impact of thickness and modulus on adhesion of diamond ... - 2016... · modulus of samples from...

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DLC Background Hydrogenated Diamond-like carbon (DLC) consists of an amorphous carbon matrix of diamond-like sp 3 orbitals and graphite-like sp 2 orbitals, and includes hydrogen bonds embedded within the matrix. DLC coatings are grown onto materials through Plasma Assisted Chemical Vapor Deposition (PACVD). The material was put into a vacuum chamber where it was sputter cleaned, nitrided and then coated with a silicon interlayer. Finally a carbon-rich gas was introduced into the chamber and ignited into a plasma to deposit a DLC coating. Objective To investigate the relationships between coating thickness, modulus, hardness, hybridization, and surface morphology to DLC adhesion Impact of Thickness and Modulus on Adhesion of Diamond-like Carbon Coatings Ahmed Alghuraid, Jonathan Comparan, Sarah Port, Emily Soltys Faculty Advisor: Dr. Shriram Ramanathan Industrial Sponsors: Elgin Miller Project Background Diamond-like carbon (DLC) coatings are a new environmentally friendly form of low-friction, high wear resistant, and self-lubricating solid material which could eliminate the need for grease-based lubrication in some applications. Certain DLC coatings can often adhere poorly to various substrates, so interlayers are sometimes used, such as silicon. However, some substrates still have poor adhesion to DLC at micron-level coating thicknesses even with the interlayer. The ratio of modulus to hardness, sp 2 /sp 3 hybridization of the carbon in the coating, and surface morphology have all been found to be factors affecting adhesion. Experimental Procedure Results & Discussion Conclusion & Recommendations MSE 430 - 440: Materials Processing and Design Samples Four thicknesses of DLC coating were grown onto five different substrates with a silicon interlayer. These five substrates included 17-4PH steel, 13-8PH steel, I-718, D2 and P20. The thicknesses were analyzed to determine an optimal DLC coating process. Raman Spectroscopy (HORIBA Scientific T64000) 514nm laser centered at 1400nm Raman shift collected at the range 1164 -1614 cm -1 AFM (Dimension 5000) Surface roughness and morphology analyzed Scratch Testing (Hysitron TI-950 TriboIndenter) Adhesion failure identified through inconsistencies in the scratch graphs and quantified through micrographs of the scratches 3 distance controlled scratches of length 10 μm for each substrate 5 μm conical tip with a high load head Nanoindentation (Hysitron TI-950 TriboIndenter) Nine indents performed on each sample with a Birkovich diamond tip attached to a high-load head Partial loading and unloading program used to penetrate to a maximum depth of 500 nm Beta 1 samples and 1500 nm for Beta 2-4 samples This work is sponsored by IBC Materials & Technologies Incorporated, Lebanon, IN Table 2. Modulus of samples from nanoindentation testing with a 95% confidence interval Table 3. Hardness of samples from nanoindentation testing with a 95% confidence interval 0 2000 4000 6000 0 10 20 30 Normal Displacement (nm) 0 500000 1000000 1500000 0 10 20 30 Normal Force (μN) 0 5 10 15 0 10 20 30 Lateral Displacement (μm) Time (s) 0 10000 20000 30000 0 10 20 30 Lateral Force (μN) 0 2000 4000 6000 0 10 20 30 Normal Displacement (nm) 0 500000 1000000 0 10 20 30 Normal Force (μN) 0 5 10 15 0 10 20 30 Lateral Displacement (μm) Time (s) 0 5000 10000 15000 0 10 20 30 Lateral Force (μN) (a) (b) (c) (d) Figure 6. Scratch adhesion data from Steel 17-4PH (a) Beta 4 and (b) Beta 2, along with their corresponding micrographs (c) and (d), respectively. Red lines were placed to quantify adhesion failures through inconsistencies in the data set. (a) (b) Figure 7. Nanoindentation data from (a) 17-4PH steel and (b) 13-8PH steel. The modulus and hardness ratios decrease with increasing coating thickness. 