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INAF - Osservatorio Astrofisico CataniaINAF - Osservatorio Astrofisico Catania
II PRIN 2006 Meeting II PRIN 2006 Meeting
NEWS FROM SINGLE PHOTONSNEWS FROM SINGLE PHOTONS
Sergio BillottaSergio Billotta
II PRIN 2006 meeting - Bled 26-28 Mar '08 Sergio Billotta - NEWS FROM SINGLE PHOTONS
2
SummarySummary
Single Photon Avalanche Diode (SPAD)Single Photon Avalanche Diode (SPAD)What it isHow it worksDarkAfter pulsePhoton Detection Efficiency (PDE)
Silicon PhotoMultiplier (SiPM)Silicon PhotoMultiplier (SiPM)What it isDarkAfter pulseLinearityCharge spectrumTime jitterPhoton Detection Efficiency (PDE)
Conclusions
II PRIN 2006 meeting - Bled 26-28 Mar '08 Sergio Billotta - NEWS FROM SINGLE PHOTONS
3
SPADSPADwhat it iswhat it is
OXIDE
METAL
N+
N+
GetteringP+
Sinker
SPAD = Single Photon Avalanche DiodeSPAD = Single Photon Avalanche Diode
STMicroelectronics SPADSTMicroelectronics SPAD Planar device Thin junction depletion layer (~ 1m) Low breakdown voltage (15 – 30 V) Photodetector active area: defined by the metal ring used to contact the N+ thin polysilicon layer doped with
arsenic (Diameter: 10 ÷ 100m) High-electric field active region: defined by an P+ enrichment diffusion Local gettering sites: provided by an external ring doped by a heavy POCl
3 diffusion (to reduce the defectivity
in the device active area)
II PRIN 2006 meeting - Bled 26-28 Mar '08 Sergio Billotta - NEWS FROM SINGLE PHOTONS
4
SPADSPADhow it workshow it works
OXIDE
METAL
N+
N+
GetteringP+
Sinker
Semiconductor junction diodes reverse-biased few Volt above the breakdown voltage.
The electric field within SPAD depletion layer is so high (higher than 3 x 105 V/cm) that a single carrier (photo / thermal electron) injected in this region can trigger a self-sustaining avalanche multiplication process.
A sharp current pulse of few milliamps and with sub-nanosecond rise time is produced.( If the first carrier is photogenerated, the current rising edge marks the photon arrival time).
Once the breakdown current has been detected, it is quenched by a large series resistor (passive quenching) or by a suitable quenching circuit (active quenching).
The diode is thus turned off for a suitable hold-off time that allows the charge stored within the depletion layer to dissipate.
The voltage is restored to the bias value and the device is ready to detect another photon.
II PRIN 2006 meeting - Bled 26-28 Mar '08 Sergio Billotta - NEWS FROM SINGLE PHOTONS
5
SPADSPADdarkdark
STM SPAD arrayIt is manufactured by the integration of 25 pixels with a square geometry of 5 x 5. For these devices, STMicroelectronics has designed three different pixel diameters: 20, 40 and 60 m. Separation distances between adjacent pixels are in the range of 160 and 240 m according to different diameters.
Anode contacts are in common for each row, while each cathode is separately contacted and available from outside by different pads. The typical breakdown voltage is about 30 V.
We have measured the dark counts rate of each pixel of several array of SPADs, and we have found a fairly good uniformity of it.
Median room temperature dark count rate at 4V overbias as a function of SensL SPAD device area.
Applications of Silicon Photon Counting Detectors, Stewart et al., JMO in press
II PRIN 2006 meeting - Bled 26-28 Mar '08 Sergio Billotta - NEWS FROM SINGLE PHOTONS
6
SPADSPADaafter pulsefter pulse
It depends on:Trap concentration in the junction depletion layernumber of carriers generated during a Geiger pulse.
It could strongly enhance the total dark count rate.
