase the accuracy

of the physical zero

Read logical position,real position ,driver speed,accelerate

speed all the time in motion etc status parameters

16 road I/O set up output exter or trigger output by

program.when I/O is input internal,as stop motion or signal of

operate special processing

When I/O is input I/O as the interface hardware of monitor

device status

Achieve indication of motion control by zolix MC antivex.

additionally ,finishing simple programme by MC control

software,set up motion parameters and location parameters

conveniently




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Motion Control MC600 Controller

Compare with self-made, reducing workload

Display surface of 240x128 latt ice LCD,aboundant

content,the design of style of menu .is easy to set up parameter

Multi-menu function,convenient for set up parameter

Display the parameter of x y z t axises simultaneously

Choose different model of operating

Display measure units

Store the parameter ,non- loss electric,simple operating

process

Lead meachanism of translation .radium of ratation and motion

Model Sheet:

Model MC600-4B MC600-2B MC6003PB MC6003P-2B MC600ASP+ASP-XXXX

Indication 4axes 2phase

stepper motor

2axes 2phase

stepper motor

4axes 3phase

stepper motor

2axes 3phase

stepper motor

Servo-motor cabinet+servo-motor

drive cabinet

Motor control

2 phase stepper motor (24V,3.5Amax) 3 phase stepper motor (24V,5.8 A max Panasonic AC servo-motor

(220V,200W max)

Open or closed-loop control

300kHz pulse frequency 2mHzpulse frequency

128 sub-division max 51200 max,numbers of pulse 1048576max

Motion control

32 digital,150Mhz DSP controller

PID servo control

Terraced speed adjust

Point to point,synchronous or dy synchronous motion

Inching and increment

3 axes linear interpolation , 2 axes circle interpolation

Output trigger Open collector output

Sensor Zero switch,left and right limited switches

Option Joystick

SoftwareZolixMC600 software

MC600 control software

Interface RS-232,USB2.0

I/O 16 digital programmable TTL I/O

Memory 512KB flash non-volatile firmware

Display pannel LCD,240X128,105X56MM

Power 115/220V,60/50Hz,400W (max)

Size 440x395x145mm

Weight 4.5Kg

�� USB RS-232� ��LCD��

��

��

!��

"#�

��$%

parameter is set up , can memory, avoid the reset parameter

when open and close PC,avoiding the error from artificial.

Joy stick achieve manual scanning of three directions and

target tracing.,flexible control, it achieve manual control by yaw,

pitch, tilt ,clickwise rotation, convenient for remote prelocate

and range scanning.the speed of joy stick have plus and minus

total 8 achieve switch by tilt angle of ratation and stop time.

convenient and flexibile

MC600 can operate by SD card:

Model

LCD Screen Menu Function Keys Joystick Interface

Keyboard Emergency Stop Switch

Power Switch

Baterry Socket RS232 Interface FanUSB

Digital I/O Interface

Motor Interface

Grating Interface

Model&Number




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45

Motion Control SC300 Controller

SC300 Controller

SC300 series stepper motor box is a integralted system of 1-3 axis point

to point location target ,particular to translation and rotation stages.

equipped with stepper motor drive ,strong control function ,control panel

achieve man-manchine design,operate stages without PC,providing RS232

interface,users can control by zolix motion manager stages software;program

by communication protocol or OCS activex.,control the whole Stages by SC300

Specification

Power voltage:220V/50HZ

Numbers of axis:1-3 axis (each axis has

separate function key ,directly control axises

Motor and driving:2 phase stepper motor

Subdivision

SC300A:2,4,8,16,32,64

SC300B:2,4,8,16,32,64,128

Pulse speed:400PPS-18KPPS

RS232 standard interface

Acceleration deceleration model :triangle or

terranced

8 untis lead display

Appreance size :365X132X360

Weight:6Kg

HC-100 single axis stepper motor controller by hand

HC-100 is Simple and Robust function motion controller ,low price,outstanding

performance,continuous adjust speed, In the single-step operation and can run

continuously switch between the built-in high-performance stepper motor drive to

support high number of segments (256 segments), support a variety of 2-phase

stepper motor, the maximum current of 3.5A, detailed details , please contact us.

Model Sheet

Model HC-100 (2 phase stepper motor) HC3P-100 (3 phase stepper motor)

Frequency 5KHz max

Power AC220V change to DC24V power adaptor

Motion mode Continous mode, single step both can change

Current 3.5A MAX 5.8A MAX

Division 128 max 51200 pulse /turn

Size (mm) 112 62 158 152 75 160

SC300 Model Sheet

SC300-1A 1 axis 42 stepper motor controller (64 sub-division max )

SC300-2A 2 axes 42 stepper motor controller (64 sub-division max )

SC300-3A 3 axes 42 stepper motor controller (64 sub-division max )

SC300-1B 1 axis 57stepper motor controller (128 sub-division max)

SC300-2B 2 axes 57stepper motor controller (128 sub-division max)

SC300-3B 3 axes 57stepper motor controller (128 sub-division max)

SC3003P Model Sheet

SC3003P-1B 1 axis three phase stepper motor

SC3003P-2B 2 axes three phase stepper motor

SC3003P-3B 3 axes three phase stepper motor

ZOLIX INSTRUMENTS CO.,LTD.

LDUV 68B, No. 16 Huanke Middle Rd, Tongzhou District, Beijing China(101102).

Tel 86-10-56370168 Fax: 86-10-56370118 E-mail [email protected]

Website http://www.zolix.com.cn/en/index_0.html

Copyright © 2016 ZOLIXINSTRUMENTS CO.LTD. All Rights Reserved

Headquarter

You can obtain future information on our website at

http://www.zolix.com.cn/en/index_0.html

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