0 2 4 6 8 10 12 14 0 500 1000 1500 Modulus-Hardness Ratio Contact Depth, hc (nm) Beta 1 Beta 2 Beta 3 Beta 4 1450 1500 1550 1600 1650 1700 1750 1800 1850 1900 1950 1164 1214 1264 1314 1364 1414 1464 1514 1564 1614 Intensity (I) Raman Shift (cm-1 ) (c) 1450 1500 1550 1600 1650 1700 1750 1800 1850 1900 1950 1164 1214 1264 1314 1364 1414 1464 1514 1564 1614 Intensity (I) Raman Shift (cm-1 ) (d) Figure 3. Raman Spectra data from (a) Beta-1 17-4PH ) and (b) Beta-4(17-4PH ) (c) Beta-1 (13-8PH) (d) Beta-4 (13-8PH) steel. The sp 3 diamond content decreased with increasing coating thickness from Beta 1 to 4 1450 1500 1550 1600 1650 1700 1750 1800 1850 1900 1950 1164 1214 1264 1314 1364 1414 1464 1514 1564 1614 Intensity (I) Raman Shift (cm-1) (a) 1450 1500 1550 1600 1650 1700 1750 1800 1850 1900 1950 1164 1264 1364 1464 1564 Intensity (I) Raman Shift (cm-1) (b) 0 10 20 30 40 50 60 70 80 90 100 Bare Metal Beta 1 17-4 Beta 2 17-4 Beta 3 17-4 Beta 4 17-4 Beta 1 13-8 Beta 2 13-8 Beta 3 13-8 Beta 4 13-8 Ra (nm) Figure 4. Representative AFM images from all 13-8PH samples. Images have been edited to remove streaking Figure 5. Average Ra values for a delaminated surface, 17-4PH, and 13-8PH samples with a 95% confidence interval (n=10 for delaminated surface, n=8 for 17-4PH and 13-8PH) Atomic Force Microscopy (AFM) Raman Spectroscopy Raman spectrum of two DLC samples (17-4PH & 13-8PH) indicates a compositional range of 35-45% for the sp 3 content using the peaks intensities ratio I(D)/I(G). Limitations in the Raman shift range in the T64000 during scanning are reflected in data collection as only differences between spectrums were considered with I(D)/I(G) of 0.86 indicating higher Sp 3 content than (0.9). High-low designation is applied. In Figure 3 increased Beta 4 coating thicknesses in both (b) and (d) compared to Beta 1 in (a) and (c) indicates a lower sp 3 content and higher G dispersion as can be seen in Table 1. Beta 2 samples overall have the highest diamond content and 13-8PH have higher sp 3 content in both Beta 2 and Beta 3 thicknesses. Scratch Adhesion Nanoindentation Table 1. I(D)/I(G) intensity ratios of 17-4PH & 13-8PH samples using limited spectra Raman shift where H designate high sp 3 content and L lower Sp 3 content Modulus (GPa) Sample Beta 1 Beta 2 Beta 3 Beta 4 17-4PH 92±13.5 95.9±4.4 90±3.2 74±4.5 13-8PH 92.8±14.1 96.4±6.4 86.1±4.4 81.2±4.3 Hardness (GPa) Sample Beta 1 Beta 2 Beta 3 Beta 4 17-4PH 10.8±1.3 11.8±0.9 11.6±0.4 10.7±1.1 13-8PH 10.9±2.2 11.5±1.2 11.2±1.2 11.3±1.1 The values for modulus and hardness followed the same trend as the thickness increased. Both increased from Beta 1 to Beta 2 but then decreased in Beta 3 and Beta 4 as shown in the modulus and hardness tables. The values used in Tables 2 and 3 were taken at a depth that was 10% of the coating thickness. The modulus to hardness ratio also increased and then decreased as illustrated in Figure 7a and 7b. The lower values in higher thickness coatings are due to the lower sp 3 content found through Raman spectroscopy. More sp 2 content appeared in the coating during the growth process which