During an avalanche some carriers are trapped by deep levels in the multiplication region
released after a statistically fluctuating delay
they can re-trigger a Geiger event correlated with the previous avalanche pulse
Dark count rate at several hold-off time
estimation of the afterpulsing effects
Lo t:7 0 3 0 1 2 wf4 2 - S a mple s : k 3 / k 4 - S ing le - P ix e l:3 2 b9 3 P a dA-3 2 mic ro nD a rk (c o rre c te d fo r the H .O .) v s H o ld o ff
0
5000
10000
15000
20000
25000
30000
35000
40000
45000
50000
0 5 10 15 20 25 30 35 40 45
H o ld o f f t i m e (s )
Dark
(cnt
s/s)
_
s a m p le k 3 - 3 2 V - 2 4 ° C s a m p le k 3 - 3 5 V - 2 4 ° C s a m p le k 4 - 3 2 V - 2 1 ° C s a m p le k 3 - 3 5 V - 2 2 ° C
Lo t: 7 0 3 0 1 2 wf3 2 - S a mple : e ps ilo n - S ing le - P ix e l: 3 2 b9 3 P a dA - nume ro 2 9 -3 2 mic ro nD a rk (c o rre c te d fo r H .O .) v s H o ld o ff
2 0 0 0
3 0 0 0
4 0 0 0
5 0 0 0
6 0 0 0
7 0 0 0
8 0 0 0
9 0 0 0
1 0 0 0 0
0 5 1 0 1 5 2 0 2 5 3 0 3 5 4 0 4 5
H o ld o ff t im e (s )
Da
rk (
cnts
/s)
_
3 2 V - 2 2 ° C
II PRIN 2006 meeting - Bled 26-28 Mar '08 Sergio Billotta - NEWS FROM SINGLE PHOTONS
7
PDE = QE x Pt x A
e
QE = Quantum EfficiencyP
t= Avalanche
ProbabilityA
e= Geometrical
Efficiency Probability for a photon to generate an e–h pair in the active thickness of the device
QE = (Dielectric layer transmittance) x QEinternal
Probability for a photon that has crossed the dielectric layer to generate an e–h pair in the active thickness.
wavelength dependent.
Can be maximized, implementing an anti-reflective coating (ARC)
ARC
SPADSPADphoton detection efficiency (1)photon detection efficiency (1)
II PRIN 2006 meeting - Bled 26-28 Mar '08 Sergio Billotta - NEWS FROM SINGLE PHOTONS
8
PDE = QE x Pt x A
e
QE = Quantum EfficiencyP
t= Avalanche
ProbabilityA
e= Geometrical
Efficiency
There is a finite probability for a carrier to initiate an avalanche when passing through a high-field region. In case of a photogeneration event, 2 carriers are created travelling in opposite directions
Pt = P
e + P
h - P
eP
h
Electron and hole breakdown initiation probabilities
In case of photogeneration on the right side, the situation is symmetrical and only electrons contribute to the triggering probability, thus, P
t = P
eM.
In the central region, both carriers contribute to a different extent as a function of the interaction position and the Pt value is between P
eM and P
hM
When a pair is generated in the left side of the high-field region, the electron is directly collected at the n+ terminal; thus, it does not contribute to the triggering probability. The hole is forced to cross the whole high-field region and so its triggering probability is maximized and P
t = P
hM.
SPADSPADphoton detection efficiency (2)photon detection efficiency (2)
II PRIN 2006 meeting - Bled 26-28 Mar '08 Sergio Billotta - NEWS FROM SINGLE PHOTONS
9
PDE = QE x Pt x A
e
QE = Quantum EfficiencyP
t= Avalanche
ProbabilityA
e= Geometrical
EfficiencyA
active / A
total for SPAD = 1
SPADSPADphoton detection efficiency (3)photon detection efficiency (3)
OXIDE
METAL
N+
N+
GetteringP+
Sinker
All the exposed area is active
Photon Detection Probability (PDP)
II PRIN 2006 meeting - Bled 26-28 Mar '08 Sergio Billotta - NEWS FROM SINGLE PHOTONS
10
Pho
ton
Det
ectio
n E
ffic
ienc
y %
PDE of a 40 m STM SPAD
SPADSPADphoton detection efficiencyphoton detection efficiency
0 %
1 0 %
2 0 %
3 0 %
4 0 %
5 0 %
6 0 %
7 0 %
3 0 0 4 0 0 5 0 0 6 0 0 7 0 0 8 0 0 9 0 0 1 0 0 0 1 1 0 0W a v e le n g th (n m )
Qua
ntum
Effi
cien
cyP
hoto
n D
etec
tion
eff
icie
ncy
L ot: 7 0 3 0 1 2 w f3 2 - S am p le: k E p s i lon - S in g le - P ix e l : 3 2 b 9 3 P ad A -3 2 m icron
0
1 0
2 0
3 0
4 0
5 0
6 0
3 0 0 4 0 0 5 0 0 6 0 0 7 0 0 8 0 0 9 0 0 1 0 0 0
W a v eleg th (nm )
Qu
antu
m D
etec
tion
Eff
icie
ncy
(%
)
_
2 0 ,6 % (3 4 ,9 7 4 V ) - [H o ld o ff : 4 0 u s - Tsenso r :1 7 °C - R =3 7 0 k+ 2 9 0 k] 1 0 ,5 % (3 2 ,0 4 5 V ) - [H o ld o ff : 4 0 u s - Tsenso r :1 7 °C - R =3 7 0 k+ 2 9 0 k]
3 0 ,2 % (3 7 ,7 5 8 V ) - [H o ld o ff : 4 0 u s - Tsenso r :1 7 °C - R =3 7 0 k+ 2 9 0 k] 1 0 % (3 1 .9 V ) - [H o ld o ff : 4 5 u s - Tsenso re2 2 °C - R :3 9 0 k+ 2 7 0 k]
STMSTMPixel size: 40mV
Brk: 26V
VBIAS
: 10% -> 15%H.O.: 6 s
STMSTMPixel size: 32mV
Brk: 29V
VBIAS
: 10% -> 30%H.O.: 40/45 s
SensLSensLPixel size: 50mV
Brk: 28V
Vovervoltage
: 1.5V -> 4V
MPDMPDPixel size: 50mOperating conditions set by the electronics inside the module
Applications of Silicon Photon Counting Detectors, Stewart et al., JMO in press
II PRIN 2006 meeting - Bled 26-28 Mar '08 Sergio Billotta - NEWS FROM SINGLE PHOTONS
11
Single Photon Avalanche Diode (SPAD)Single Photon Avalanche Diode (SPAD)What it isHow it worksDarkAfter pulsePhoton Detection Efficiency (PDE)
Silicon PhotoMultiplier (SiPM)Silicon PhotoMultiplier (SiPM)What it isDarkAfter pulseLinearityCharge spectrumTime jitterPhoton Detection Efficiency (PDE)
Conclusions
II PRIN 2006 meeting - Bled 26-28 Mar '08 Sergio Billotta - NEWS FROM SINGLE PHOTONS
12
SiPMSiPMwhat it iswhat it is
Silicon PhotoMultiplierSilicon PhotoMultiplier
Matrix of n pixels in parallel Each pixel: SPAD + R
quenching
Analog Device => the output signal is the sum of the signals from all fired pixel
Qout
= C x (VR – V
BR) x N
fired
Schematic cross-section of a half single cell of the SiPM fabricated at STMicroelectronics Catania R&D clean room facility
a) SEM top view of a SiPM prototype fabricated at STMicroelectronics Catania R&D clean room facility; b) detail of optical trenches between adjacent pixels
II PRIN 2006 meeting - Bled 26-28 Mar '08 Sergio Billotta - NEWS FROM SINGLE PHOTONS
13
SiPMSiPMdarkdark
Dark count pulses:s => single pixel pulsed => two simultaneously pixels pulsea = >
Characteristics of the single-pixel dark pulse (equal of single photon pulse)rise time~ hundreds of psrecovery timeτ = R
quenching · C
micro-cell ~ 20-30 ns
Measured noise rate as a function of V − Vbd
afterpulses
Dark rate as a function of overbias for a SensL SiPM at room temperature and at -20°C
Applications of Silicon Photon Counting Detectors, Stewart et al., JMO in press
II PRIN 2006 meeting - Bled 26-28 Mar '08 Sergio Billotta - NEWS FROM SINGLE PHOTONS
14
SiPMSiPMafter pulseafter pulse
Sketch of the electronics for the self-correlated timing, employed forafterpulse measurements.