is shown through the large nodule sizes in thicker coatings from AFM testing. That sp 2 content contributes to lower modulus and hardness values in the Beta 3 and Beta 4 samples. Scratch tests were performed in a displacement controlled function instead of load control due to nonlinear load control during testing. Because of the programming in the machine during the displacement controlled function, the tip went to the desired displacement and then quickly retreated to the start point causing partial delamination. Therefore, adhesion failure will mainly be quantified through inconsistencies within the graphs before the tip starts to retreat. Beta 1 and 2 showed signs of adhesion failure, while 3 and 4 did not. Red lines were placed on Beta 2 data set in Figure 6.b to highlight concurrent inconsistencies throughout the graphs. As the thickness of the coating increased, the diameters of nodules on the sample surface also increased as shown in Figure 4. Both 17-4PH and 13-8PH followed the same trends. As the DLC nucleates on the surface, it undergoes the Stranksi-Krastanov (S-K) growth mode. The coating begins as a layer, then builds up into islands that coalesce when more DLC is added. This coalescence is seen particularly in the Beta 4 samples. It was also found that the smallest coating thickness resulted in the roughest samples (highest Ra value). The trends found from the Ra values match those of the Raman spectroscopy, though there are larger variations in the Ra data due to surface finish. Figure 2. Images of (a) the 17-4PH DLC coated sample and (b) an IBC product glowing during PACVD process (a) (b) Figure 1. Ternary diagram of amorphous carbons I(D)/I(G) Sample Beta 1 Beta 2 Beta 3 Beta 4 17-4PH 0.9 (L) 0.87 0.9 (L) 0.88 13-8PH 0.9 (L) 0.86 (H) 0.88 0.88 References 1. Miller, E. Technology Overview for PACVD / PVD DLC. Presented at IBC Coatings, 22 September 2015. 2. Ferrari, A.C., Robertson, J. (2004). Raman spectroscopy of amorphous, nanostructured, diamond-like carbon, and nanodiamond. The Royal Society. 3. Huan, Y., Zhang, T.H. (2005). Nanoindentation and nanoscratch behaviors of DLC coatings on different steel substrates. Composites Science and Technology. 65, 1409-1413. 4. Ohring, M. (2001). Materials Science of Thin Films (2nd ed.). Burlington: Elsevier Science. 5. Kowalski, C. (2003). SPM Training Notebook. Veeco Instruments Inc. 6. Yen, J., Wei, C. (2007). Effect of film thickness and interlayer on the adhesion strength of diamond like carbon films on different substrates. Diamond and Related Materials. Beta 3 coatings are the best candidate for dry lubricant applications due to their lack of failure during scratch adhesion and intermediate roughness and sp 3 content. Beta 2 has the highest sp 3 content and hardness, but Beta 3 adheres better to the substrates. In the future, we recommend investigating a set with a thickness range of 7-10 μm to achieve the best properties of both coatings. We also recommend using XPS to confirm hybridization and REELS to confirm hydrogen content. It would be beneficial to cut cross-sections of the samples and analyze any interlayer interactions along with quantifying the actual thickness of the DLC coating as well. Curvature measurements should be taken before and after the PACVD process to measure residual stress. If scratch adhesion is performed again, longer scratches should be made. 0 2 4 6 8 10 12 14 0 200 400 600 800 1000 1200 Modulus-Hardness Ratio Contact Depth, hc (nm) Beta 1 Beta 2 Beta 3 Beta 4