For uncorrelated events (SiPM without cross-talk and afterpulses):The random noise follows the Poisson lawThe distribution of the arrival time between two events is exponential
We measured the distribution of time intervals between two consecutive dark pulses at 20°C for several bias voltages, and built the corresponding histograms.The lower time threshold was around 15-20ns, therefore preventing us from attaining a direct measurement of cross-talk.
The afterpulse effect shows up in such a distribution as a pronounced deviation from the perfect exponential distribution of the uncorrelated dark noise, namely a prominent peak around 200ns.
II PRIN 2006 meeting - Bled 26-28 Mar '08 Sergio Billotta - NEWS FROM SINGLE PHOTONS
15
If Nphoton x PDE << Ntotal Output signal Nfired
When 50% of the cells fire the deviation from linearity is 20%
Best working condition => Nphotons
< Ncells
)1( total
photon
N
PDEN
totalfiredcells eNNA
If t > R the SiPM dynamic range is larger.
t = duration of the light signal
R = single pixel recovery time
SiPMSiPMdynamic range - linearitydynamic range - linearity
II PRIN 2006 meeting - Bled 26-28 Mar '08 Sergio Billotta - NEWS FROM SINGLE PHOTONS
16
SiPMSiPMcharge spectrumcharge spectrum
By making use of a dedicated data acquisition system one can characterize the SiPM on an event-by-event basis. Using this method we built the charge distribution histogram under several different light intensity values. We employed a red laser diode (650nm) pulsed at 1kHz, whose light was conveyed onto the sensor by means of an optical fiber.
A typical charge spectrum under very low light level for a 10x10 device biased at 6% OV.The multipeak structure reflects the detection of 1-18 photons per event. For this sensor we measured a 3resolving power around 20 and a 2resolving power around 45.
Sketch of the electronics for the charge and time measurements, employed for SiPM response characterization.
II PRIN 2006 meeting - Bled 26-28 Mar '08 Sergio Billotta - NEWS FROM SINGLE PHOTONS
17
SiPMSiPMtime jittertime jitter
STM SiPM:SiPM area: 0,5 x 0,5 mm2
Pixel active area: 32 x 32 m2
Fill factor: 36%N° pixels: 10 x 106% overvoltage Apparatus:Pulsed laser diode ( = 650 nm, 1kHz, pulse: 40ps)Optical fiber
A typical timing spectrum under very low light level for a 10x10 device biased at 6% OV. The average number of detected photons was around 6. The time calibration of the TDC was 50ps/channel, therefore the time resolution (sigma) is 135ps.
Sketch of the electronics for the charge and time measurements, employed for SiPM response characterization.
The width (FWHM) of the statistical distribution of the delay between the true arrival time of the photon at the sensor and the measured time marked by the output pulse current leading edge.
II PRIN 2006 meeting - Bled 26-28 Mar '08 Sergio Billotta - NEWS FROM SINGLE PHOTONS
18
PDE = QE x Pt x A
e
QE = Quantum EfficiencyP
t= Avalanche
ProbabilityA
e= Geometrical
Efficiency
dead region:determined by the guard ringstructure preventing optical cross-talk space between the cells for the individual resistors
Considering that the area of a cell can be very small (in the order of 30x30 m2) even few microns of dead region around the cell have a very detrimental effect on the geometrical efficiency.
Best filling can be achieved with a small number of big cells => SATURATION !!!