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Page 1: Impact of Thickness and Modulus on Adhesion of Diamond ... - 2016... · Modulus of samples from nanoindentation testing with a 95% confidence interval Table 3. Hardness of samples

DLC Background• Hydrogenated Diamond-like carbon (DLC) consists

of an amorphous carbon matrix of diamond-like sp3

orbitals and graphite-like sp2 orbitals, and includeshydrogen bonds embedded within the matrix.

• DLC coatings are grown onto materials throughPlasma Assisted Chemical Vapor Deposition(PACVD). The material was put into a vacuumchamber where it was sputter cleaned, nitrided andthen coated with a silicon interlayer. Finally acarbon-rich gas was introduced into the chamberand ignited into a plasma to deposit a DLC coating.

Objective• To investigate the relationships between coating

thickness, modulus, hardness, hybridization, andsurface morphology to DLC adhesion

Impact of Thickness and Modulus on Adhesion of Diamond-like Carbon CoatingsAhmed Alghuraid, Jonathan Comparan, Sarah Port, Emily SoltysFaculty Advisor: Dr. Shriram RamanathanIndustrial Sponsors: Elgin Miller

Project Background

Diamond-like carbon (DLC) coatings are a new environmentally friendly form of low-friction, high wearresistant, and self-lubricating solid material which could eliminate the need for grease-based lubrication insome applications. Certain DLC coatings can often adhere poorly to various substrates, so interlayers aresometimes used, such as silicon. However, some substrates still have poor adhesion to DLC at micron-levelcoating thicknesses even with the interlayer. The ratio of modulus to hardness, sp2/sp3 hybridization of thecarbon in the coating, and surface morphology have all been found to be factors affecting adhesion.

Experimental Procedure

Results & Discussion

Conclusion & Recommendations

MSE 430-440: Materials Processing and Design

Samples• Four thicknesses of DLC coating were grown onto

five different substrates with a silicon interlayer.These five substrates included 17-4PH steel,13-8PH steel, I-718, D2 and P20. The thicknesseswere analyzed to determine an optimal DLC coatingprocess.

Raman Spectroscopy (HORIBA Scientific T64000)• 514nm laser centered at 1400nm• Raman shift collected at the range 1164 -1614 cm-1

AFM (Dimension 5000)• Surface roughness and morphology analyzed

Scratch Testing (Hysitron TI-950 TriboIndenter)• Adhesion failure identified through inconsistencies

in the scratch graphs and quantified throughmicrographs of the scratches

• 3 distance controlled scratches of length 10 μm foreach substrate

• 5 μm conical tip with a high load head

Nanoindentation (Hysitron TI-950 TriboIndenter)• Nine indents performed on each sample with a

Birkovich diamond tip attached to a high-load head• Partial loading and unloading program used to

penetrate to a maximum depth of 500 nm Beta 1samples and 1500 nm for Beta 2-4 samples

This work is sponsored by IBCMaterials & Technologies Incorporated,Lebanon, IN

Table 2. Modulus of samples from nanoindentation testing with a 95% confidence interval

Table 3. Hardness of samples from nanoindentation testing with a 95% confidence interval

0

2000

4000

6000

0 10 20 30

Nor

mal

D

ispl

acem

ent

(nm

)

0

500000

1000000

1500000

0 10 20 30

Nor

mal

For

ce

(μN

)

0

5

10

15

0 10 20 30

Late

ral

Dis

plac

emen

t (μ

m)

Time (s)

0

10000

20000

30000

0 10 20 30

Late

ral F

orce

N)

0

2000

4000

6000

0 10 20 30

Nor

mal

D

ispl

acem

ent

(nm

)

0

500000

1000000

0 10 20 30

Nor

mal

For

ce

(μN

)

0

5

10

15

0 10 20 30

Late

ral

Dis

plac

emen

t (μ

m)

Time (s)

0

5000

10000

15000

0 10 20 30

Late

ral F

orce

N)

(a) (b)

(c) (d)

Figure 6. Scratch adhesion data from Steel 17-4PH (a) Beta 4 and (b) Beta 2, along with theircorresponding micrographs (c) and (d), respectively. Red lines were placed to quantify adhesionfailures through inconsistencies in the data set.

(a) (b)

Figure 7. Nanoindentation data from (a) 17-4PH steel and (b) 13-8PH steel. The modulus andhardness ratios decrease with increasing coating thickness.

0

2

4

6

8

10

12

14

0 500 1000 1500

Mod

ulus

-Har

dnes

s R

atio

Contact Depth, hc (nm)

Beta 1Beta 2Beta 3Beta 4

1450

1500

1550

1600

1650

1700

1750

1800

1850

1900

1950

1164 1214 1264 1314 1364 1414 1464 1514 1564 1614

Inte

nsity

(I)

Raman Shift (cm-1 )

(c)

1450

1500

1550

1600

1650

1700

1750

1800

1850

1900

1950

1164 1214 1264 1314 1364 1414 1464 1514 1564 1614

Inte

nsity

(I)

Raman Shift (cm-1 )

(d)

Figure 3. Raman Spectra data from (a) Beta-1 17-4PH ) and (b) Beta-4(17-4PH ) (c) Beta-1 (13-8PH) (d) Beta-4 (13-8PH)steel. The sp3 diamond content decreased with increasing coating thickness from Beta 1 to 4

1450

1500

1550

1600

1650

1700

1750

1800

1850

1900

1950

1164 1214 1264 1314 1364 1414 1464 1514 1564 1614

Inte

nsity

(I)

Raman Shift (cm-1)

(a)

1450

1500

1550

1600

1650

1700

1750

1800

1850

1900

1950

1164 1264 1364 1464 1564

Inte

nsity

(I)

Raman Shift (cm-1)

(b)

0102030405060708090

100

BareMetal

Beta 117-4

Beta 217-4

Beta 317-4

Beta 417-4

Beta 113-8

Beta 213-8

Beta 313-8

Beta 413-8

Ra

(nm

)

Figure 4. Representative AFM images from all 13-8PH samples. Images have been edited to removestreaking

Figure 5. Average Ra values for a delaminated surface, 17-4PH, and 13-8PH samples with a 95%confidence interval (n=10 for delaminated surface, n=8 for 17-4PH and 13-8PH)

Atomic Force Microscopy (AFM)

Raman Spectroscopy

Raman spectrum of two DLC samples (17-4PH & 13-8PH) indicates acompositional range of 35-45% for the sp3 content using the peaksintensities ratio I(D)/I(G). Limitations in the Raman shift range in theT64000 during scanning are reflected in data collection as onlydifferences between spectrums were considered with I(D)/I(G) of 0.86indicating higher Sp3 content than (0.9). High-low designation isapplied. In Figure 3 increased Beta 4 coating thicknesses in both (b)and (d) compared to Beta 1 in (a) and (c) indicates a lower sp3

content and higher G dispersion as can be seen in Table 1. Beta 2samples overall have the highest diamond content and 13-8PH havehigher sp3 content in both Beta 2 and Beta 3 thicknesses.

Scratch Adhesion

Nanoindentation

Table 1. I(D)/I(G) intensity ratios of 17-4PH & 13-8PH samples using limited spectra Raman shift where H designate high sp3 content and L lower Sp3 content

Modulus (GPa)Sample Beta 1 Beta 2 Beta 3 Beta 417-4PH 92±13.5 95.9±4.4 90±3.2 74±4.513-8PH 92.8±14.1 96.4±6.4 86.1±4.4 81.2±4.3

Hardness (GPa)Sample Beta 1 Beta 2 Beta 3 Beta 417-4PH 10.8±1.3 11.8±0.9 11.6±0.4 10.7±1.113-8PH 10.9±2.2 11.5±1.2 11.2±1.2 11.3±1.1

The values for modulus and hardness followed the same trend as thethickness increased. Both increased from Beta 1 to Beta 2 but thendecreased in Beta 3 and Beta 4 as shown in the modulus and hardnesstables. The values used in Tables 2 and 3 were taken at a depth thatwas 10% of the coating thickness. The modulus to hardness ratio alsoincreased and then decreased as illustrated in Figure 7a and 7b. Thelower values in higher thickness coatings are due to the lower sp3

content found through Raman spectroscopy. More sp2 contentappeared in the coating during the growth process which is shownthrough the large nodule sizes in thicker coatings from AFM testing.That sp2 content contributes to lower modulus and hardness values inthe Beta 3 and Beta 4 samples.