Aactive
/ Atotal
SiPMSiPMphoton detection efficiencyphoton detection efficiency
II PRIN 2006 meeting - Bled 26-28 Mar '08 Sergio Billotta - NEWS FROM SINGLE PHOTONS
19
PDE SiPM 1mm - 32V - Guadagno 8E+5 - temp = 24°C - Trigger:0,5
0%
5%
10%
15%
20%
25%
300 400 500 600 700 800 900 1000
lamda (n m)
PD
E
STMSTM1 x 1 mm2
20 x 20 pixelsPixel size: 32mFill factor: 36%V
BIAS: 32V
Gain = 8 x 105
Temp: 24°C
SiPMSiPMphoton detection efficiencyphoton detection efficiency
SensLSensL1 x 1 mm2
1144 pixelsPixel size: 20 mFill factor: 43%V
BIAS: 29.5V, 30V, 31V and 32V
Temp: 20°C
S T M S iP M - 1 0 x1 0 p ixel s - 0 ,5 m m x 0 ,5 m m
0
2
4
6
8
10
12
14
300 400 500 600 700 800 900 1000
W av elength (nm )
Ph
oto
n D
etec
tio
n E
ffic
ien
cy (
%)
_
1 0 % (3 2 ,5 V ) - [T a m b ie n te 2 0 ° C - S o g lia 4 4 m V (0 .7 p h s ) - Ga te 5 0 0 n s ] 1 0 % (3 2 ,5 V ) - [T a m b ie n te 2 0 ° C - S o g lia 4 4 m V (0 .7 p h s ) - Ga te 5 0 n s ]
1 2 % (3 3 V ) - [T a m b ie n te 2 1 ° C - T v ic in o S e n s o re 2 2 ° C - S o g lia 4 7 m V (0 .7 p h s ) - Ga te 5 0 n s ] 7 % (3 1 ,5 V ) - [T a m b ie n te 2 0 ° C - T v ic in o S e n s o re 2 0 ° C - S o g lia 3 8 m V (0 .7 p h s ) - Ga te 5 0 n s ]
5 % (3 1 V ) - [T a m b ie n te 2 1 ° C - T v ic in o S e n s o re 2 0 ° C - S o g lia 3 4 m V (0 .7 p h s ) - Ga te 5 0 n s ]
STMSTM0.5 x 0.5 mm2
10 x 10 pixelsPixel size: 32mFill factor: 36%Temp: 20°CV
Brk: 29.5V
HamamatsuHamamatsu1 x 1 mm2
20 x 20 pixelsFill factor: 61%V
BIAS: 70V
Gain = 7 x 105
Temp: 25°C
10%
12%
5%
7%
Gate 500 ns
11stst method methodGainGain
overestimated: after overestimated: after pulsepulse
22ndnd method methodunderestimated: no underestimated: no
amplitudeamplitudediscriminationdiscrimination
Applications of Silicon Photon Counting Detectors, Stewart et al., JMO in press
II PRIN 2006 meeting - Bled 26-28 Mar '08 Sergio Billotta - NEWS FROM SINGLE PHOTONS
20
ConclusionsConclusions
SiPMSiPMAdvantages:Advantages: robust and compact sensitivity to extremely low photon fluxes providing
proportional information with excellent resolutionand high photon detection efficiency
extremely fast response with low fluctuation (sub-ns rise time and <100ps jitter)
low bias voltage (<100V) low power consumption (<50μW/mm2) long term stability insensitive to magnetic fields (up to 15T) and EM
pickup low cost (in the future! now ~140$/mm2) + low
peripheral costs
Disadvantages:Disadvantages: silicon quality (dark rate, after-pulse) effective area of the cells (gain, fill factor, dynamic
range, recovery time optical cell insulation (optical cross-talk) quenching resistor (recovery time, dynamic range)
SPADSPADAdvantages:Advantages: solid state technology: robust, compact, mechanically
rugged and less expensive Geiger mode high internal gain of 105 - 106
faint sources high quantum efficiency large standardized output signal no Read Out Noise high sensitivity for single photons excellent timing event for single photo electrons (<<
1ns) good temperature stability devices operate in general < 100V no nuclear counter effect (due to the standardized
output)
Disadvantages:Disadvantages: BINARY DEVICE – one knows there was at least one
electron/hole initiating the breakdown but not how many of them !!!!!
Max diameter 100 m.
II PRIN 2006 meeting - Bled 26-28 Mar '08 Sergio Billotta - NEWS FROM SINGLE PHOTONS
21
INAF - Osservatorio Astrofisico CataniaINAF - Osservatorio Astrofisico Catania
II Meeting PRIN 2006II Meeting PRIN 2006
NEWS FROM SINGLE PHOTONSNEWS FROM SINGLE PHOTONS
Sergio BillottaSergio Billotta
GrazieGrazie