Scratch tests were performed in a displacement controlled functioninstead of load control due to nonlinear load control during testing.Because of the programming in the machine during the displacementcontrolled function, the tip went to the desired displacement and thenquickly retreated to the start point causing partial delamination.Therefore, adhesion failure will mainly be quantified throughinconsistencies within the graphs before the tip starts to retreat. Beta 1and 2 showed signs of adhesion failure, while 3 and 4 did not. Red lineswere placed on Beta 2 data set in Figure 6.b to highlight concurrentinconsistencies throughout the graphs.

As the thickness of the coating increased, the diameters of nodules onthe sample surface also increased as shown in Figure 4. Both 17-4PHand 13-8PH followed the same trends. As the DLC nucleates on thesurface, it undergoes the Stranksi-Krastanov (S-K) growth mode. Thecoating begins as a layer, then builds up into islands that coalescewhen more DLC is added. This coalescence is seen particularly in theBeta 4 samples. It was also found that the smallest coating thicknessresulted in the roughest samples (highest Ra value). The trends foundfrom the Ra values match those of the Raman spectroscopy, thoughthere are larger variations in the Ra data due to surface finish.

Figure 2. Images of (a) the 17-4PH DLC coated sample and (b) an IBC product glowing during PACVD process

(a) (b)

Figure 1. Ternary diagram of amorphous carbons

I(D)/I(G)Sample Beta 1 Beta 2 Beta 3 Beta 417-4PH 0.9 (L) 0.87 0.9 (L) 0.8813-8PH 0.9 (L) 0.86 (H) 0.88 0.88

References1. Miller, E. Technology Overview for PACVD / PVD DLC. Presented at IBC Coatings, 22 September 2015.2. Ferrari, A.C., Robertson, J. (2004). Raman spectroscopy of amorphous, nanostructured, diamond-like carbon, and nanodiamond. The Royal

Society.3. Huan, Y., Zhang, T.H. (2005). Nanoindentation and nanoscratch behaviors of DLC coatings on different steel substrates. Composites

Science and Technology. 65, 1409-1413.4. Ohring, M. (2001). Materials Science of Thin Films (2nd ed.). Burlington: Elsevier Science.5. Kowalski, C. (2003). SPM Training Notebook. Veeco Instruments Inc.6. Yen, J., Wei, C. (2007). Effect of film thickness and interlayer on the adhesion strength of diamond like carbon films on different substrates.

Diamond and Related Materials.

Beta 3 coatings are the best candidate for dry lubricant applications due totheir lack of failure during scratch adhesion and intermediate roughness andsp3 content. Beta 2 has the highest sp3 content and hardness, but Beta 3adheres better to the substrates. In the future, we recommend investigating aset with a thickness range of 7-10 μm to achieve the best properties of bothcoatings. We also recommend using XPS to confirm hybridization and REELSto confirm hydrogen content. It would be beneficial to cut cross-sections of thesamples and analyze any interlayer interactions along with quantifying theactual thickness of the DLC coating as well. Curvature measurements shouldbe taken before and after the PACVD process to measure residual stress. Ifscratch adhesion is performed again, longer scratches should be made.

0

2

4

6

8

10

12

14

0 200 400 600 800 1000 1200

Mod

ulus

-Har

dnes

s R

atio

Contact Depth, hc (nm)

Beta 1Beta 2Beta 3Beta 4